JP2011059482A5 - - Google Patents

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Publication number
JP2011059482A5
JP2011059482A5 JP2009210353A JP2009210353A JP2011059482A5 JP 2011059482 A5 JP2011059482 A5 JP 2011059482A5 JP 2009210353 A JP2009210353 A JP 2009210353A JP 2009210353 A JP2009210353 A JP 2009210353A JP 2011059482 A5 JP2011059482 A5 JP 2011059482A5
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JP
Japan
Prior art keywords
optical element
optical
support
support member
displacement
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Application number
JP2009210353A
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English (en)
Japanese (ja)
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JP2011059482A (ja
JP5455516B2 (ja
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Application filed filed Critical
Priority to JP2009210353A priority Critical patent/JP5455516B2/ja
Priority claimed from JP2009210353A external-priority patent/JP5455516B2/ja
Priority to US12/876,921 priority patent/US8064152B2/en
Publication of JP2011059482A publication Critical patent/JP2011059482A/ja
Priority to US13/172,695 priority patent/US8508870B2/en
Publication of JP2011059482A5 publication Critical patent/JP2011059482A5/ja
Application granted granted Critical
Publication of JP5455516B2 publication Critical patent/JP5455516B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009210353A 2009-09-11 2009-09-11 支持装置、光学装置、転写装置及びデバイス製造方法 Expired - Fee Related JP5455516B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009210353A JP5455516B2 (ja) 2009-09-11 2009-09-11 支持装置、光学装置、転写装置及びデバイス製造方法
US12/876,921 US8064152B2 (en) 2009-09-11 2010-09-07 Supporting device, optical apparatus, exposure apparatus, and device manufacturing method
US13/172,695 US8508870B2 (en) 2009-09-11 2011-06-29 Supporting device, optical apparatus, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009210353A JP5455516B2 (ja) 2009-09-11 2009-09-11 支持装置、光学装置、転写装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2011059482A JP2011059482A (ja) 2011-03-24
JP2011059482A5 true JP2011059482A5 (OSRAM) 2012-10-25
JP5455516B2 JP5455516B2 (ja) 2014-03-26

Family

ID=43730309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009210353A Expired - Fee Related JP5455516B2 (ja) 2009-09-11 2009-09-11 支持装置、光学装置、転写装置及びデバイス製造方法

Country Status (2)

Country Link
US (2) US8064152B2 (OSRAM)
JP (1) JP5455516B2 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8710461B2 (en) * 2011-09-12 2014-04-29 Mapper Lithography Ip B.V. Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly
JP6209946B2 (ja) * 2013-11-06 2017-10-11 三菱電機株式会社 光モジュール
CN107145040B (zh) * 2017-06-30 2019-04-02 中国科学院长春光学精密机械与物理研究所 光学元件运动学支撑装置、投影物镜和光刻机
US10911647B2 (en) 2018-11-12 2021-02-02 Magna Electronics Inc. Vehicular camera with thermal compensating means
CN112068277B (zh) * 2020-08-31 2021-08-20 中国科学院长春光学精密机械与物理研究所 大口径光学透镜的多级柔性支撑结构

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226718A (ja) * 1985-03-29 1986-10-08 Sharp Corp 光学読取装置
JP2532200Y2 (ja) * 1990-05-25 1997-04-09 旭光学工業株式会社 円形部材の支持装置
JPH0868899A (ja) 1994-08-29 1996-03-12 Nikon Corp 光学素子の保持具
JPH1096843A (ja) 1996-09-19 1998-04-14 Minolta Co Ltd 光学素子保持構造
JP3037163B2 (ja) * 1996-11-26 2000-04-24 キヤノン株式会社 光学素子支持装置、光学機器及びステッパー
JP4809987B2 (ja) * 2000-03-30 2011-11-09 キヤノン株式会社 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法
JP2006100315A (ja) * 2004-09-28 2006-04-13 Canon Inc 保持機構、光学装置、及びデバイス製造方法
JP2006211251A (ja) * 2005-01-27 2006-08-10 Ricoh Co Ltd 画像読取レンズ、画像読取装置および画像形成装置
WO2007020067A1 (en) * 2005-08-16 2007-02-22 Carl Zeiss Smt Ag Immersion lithography objective
JP5055384B2 (ja) * 2007-02-27 2012-10-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学結像装置

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