JP2011043548A - 光源装置 - Google Patents
光源装置 Download PDFInfo
- Publication number
- JP2011043548A JP2011043548A JP2009189912A JP2009189912A JP2011043548A JP 2011043548 A JP2011043548 A JP 2011043548A JP 2009189912 A JP2009189912 A JP 2009189912A JP 2009189912 A JP2009189912 A JP 2009189912A JP 2011043548 A JP2011043548 A JP 2011043548A
- Authority
- JP
- Japan
- Prior art keywords
- light
- wavelength
- light source
- polarization
- source device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010287 polarization Effects 0.000 claims abstract description 124
- 230000003287 optical effect Effects 0.000 claims abstract description 110
- 239000013078 crystal Substances 0.000 claims abstract description 70
- 238000006243 chemical reaction Methods 0.000 claims abstract description 42
- 230000008859 change Effects 0.000 claims abstract description 19
- 230000000694 effects Effects 0.000 claims description 12
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 230000005693 optoelectronics Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 13
- 238000007689 inspection Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000593 degrading effect Effects 0.000 description 5
- 230000007774 longterm Effects 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 229910009372 YVO4 Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3507—Arrangements comprising two or more nonlinear optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
【解決手段】本発明の一態様に係る光源装置は、基本波L1を発生するレーザー光源1と、基本波L1又はその高調波を入射光として、波長変換光L2を発生する少なくとも1つの非線形光学結晶3と、入射光の光路上に配置され、当該入射光の偏光成分に対する屈折率を変化させて、波長変換光L2の出力を変化させる偏光調整手段2とを備える。偏光調整手段2は、光検出器7から電気信号出力に応じて屈折率の変化量を変化させる
【選択図】図1
Description
本発明の実施の形態1に係る光源装置の構成を、図1、2を参照して説明する。図1は、本実施の形態に係る光源装置の構成を示す図である。図2は、本実施の形態に係る光源装置において用いられる偏光調整手段の構成を示す図である。図1に示すように、光源装置は、レーザー光源1、偏光調整手段2、非線形光学結晶3、ダイクロイックミラー4a、4b、空間コヒーレンス劣化手段5、部分反射ミラー6、光検出器7、制御器8、参照用電圧発生器9を備えている。
本発明の実施の形態2に係る光源装置について図4を参照して説明する。図4は、本実施の形態に係る光源装置の構成を示す図である。図4において、図1に示す構成要素と同一の構成要素には同一の符号を付し、説明を省略する。
もちろん、先に記したように偏光子は必ずしも設ける必要はない。
2 偏光調整手段
3 非線形光学結晶
4 ダイクロイックミラー
5 空間コヒーレンス劣化手段
6 部分反射ミラー
7 光検出器
8 制御器
9 参照用電圧発生器
10 分圧回路
11 コンピュータ
12 モータ制御器
13 1/2波長板
20 偏光調整手段
21 光弾性体
22 圧電素子
23 バネ
L1 レーザー光
L2 波長変換光
L3 残存基本波光
Claims (9)
- 基本波を発生するレーザー光源と、
前記基本波又はその高調波を入射光として、波長変換光を発生する少なくとも1つの非線形光学結晶と、
前記入射光の光路上に配置され、当該入射光の偏光成分に対する屈折率を変化させて、前記波長変換光の出力を変化させる偏光調整手段と、
を備える光源装置。 - 前記波長変換光の出力を電気信号出力に変換する光出力測定器を備え、
前記偏光調整手段は、前記光出力測定器からの前記電気信号出力に応じて前記屈折率の変化量を変化させることを特徴とする請求項1に記載の光源装置。 - 前記入射光の光路上に設けられ、前記偏光調整手段に印加される電気信号が略一定となるように、前記入射光のうち前記非線形光学結晶に入射して波長変換に寄与する偏光成分を調整する位相差板をさらに備える請求項2に記載の光学装置。
- 前記波長変換光の光路上に設けられ、前記波長変換光の空間コヒーレンスを劣化させる光学手段を備える請求項1、2又は3に記載の光源装置。
- 前記光学手段は、回転駆動される光学素子、液晶空間光変調素子又は形状可変鏡を含むことを特徴とする請求項4に記載の光源装置。
- 前記偏光調整手段は、光弾性効果又は電気光学効果によって屈折率変化を生じる光学素子であることを特徴とする請求項1〜5のいずれか1項に記載の光源装置。
- 前記基本波の波長は1030〜1080nm、前記波長変換光は第4高調波発生による270nm以下の紫外光であり、
前記偏光調整手段は、前記基本波又は第2高調波に対して作用することを特徴とする請求項1〜6のいずれか1項に記載の光源装置。 - 前記基本波の波長は1030〜1080nm、前記波長変換光は前記基本波と第4高調波の和周波混合により発生する216nm以下の紫外光であり、
前記偏光調整手段は、前記基本波、第2高調波又は第4高調波に対して作用することを特徴とする請求項1〜6のいずれか1項に記載の光源装置。 - 前記レーザー光源は、縦マルチモードの基本波を発生することを特徴とする請求項1〜8のいずれか1項に記載の光源装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009189912A JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
US12/858,848 US8305681B2 (en) | 2009-08-19 | 2010-08-18 | Light source apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009189912A JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011043548A true JP2011043548A (ja) | 2011-03-03 |
JP4654424B2 JP4654424B2 (ja) | 2011-03-23 |
Family
ID=43831043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009189912A Active JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8305681B2 (ja) |
JP (1) | JP4654424B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023145524A1 (ja) * | 2022-01-28 | 2023-08-03 | 浜松ホトニクス株式会社 | 光学装置及び光生成方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007002821A1 (de) * | 2007-01-19 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Anordnung zur Frequenzkonvertierung kohärenter optischer Strahlung |
WO2012128354A1 (ja) * | 2011-03-24 | 2012-09-27 | 株式会社ニコン | 紫外レーザ装置 |
US9614280B2 (en) * | 2013-05-30 | 2017-04-04 | Phase Sensitive Innovations, Inc. | Optical feed network for phased array antennas |
US9851616B2 (en) * | 2013-06-26 | 2017-12-26 | Texas Instruments Incorporated | Non-moving optical beam steering using non-pixelated liquid crystal optical phased arrays |
US9293882B2 (en) | 2013-09-10 | 2016-03-22 | Kla-Tencor Corporation | Low noise, high stability, deep ultra-violet, continuous wave laser |
US10107762B2 (en) | 2015-01-30 | 2018-10-23 | Hitachi High-Technologies Corporation | Examination device |
US9696568B2 (en) | 2015-05-13 | 2017-07-04 | Lasertec Corporation | Light source apparatus and inspection apparatus |
US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
CN111727369B (zh) | 2018-02-28 | 2022-12-20 | 株式会社日立高新技术 | 检查装置及其检查方法 |
CN111142268B (zh) * | 2018-11-05 | 2022-09-16 | 青岛海信激光显示股份有限公司 | 一种消散斑装置、激光光源及激光投影设备 |
DE102020202317A1 (de) * | 2019-03-28 | 2020-10-01 | Advantest Corporation | Vorrichtung zur messung photoakustischer wellen |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07142802A (ja) * | 1993-11-15 | 1995-06-02 | Nec Corp | 外部高調波発生レーザ発振器 |
JPH09243964A (ja) * | 1996-03-14 | 1997-09-19 | Sony Corp | 露光照明装置 |
JP2003046173A (ja) * | 2001-07-30 | 2003-02-14 | Matsushita Electric Ind Co Ltd | レーザ装置、波長変換素子、レーザ発振器、波長変換装置およびレーザ加工方法 |
JP2006269455A (ja) * | 2005-03-22 | 2006-10-05 | Advanced Mask Inspection Technology Kk | レーザー装置及び和周波発生方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5144630A (en) * | 1991-07-29 | 1992-09-01 | Jtt International, Inc. | Multiwavelength solid state laser using frequency conversion techniques |
JPH09232665A (ja) | 1996-02-22 | 1997-09-05 | Hitachi Metals Ltd | 出力安定化第二高調波光源 |
US5742626A (en) * | 1996-08-14 | 1998-04-21 | Aculight Corporation | Ultraviolet solid state laser, method of using same and laser surgery apparatus |
JPH1070333A (ja) | 1996-08-27 | 1998-03-10 | Shimadzu Corp | 波長変換固体レーザ装置 |
JP3627208B2 (ja) | 1998-11-24 | 2005-03-09 | Hoya Candeo Optronics株式会社 | レーザ装置、レーザカッタ、及びレーザ波長変換方法 |
JP2002267825A (ja) * | 2001-03-09 | 2002-09-18 | Sony Corp | 回折型レンズ素子及びこれを用いた照明装置 |
US6785040B2 (en) * | 2001-08-17 | 2004-08-31 | Bae Systems Information And Electronic Systems Integration Inc. | Spectral modulation in an optical wavelength converter |
DE102007002821A1 (de) * | 2007-01-19 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Anordnung zur Frequenzkonvertierung kohärenter optischer Strahlung |
-
2009
- 2009-08-19 JP JP2009189912A patent/JP4654424B2/ja active Active
-
2010
- 2010-08-18 US US12/858,848 patent/US8305681B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07142802A (ja) * | 1993-11-15 | 1995-06-02 | Nec Corp | 外部高調波発生レーザ発振器 |
JPH09243964A (ja) * | 1996-03-14 | 1997-09-19 | Sony Corp | 露光照明装置 |
JP2003046173A (ja) * | 2001-07-30 | 2003-02-14 | Matsushita Electric Ind Co Ltd | レーザ装置、波長変換素子、レーザ発振器、波長変換装置およびレーザ加工方法 |
JP2006269455A (ja) * | 2005-03-22 | 2006-10-05 | Advanced Mask Inspection Technology Kk | レーザー装置及び和周波発生方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023145524A1 (ja) * | 2022-01-28 | 2023-08-03 | 浜松ホトニクス株式会社 | 光学装置及び光生成方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4654424B2 (ja) | 2011-03-23 |
US8305681B2 (en) | 2012-11-06 |
US20110220815A1 (en) | 2011-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4654424B2 (ja) | 光源装置 | |
JP5649548B2 (ja) | サブ213nm波長を生成するためのCLBOにおける非臨界位相整合 | |
JP4565207B1 (ja) | 波長変換装置及び波長変換方法並びに半導体装置の製造方法 | |
JP2010054547A (ja) | 紫外レーザ装置 | |
WO2010004749A1 (ja) | 波長変換レーザ光源、これを備えたプロジェクションディスプレイ装置、液晶ディスプレイ装置及びレーザ光源 | |
JP7451656B2 (ja) | レーザビームの方法及びシステム | |
US10505336B2 (en) | Laser adjustment method and laser source device | |
US20210226411A1 (en) | Laser system and electronic device manufacturing method | |
JP3939928B2 (ja) | 波長変換装置 | |
US10534205B2 (en) | Apparatus and method for generating electromagnetic radiation | |
JP2017510081A (ja) | 垂直入射取付けの多結晶tm:ii−vi材料を有する中赤外線カーレンズモードロックレーザー及び、多結晶tm:ii−viカーレンズモードロックレーザーのパラメータを制御するための方法 | |
JPH0527287A (ja) | 光波長変換装置 | |
KR102528248B1 (ko) | 파장 변환 레이저 장치 및 파장 변환 레이저 가공기 | |
JP5359461B2 (ja) | レーザ装置、光源装置、これらの調整方法、光照射装置、露光装置、並びにデバイス製造方法 | |
KR100809271B1 (ko) | 파장가변 레이저 장치 | |
US6836592B2 (en) | Method and apparatus for fiber Bragg grating production | |
EP3176887A1 (en) | Efficient frequency conversion of multimode lasers using coordinated resonators | |
JP2006343786A (ja) | 波長変換装置 | |
JP5213368B2 (ja) | レーザ光第2高調波発生装置 | |
JP2011249400A (ja) | レーザ光源の調整システム、及びレーザ光源の調整方法 | |
JP2007515765A (ja) | レーザ共振器および周波数変換型のレーザ | |
US20110026102A1 (en) | MOPA Seed Source With Wavelength Control For Resonant Frequency Conversion | |
JP4600129B2 (ja) | 固体レーザ装置 | |
KR101747906B1 (ko) | 레이저 시스템 | |
JP2000252570A (ja) | 波長変換固体レーザ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20101201 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140107 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4654424 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |