JP2011071219A5 - - Google Patents

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Publication number
JP2011071219A5
JP2011071219A5 JP2009219387A JP2009219387A JP2011071219A5 JP 2011071219 A5 JP2011071219 A5 JP 2011071219A5 JP 2009219387 A JP2009219387 A JP 2009219387A JP 2009219387 A JP2009219387 A JP 2009219387A JP 2011071219 A5 JP2011071219 A5 JP 2011071219A5
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JP
Japan
Prior art keywords
semiconductor substrate
manufacturing
carbon layer
carbon
layer containing
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JP2009219387A
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English (en)
Japanese (ja)
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JP5482051B2 (ja
JP2011071219A (ja
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Priority to JP2009219387A priority Critical patent/JP5482051B2/ja
Priority claimed from JP2009219387A external-priority patent/JP5482051B2/ja
Publication of JP2011071219A publication Critical patent/JP2011071219A/ja
Publication of JP2011071219A5 publication Critical patent/JP2011071219A5/ja
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Publication of JP5482051B2 publication Critical patent/JP5482051B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009219387A 2009-09-24 2009-09-24 半導体基板の製造方法 Expired - Fee Related JP5482051B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009219387A JP5482051B2 (ja) 2009-09-24 2009-09-24 半導体基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009219387A JP5482051B2 (ja) 2009-09-24 2009-09-24 半導体基板の製造方法

Publications (3)

Publication Number Publication Date
JP2011071219A JP2011071219A (ja) 2011-04-07
JP2011071219A5 true JP2011071219A5 (https=) 2012-10-04
JP5482051B2 JP5482051B2 (ja) 2014-04-23

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ID=44016232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009219387A Expired - Fee Related JP5482051B2 (ja) 2009-09-24 2009-09-24 半導体基板の製造方法

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JP (1) JP5482051B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109904106B (zh) * 2019-02-28 2021-12-14 云谷（固安）科技有限公司 柔性显示面板及柔性显示面板的制备方法
JP7259615B2 (ja) * 2019-07-24 2023-04-18 株式会社Sumco ヘテロエピタキシャルウェーハの製造方法
WO2023058355A1 (ja) * 2021-10-06 2023-04-13 信越半導体株式会社 ヘテロエピタキシャル膜の作製方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06157190A (ja) * 1992-11-20 1994-06-03 Matsushita Electric Ind Co Ltd 炭化珪素薄膜の製造方法

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