KR20130133752A - Customizable dispense system with smart controller - Google Patents

Abstract

The disclosed embodiments provide a customizable dispensing system that implements a modular architecture, wherein the customizable dispensing system is configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. It includes. The smart controller is configured to apply a control scheme that automatically recognizes the second pump and controls the second pump when switching from communicating with the first pump to communicating with the second pump, the second pump being a motor It may be a pump or a pneumatic pump. The conversion may be due to the physical separation of the first pump and the physical connection of the second pump, or may be done entirely through software. The smart controller can be connected to various devices including tracks and smart filters.

Description

Customizable distribution system with smart controllers {CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER}

The present disclosure relates generally to liquid distribution in semiconductor manufacturing processes, and more particularly to new distribution systems having smart controllers that control customizable pump operation to meet various needs in the semiconductor manufacturing field.

There are many applications that require precise control over the amount and / or speed at which fluid is dispensed by a pumping device. For example, in semiconductor manufacturing processes, it is important to control the amount and speed at which photochemicals, such as photoresist chemicals, are applied to semiconductor wafers. Semiconductor manufacturing processes refer to processes used to create integrated circuits present in everyday electrical and electronic devices. The semiconductor manufacturing process includes a series of photographic and chemical processing steps in which electronic circuitry is progressively produced on a wafer of pure semiconductor material. Coatings applied to semiconductor wafers during processing typically require certain flatness and / or even thickness (in angstroms) over the surface of the wafer. In order for the treatment liquid to be applied uniformly, the rate at which the treatment chemical is applied (ie, dispensed) on the wafer must be carefully controlled.

Photochemicals used in the semiconductor industry can be very expensive. Therefore, it is highly desirable that a minimum appropriate amount of chemical is used and that the chemical is not damaged by the pumping device. Unfortunately, these desirable qualities can be extremely difficult to achieve in today's pumping systems due to many related obstacles. For example, due to incoming power issues, pressure may vary from system to system. Due to fluid dynamics and properties, pressure demands vary from fluid to fluid (eg, fluids with higher viscosities require more pressure). Because these disorders are involved, sometimes solving the disorder may cause more problems and / or worsen the problem. In addition, different applications have different needs. Pump systems that meet the needs of a particular application may not be suitable for other applications.

In semiconductor manufacturing, various pumps may be used for mixing chemicals as well as for dispensing a mixture of chemicals onto a wafer. For direct mixing and dispensing of chemicals, high performance pumps can be used, such as the Entegris IntelliGen Mini photolithography rolling edge diaphragm pumps (Entegris and IntelliGen are trademarks of Entegris, Inc., Chaska, Minnesota, USA). ). These chemicals may vary from application to application, and different applications may have different needs. Thus, pump systems used to dispense chemicals must take into account a number of factors including size, cost, performance (both speed and accuracy), reliability, adaptability and the like.

Embodiments disclosed herein can address these needs using a customizable distribution system that builds on a modular architecture and includes one main controller that controls the components in this various "plug and play" distribution system. . Within the present disclosure, the term "customizable" refers to the fact that embodiments of the distribution system disclosed herein can be easily changed, modified or otherwise modified to suit various needs. Whenever this need arises, such changes, modifications or modifications can be made dynamically. For example, one embodiment of the customizable dispensing system disclosed herein may first be built in a pneumatic to pneumatic configuration. Pneumatically driven pumps (pneumatic pumps) are generally less expensive than motor driven pumps (motor pumps) and can provide positive pressure filtration and good throughput, which translates this pneumatic to pneumatic configuration into an insignificant layer. Makes it ideal for processing applications such as application for Pneumatic-to-pneumatic configurations can be easily changed, modified or otherwise modified for motor-to-motor configurations for critical floor applications. In some embodiments, one main controller with the required intelligence is configured, and thus, herein, a "smart" controller that automatically recognizes changes in the customizable distribution system and operates according to new configurations and / or new applications. It is called.

In some embodiments, the smart controller of the customizable dispensing system disclosed herein can be configured to operate a plurality of pumps in a semiconductor manufacturing process that are sensitive to defects in printed patterns. The plurality of pumps may comprise at least one pneumatic pump and at least one motor pump. The customizable distribution system may further comprise a plurality of lines connecting the smart controller with the track and various devices. In some embodiments, various devices may include a filter having a radio-frequency identification (RFID) tag, a sensor, and a pump head.

In some embodiments, the smart controller is further configured to provide a second pump with no minimum (if any) downtime when switching one of the plurality of lines from communicating with the first pump to communicating with the second pump. In order to control it precisely and accurately, it is configured to automatically recognize the second pump and apply a control scheme corresponding to the second pump.

In some embodiments, switching between motor pumps, between pneumatic pumps, or between mixed pneumatic and motor pumps may occur. For example, a user may insert a motor pump to remove the pneumatic pump and take over the specific function of the pneumatic pump. Exemplary functions may include chemical supply and distribution. In some embodiments, no physical connection / disconnection may be necessary, and the switching is done entirely through software.

In some embodiments, the smart controller may be configured to automatically recognize the newly connected pump and apply a control scheme corresponding to the newly connected pump (which may be a motor pump or a pneumatic pump) when interfacing with the newly connected pump. have. The smart controller can include an onboard database that stores information associated with the plurality of pumps.

In some embodiments, the smart controller can be configured to control one or more integrated pumps. In some embodiments, the integral pump may include two or more pneumatic pumps that are physically coupled as a unit. Two or more pneumatic pumps in the unit can operate independently of each other. In some embodiments, the smart controller can also be configured to independently control two or more pneumatic pumps in the unit.

In some embodiments, the customizable dispensing system can include a supply pump set and a dispensing pump set. In some embodiments, the smart controller may be configured to operate a supply pump set and a dispensing pump set that may include one or more integral pumps.

Software implementing the embodiments disclosed herein may be embodied in suitable computer executable instructions that may reside on one or more non-transitory computer readable media. Within the present disclosure, the term "computer readable storage medium" includes all types of data storage media that can be read by a processing unit such as a processor or a controller. Examples of computer readable storage media may include random access memory, read-only memory, hard drives, data cartridges, floppy diskettes, flash memory drives, and the like.

Embodiments disclosed herein can provide many advantages. For example, instead of a fixed number of pumps, the customizable dispensing system disclosed herein can support a variable number of different types of pumps over time. This mix and match flexibility allows the system to be tailored to each specific application, reduces the cost of maintaining the system, and easily upgrades to new types of pumps and / or new system configurations. To provide.

These and other aspects of the disclosure will be better understood when considered in connection with the following description and the annexed drawings. Nevertheless, while the following descriptions illustrate various embodiments of the present disclosure and many specific details thereof, it will be appreciated that they are provided by way of example and not limitation. Many substitutions, modifications, additions and / or rearrangements may be made within the scope of the present disclosure without departing from the spirit of the disclosure, and the present disclosure includes all such substitutions, modifications, additions and / or rearrangements.

In order to illustrate certain aspects of the present disclosure, drawings are included to form a part thereof. Note that the drawings are not necessarily drawn to scale. A more complete understanding of the present disclosure and its advantages may be obtained with reference to the following description, in which like reference numerals refer to the accompanying drawings in which like features represent similar features.
1 is a schematic diagram of an exemplary multi-stage pump ("multi-stage pump").
2 and 3 are perspective views of exemplary multistage pumps.
4 is a schematic diagram of an exemplary single stage pump.
5 is a schematic diagram of one exemplary embodiment of a modular architecture for a customizable distribution system.
6 is a schematic diagram of one exemplary embodiment of a customizable dispensing system having a smart controller that controls a pneumatic feed pump and a pneumatic dispense pump.
7 is a schematic diagram of one exemplary embodiment of a customizable dispensing system having a smart controller controlling a pneumatic feed pump and a motor dispensing pump.
8 is a schematic diagram of one exemplary embodiment of a customizable dispensing system having a smart controller controlling a motor feed pump and a motor dispensing pump.
9 is a schematic diagram of one exemplary embodiment of a customizable dispensing system having a pneumatic to pneumatic configuration.
10-15 illustrate pump control and sequential operation of one exemplary embodiment of a customizable dispensing system.
16-17 are schematic diagrams of exemplary embodiments of unitary pumps.
18 is a top perspective view of one exemplary embodiment of an integrated pump.
19 is an exploded view of a pneumatic pump in one exemplary embodiment of a unitary pump.

The present disclosure and its various features and advantageous details are described in more detail with reference to exemplary, thus non-limiting embodiments illustrated in the accompanying drawings and described in detail in the following description. Descriptions of well-known programming techniques, computer software, hardware, operating platforms, and protocols may be omitted so as not to unnecessarily obscure the present disclosure described in detail. However, it will be understood that the detailed description and specific examples illustrate preferred embodiments, but are provided only as examples and not limitations. Various substitutions, modifications, additions and / or rearrangements within the spirit and / or scope of the underlying inventive concepts will be apparent to those skilled in the art from this disclosure.

1 shows a schematic diagram of an exemplary multistage pump 100. The multistage pump 100 includes a feed stage portion 105 and a separate dispensing stage portion 110. From a fluid flow standpoint, a filter 120 that filters impurities from the process fluid is located between the feed end portion 105 and the dispensing end portion 110. For example, a number of valves, including inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140, discharge valve 145, and outlet valve 147, may be used in multistage pump 100. It is possible to control the fluid flow through. Valves of the multistage pump 100 are opened or closed to allow or restrict fluid flow to various portions of the multistage pump 100. These valves may be pneumatically actuated (ie gas driven) diaphragm valves that open or close depending on whether pressure is applied or vacuum is applied.

Dispensing end portion 110 may further include a pressure sensor 112 that measures the pressure of the fluid at dispensing end 110. The pressure measured by the pressure sensor 112 can be used to control the speed of the various pumps, which are described below. Exemplary pressure sensors include ceramic and polymer piezoresistive and capacitive pressure sensors, including those made by Metallux AG, Corv, Germany. The front side of the pressure sensor 112 in contact with the process fluid may be a perfluoropolymer. The pump 100 may include additional pressure sensors, such as a pressure sensor that measures the pressure of the fluid at the feed end 105 and / or a pressure sensor that reads the pressure in the feed chamber 155. have.

Supply stage 105 and distribution stage 110 may include a rolling diaphragm pump that pumps fluid in multistage pump 100. The feed stage pump 150 (feed pump 150) is, for example, a feed chamber 155 for collecting fluid, a feed stage diaphragm for moving within the supply chamber 155 to displace the fluid. a stage diaphragm 160, a piston 165 for moving the feed end diaphragm 160, a lead screw 170 and a stepper motor 175. Lead screw 170 is coupled to stepper motor 175 via a nut, gear, or other mechanism that provides energy from the motor to lead screw 170. According to one embodiment, the feed motor 170 rotates the nut, which in turn drives the lead screw 170, thereby actuating the piston 165. Dispense stage pump 180 (dispensing pump 180) similarly includes dispensing chamber 185, dispensing stage diaphragm 190, piston 192, lead screw 195, and dispensing motor 200. ) May be included. Each of feed stage 105 and distribution stage 110 may include a variety of pumps, including pneumatically operated pumps, hydraulic pumps, or other pumps. For example, a hydraulically actuated pump can be used for the feed end and a stepper motor driven hydraulic pump can be used for the dispensing end.

In the example shown in FIG. 1, the multistage pump 100 implements a motor-to-motor configuration between the supply and distribution stages. Supply motor 175 and distribution motor 200 may be any suitable motor. For example, the distribution motor 200 may be a Permanent-Magnet Synchronous Motor (PMSM). The PMSM may be controlled by a digital signal processor (DSP) using field-oriented control (FOC) or other position / speed control schemes. In some embodiments, the smart controller in the multistage pump 100 is configured to control the dispensing motor 200 using a control scheme.

The dispensing motor 200 may further include an encoder (eg, a fine line rotary position encoder) for real-time feedback of the position of the dispensing motor 200. The use of a position sensor allows for accurate and repeatable control of the position of the piston 192, resulting in accurate and repeatable control of fluid movement in the dispensing chamber 185. For example, using a 2000 line encoder capable of providing 8000 pulses to the DSP, it is possible to accurately measure and control the position of the dispensing motor 200 at a .045 rotational angle. In addition, the PMSM can operate at low speed with little or no vibration. Supply motor 175 may also be a PMSM or stepper motor. For example, supply motor 175 may be EAD Motors stepper motor part number L1 LAB-005 from Dover, N.H., and distribution motor 200 may be EAD Motors brushless DC motor part number DA23DBBL-13E17A.

2 and 3 show perspective views of one example of a pump assembly for a multistage pump 100. The multistage pump 100 may include a distribution block 205 that defines various fluid flow paths through the multistage pump 100. Dispense pump block 205 may be a unitary block of PTFE, modified PTFE, or other material. Because these materials do not or minimally react with many process fluids, the use of these materials allows the flow path and pump chamber to be processed directly into the distribution block 205 with minimal additional hardware. As a result, the distribution block 205 reduces the need for piping by providing a fluid manifold.

The dispensing block 205 may include, for example, an inlet 210 for receiving fluid, a discharge outlet 215 for discharging fluid during the discharge segment, and a dispensing outlet 220 for dispensing fluid during the dispensing segment. It may include an external inlet and an outlet. In the example of FIG. 2, the dispense block 205 does not include an external purge outlet because purged fluid is sent back to the supply chamber. However, in other implementations, the fluid may be purged externally.

Dispensing block 205 directs fluid to supply pump, dispensing pump, and filter 120. Pump cover 225 may protect feed motor 175 and dispense motor 200 from damage, while piston housing 227 may provide protection for piston 165 and piston 192. In this example, valve plate 230 is a system of valves (eg, inlet valve 125, isolation valve 130, of FIG. 1) that can be configured to direct fluid flow to various components of multistage pump 100. Valve housing 135, purge valve 140 and outlet valve 145 are provided. According to one embodiment, the inlet valve 125, the isolation valve 130, the barrier valve 135, the purge valve 140 and the discharge valve 145 are partially integrated in the valve plate 230 and corresponding It is a diaphragm valve that opens or closes depending on whether pressure or vacuum is applied to the diaphragm.

The valve plate 230 includes a valve control inlet for each valve that applies pressure or vacuum to the corresponding diaphragm. For example, inlet 235 corresponds to barrier valve 135, inlet 240 corresponds to purge valve 140, inlet 245 corresponds to isolation valve 130, and inlet 250 Corresponds to discharge valve 145 and inlet 255 corresponds to inlet valve 125. By selectively applying pressure or a valve to the inlet, the corresponding valve is opened and closed. The valves can be opened and closed in various orders that may vary from application to application. The valve plate 230 is configured to reduce the hold-up volume of the valve, eliminate volume fluctuations due to vacuum fluctuations, reduce vacuum requirements and reduce stress on the valve diaphragm. Can be.

Valve control gas and vacuum are supplied from the valve control supply line 260-the valve control manifold (covered by the manifold cover 263 or the housing cover 225) to the valve plate 230 via the distribution block 205. Is provided to the valve plate 230. The valve control gas supply inlet 265 provides pressurized gas to the valve control manifold and the vacuum input 270 provides a vacuum (or low pressure) to the valve control manifold. The valve control manifold functions as a three way valve that sends pressurized gas or vacuum through the supply line 260 to the corresponding inlet of the valve plate 230 to operate the corresponding valve (s).

In FIG. 3, the distribution block 205 is made transparent to show the defined fluid flow path therethrough. The distribution block 205 defines the various chambers and fluid flow paths of the multistage pump 100. Supply chamber 155 and distribution chamber 185 may be processed directly within distribution block 205. In addition, various flow paths may be machined within distribution block 205. The fluid flow path extends from the inlet 210 to the inlet valve. Fluid flow path 280 extends from inlet valve to supply chamber 155 to complete the path from inlet 210 to feed pump 150. Inlet valve 125 in valve housing 230 regulates the flow between inlet 210 and feed pump 150. Flow path 285 directs fluid from feed pump 150 to isolation valve 130 in valve plate 230. The output of the isolation valve 130 is sent to the filter 120 by another flow path. Fluid flows from the filter 120 through a flow path connecting the filter 120 to the outlet valve 145 and the barrier valve 135. The output of the outlet valve 145 is directed to the outlet outlet 215, while the output of the barrier valve 135 is directed through the flow path 290 to the dispensing pump 180. During the dispensing segment, the dispensing pump may output fluid through the flow path 295 to the outlet 220 or, in the purge segment, through the flow path 300 to the purge valve. During the purge segment, fluid may return to feed pump 150 via flow path 305. Because the fluid flow path can be formed directly in the PTFE (or other material) block, the distribution block 205 can function as a tubing for process fluid between the various components of the multistage pump 100, thereby providing additional Eliminate or reduce the need for piping. In other cases, tubing may be inserted into distribution block 205 to define the fluid flow path.

3 also shows a supply line 260 that provides pressure or vacuum to the valve plate 230. The operation of the valve is controlled by a valve control manifold 302 that sends pressure or vacuum to each supply line 260. Each supply line 260 may include a fitting with a small hole (ie, a restriction) (an exemplary fitting is indicated at 318). Holes in each supply line help to mitigate the effect of the sudden pressure difference between applying pressure to the supply line and applying vacuum. This allows the valve to be smoother and open and close more slowly.

In addition to the example shown in FIGS. 1-3, other multistage pump configurations are possible, including pneumatic to motor and pneumatic to pneumatic. In addition, although described in the context of a multistage pump, the embodiments disclosed herein may also be used in single stage pumps. 4 shows a perspective view of an exemplary pump assembly for a single stage pump 4000.

The pump 4000 can be similar to one stage (eg, dispensing stage) of the multistage pump 100 described above. The pump 4000 may comprise a hydraulically actuated pump or a rolling diaphragm pump driven by a stepper motor, brushless DC motor or other motor. The pump 4000 may include a distribution block 4005 that defines various fluid flow paths through the pump 4000 and at least partially defines a pump chamber. Dispense pump block 4005 may be a unit block of PTFE, modified PTFE, or other material. Because these materials do not or minimally react with many process fluids, the use of these materials allows the flow path and pump chamber to be processed directly into distribution block 4005 with minimal additional hardware. As a result, distribution block 4005 reduces the need for piping by providing an integral fluid manifold. A pressure sensor can be arranged to read the pressure in the pump chamber.

Dispensing block 4005 includes, for example, an inlet 4010 for receiving fluid, a purge / drain outlet 4015 for purging / draining the fluid, and a dispensing outlet 4020 for dispensing fluid during the dispensing segment. Various external inlets and outlets may be included. In the example of FIG. 4, since the pump has only one chamber, the distribution block 4005 includes an external purge outlet 4010. Suitable fittings, such as o-ring-less low profile fittings, may be used to connect the outer inlets and outlets of the distribution block 4005 to the fluid lines.

Dispense block 4005 directs fluid from the inlet to the inlet valve (eg, at least partially defined by valve plate 4030), from the inlet valve to the pump chamber, from the pump chamber to the discharge / purge valve, and from the pump chamber. To exit 4020. The pump cover 4025 may protect the pump motor from damage, while the piston housing 4027 may provide protection for the piston. The cover / housing can be formed of polyethylene or other polymer. Valve plate 4030 provides a valve housing for a system of valves (eg, inlet valve, and purge / drain valve) that can be configured to direct fluid flow to various components of pump 4000. The valve plate 4030 and corresponding valve may be formed similarly to the manner described with respect to the valve plate 230 described above. The purge valve may be the same size or smaller than or larger than the inlet valve. However, the use of smaller purge valves can reduce the retention volume back to the chamber as described above. Each of the inlet valve and the purge / discharge valve may be partially integrated in the valve plate 4030 and may be a diaphragm valve that opens or closes depending on whether pressure or vacuum is applied to the corresponding diaphragm. In some implementations, some of the valves can be external to the distribution block 4005 or can be arranged in additional valve plates. As one example, seats of PTFE may be sandwiched between valve plate 4030 and distribution block 4005 to form diaphragms of various valves. Valve plate 4030 includes a valve control inlet (not shown) for each valve that applies pressure or vacuum to the corresponding diaphragm.

In some embodiments, instead of a fixed number of pumps, the customizable system may support a variable number of pumps over time. Customizable distribution systems use a flexible modular architecture. Embodiments of customizable dispensing systems can also support different types of pumps including pneumatics and motors at any given time. For example, in a multistage pump system, the first stage pump may be pneumatically driven and the second stage pump may be driven by a motor. This mix-and-match flexibility allows the system to be customized for each specific application. 5 shows a schematic diagram of one exemplary embodiment of a modular architecture 500 for a customizable distribution system.

As illustrated in FIG. 5, different applications may have different needs, possibly depending on the chemistry used, the level of quality / performance desired, the cost of achieving the desired level of quality / performance, and the like. For example, if the cost of the chemical is high and the end product is sensitive to defects, the system may use a motor-to-motor configuration for the best possible filtration control with the lowest possible defect (an example of which is shown in FIG. 8). . Because such motor-to-motor configurations can be inherently expensive, in some cases, pneumatic-to-motor configurations may be used to reduce the cost of the system while maintaining the desired level of throughput and monitoring and controlling the dispensing speed and volume. Can be. An example of pneumatic to motor configuration is shown in FIG. 7. In some cases, pneumatic to pneumatic configurations may be desirable, particularly when the cost for dispensing volume is a concern and / or where high quality performance is not required or required. One example of a pneumatic to pneumatic configuration is shown in FIG. 6. In the embodiments disclosed herein, the modular architecture 500 includes a smart controller that enables mixing and matching of pneumatic and motor pumps, sometimes dynamically and immediately. In this manner, embodiments of the customizable distribution system disclosed herein can achieve a wide range of performance levels for many different applications to meet various needs in the semiconductor fabrication art.

This flexible modular architecture can provide the distribution system disclosed herein with many advantages. For example, the owner of the system can start with a pneumatic to pneumatic setting. Over time, the owner's needs may change and / or after evaluation, the pneumatic to pneumatic setting may require an upgrade. One or more of the pneumatic pumps may be replaced and replaced immediately with motor driven pump (s) and / or replacement pneumatic pump (s). The owner will not need to replace the entire distribution system.

This type of plug-and-play modification to the distribution system is possible, at least in part, by a versatile smart controller that operates to automatically and dynamically control various types of pumps. For example, the first pump can be removed, the second pump can be inserted and the line piped to start or resume operation. Upon interfacing with the pump head of the second pump, the controller operates to automatically recognize the second pump and apply a control scheme corresponding to the second pump. In some embodiments, switching from one pump to another can be done entirely through software, without the need to physically remove and insert the pump. For example, a user may wish to take pump A and pump B offline and take over to designate pump C and pump D to function as new pump A and new pump B.

In some embodiments, electronically readable tags or codes may be used to provide a wide variety of information to the smart controller. In some embodiments, the smart controller may be coupled to various identifiable devices via electronically readable tags that may or may not be embedded directly in the device / package. For example, a smart controller can be connected to a smart filter through one of its many ports, and information about the smart filter can be provided to the smart controller through an electronically readable tag associated with the smart filter. As another example, the smart controller can be coupled to a pack or package, and information about the contents contained therein can be provided to the smart controller via an electronically readable tag associated with the pack or package. The pack may contain the chemicals or materials needed for a particular application. Other devices / packages can be connected to the smart controller in a similar manner.

In semiconductor manufacturing, different applications often have different requirements for chemical layer thickness and coating area. Correspondingly, multiple dispense volumes and speeds may be required. Meeting these requirements requires many different size pumps for all different track sizes, because each pump must be able to contain all the fluids required for the individual dispensing. These tracks and pumps may rely on separate lines for communication, meaning that each input line and each output line will require a physical wire or cable. The complexity of the wiring adds another challenge to already complicated fluidic connections in the distribution system.

One way to solve this challenge is to provide an input / output (I / O) interface device that can provide serial communication between individual pump controllers and tracks. In this way, individual pump controllers for pumps of the same type can communicate with different tracks via an I / O interface device. More specifically, the I / O interface device may receive a signal from a track at the front end and pass the signal to a pump controller at the back end, in a format that can be understood by the pump controller, in a serial manner. .

Embodiments of the smart controller disclosed herein can provide other viable solutions. In some embodiments, the smart controller may include a plurality of communication ports for physical connection to the track and various devices. In some embodiments, the smart controller may be a motor pump, pneumatic pump, filter, sensor, etc., each of which may be plugged into any of the 24 ports and may be automatically recognized by the smart controller using an onboard database. It can have 24 communication ports for. The communication line between the smart controller and the devices may be software configurable. In some embodiments, each type of device may be assigned to a particular port of a smart controller.

In some embodiments, the smart controller is a different type of interface that delivers serial, parallel or analog signals / data to / from various devices (including tracks, pumps, valves, sensors, tag readers, pump heads, and other components). It may include. In some embodiments, the interface to the track may use proprietary or industry standard protocols. As another example, the interface to the track can be a Controller Area Network (CAN) interface with DeviceNet, Industry Standard Ethernet or any other industry standard protocol. For example, the smart controller can use Transmission Control Protocol / Internet Protocol (TCP / IP) to communicate with the track. Other interfaces of the smart controller can be used to communicate with various devices, including individual pump heads, in one or more protocols. In some embodiments, various devices may include CAN devices. In some embodiments, the interface to various devices may include a simple proprietary interface that is stripped down.

In many tracks, Ethernet and DeviceNet or something similar can be used to control the pump's I / O signals. For example, a track would send a DeviceNet command to a DeviceNet parallel I / O board to set up a signal, which would go through a connector and cable to a special pump interface module. This kind of connection architecture requires subtle and complex hardware arrangements in addition to software programming.

In some embodiments, the smart controller may implement a proprietary communication protocol for interface / communication with the pump. In some embodiments, the smart controller may implement a track interface to replace the parallel I / O that is commonly used to trigger a pump and obtain a basic state. In some embodiments, the pump may be implemented as the same parallel device type, and the smart controller may operate to interpret the protocol directly. This will provide nearly the same programming functions that many tracks currently use, while eliminating the need for track hardware boards and cables as well as parallel signals to the pump. According to the example above, the track can send the same DeviceNet command to the pump through the smart controller and will not require additional hardware. Those skilled in the art will appreciate that this is only one possible example. In some embodiments, existing Entegris networking protocols may be used to communicate with a smart controller or pump.

In some conventional dispensing systems, a master controller can be connected to multiple pumps, each pump having a dedicated pump controller coupled to it. The function of this type of dedicated pump controller can be classified into two levels (upper and lower). The high level control function may include the function required to operate the dispense pump. The low level control function may include simple functions such as moving the motor from point A to point B. These pump controllers have a lot of processing power. Unfortunately, conventional dispensing systems do not utilize the processing power of such pump controllers in an efficient manner. For example, in a dispensing system with multiple pumps (eg, 30-40), up to three pumps are running at the same time, with the remaining pumps idle. This inefficiency can be expensive.

Another disadvantage of conventional distribution systems lies in their fixed architecture, which cannot be fixed immediately. The master controller is generally programmed in a control manner corresponding to the type of pump controller connected thereto. Since the control scheme is related to the type of pump, if the pneumatic pump is taken out and replaced with a motor pump, the master controller will not recognize the motor pump and the master controller will also not know how to control the motor pump.

Embodiments of the smart controller disclosed herein can bring higher level functionality from the pump controller and thus smartly share processing power to reduce idle time and corresponding costs. The low level function remains in the pump head. The difference between the high level function and the low level function may be software configurable to customize the distribution system for a particular implementation. For example, in some embodiments, the smart controller can send a simple 'DISPENSE' command to the pump head, which has enough intelligence to execute the command and report to the smart controller when the task is complete. As another example, the smart controller can provide a generic command “DISPENSE RECIPE 4” to the pump controller (either at the pump or local to the pump), and the pump controller configured to dispense this particular recipe performs the operation as commanded. do. In some embodiments, the pump head may have only basic or basic functionality sufficient to drive a pump coupled thereto, and the smart controller may provide specific instructions to the pump head to perform the task immediately.

In some embodiments, the operation of the pump is controlled by a smart controller using information about a filter connected to the pump. In some embodiments, the filter is a removable filter disposed between the pump inlet and the pump outlet in the fluid flow path. The removable filter can implement a quick change or quick connect mechanism to connect to the pump. In some embodiments, the smart controller receives filter information, receives process fluid information such as chemical type, and based on filter information and process fluid information to select an operating routine for the pump (control scheme). Access the library and operate the pump according to the selected operating routine. The selected operating routine may include a selected segment of a priming routine, a dispensing cycle, a dispensing cycle of another routine.

6 is an example of a customizable dispensing system 600 having a pneumatic supply pump 630 in the supply stage 601 and a smart controller 610 that controls the pneumatic dispensing pump 640 in the dispensing stage 602. A schematic of an exemplary embodiment is shown. In this example, controller 610 is in communication with track 620, pneumatic feed pump 630, filter 650, and dispense pump 640. In this example, an electronic regulator 635 is used to regulate the pneumatically actuated feed pump 630, and an electronic regulator 645 is used to regulate the pneumatically actuated dispense pump 640.

FIG. 7 shows a customizable dispensing system 700 having a pneumatic supply pump 630 in supply stage 601 and a smart controller 610 that controls motor driven dispensing pump 740 in distribution stage 602. A schematic diagram of an exemplary embodiment is shown. According to this example, the controller 610 is in communication with the track 620, the pneumatic supply pump 630, the filter 650 and the distribution pump 740. In the dispensing system 700, an electronic regulator 635 is used to regulate the pneumatically actuated feed pump 630. In this example, the smart controller 610 can be configured to control the dispense pump 740 without an electronic regulator. In some embodiments, customizable distribution system 700 may nonetheless include an electronic regulator as a standard component. This makes it possible to mix and match different types of pumps for the dispensing pump 740 if one or more pneumatic pumps in the dispensing pump 740 are connected to the electronic regulator.

8 illustrates a customizable dispensing system 800 having a motor driven supply pump 830 at feed end 601 and a smart controller 610 controlling motor driven dispense pump 740 at dispense end 602. A schematic diagram of one exemplary embodiment is shown. According to the example above, the controller 610 is in communication with the track 620, the feed pump 830, the filter 650 and the dispensing pump 740. The smart controller 610 may control the motor driven supply pump 830 and the motor driven dispensing pump 740 in a manner similar to the multistage pump 100 described above. In some embodiments, the customizable distribution system 800 may include an electronic regulator for supply stage 601 and an electronic regulator for supply stage 602 as standard components. This means that at least one pneumatic pump at feed pump 830 is connected to an electronic regulator at feed stage 601 and at least one pneumatic pump at dispense pump 740 is connected to an electronic regulator at feed stage 602. If desired, it is possible to mix and match different types of pumps for feed pump 830 and dispense pump 740, if desired.

6-8 show a pneumatic supply pump 630 at feed end 601, a pneumatic dispense pump 640 at dispense end 602, a motor driven dispense pump 740 at dispense end 602, and Motor-driven feed pump 830 at feed stage 601 as well as the flexibility and versatility of smart controller 610 that can handle various filters 650. The smart controller 610 provides a plug and play interface with a number of physical interfaces (ports) for connection to the track 620 and various devices. The same connection line can be used to communicate with different types of pumps. This reduces / simplifies the wiring for the underlying customizable distribution system.

Smart controllers can provide proprietary or internally standardized communication lines for communicating with various devices, including pneumatic pumps, motor pumps, filters, and the like. In communicating with these devices, the smart controller can identify each type of device upon connection, search for a corresponding control scheme, and proceed accordingly. For example, to switch from communicating with one device to communicating with another device, the smart controller accesses an internal or local database of information, including the control scheme associated with the newly connected pump, and applies the control scheme accordingly. can do.

In some embodiments, the smart controller can be coupled to a filter having an electronically readable filter information tag that includes the filter information. Some examples of electronically readable filter information tags may implement radio-frequency identification (RFID) technology. These filters may be removable to implement a quick change or quick connect mechanism. In some embodiments, the filter information tag may be an active or passive RFID tag, a barcode or other optically readable code.

Radio-frequency identification (RFID) generally has two parts (reader and tag). Using radio waves, certain RFID tags can be read several meters outside the line of sight (LOS) of the RFID reader. In some embodiments, the range of suitable RFID tags is intentionally shortened to reduce crosstalk of adjacent pumps that read the other party's tags. As one example, in one embodiment, the range of the RFID tag is reduced to about 1 inch. Other ranges are possible, depending on the distance and / or arrangement of the RFID reader (s) and tag (s). 10 shows an example filter 950a with an RFID tag 952a and an example filter 950b with an RFID tag 952b. In some embodiments, the RFID tag may be fixed directly on the filter or embedded in the filter. In some embodiments, the RFID tag may not need to be physically fixed to the filter. RFID technology is known to those skilled in the art and is therefore not described further herein.

Examples of filter information include part number, design style, membrane type, retention rating, generation of filter, filter membrane configuration, lot number, serial number, device flow, membrane thickness, membrane bubble point, Particle quality, filter manufacturer quality information, or other information. The design style indicates the type of pump the filter is designed for, the capacity / size of the filter, the amount of membrane material in the filter, or other information about the design of the filter. Membrane type refers to the material and / or thickness of the membrane. The collection grade refers to the size of the particles that can be removed at a particular efficiency by the membrane. The generation of the filter indicates whether the filter is a first generation, second generation, third generation, or other generation of filter design. The construction of the filter membrane indicates whether the filter is pleated, the type of pleat or other information regarding the design of the membrane. The serial number provides the serial number of the individual filter. The lot number may specify the lot of manufacture of the filter or membrane. The device flow represents the flow rate that the filter can handle while still producing a good distribution. Device flow can be determined during manufacturing for individual filters. The membrane bubble point provides another measure of flow rate / pressure that the filter can process and still produce good distribution. The membrane bubble point can also be determined during manufacture for the individual filters. The above example is provided as an explanation rather than limiting information that may be included in the filter information.

The part number included in the filter information can convey various kinds of information. For example, each letter in the example part number format "Aabcdefgh" may convey different information. Table 1 below provides an example of information conveyed by part number:

text Information Yes A Connection a Design Style-indicates the type of pump the filter is designed for For lntelliGen pump filters:
P = wide body pump (lntelliGen1 or lntelliGen2)
2 or M = lntelliGen3 or lntelliGen mini pump b Membrane Type-The type of membrane used in the filter A = thin UPE
U = thick UPE
S = asymmetric nylon and UPE or other combination
M = PCM (chemically modified UPE)
N = nylon c Capture rating G = 0.2 um
V = 0.1 um
Z = 0.05 um
Y = 30 nm
X = 20 nm
T = 10 nm
F = 5 nm
K = 3 nm d Occurrence-occurrence of the filter 0 = V1
2 = V2 e RFID R = RFID f Pleat-Type of Pleat Used in Filter 0 = standard
M = M wrinkle g Where the O-ring is located 0 = OM
K = Karlez
E = EPDM
R = no O-ring h The number of filters in the box 1 = 1 per box
3 = 3 per box

Using the example in Table 1, part number A2AT2RMR1 for the Impact pump filter is the connectionology of the filter, the filter is designed for lntelliGen2 pumps (Impact and IntelliGen are listed in Entegris, Inc., Chaska, Minnesota, USA). ), The membrane is a thin UPE and has a capture rating of 10 nm, the filter is a version 2 filter, the filter contains an RFID tag, the filter membrane has an M-wrinkle, the filter has no O-rings and one per box It will indicate that there is a filter of. However, using the part number to convey information is provided as an example, and the filter information can be conveyed in other ways.

Other suitable filters for various purposes may also be connected to the smart controller. For example, older versions of smart filters may need to be replaced and replaced with newer versions. This can be done simply by removing the old smart filter and inserting a replacement in place. A rule set can be applied to the filter information to determine if the filter is appropriate. The rules for determining if a filter is appropriate may depend on filter information and other factors (such as process fluid, environmental characteristics, required cycle time or other factors). For example, if the process fluid has a certain viscosity, rules may be applied that would only allow the filter to be considered appropriate if the filter had a particular part number or some part number and bubble point. Thus, the rules applied may depend on a number of filter information and other information. If the filter is not a suitable filter, a corresponding action may be taken. If not, the operation of the pump can continue.

Smart filters can play an important role in various semiconductor manufacturing processes that are susceptible to defects in printed patterns, especially in those that can be viewed with very small microscopes or with submicron linewidths. Some existing distribution systems filter at negative pressure. Some existing distribution systems can monitor the pressure required for filtration and possibly maintain it manually. However, it is known that conventional dispensing systems are unable to accurately and precisely control the pressure required for filtration.

Some embodiments disclosed herein can control and maintain a static pressure at the pump head at the inlet of the pump at the dispensing side to reduce defect-caused bubbles. In the case of a motor pump, this static pressure can be controlled by motor movement and by a feedback loop to the pressure transducer. For example, to provide 5 psi static pressure, the upstream electronic regulator can be set to provide 10 psi in the first stage and the downstream electronic regulator is set to provide 5 psi in the second stage. Can be. This pressure differential pushes the fluid across the filter to the dispensing side.

In pneumatic pump settings, a pressure transducer is placed in the fluid path to detect the actual fluid pressure. Based on the information from the smart filter, the smart controller can infer what the actual filtration rate is for a particular filter and control that filtration rate accordingly. This allows the user to set the desired filtration rate in addition to setting the downstream pressure. The upstream pressure can be adjusted to achieve the desired target speed across the filter.

As one example, the filtration rate for a pneumatic to pneumatic pump setting can be calculated as follows:

The user enters the viscosity of the chemical (FV) for the pneumatic dispense pump.

The user enters the desired filtration pressure setpoint (FP) for the RFID filter fluidly connected to the pump. In some cases, the FP may be set at 4 psi. In some cases, the FP may be set between about 2 psi and about 10 psi.

The user enters the desired filtration rate (FR) for filtering the chemical. The FR can be set from about 0,2 cc / sec to about 1 cc / sec and in some cases perhaps higher.

The controller obtains the filter flow rate (FLR) from the filter's RFID tag. The information provided by the RFID tag may include the type of filter and the current flow rate of the fluid flowing through the filter.

The controller has a resistance constant (FC) stored in the firmware.

The controller calculates the filter resistance (R), where R = FC / FLR.

At this point, the controller has all the information needed to calculate the upstream pressure (UFP), where UFR = (R * FR * FV) + FP. UFP is necessary to achieve the desired filtration rate.

The controller sets the first stage fluid pressure to UFP and the second stage fluid pressure to FP.

The isolation and barrier valves are opened;

Filtration takes place at a given filtration rate.

When filtration is complete, the first stage fluid pressure will rise from FP to UFP.

An increase in pressure signals the end of filtration.

As a specific example, a user may want a filtration rate of 1.5 cc / sec and a downstream pressure of 4 psi at the dispense pump to filter a fluid having a viscosity of 3 centipoise (cps). Assume R = 1.55, UFR = 10.98 psi. If the pressure regulator for the feed pump is set to 10.98 psi and the pressure regulator for the dispensing pump is set to 4 psi, then the pressure difference across the filter causes the movement of the fluid, and in this example, the fluid Is moved from the supply side to the distribution side through a filter at a flow rate of 1.5 cc / sec. The flow rate will continue until the fluid is no longer needed. At that time, the dispense pump diaphragm will reach the bottom and the pressure regulator for the dispense pump will no longer be able to maintain a 4 psi set point. The pressure in the second stage then begins to drift towards the 10.98 psi set point. If the drift begins to occur, this signals the end of the filtration and the dispensing pump can move away from the filtration to the next step in the cycle. One reason for this is that the pressure transducer is located in the fluid path. If the pressure transducer is located only in the pneumatic path, a change in fluid pressure may not be detected.

9 shows a schematic diagram of one exemplary embodiment of a customizable dispensing system 900 having a pneumatic versus pneumatic pump setting for supply stage 901 and distribution stage 902. In this example, feed pump 930a and feed pump 930b are physically coupled as a unit, but each operates independently of each other and is independent by an embodiment of the smart controller disclosed herein (see FIG. 6). Controlled in fluid communication with each bottle set 970a, 970b containing chemicals for a particular dispensing application. Advantageously, this configuration can provide cost savings and high throughput due to simultaneous distribution. Similarly, dispensing pump 940a and dispensing pump 940b are also physically coupled as a unit, but each operates independently of one another, independently controlled by a smart controller, and has its own filters 950a, 950b, purge Fluid connection with the line and the dispense (outlet) valve to the dispense point. In some embodiments, the outlet valve may comprise a stop / suckback valve (SSBV). The outlet valve may be connected to molecular contaminants or other molecular or chemical monitoring / detection devices in the air. A controlled amount of fluid containing the treatment chemical is applied (distributed) on the wafer through the dispense nozzle at the dispense point. In order for the treatment liquid to be applied uniformly, the rate at which the treatment chemical is applied to the wafer must be controlled. The thickness of the coating over the surface of the wafer is typically measured in angstroms.

The dispensing nozzle is generally at atmospheric pressure. Preferably, the level of pressure at the dispensing nozzle remains undisturbed-no high pressure, no vacuum, no spikes. Placing the pressure transducer in the fluid path in a pneumatic to pneumatic setting allows the inlet of the dispensing pump to have a constant pressure and to ensure that the constant pressure is always accurately controlled, without making any assumptions. Pressure transducers are a type of sensor that can generate signals as a function of applied pressure. Many suitable pressure transducers can be used in this setup. In some embodiments, the static pressure may be in the range of 0 to about 12 psi. In some embodiments, the positive pressure may be in the range of about 2-10 psi.

10-15 illustrate pump control and sequential operation of one exemplary embodiment of a customizable dispensing system 1000 having a pneumatic versus pneumatic pump setting for supply stage 901 and distribution stage 902. In this exemplary embodiment, the customizable dispensing system 1000 includes an inlet valve, an isolation valve, a discharge valve, a barrier valve, a purge valve, and a function similar to the respective valves described above with reference to the multistage pump 100. Various valves can be included, including outlet valves. In addition, in this example, the electronic regulator 935 is used to independently regulate the pneumatic operation of the feed pumps 930a and 930b, and the electronic regulator 945 independently controls the pneumatic operation of the dispensing pumps 940a and 940b. Used to adjust. In this exemplary embodiment, the customizable distribution system 1000 includes a smart filter 950a with an RFID tag 952a, a smart filter 950b with an RFID tag 952b, a PCB 961 and a PCB 962. It may further include. In this example, since the two pumps are physically coupled as a unit, a printed circuit board (PCB) is coupled to the unit and the smart controller to operate one or both pumps simultaneously according to instructions from the smart controller. .

FIG. 11 shows an exemplary filling and dispensing sequence 1100 in which chemical is drawn from bottle 970a into feed pump 930a. For simplicity, feed pump 930b and dispense pump 940b and their associated components / connections are not shown in FIGS. 11-15. Feed pump 930b and dispense pump 940b may have the same or similar pump control and sequential operation as described herein with reference to respective feed pump 930a and dispense pump 940a.

Filter 950a may have tag 952a. In operation, a tag reader (not shown) may read filter information from tag 952a and pass the filter information to a smart controller (see FIG. 6). The smart controller processes filter information and whether and how to operate feed pump 930a and dispense pump 940a (control fill pressure, monitor fluid pressure profile, and exit) Rules for generating the alert (s)). In addition, the smart controller can adjust the operation of the customizable distribution system 1000 during the dispensing cycle based on the filter information obtained from the tag 952a.

The smart controller can also use the filter information to correlate good or bad behavior with filter characteristics. During operation, the smart controller can track various operational data for the customizable distribution system 1000. The information tracked by the smart controller may include any operating parameters available to the smart controller and any information calculated by the smart controller. Some non-limiting examples of operational data may include pressure, parameters related to valve operation, motor position, motor speed, hydraulic pressure or other parameters (such as temperature if the pump includes a temperature sensor). This information can be used to determine if the distribution was / was a good distribution. This can be done in real time after the dispensing has taken place or during the dispensing cycle.

Operational data may be correlated to filter information such that the impact on the distribution quality of various filter parameters can be identified. As one example, the smart controller can record the lot number of the filter so that the operational data of the customizable distribution system 1000 can be correlated to the lot. This information can be used to identify whether filters of a particular lot produced better or worse results compared to filters of other lots of the same design. Similarly, serial numbers can be used to track motion data for individual filters to help determine if individual filters were the cause of the bad coating. As another example, the operational data may be correlated to the membrane bubble point to determine whether different dispensing results have been obtained from a filter having the same part number but different membrane bubble points. Recording the information from the tag 952a and tracking the information about the distribution can optimize the selection of the filter and even its manufacture.

12 illustrates an example filtration sequence 1200. As discussed above, smart filters can play an important role in various semiconductor manufacturing processes. As a specific example, assume that the first stage fluid pressure set point is set to 10 psi, the second stage fluid pressure set point is set to 8 psi, and the delta between the two set points is 2 psi. This pressure delta (ΔP) causes the fluid to be drawn through the filter. The filter is hermetic, so there is no loss of pressure as the fluid is pushed through the filter. Depending on the flow rate and the resistance of the filter, the pressure in the two stages ultimately reaches equilibrium over time and filtration ends. Previously, we did not know exactly when the termination actually occurred in the pneumatic versus pneumatic setting. In some embodiments, a pressure transducer can be placed in the fluid path to provide timely and accurate information to the pump, so that the pump can move to the next step without having to wait unnecessarily. Using the setup shown in FIG. 10 as an example, the fluid diaphragm on the dispensing side ultimately reaches the bottom and no more fluid can enter the pump. On the other hand, a bottle drawer at the feed end tries to continue pushing the fluid to the dispensing side, which raises the fluid pressure at the dispensing side and ultimately rises to 10 psi to signal the end of filtration. In the pneumatic to pneumatic setting, this pressure is detected by a pressure transducer located in the fluid path. Again, the flow rate is controlled through coordination with the dispensing stage. At the dispensing end, the downstream pressure can be controlled so that defects can be created to a minimum. In addition, end-of-filtration detection can enable the best possible throughput for the underlying customizable dispensing system, because the system does not have to wait for a period of time and continues to prepare for the next dispensing cycle. Because it can.

In a mix and match system, the bottle aspirator can use the motor pump (s) to draw fluid (s) from the bottle (s). Negative pressure may be applied (via the upstream electronic regulator) to draw the fluid (s) from the bottle (s) into the fluid reservoir at the first stage. Using a motor pump may have the advantage of finer levels of control with regard to fluid velocity and pressure. In some embodiments, pneumatic pumps can be used at lower cost. Thus, in some embodiments, the above-described positive pressure control scheme may be implemented in a motor-to-motor setting or a motor-to-pneumatic setting without being limited to the pneumatic to pneumatic setting. The bottle may also be pressurized, and the supply stage may be used to control the rate at which the chemical is filled and to determine when the filling is complete.

In addition to the dispensing cycle, the smart controller can be configured to perform other operations. For example, when a new filter is connected to the pump, the filter may be primed so that the filter membrane is fully wetted before performing the dispensing cycle. An example priming routine may be as follows. First, fluid is introduced into the distribution chamber. The filter may be withdrawn for a period of time to remove bubbles from the upstream portion of the filter. There may then be a recycle purge segment. An exemplary recycle purge sequence 1300 is shown in FIG. 13. Recycle purge can remove bubbles without wasting chemicals, in addition to being important for efficiently priming the filter. In the following purge-to-vent segment, the isolation valve and the purge valve are opened and the barrier valve is closed. Fluid exits the dispensing chamber and is sent through the outlet. This may be followed by a filtration segment, an outlet segment, and a purge segment, after which the filter may be pressurized and the barrier valve and the outlet valve may be closed, while the isolation valve is open and the fluid at the feed end is pressurized. . A forward flush segment can occur where the fluid is sent through the filter to the distribution chamber and purged from the purge valve. The purge versus discharge segment may again occur. The priming routine can be repeated as needed or as desired.

The pump in the customizable dispensing system can be primed based on the type of filter and the process fluid used. Thus, while the foregoing provides exemplary priming routines, other priming routines may be used, as will be appreciated by those skilled in the art. Suitable priming routines may include any number of different steps to ensure that the filter membrane is fully wetted. Some non-limiting examples of sequences of segments that can be used in the priming routine include, but are not limited to, the following: i) filling segment, discharge segment; ii) fill segment, purge to discharge segment, filtration segment, discharge segment, purge to inlet segment; iii) dispensing segments, filling segments, filtration segments and purge segments. 14 shows an exemplary filling segment 1400 in which the customizable dispensing system 1000 is ready for the next dispensing. FIG. 15 shows an exemplary discharge segment 1500 in which the customizable dispensing system 1000 automatically evacuates to remove bubbles when bubbles are detected through pressure monitoring and thus prevents gas from re-dissolving under pressure. . Additional or alternative segments may be used in the priming routine as needed or desired.

As discussed above, in some embodiments, the customizable dispensing system may include one or more units of physically connected pumps. With the help of the PCB, the smart controller can communicate with these pumps via one line / port / physical interface per unit. However, because the pumps are not physically integrated, each pump still requires a full set of piping and components. In some embodiments, the customizable distribution system disclosed herein can include an integrated pump with simplified wiring / piping requirements.

FIG. 16 shows a schematic diagram of one exemplary embodiment of an integrated pump 1600 having two pneumatic pumps physically integrated as a unit. In the integral pump 1600, two pneumatic pumps (Pump 1, Pump 2) share a fluid plate 1610 sandwiched between a front plate 1611 and an end plate 1612. . As a non-limiting example, the fluid plate may be made of polymeric material, such as polytetrafluoroethylene (PTFE) or any other suitable material. As a specific example, the fluid plate may be 4 "tall, 4" wide and 1/4 "thick. Both sides of the fluid plate may be machined or otherwise formed to create a dished, recessed or concave surface. In this example, each pneumatic pump has an end plate that is coupled to one side of the fluid plate to form a cavity or space for retaining the fluid therein.The diaphragms 1621 and 1622 are fluids 1601 and 1602. May be independently pneumatically actuated to send into or out of the integral pump 1600. A fitting plate may be sandwiched between the end plates to provide a fluid connection between the fluid space and the fitting. As an end plate, the end plate may be made of metal Other suitable materials such as plastic may also be used. It is assumed that the feed pump 630 includes a plurality of integral pumps 1600 and each unit thereof has one control board connected thereto. It is possible to immediately increase its operating capacity and capacity without having to rewire feed pump 630.

17 shows four pneumatic pumps (pump 1 for fluid 1701, pump 2 for fluid 1702, pump 3 for fluid 1703, pump 4 for fluid 1704) that are physically integrated as a unit A schematic diagram of one exemplary embodiment of a one-piece pump 1700 is shown. Smart controllers can control these pumps through one line / port / interface. Each pump has a fluid side and a pneumatic side. These pumps share certain components including center plate 1710, front plate 1711, end plate 1712, fluid plate 1721, and fluid plate 1722. In some embodiments, they may also share fitting plates and fittings (including fluid fittings and pneumatic fittings).

18 shows a top perspective view of one exemplary embodiment of an integrated pump 1800. In this example, pump 1 and pump 2 of unitary pump 1800 are fluid plate 1810, front plate 1811, end plate 1812, fitting plate 1860, fluid fitting 1885, and pneumatic fitting ( 1895).

19 illustrates an exploded view of one exemplary embodiment of an integrated pump 1900. For simplicity, only one pneumatic pump is shown. The pneumatic pump of the unitary pump 1900 may share certain components as described above with reference to FIGS. 16-18. In this example, the unitary pump 1900 includes a fluid plate 1910, a valve plate 1911, an end plate 1912, a diaphragm 1922, a diaphragm 1922 sandwiched between the valve plate 1911 and the fluid plate 1910. O-ring 1980 disposed between 1922 and valve plate 1911, and fasteners 1990 that couple fluid plate 1910, valve plate 1911, end plate 1912, and diaphragm 1922. ). O-ring 1980 may be partially seated. Diaphragm 1922 may be comprised of a sheet of elastomeric material, PTFE, modified PTFE, a composite material of different layer types, or other suitable material that is preferably non-reactive with the process fluid. In one embodiment, the diaphragm 1922 may be approximately .013 inches thick. Fluid may be sent into / out of the integral pump 1900 through a fluid fitting 1985, which may be connected to the fluid channel through the upper support plate 1970 and the fitting plate 1960. Diaphragm 1922 may be pneumatically actuated through pneumatic fitting 1995. The displacement volume of the fluid in the cavity (fluid side) may vary depending on the amount of pressure / vacuum applied to the diaphragm 1922. This pressure can be measured through the pressure nut 1950.

As will be appreciated by those skilled in the art, the number of pumps that can be combined in this manner as well as the type of pumps are not limited to those shown in the figures attached to the present disclosure. For example, by forming two or more bore holes (one for each pump) in a single block, by bolting two or more rolling diaphragm pumps with one control board, the motor driven pump can also be coupled by others. Can be. In some cases, practical considerations, such as the complexity involved in coupling pumps and the benefits that may be provided by such coupling, can affect the number of pumps to be combined. For example, using two separate pumps in a distribution system can cost X, and combining two pumps can cost 1 in water of X. However, coming in four pumps can increase one of its moisture in X. As the number of pumps to be coupled continues to increase, the difficulty continues to increase, which reduces the value of coupling the pumps. There may be a point where one of those minutes of X is close enough to X, making the savings from combining the pumps negligible.

Combining pumps that can be operated independently can provide many advantages. For example, an integrated pump may require a smaller footprint than the total footprint of an individual pump. In addition, the integrated pump can simplify wiring / cable installation, thereby reducing installation / configuration / maintenance time. In addition, the integrated pump can reduce the cost of the overall system, at least by sharing the materials in each unit of the integrated pump.

While embodiments of the modular, flexible, smart, cost effective and high performance distribution system are described in this disclosure, those skilled in the art will appreciate that various modifications and changes can be made without departing from the spirit and scope of the specific embodiments disclosed herein. It can be seen that it can be done. Those skilled in the art will appreciate that the features and aspects disclosed herein may be implemented independently or in various combinations. Accordingly, the specification and drawings disclosed herein, including the appended appendices, are to be regarded in an illustrative rather than a restrictive sense, and all such modifications are intended to be included within the scope of this disclosure. Accordingly, the scope of the present disclosure should be determined by the following claims and their legal equivalents.

Claims (26)

In the customizable dispense system,
A smart controller configured to operate a plurality of pumps in a semiconductor manufacturing process that are sensitive to defects in a printed pattern, the plurality of pumps including at least one pneumatic pump and at least one motor pump; And
A plurality of lines connecting the smart controller with a track and various devices, including a pump head for the at least one pneumatic pump and the at least one motor pump
/ RTI >
The smart controller automatically recognizes the second pump and controls corresponding to the second pump when one of the plurality of lines switches from communicating with the first pump to communicating with the second pump. A customizable distribution system, configured to apply a control scheme. The customizable dispensing system of claim 1, wherein the first pump is a pneumatic pump and the second pump is a motor pump. The customizable dispensing system of claim 1, wherein both the first pump and the second pump are motor pumps. The customizable dispensing system of claim 1, wherein both the first pump and the second pump are pneumatic pumps. The motor of claim 1, wherein the smart controller is further configured to automatically recognize the newly connected pump and apply a control scheme corresponding to the newly connected pump when interfacing with the newly connected pump, wherein the newly connected pump is configured to include a motor. Customizable dispensing system, which is a pump or pneumatic pump. The customizable dispensing system of claim 1, wherein the smart controller includes an onboard database that stores information associated with the plurality of pumps. 10. The customizable distribution system of claim 1 wherein the various devices include a filter having a radio-frequency identification (RFID) tag. The system of claim 1, wherein the plurality of pumps comprises one or more integrated pumps, each of the one or more integrated pumps comprising two or more pneumatic pumps physically coupled as a unit, wherein Wherein at least two pneumatic pumps operate independently of each other, and at least two pneumatic pumps in the unit are independently controlled by the smart controller. The customizable dispensing system of claim 8, wherein the one or more integral pumps function as a feed pump. The customizable dispensing system of claim 8, wherein the one or more integrated pumps function as a dispensing pump.  The customizable dispensing system of claim 1, wherein the switching is due to physical separation of the first pump and physical connection of the second pump. The customizable distribution system of claim 1, wherein the transition is due to a command received at the smart controller. In the customizable distribution system,
A supply pump set for directing chemicals used in semiconductor manufacturing processes;
A dispensing pump set for dispensing the chemical; And
A smart controller configured to operate the feed pump set and the dispense pump set
Lt; / RTI >
The feed pump set and the dispensing pump set comprise one or more integral pumps, each of the one or more integral pumps comprising two or more pneumatic pumps physically coupled as a unit, wherein the two or more pneumatic pumps within the unit Wherein the at least two pneumatic pumps in the unit are independently controlled by the smart controller. The method of claim 13, wherein the smart controller automatically recognizes the second pump and applies a control scheme corresponding to the second pump when switching from communication with the first pump to communication with the second pump. And a customizable distribution system. 15. The customizable dispensing system of claim 14, wherein said first pump is a pneumatic pump and said second pump is a motor pump. 15. The customizable dispensing system of claim 14, wherein both the first pump and the second pump are motor pumps. 15. The customizable dispensing system of claim 14, wherein both the first pump and the second pump are pneumatic pumps. The pump of claim 13, wherein the smart controller is further configured to automatically recognize the newly connected pump and apply a control scheme corresponding to the newly connected pump when interfacing with the newly connected pump. Customizable dispensing system, which is a motor pump or pneumatic pump. In the customizable distribution system,
A feed pump set for sending chemicals used in semiconductor manufacturing processes;
A dispensing pump set for dispensing the chemical; And
A smart controller configured to operate the feed pump set and the dispense pump set
Lt; / RTI >
The feed pump set and the dispensing pump set comprise one or more integral pumps, each of the one or more integral pumps comprising two or more pneumatic pumps physically coupled as a unit, wherein the two or more pneumatic pumps within the unit Independently operated, two or more pneumatic pumps in the unit are independently controlled by the smart controller, which, when interfacing with a newly connected pump, automatically recognizes the newly connected pump and connects the newly connected pump. And a newly connected pump, wherein the newly connected pump is a motor pump or a pneumatic pump. The method of claim 19, wherein the smart controller automatically recognizes the second pump and applies a control scheme corresponding to the second pump when switching from communication with the first pump to communication with the second pump. And is further configured to. 21. The customizable dispensing system of claim 20, wherein said first pump is a pneumatic pump and said second pump is a motor pump. 21. The customizable dispensing system of claim 20, wherein both the first pump and the second pump are motor pumps. 21. The customizable dispensing system of claim 20, wherein both the first pump and the second pump are pneumatic pumps. 21. The customizable dispensing system of claim 20, wherein said switching is due to physical separation of said first pump and physical connection of said second pump. 21. The customizable distribution system of claim 20 wherein the transition is due to a command received at the smart controller. In the filtration method,
In a controller of a dispensing system having a feed pump and a dispensing pump, determining an upstream pressure for the fluid upstream from a filter disposed between the feed pump and the dispensing pump;
Setting a feed end fluid pressure to the upstream pressure;
Setting the dispensing stage fluid pressure to a filtration pressure set point;
Opening a valve to allow the fluid to flow through the filter from the supply side to the dispensing side, wherein the supply end fluid pressure and the dispensing end fluid pressure generate a differential pressure across the filter, and thus the fluid Is moved from the supply side to the distribution side through the filter; And
Determining an end of filtration based on a change in fluid pressure at the dispensing side
Including, filtration method.

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