JP2011044684A - 磁気トンネル接合デバイスおよびその製造方法 - Google Patents
磁気トンネル接合デバイスおよびその製造方法 Download PDFInfo
- Publication number
- JP2011044684A JP2011044684A JP2009272188A JP2009272188A JP2011044684A JP 2011044684 A JP2011044684 A JP 2011044684A JP 2009272188 A JP2009272188 A JP 2009272188A JP 2009272188 A JP2009272188 A JP 2009272188A JP 2011044684 A JP2011044684 A JP 2011044684A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- magnetic layer
- tunnel junction
- junction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/091—Constructional adaptation of the sensor to specific applications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/14—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F41/305—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling
- H01F41/307—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling insulating or semiconductive spacer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/123—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/115—Magnetic layer composition
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Thin Magnetic Films (AREA)
Abstract
【解決手段】磁気トンネル接合デバイスは、i)(A100−xBx)100−yCyの化学式を有する化合物を含む第1磁性層と、ii)第1磁性層の上に位置する絶縁層と、iii)絶縁層の上に位置し、(A100−xBx)100−yCyの化学式を有する化合物を含む第2磁性層とを含む。第1磁性層および第2磁性層は垂直磁気異方性を有し、Aおよび前記Bはそれぞれ金属元素であり、CはB(ホウ素)、C(炭素)、Ta(タンタル)、およびHf(ハフニウム)からなる群より選択された一つ以上の非晶質化元素である。
【選択図】図1
Description
磁性層、絶縁層および磁性層が順次に積層された磁気トンネル接合デバイスを製造した。磁性層は元素含有量1:1のFe50Pd50合金に20at%のホウ素を添加して(Fe50Pd50)80B20からなる磁性層を製造した。Fe50Pd50合金は整列された結晶構造を有し、垂直磁気異方性を有する。ここにホウ素を添加することによって磁性層を非晶質化した。磁性層の厚さは3nmであった。
(001)方向性を有するMgOからなる単結晶基板上にPt層を(001)方向性を有するように40nm蒸着した。ここで、Pt層は40nmの厚さを有し、非晶質磁性層の結晶性誘導層として機能した。その次に、(Fe50Pd50)80B20からなる磁性層をPt層の上に非晶質状態で蒸着した。(Fe50Pd50)80B20からなる磁性層の厚さは10nmであった。磁性層を蒸着して500℃で1時間熱処理した。
20 絶縁層
30 第2磁性層
40、42 水平異方性磁性層
50、52 結晶性誘導層
60 水平磁気異方性磁性層
62 垂直磁気異方性誘導層
100、200、300 磁気トンネル接合デバイス
Claims (17)
- (A100−xBx)100−yCyの化学式を有する化合物を含む第1磁性層と、
前記第1磁性層の上に位置する絶縁層と、
前記絶縁層の上に位置し、(A100−xBx)100−yCyの化学式を有する化合物を含む第2磁性層と
を含み、
前記第1磁性層および前記第2磁性層は垂直磁気異方性を有し、
前記Aおよび前記Bはそれぞれ金属元素であり、前記CはB(ホウ素)、C(炭素)、Ta(タンタル)、およびHf(ハフニウム)からなる群より選択された一つ以上の非晶質化元素であることを特徴とする磁気トンネル接合デバイス。 - 前記AはFe(鉄)、Co(コバルト)、Ni(ニッケル)、Mn(マンガン)、およびCr(クロム)からなる群より選択された一つ以上の元素であることを特徴とする請求項1に記載の磁気トンネル接合デバイス。
- 前記BはPt(白金)、Pd(パラジウム)、Rh(ロジウム)、Au(金)、Hg(水銀)、およびAl(アルミニウム)からなる群より選択された一つ以上の元素であることを特徴とする請求項2に記載の磁気トンネル接合デバイス。
- 前記絶縁層はD100−zEzの化学式を有する化合物を含み、前記DはLi(リチウム)、Be(ベリリウム)、Na(ナトリウム)、Mg(マグネシウム)、Nb(ニオブ)、Ti(チタン)、V(バナジウム)、Ta(タンタル)、Ba(バリウム)、Pd(パラジウム)、Zr(ジルコニウム)、Ho(ホルミウム)、K(カリウム)、およびAg(銀)からなる群より選択された一つ以上の元素であり、前記EはO(酸素)、N(窒素)、C(炭素)、H(水素)、Se(セレン)、Cl(塩素)、およびF(フッ素)からなる群より選択された一つ以上の元素であることを特徴とする請求項1に記載の磁気トンネル接合デバイス。
- 前記第1磁性層および前記第2磁性層のうちの一つ以上の磁性層は立方晶系または正方晶系であることを特徴とする請求項1に記載の磁気トンネル接合デバイス。
- 前記第2磁性層および前記絶縁層の間に位置する水平磁気異方性磁性層と、
前記第2磁性層の上に位置する結晶性誘導層と
をさらに含むことを特徴とする請求項1に記載の磁気トンネル接合デバイス。 - 前記水平磁気異方性磁性層はFe、CoFe、およびCoFeBからなる群より選択された一つ以上の元素を含むことを特徴とする請求項6に記載の磁気トンネル接合デバイス。
- 前記第1磁性層および前記第2磁性層のうちの一つ以上の磁性層に含まれている前記化合物が(Fe100−xPdx)100−xBxまたは(Fe100−xPtx)100−xBxの化学式を有する場合、前記結晶性誘導層はPd、Pt、Au、およびFeからなる群より選択された一つ以上の元素を含むことを特徴とする請求項6に記載の磁気トンネル接合デバイス。
- 前記第1磁性層および前記絶縁層の間に位置する他の水平磁気異方性磁性層と
前記第1磁性層の下に位置する他の結晶性誘導層と
をさらに含むことを特徴とする請求項6に記載の磁気トンネル接合デバイス。 - 結晶性誘導層と、
前記結晶性誘導層の上に位置し、(A100−xBx)100−yCyの化学式を有する化合物を含む垂直磁気異方性磁性層と、
前記垂直磁気異方性磁性層の上に位置する水平磁気異方性磁性層と、
前記水平異方性磁性層の上に位置する絶縁層と、
前記絶縁層の上に位置する水平磁気異方性磁性層と、
前記水平磁気異方性磁性層の上に位置する垂直磁気異方性誘導層と
を含み、
前記AはFe(鉄)、Co(コバルト)、Ni(ニッケル)、Mn(マンガン)、およびCr(クロム)からなる群より選択された一つ以上の元素であり、前記BはPt(白金)、Pd(パラジウム)、Rh(ロジウム)、Au(金)、Hg(水銀)、およびAl(アルミニウム)からなる群より選択された一つ以上の元素であり、前記CはB(ホウ素)、C(炭素)、Ta(タンタル)、およびHf(ハフニウム)からなる群より選択された一つ以上の元素であることを特徴とする磁気トンネル接合デバイス。 - 非晶質を含む第1磁性層を提供する段階と、
前記第1磁性層の上に絶縁層を提供する段階と、
前記絶縁層の上に非晶質を含む第2磁性層を提供する段階と、
前記第1磁性層、前記絶縁層、および前記第2磁性層を熱処理して、前記第1磁性層および前記第2磁性層を結晶化する段階と
を含むことを特徴とする磁気トンネル接合デバイスの製造方法。 - 前記第1磁性層を提供する段階および前記第2磁性層を提供する段階において、前記第1磁性層および前記第2磁性層はそれぞれ(A100−xBx)100−yCyの化学式を有し、前記AはFe(鉄)、Co(コバルト)、Ni(ニッケル)、Mn(マンガン)、およびCr(クロム)からなる群より選択された一つ以上の元素であり、前記BはPt(白金)、Pd(パラジウム)、Rh(ロジウム)、Au(金)、Hg(水銀)、およびAl(アルミニウム)からなる群より選択された一つ以上の元素であり、前記CはB(ホウ素)、C(炭素)、Ta(タンタル)、およびHf(ハフニウム)からなる群より選択された一つ以上の非晶質化元素であることを特徴とする請求項11に記載の磁気トンネル接合デバイスの製造方法。
- 前記第1磁性層および前記第2磁性層を結晶化する段階において、前記第1磁性層および前記第2磁性層は垂直磁気異方性を有することを特徴とする請求項11に記載の磁気トンネル接合デバイスの製造方法。
- 前記第1磁性層および前記第2磁性層を結晶化する段階において、前記第1磁性層、前記絶縁層および前記第2磁性層を300℃乃至600℃で熱処理することを特徴とする請求項11に記載の磁気トンネル接合デバイスの製造方法。
- 前記第2磁性層および前記絶縁層の間に水平磁気異方性磁性層を提供する段階と、
前記第2磁性層の上に結晶性誘導層を提供する段階と
をさらに含むことを特徴とする請求項11に記載の磁気トンネル接合デバイスの製造方法。 - 前記第1磁性層および前記絶縁層の間に他の水平磁気異方性磁性層を提供する段階と、
前記第1磁性層の下に他の結晶性誘導層を提供する段階と
をさらに含むことを特徴とする請求項15に記載の磁気トンネル接合デバイスの製造方法。 - 結晶性誘導層を提供する段階と、
前記結晶性誘導層の上に(A100−xBx)100−yCyの化学式を有する化合物を含む磁性層を提供する段階と、
前記磁性層の上に水平磁気異方性磁性層を提供する段階と、
前記水平磁気異方性磁性層の上に絶縁層を提供する段階と、
前記絶縁層の上に水平磁気異方性磁性層を提供する段階と、
前記水平磁気異方性磁性層の上に垂直磁気異方性誘導層を提供する段階と、
前記結晶性誘導層、前記磁性層、前記水平磁気異方性磁性層、前記絶縁層、前記水平磁気異方性磁性層、および前記垂直磁気異方性誘導層を熱処理して、前記磁性層を結晶化する段階と
を含み、
前記磁性層を結晶化する段階において前記磁性層は垂直磁気異方性を有し、
前記磁性層は(A100−xBx)100−yCyの化学式を有し、前記AはFe(鉄)、Co(コバルト)、Ni(ニッケル)、Mn(マンガン)、およびCr(クロム)からなる群より選択された一つ以上の元素であり、前記BはPt(白金)、Pd(パラジウム)、Rh(ロジウム)、Au(金)、Hg(水銀)、およびAl(アルミニウム)からなる群より選択された一つ以上の元素であり、前記CはB(ホウ素)、C(炭素)、Ta(タンタル)、およびHf(ハフニウム)からなる群より選択された一つ以上の非晶質化元素であることを特徴とする磁気トンネル接合デバイスの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090077492A KR101115039B1 (ko) | 2009-08-21 | 2009-08-21 | 자기터널접합 디바이스 및 그 제조 방법 |
KR10-2009-0077492 | 2009-08-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011044684A true JP2011044684A (ja) | 2011-03-03 |
JP5300701B2 JP5300701B2 (ja) | 2013-09-25 |
Family
ID=42245996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009272188A Active JP5300701B2 (ja) | 2009-08-21 | 2009-11-30 | 磁気トンネル接合デバイスおよびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US8841006B2 (ja) |
EP (1) | EP2287863B1 (ja) |
JP (1) | JP5300701B2 (ja) |
KR (1) | KR101115039B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012204432A (ja) * | 2011-03-24 | 2012-10-22 | Toshiba Corp | 磁気ランダムアクセスメモリ及びその製造方法 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101115039B1 (ko) * | 2009-08-21 | 2012-03-07 | 한국과학기술연구원 | 자기터널접합 디바이스 및 그 제조 방법 |
JP5725735B2 (ja) * | 2010-06-04 | 2015-05-27 | 株式会社日立製作所 | 磁気抵抗効果素子及び磁気メモリ |
US8817426B2 (en) | 2011-10-17 | 2014-08-26 | HGST Netherlands B.V. | Magnetic sensor having CoFeBTa in pinned and free layer structures |
KR101308105B1 (ko) | 2011-11-18 | 2013-09-12 | 한국과학기술연구원 | 수직자화 박막 구조체 및 그 제조 방법 |
KR101901323B1 (ko) | 2011-12-21 | 2018-09-27 | 삼성전자주식회사 | 자기저항요소 및 이를 포함하는 메모리소자 |
US9490054B2 (en) * | 2012-10-11 | 2016-11-08 | Headway Technologies, Inc. | Seed layer for multilayer magnetic materials |
KR101537449B1 (ko) * | 2013-10-10 | 2015-07-16 | 한양대학교 산학협력단 | 다층박막 제조방법 및 이에 의해 제조된 다층박막을 포함하는 mtj 구조 |
US9831422B2 (en) * | 2015-10-21 | 2017-11-28 | Samsung Electronics Co., Ltd. | Magnetic memory devices having perpendicular magnetic tunnel junction |
US9780299B2 (en) | 2015-11-23 | 2017-10-03 | Headway Technologies, Inc. | Multilayer structure for reducing film roughness in magnetic devices |
US10115892B2 (en) | 2015-11-23 | 2018-10-30 | Headway Technologies, Inc. | Multilayer structure for reducing film roughness in magnetic devices |
US10438638B2 (en) * | 2016-03-07 | 2019-10-08 | Samsung Electronics Co., Ltd. | Method and system for providing a magnetic layer in a magnetic junction usable in spin transfer or spin orbit torque applications using a sacrificial oxide layer |
US9966528B2 (en) * | 2016-03-07 | 2018-05-08 | Samsung Electronics Co., Ltd. | Method and system for providing a magnetic layer in a magnetic junction usable in spin transfer torque applications using a sacrificial oxide layer |
US10490732B2 (en) | 2016-03-11 | 2019-11-26 | Toshiba Memory Corporation | Magnetic memory device with sidewall layer containing boron and manufacturing method thereof |
TWI688131B (zh) | 2016-09-14 | 2020-03-11 | 日商東芝記憶體股份有限公司 | 半導體裝置 |
US10283246B1 (en) | 2017-10-20 | 2019-05-07 | Globalfoundries Singapore Pte. Ltd. | MTJ structures, STT MRAM structures, and methods for fabricating integrated circuits including the same |
CN108062450B (zh) * | 2018-01-03 | 2021-03-16 | 中国铁路设计集团有限公司 | 高铁隧道穿越区域内地面沉降严重区的设计方法 |
CN112962122B (zh) * | 2021-02-01 | 2022-03-15 | 浙江工业大学 | 一种高矫顽力B掺杂FePt薄膜的制备方法 |
CN114002252B (zh) * | 2021-12-31 | 2022-04-26 | 季华实验室 | 多层薄膜材料的垂直磁各向异性检测方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008098523A (ja) * | 2006-10-13 | 2008-04-24 | Toshiba Corp | 磁気抵抗効果素子および磁気メモリ |
WO2009038105A1 (ja) * | 2007-09-18 | 2009-03-26 | Japan Science And Technology Agency | 金属ガラス及びそれを用いた磁気記録媒体並びにその製造方法 |
JP2009081315A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
JP2009081314A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
JP2009081216A (ja) * | 2007-09-25 | 2009-04-16 | Toshiba Corp | 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ |
JP2009212156A (ja) * | 2008-02-29 | 2009-09-17 | Toshiba Corp | 磁気抵抗効果素子及びこれを用いた磁気メモリ |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6846543B2 (en) * | 1999-04-20 | 2005-01-25 | Hitachi Global Storage Technologies Netherlands, B.V. | Thin film magnetic recording disk with ruthenium-aluminum layer |
US6436526B1 (en) * | 1999-06-17 | 2002-08-20 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistance effect element, magneto-resistance effect memory cell, MRAM and method for performing information write to or read from the magneto-resistance effect memory cell |
US6845038B1 (en) * | 2003-02-01 | 2005-01-18 | Alla Mikhailovna Shukh | Magnetic tunnel junction memory device |
JP2004311607A (ja) * | 2003-04-04 | 2004-11-04 | Canon Inc | 磁性体、磁気記録媒体、磁気記録再生装置、情報処理装置及びその製造方法 |
US20050202287A1 (en) * | 2004-03-10 | 2005-09-15 | Seagate Technology Llc | Thermally isolated granular media for heat assisted magnetic recording |
JP4444241B2 (ja) | 2005-10-19 | 2010-03-31 | 株式会社東芝 | 磁気抵抗効果素子、磁気ランダムアクセスメモリ、電子カード及び電子装置 |
US7732881B2 (en) | 2006-11-01 | 2010-06-08 | Avalanche Technology, Inc. | Current-confined effect of magnetic nano-current-channel (NCC) for magnetic random access memory (MRAM) |
US8593862B2 (en) * | 2007-02-12 | 2013-11-26 | Avalanche Technology, Inc. | Spin-transfer torque magnetic random access memory having magnetic tunnel junction with perpendicular magnetic anisotropy |
JP2009081215A (ja) | 2007-09-25 | 2009-04-16 | Toshiba Corp | 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ |
US8932667B2 (en) * | 2008-04-30 | 2015-01-13 | Seagate Technology Llc | Hard magnet with cap and seed layers and data storage device read/write head incorporating the same |
US8169753B2 (en) * | 2008-11-21 | 2012-05-01 | Hitachi Global Storage Technologies Netherlands B.V. | Current-perpendicular-to-plane (CPP) read sensor with ferromagnetic amorphous buffer and polycrystalline seed layers |
US8133332B2 (en) * | 2009-02-12 | 2012-03-13 | Seagate Technology Llc | Method for preparing FePt media at low ordering temperature and fabrication of exchange coupled composite media and gradient anisotropy media for magnetic recording |
KR101115039B1 (ko) * | 2009-08-21 | 2012-03-07 | 한국과학기술연구원 | 자기터널접합 디바이스 및 그 제조 방법 |
US8648589B2 (en) * | 2009-10-16 | 2014-02-11 | HGST Netherlands B.V. | Magnetoresistive sensor employing nitrogenated Cu/Ag under-layers with (100) textured growth as templates for CoFe, CoFeX, and Co2(MnFe)X alloys |
US8907436B2 (en) * | 2010-08-24 | 2014-12-09 | Samsung Electronics Co., Ltd. | Magnetic devices having perpendicular magnetic tunnel junction |
KR102082328B1 (ko) * | 2013-07-03 | 2020-02-27 | 삼성전자주식회사 | 수직 자기터널접합을 구비하는 자기 기억 소자 |
US9236564B2 (en) * | 2013-12-11 | 2016-01-12 | Samsung Electronics Co., Ltd. | Method and system for providing an engineered magnetic layer including Heusler layers and an amorphous insertion layer |
-
2009
- 2009-08-21 KR KR1020090077492A patent/KR101115039B1/ko active IP Right Grant
- 2009-11-30 JP JP2009272188A patent/JP5300701B2/ja active Active
-
2010
- 2010-02-16 US US12/658,853 patent/US8841006B2/en active Active
- 2010-05-06 EP EP10162168.8A patent/EP2287863B1/en active Active
-
2014
- 2014-08-13 US US14/458,617 patent/US9263668B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008098523A (ja) * | 2006-10-13 | 2008-04-24 | Toshiba Corp | 磁気抵抗効果素子および磁気メモリ |
WO2009038105A1 (ja) * | 2007-09-18 | 2009-03-26 | Japan Science And Technology Agency | 金属ガラス及びそれを用いた磁気記録媒体並びにその製造方法 |
JP2009081216A (ja) * | 2007-09-25 | 2009-04-16 | Toshiba Corp | 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ |
JP2009081315A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
JP2009081314A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
JP2009212156A (ja) * | 2008-02-29 | 2009-09-17 | Toshiba Corp | 磁気抵抗効果素子及びこれを用いた磁気メモリ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012204432A (ja) * | 2011-03-24 | 2012-10-22 | Toshiba Corp | 磁気ランダムアクセスメモリ及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5300701B2 (ja) | 2013-09-25 |
KR101115039B1 (ko) | 2012-03-07 |
EP2287863B1 (en) | 2017-11-15 |
US8841006B2 (en) | 2014-09-23 |
US20140349416A1 (en) | 2014-11-27 |
US9263668B2 (en) | 2016-02-16 |
KR20110019886A (ko) | 2011-03-02 |
EP2287863A1 (en) | 2011-02-23 |
US20110045320A1 (en) | 2011-02-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5300701B2 (ja) | 磁気トンネル接合デバイスおよびその製造方法 | |
KR102211377B1 (ko) | 수직 자기 이방성을 갖는 자기 디바이스 응용을 위한 고온 어닐링 후의 보자력 유지 | |
KR101706613B1 (ko) | 자기 이방성 강화층과 결정화 장벽층을 포함하는 수직 mtj 적층 | |
JP6690838B2 (ja) | 強磁性トンネル接合体、これを用いた磁気抵抗効果素子及びスピントロニクスデバイス並びに強磁性トンネル接合体の製造方法 | |
TW201721916A (zh) | 具有底電極介面材料之垂直自旋轉移力矩記憶體(psttm)裝置 | |
US20220059755A1 (en) | Magnetoresistive stack/structure and methods therefor | |
JP5429480B2 (ja) | 磁気抵抗素子、mram、及び磁気センサー | |
EP3933948A1 (en) | Magnetoresistive stack, seed region therefor and method of manufacturing same | |
TW201724592A (zh) | 具有透過有著高溫穩定性的金屬層耦合的自由磁性層的垂直自旋力矩轉移記憶體(pSTTM)裝置 | |
JP2009170556A (ja) | トンネル磁気抵抗効果素子及びスピンmos電界効果トランジスタ | |
KR101661275B1 (ko) | 메모리 소자 | |
KR102169622B1 (ko) | 메모리 소자 | |
JP6857421B2 (ja) | 強磁性トンネル接合体、それを用いたスピントロニクスデバイス、及び強磁性トンネル接合体の製造方法 | |
US10516097B2 (en) | Memory device | |
KR101537715B1 (ko) | 메모리 소자 | |
WO2010023833A1 (ja) | 磁気抵抗素子とその製造方法、該製造方法に用いる記憶媒体 | |
KR102432900B1 (ko) | 수직 자화막 및 이를 포함하는 자기 장치 | |
KR101705125B1 (ko) | 메모리 소자 | |
KR101308105B1 (ko) | 수직자화 박막 구조체 및 그 제조 방법 | |
JP2018517272A (ja) | 磁気トンネル接合の磁気電極を形成する方法および磁気トンネル接合を形成する方法 | |
JP5389370B2 (ja) | 強磁性薄膜材料とその製造方法 | |
KR101698532B1 (ko) | 메모리 소자 | |
WO2010026703A1 (ja) | 磁気抵抗素子とその製造方法、該製造方法に用いる記憶媒体 | |
KR101583783B1 (ko) | 메모리 소자 | |
Liu et al. | Effect of Pt doping Ni on the structural and magnetic properties of hexagonal MnNiGa alloy |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111117 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111129 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120229 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120305 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120329 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120403 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120501 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121106 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130204 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130207 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130306 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130311 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130405 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130410 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130430 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130521 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130618 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5300701 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |