JP2010522092A - 研磨物品、回転往復ツール及び方法 - Google Patents
研磨物品、回転往復ツール及び方法 Download PDFInfo
- Publication number
- JP2010522092A JP2010522092A JP2009554730A JP2009554730A JP2010522092A JP 2010522092 A JP2010522092 A JP 2010522092A JP 2009554730 A JP2009554730 A JP 2009554730A JP 2009554730 A JP2009554730 A JP 2009554730A JP 2010522092 A JP2010522092 A JP 2010522092A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- polishing
- article
- support layer
- compressible member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 98
- 238000005498 polishing Methods 0.000 claims abstract description 181
- 238000007517 polishing process Methods 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 68
- 239000002131 composite material Substances 0.000 claims description 37
- 239000011230 binding agent Substances 0.000 claims description 23
- 239000000853 adhesive Substances 0.000 claims description 19
- 230000001070 adhesive effect Effects 0.000 claims description 19
- 229920006254 polymer film Polymers 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 65
- 239000006260 foam Substances 0.000 description 44
- 238000012360 testing method Methods 0.000 description 40
- 239000002002 slurry Substances 0.000 description 36
- 239000000463 material Substances 0.000 description 35
- 230000008569 process Effects 0.000 description 29
- 230000000052 comparative effect Effects 0.000 description 16
- -1 etc.) Polymers 0.000 description 16
- 239000000499 gel Substances 0.000 description 14
- 239000002243 precursor Substances 0.000 description 13
- 230000008439 repair process Effects 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000013329 compounding Methods 0.000 description 10
- 230000009977 dual effect Effects 0.000 description 10
- 229920002554 vinyl polymer Polymers 0.000 description 10
- 229920001971 elastomer Polymers 0.000 description 8
- 229920005830 Polyurethane Foam Polymers 0.000 description 7
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- 239000011496 polyurethane foam Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000003973 paint Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 239000012952 cationic photoinitiator Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 239000000806 elastomer Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 238000006748 scratching Methods 0.000 description 5
- 230000002393 scratching effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000004831 Hot glue Substances 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 230000007717 exclusion Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229920000058 polyacrylate Polymers 0.000 description 3
- 229920006267 polyester film Polymers 0.000 description 3
- 229920002635 polyurethane Polymers 0.000 description 3
- 239000004814 polyurethane Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000005060 rubber Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000002023 wood Substances 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- 229920001807 Urea-formaldehyde Polymers 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229920000180 alkyd Polymers 0.000 description 2
- 229920003180 amino resin Polymers 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- FACXGONDLDSNOE-UHFFFAOYSA-N buta-1,3-diene;styrene Chemical compound C=CC=C.C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 FACXGONDLDSNOE-UHFFFAOYSA-N 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 229910001651 emery Inorganic materials 0.000 description 2
- 229920005570 flexible polymer Polymers 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 229910052752 metalloid Inorganic materials 0.000 description 2
- 150000002738 metalloids Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 235000019462 natural additive Nutrition 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001084 poly(chloroprene) Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 210000003660 reticulum Anatomy 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 229920000468 styrene butadiene styrene block copolymer Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000001993 wax Substances 0.000 description 2
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- RZVINYQDSSQUKO-UHFFFAOYSA-N 2-phenoxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC1=CC=CC=C1 RZVINYQDSSQUKO-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- DXPPIEDUBFUSEZ-UHFFFAOYSA-N 6-methylheptyl prop-2-enoate Chemical compound CC(C)CCCCCOC(=O)C=C DXPPIEDUBFUSEZ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 206010034962 Photopsia Diseases 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 229920003182 Surlyn® Polymers 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 229920006266 Vinyl film Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000370 acceptor Substances 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001266 acyl halides Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000011045 chalcedony Substances 0.000 description 1
- 239000002666 chemical blowing agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910001610 cryolite Inorganic materials 0.000 description 1
- 239000004643 cyanate ester Substances 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 239000010433 feldspar Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 229920001821 foam rubber Polymers 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 150000007857 hydrazones Chemical class 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229920000554 ionomer Polymers 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- HGPXWXLYXNVULB-UHFFFAOYSA-M lithium stearate Chemical compound [Li+].CCCCCCCCCCCCCCCCCC([O-])=O HGPXWXLYXNVULB-UHFFFAOYSA-M 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 150000002832 nitroso derivatives Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229910000065 phosphene Inorganic materials 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001485 poly(butyl acrylate) polymer Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002743 polystyrene-poly(ethylene-ethylene/propylene) block-polystyrene Polymers 0.000 description 1
- 229920003225 polyurethane elastomer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000008262 pumice Substances 0.000 description 1
- WVIICGIFSIBFOG-UHFFFAOYSA-N pyrylium Chemical class C1=CC=[O+]C=C1 WVIICGIFSIBFOG-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011044 quartzite Substances 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 239000002990 reinforced plastic Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000009823 thermal lamination Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B23/00—Portable grinding machines, e.g. hand-guided; Accessories therefor
- B24B23/04—Portable grinding machines, e.g. hand-guided; Accessories therefor with oscillating grinding tools; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
- B24D9/08—Circular back-plates for carrying flexible material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
本発明との関連で用いられるベースプレートは好ましくは、その上の研磨物品の残部を支えるプラットフォームを提供する。ベースプレートも、本明細書に記載されているような駆動ツールのシャフトと連結できる構造体を備えるのが好ましい場合があるが、その連結構造体は、ベースプレートとは別に提供することができる。
本発明との関連で用いられる任意の圧縮性部材は好ましくは、本発明との関連で用いられる研磨物品の研磨表面の中心部分を支持する。圧縮性部材の弾性圧縮性は、ベースプレートの縁部において研磨表面によって加えられる力の集中を抑えると理論づけられる。弾性圧縮性に加えて、圧縮性部材は、駆動ツールの駆動シャフトの回転方向の変化に応じてねじれることができるように、システムに多少のねじれ可撓性も提供できるのが好ましい場合もある。
本明細書に記載されているように、任意の支持層は好ましくは、使用中に研磨部材に支持力を供給する可撓性弾性層である。支持層は、本発明の研磨物品において、圧縮性部材と研磨部材との間に位置するのが好ましい場合がある。支持層は、任意の好適な技法又は技法の組み合わせ(例えば、ホットメルト接着剤、感圧性接着剤、硬化性接着剤、膠剤、熱ラミネート、化学溶接、共押し出し、インサート成形など)によって、圧縮性部材に取り付けてよい。
本発明の研磨物品内で用いられる研磨部材は、被加工物を研磨する目的で用いられる研磨表面を提供する。研磨部材は、可撓性裏材に任意で貼り付けられる研磨層(即ち、コーティングされた研磨物品)を含むのが好ましい場合がある。研磨部材の任意の可撓性裏材は、伸縮性であっても非伸縮性であってもよい。
以下の説明では、本発明の研磨物品、ツール及び方法、並びに、比較対象の研磨物品、ツール及び方法の代表的な使用法を示す。
実施例C及び実施例5〜8の各々の最後に、以下の尺度に従って、試験パネルの仕上げを目で評定した。
Claims (34)
- 被加工物の表面を研磨する方法であって、
付着した研磨粒子を含む研磨表面を備える、駆動ツールのシャフトの上に装着された研磨物品を提供する工程と、
前記被加工物の表面を、前記研磨物品の研磨表面と接触させる工程と、
前記駆動ツールのシャフトを回転往復させることによって、前記回転軸を中心に前記研磨物品の研磨表面を回転往復させる工程と、を含み、前記回転軸を中心に前記研磨物品の研磨表面を回転往復させながら、前記研磨物品の研磨表面に付着した前記研磨粒子によって、前記被加工物の表面を研磨する方法。 - 前記研磨表面を回転往復させる前記工程が、1Hz以上の振動数で前記研磨物品を往復させることを含む、請求項1に記載の方法。
- 前記研磨物品が、約500平方ミリメートル(mm2)以下の面積を有する研磨表面を含む、請求項1に記載の方法。
- 前記研磨表面を回転往復させる前記工程が、約360度未満の弧にわたって、前記研磨表面を往復させることを含む、請求項1に記載の方法。
- 前記研磨表面を回転往復させる前記工程が、約90度以下の弧にわたって、前記研磨表面を往復させることを含む、請求項1に記載の方法。
- 前記研磨物品の前記研磨表面が、平らな研磨表面を含む、請求項1に記載の方法。
- 前記研磨物品の研磨表面が、前記回転軸と垂直に配向される平らな研磨表面を含む、請求項1に記載の方法。
- 前記研磨表面の前記研磨粒子が、バインダー内に分散される、請求項1に記載の方法。
- 前記研磨表面が、前記研磨粒子を含む複数の構造化複合体を含む、請求項1に記載の方法。
- 前記研磨物品が、前記シャフトと前記研磨表面との間に位置する圧縮性部材を備えて前記圧縮性部材に取り付けられる、請求項1に記載の方法。
- 前記研磨物品が、前記シャフトの遠位端に取り付けられた剛性ベースプレートを備え、前記圧縮性部材が前記剛性ベースプレートに取り付けられる、請求項10に記載の方法。
- 前記研磨物品が、前記シャフトの遠位端に取り付けられたスリーブ連結具を備え、前記スリーブ連結具が前記剛性ベースプレートを前記シャフトに取り付ける、請求項11に記載の方法。
- 前記研磨物品が、
前記シャフトに取り付けられる、装着表面を含むベースプレートと、
前記ベースプレートの前記装着表面に取り付けられた弾性圧縮性部材であって、前記圧縮性部材が、前記ベースプレートの前記装着表面に面する第1の主表面と、前記装着表面から離れる方向を向く第2の主表面とを含み、前記圧縮性部材の前記第1の主表面及び前記第2の主表面がそれぞれ、前記ベースプレートの前記装着表面と同程度の大きさであるか又はこれよりも大きい弾性圧縮性部材と、
前記圧縮性部材に取り付けられた可撓性支持層であって、前記支持層が、前記圧縮性部材に面する第1の主表面と、前記圧縮性部材から離れる方向を向く第2の主表面とを含み、前記支持層の前記第1の主表面及び前記第2の主表面がそれぞれ、前記圧縮性部材の前記第2の主表面よりも大きい可撓性支持層と、
前記研磨表面を含む研磨部材であって、前記研磨表面が、前記圧縮性部材及び前記ベースプレートから離れる方向を向くように、前記研磨部材が、前記支持層の前記第2の主表面に取り付けられ、前記研磨表面が、前記支持層の前記第2の主表面と同一の広がりを有する平らな研磨表面を含む研磨部材と、を備える、請求項1に記載の方法。 - 前記研磨表面を形成して前記支持層に取り付けられた主表面を含む裏材に取り付けられた研磨層を前記研磨部材が含み、前記研磨表面が前記圧縮性部材から離れる方向を向く、請求項13に記載の方法。
- 装着表面を含むベースプレートと、
前記圧縮性部材が、前記装着表面に面する第1の主表面と、前記装着表面から離れる方向を向く第2の主表面とを含み、前記圧縮性部材の前記第1の主表面及び前記第2の主表面がそれぞれ、前記ベースプレートの前記装着表面と同程度の大きさであるか又はこれよりも大きく、前記ベースプレートの前記装着表面に取り付けられた弾性圧縮性部材と、
前記圧縮性部材に取り付けられた可撓性支持層であって、前記支持層が、前記圧縮性部材に面する第1の主表面と、前記圧縮性部材から離れる方向を向く第2の主表面とを含み、前記支持層の前記第1の主表面及び前記第2の主表面がそれぞれ、前記圧縮性部材の前記第2の主表面よりも大きい可撓性支持層と、
前記研磨表面が、前記支持層の前記第2の主表面と同一の広がりを有する平らな研磨表面を有し、前記研磨物品の研磨表面が、前記圧縮性部材及び前記ベースプレートから離れる方向を向くように、前記支持層の前記第2の主表面に取り付けられた研磨部材と、
を備える適合性研磨物品。 - 前記研磨表面を形成して前記支持層に取り付けられた主表面を含む裏材に取り付けられた研磨層を前記研磨部材が含み、前記研磨表面が前記圧縮性部材から離れる方向を向く、請求項15に記載の物品。
- 前記研磨部材及び前記支持層が、前記支持層の前記第2の主表面にわたって、相互に同一な広がりを有する、請求項16に記載の物品。
- 前記裏材がポリマーフィルムを含む、請求項16に記載の物品。
- 前記支持層が前記裏材に、接着する形で取り付けられる、請求項16に記載の物品。
- 前記支持層が圧縮支持層を含む、請求項15に記載の物品。
- 前記ベースプレートの前記装着表面が平らであり、前記圧縮性部材及び前記可撓性裏材が、平らな主表面を有する円盤形の物品を備える、請求項15に記載の物品。
- 前記支持層及び前記研磨部材の前記主表面が、前記圧縮性部材の主表面よりも大きく、前記圧縮性部材が、前記支持層の前記主表面の中心近くで前記支持層に取り付けられる、請求項21に記載の物品。
- 前記研磨表面が、約500平方ミリメートル以下の面積を有する、請求項15に記載の物品。
- 前記研磨表面が、約300平方ミリメートル以下の面積を有する、請求項15に記載の物品。
- 前記研磨表面が、約150平方ミリメートル以下の面積を有する、請求項15に記載の物品。
- 前記研磨表面が、約JIS1000〜約JIS2000の研磨等級を有する、請求項15に記載の物品。
- 前記研磨表面が、バインダー内に分散された研磨粒子を含む、請求項15に記載の物品。
- 前記研磨表面が、複数の構造化研磨複合体を含む、請求項15に記載の物品。
- 前記ベースプレートが、前記研磨表面から離れる方向に延びているスリーブ連結具を備え、前記スリーブ連結具が、前記研磨物品を、前記ベースプレートの装着表面によって画定される平面と直角を成す方向に配向されたシャフトに取り付けるように適合された、請求項15に記載の物品。
- 回転軸を中心に回転往復するように適合された出力シャフトを備える動力装置と、
研磨粒子を含む研磨表面を含んだ研磨物品が前記出力シャフトに取り付けられ、前記出力シャフトの回転往復によって、前記回転軸を中心に前記研磨物品を回転往復させる研磨物品と、
を備える研磨ツール。 - 前記出力シャフトが、1Hz以上の振動数で回転往復する、請求項30に記載のツール。
- 前記研磨物品が、スリーブ連結具によって前記出力シャフトに取り付けられる、請求項30に記載のツール。
- 前記出力シャフトが、360度未満の弧にわたって、回転軸を中心に回転往復する、請求項30に記載のツール。
- 前記出力シャフトが、90度以下の弧にわたって、回転軸を中心に回転往復する、請求項30に記載のツール。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/689,250 US20080233845A1 (en) | 2007-03-21 | 2007-03-21 | Abrasive articles, rotationally reciprocating tools, and methods |
US11/689,250 | 2007-03-21 | ||
PCT/US2008/057610 WO2008116043A2 (en) | 2007-03-21 | 2008-03-20 | Abrasive articles, rotationally reciprocating tools, and methods |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010522092A true JP2010522092A (ja) | 2010-07-01 |
JP2010522092A5 JP2010522092A5 (ja) | 2011-04-21 |
JP5427613B2 JP5427613B2 (ja) | 2014-02-26 |
Family
ID=39561746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009554730A Expired - Fee Related JP5427613B2 (ja) | 2007-03-21 | 2008-03-20 | 研磨物品、回転往復ツール及び方法 |
Country Status (11)
Country | Link |
---|---|
US (2) | US20080233845A1 (ja) |
EP (1) | EP2134509A2 (ja) |
JP (1) | JP5427613B2 (ja) |
KR (2) | KR101580335B1 (ja) |
CN (1) | CN101641183B (ja) |
AU (1) | AU2008228852B2 (ja) |
BR (1) | BRPI0809240A2 (ja) |
CA (1) | CA2681520C (ja) |
MX (1) | MX2009010035A (ja) |
RU (1) | RU2471606C2 (ja) |
WO (1) | WO2008116043A2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014016941A1 (ja) * | 2012-07-26 | 2014-01-30 | 岩本宏憲 | Pc製ライトカバーのリペア方法 |
JP2014528845A (ja) * | 2011-09-12 | 2014-10-30 | スリーエム イノベイティブ プロパティズ カンパニー | ビニル組成物タイルを改修する方法 |
JP2015524358A (ja) * | 2012-08-02 | 2015-08-24 | スリーエム イノベイティブ プロパティズ カンパニー | 精密に成形された構造部を有する研磨物品及びその作製方法 |
JP2019535538A (ja) * | 2016-11-29 | 2019-12-12 | コンチネンタル ストラクチュラル プラスティックス, インコーポレイテッド | 車両コンポーネント表面の自動研磨のための方法 |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100022174A1 (en) * | 2008-07-28 | 2010-01-28 | Kinik Company | Grinding tool and method for fabricating the same |
USD610430S1 (en) | 2009-06-18 | 2010-02-23 | 3M Innovative Properties Company | Stem for a power tool attachment |
US20110226268A1 (en) * | 2010-03-21 | 2011-09-22 | Michael Arthur Filonczuk | Machine for Sanding, Buffing and Polishing Fingernails and Toenails |
RU2527727C1 (ru) * | 2010-11-18 | 2014-09-10 | 3М Инновейтив Пропертиз Компани | Способы нанесения изображения на поверхность и устройства для их применения |
CN103370175B (zh) * | 2011-01-22 | 2016-12-07 | 鲁德·新特佳两合有限公司 | 研磨体 |
EP2797715A4 (en) | 2011-12-30 | 2016-04-20 | Saint Gobain Ceramics | SHAPED ABRASIVE PARTICLE AND METHOD OF FORMING THE SAME |
WO2013106597A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes and methods of forming same |
WO2013177446A1 (en) | 2012-05-23 | 2013-11-28 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
US9956664B2 (en) | 2012-08-02 | 2018-05-01 | 3M Innovative Properties Company | Abrasive element precursor with precisely shaped features and methods of making thereof |
CN203092275U (zh) * | 2012-12-19 | 2013-07-31 | 富鼎电子科技(嘉善)有限公司 | 打磨机构 |
PL2978566T3 (pl) | 2013-03-29 | 2024-07-15 | Saint-Gobain Abrasives, Inc. | Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek |
US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
WO2015160854A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
BR112016006779A2 (pt) * | 2014-05-01 | 2017-08-01 | 3M Innovative Properties Co | artigos abrasivos flexíveis e método de abrasão de uma peça de trabalho |
JP6611414B2 (ja) | 2014-05-27 | 2019-11-27 | スリーエム イノベイティブ プロパティズ カンパニー | 塗装表面の仕上げ方法及び研磨材料 |
US10150204B2 (en) | 2014-06-04 | 2018-12-11 | Paolo Baratti | Abrasive tool for machining surfaces |
CN104176015A (zh) * | 2014-08-29 | 2014-12-03 | 孙金福 | 一种汽车用橡胶盘 |
CN104385118A (zh) * | 2014-09-17 | 2015-03-04 | 浙江舜宇光学有限公司 | 一种金刚石丸片及其应用方法、研磨工具 |
JP2016087770A (ja) * | 2014-11-11 | 2016-05-23 | 株式会社東芝 | 研磨布および研磨方法 |
CN104526583B (zh) * | 2014-12-15 | 2017-06-16 | 郑州磨料磨具磨削研究所有限公司 | 一种氧化铝陶瓷焊针磨削用树脂结合剂超硬磨料砂轮 |
US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
US9901959B2 (en) * | 2015-01-28 | 2018-02-27 | John T. Kucala | System and tools for removing strongly adhered foreign matter from a work surface |
US10124463B2 (en) * | 2015-02-03 | 2018-11-13 | Johnny Blox, Llc | Sanding pad |
TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
US10687613B2 (en) * | 2015-05-07 | 2020-06-23 | Craig R. Smith | Rotary cleaning tool for commode surfaces |
CA2988012C (en) | 2015-06-11 | 2021-06-29 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
AU2016297794B2 (en) * | 2015-07-24 | 2020-12-03 | David M. Lewis | Thread repair tools and methods of making and using the same |
DE102015216615A1 (de) * | 2015-08-31 | 2017-03-02 | Robert Bosch Gmbh | Schleifteller für ein handgeführtes Elektrowerkzeug, sowie Elektrowerkzeugsystem |
EP4071224A3 (en) | 2016-05-10 | 2023-01-04 | Saint-Gobain Ceramics and Plastics, Inc. | Methods of forming abrasive articles |
EP3455320A4 (en) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | GRINDING PARTICLES AND METHOD FOR FORMING THEREOF |
KR102578503B1 (ko) * | 2016-09-12 | 2023-09-14 | 삼성디스플레이 주식회사 | 연마 장치 |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
DE102018103033A1 (de) * | 2018-02-12 | 2019-08-14 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Schleifvorrichtung |
USD864690S1 (en) * | 2018-04-04 | 2019-10-29 | Charles Curtis Byrum, III | Attachment for rotary tool |
RU2727401C1 (ru) * | 2019-11-11 | 2020-07-21 | Акционерное общество "Авиаавтоматика"имени В.В. Тарасова" | Полимерный теплопроводящий высокоэластичный композиционный материал |
CN110900368B (zh) * | 2019-11-27 | 2021-02-05 | 无锡职业技术学院 | 一种医用口腔磨削装置 |
EP4081369A4 (en) | 2019-12-27 | 2024-04-10 | Saint-Gobain Ceramics & Plastics Inc. | GRINDING ARTICLES AND METHODS OF FORMING SAME |
USD1010415S1 (en) * | 2021-10-27 | 2024-01-09 | Mirka Ltd | Backing pad for sander |
JP7107512B1 (ja) * | 2021-11-17 | 2022-07-27 | 株式会社ジーベックテクノロジー | 軸付き砥石および研磨工具 |
USD1029602S1 (en) * | 2022-01-04 | 2024-06-04 | Noritake Co., Limited | Polishing pad dresser |
US20230286100A1 (en) * | 2022-03-09 | 2023-09-14 | Glenn Welch | Stump Grinder Tooth Sharpening Tool and System |
USD1022649S1 (en) * | 2022-06-16 | 2024-04-16 | Hercutech Inc. | Vibrator attachment for power tool |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016359A (ja) * | 1984-06-06 | 1985-01-28 | Nobuhiko Yasui | 研磨装置 |
JPH07642U (ja) * | 1993-06-04 | 1995-01-06 | 日立工機株式会社 | 回転式研削工具 |
JPH0839400A (ja) * | 1985-11-15 | 1996-02-13 | Fein Verwaltung Gmbh | 可搬式研削盤 |
JP2004050355A (ja) * | 2002-07-19 | 2004-02-19 | Niyuurejisuton Kk | 積層型回転研磨具及びその使用方法 |
JP2005118917A (ja) * | 2003-10-14 | 2005-05-12 | Makoto Ueno | 研磨装置 |
US20050208210A1 (en) * | 2004-03-18 | 2005-09-22 | Kuta Terry M | Headlight lens resurfacing apparatus and method |
JP2006055978A (ja) * | 2004-08-24 | 2006-03-02 | Ichiro Komatsubara | サンダのパット |
JP2006341337A (ja) * | 2005-06-08 | 2006-12-21 | Kunio Yamazaki | 車体塗膜研磨方法およびバフ |
JP2007038371A (ja) * | 2005-08-05 | 2007-02-15 | Tsubasa System Co Ltd | 研磨用バフ及び研磨方法 |
Family Cites Families (98)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2350098A (en) * | 1941-12-31 | 1944-05-30 | Black & Decker Mfg Co | Oscillating sander |
US2794303A (en) * | 1955-06-16 | 1957-06-04 | David R Wickes | Power-driven hand tool |
US2958166A (en) * | 1958-07-30 | 1960-11-01 | Claude J Foland | Attachment for a rotary tool |
US3041156A (en) * | 1959-07-22 | 1962-06-26 | Norton Co | Phenolic resin bonded grinding wheels |
US3082582A (en) * | 1960-07-21 | 1963-03-26 | Formax Mfg Corp | Sanding pad assembly |
US3270467A (en) * | 1963-07-01 | 1966-09-06 | Merit Products Inc | Abrasive device |
US3395417A (en) * | 1966-04-05 | 1968-08-06 | Formax Mfg Corp | Backup pad assembly |
US3418675A (en) * | 1967-10-17 | 1968-12-31 | Mirror Bright Polish Co | Buffing wheel |
US3667170A (en) * | 1969-03-11 | 1972-06-06 | Norton Co | Finishing article and support member therefor |
US3562968A (en) * | 1969-03-12 | 1971-02-16 | Minnesota Mining & Mfg | Surface treating tool |
US3924362A (en) * | 1974-10-25 | 1975-12-09 | Formax Manufacturing Corp | Sanding pad assembly |
US4314827A (en) * | 1979-06-29 | 1982-02-09 | Minnesota Mining And Manufacturing Company | Non-fused aluminum oxide-based abrasive mineral |
US4588419A (en) * | 1980-10-08 | 1986-05-13 | Carborundum Abrasives Company | Resin systems for high energy electron curable resin coated webs |
US4623364A (en) * | 1984-03-23 | 1986-11-18 | Norton Company | Abrasive material and method for preparing the same |
CA1266568A (en) * | 1984-05-09 | 1990-03-13 | Minnesota Mining And Manufacturing Company | Coated abrasive product incorporating selective mineral substitution |
CA1266569A (en) * | 1984-05-09 | 1990-03-13 | Minnesota Mining And Manufacturing Company | Coated abrasive product incorporating selective mineral substitution |
CA1254238A (en) * | 1985-04-30 | 1989-05-16 | Alvin P. Gerk | Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products |
US5123216A (en) * | 1985-11-15 | 1992-06-23 | C. & E. Fein Gmbh & Co. | Portable grinder |
US4770671A (en) * | 1985-12-30 | 1988-09-13 | Minnesota Mining And Manufacturing Company | Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith |
US4751138A (en) * | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
US4881951A (en) * | 1987-05-27 | 1989-11-21 | Minnesota Mining And Manufacturing Co. | Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith |
US4950696A (en) | 1987-08-28 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Energy-induced dual curable compositions |
US4952612A (en) | 1987-08-28 | 1990-08-28 | Minnesota Mining And Manufacturing Company | Energy-induced curable compositions |
US4854085A (en) * | 1987-09-24 | 1989-08-08 | Dynabrade, Inc. | Random orbital sander |
US4985340A (en) * | 1988-06-01 | 1991-01-15 | Minnesota Mining And Manufacturing Company | Energy curable compositions: two component curing agents |
CH675250A5 (ja) * | 1988-06-17 | 1990-09-14 | Lonza Ag | |
GB2220845B (en) * | 1988-07-14 | 1992-08-05 | Si Hoe Kok Soon | Electric toothbrush |
US4927431A (en) * | 1988-09-08 | 1990-05-22 | Minnesota Mining And Manufacturing Company | Binder for coated abrasives |
US5011508A (en) * | 1988-10-14 | 1991-04-30 | Minnesota Mining And Manufacturing Company | Shelling-resistant abrasive grain, a method of making the same, and abrasive products |
US4962562A (en) * | 1989-01-18 | 1990-10-16 | Minnesota Mining And Manufacturing Company | Compounding, glazing or polishing pad |
US5396737B1 (en) * | 1989-01-18 | 1997-12-23 | Minnesota Mining & Mfg | Compound glazing or polishing pad |
CN1015968B (zh) * | 1989-02-11 | 1992-03-25 | 株式会社日进制作所 | 使用研磨带的超精研磨机 |
YU32490A (en) * | 1989-03-13 | 1991-10-31 | Lonza Ag | Hydrophobic layered grinding particles |
US5014468A (en) * | 1989-05-05 | 1991-05-14 | Norton Company | Patterned coated abrasive for fine surface finishing |
US4997461A (en) * | 1989-09-11 | 1991-03-05 | Norton Company | Nitrified bonded sol gel sintered aluminous abrasive bodies |
BR9004613A (pt) * | 1989-09-15 | 1991-09-10 | Minnesota Mining & Mfg | Artigo abrasivo revestido |
DE3937854A1 (de) * | 1989-11-14 | 1991-05-16 | Braun Ag | Elektrisch antreibbare zahnbuerste |
US5085671A (en) * | 1990-05-02 | 1992-02-04 | Minnesota Mining And Manufacturing Company | Method of coating alumina particles with refractory material, abrasive particles made by the method and abrasive products containing the same |
US5078753A (en) * | 1990-10-09 | 1992-01-07 | Minnesota Mining And Manufacturing Company | Coated abrasive containing erodable agglomerates |
US5378251A (en) * | 1991-02-06 | 1995-01-03 | Minnesota Mining And Manufacturing Company | Abrasive articles and methods of making and using same |
US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
DE4125795C1 (ja) * | 1991-08-03 | 1993-02-11 | C. & E. Fein Gmbh & Co, 7000 Stuttgart, De | |
US5316812A (en) * | 1991-12-20 | 1994-05-31 | Minnesota Mining And Manufacturing Company | Coated abrasive backing |
RU2116186C1 (ru) * | 1991-12-20 | 1998-07-27 | Миннесота Майнинг Энд Мэнюфекчуринг Компани | Лента с абразивным покрытием |
US5209022A (en) * | 1992-01-10 | 1993-05-11 | Wahl Clipper Corporation | Edge sharpening or surface abrading apparatus |
US5203884A (en) * | 1992-06-04 | 1993-04-20 | Minnesota Mining And Manufacturing Company | Abrasive article having vanadium oxide incorporated therein |
US5366523A (en) * | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
US5213591A (en) * | 1992-07-28 | 1993-05-25 | Ahmet Celikkaya | Abrasive grain, method of making same and abrasive products |
US5344688A (en) * | 1992-08-19 | 1994-09-06 | Minnesota Mining And Manufacturing Company | Coated abrasive article and a method of making same |
US5435816A (en) * | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
CA2115889A1 (en) * | 1993-03-18 | 1994-09-19 | David E. Broberg | Coated abrasive article having diluent particles and shaped abrasive particles |
US5436063A (en) * | 1993-04-15 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Coated abrasive article incorporating an energy cured hot melt make coat |
US5441549A (en) * | 1993-04-19 | 1995-08-15 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a grinding aid dispersed in a polymeric blend binder |
CA2163761A1 (en) * | 1993-05-26 | 1994-12-08 | Michael V. Mucci | Method of providing a smooth surface on a substrate |
US5549962A (en) * | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
US5637034A (en) * | 1993-08-13 | 1997-06-10 | Ryobi North America, Inc. | Detail sander |
SG64333A1 (en) * | 1993-09-13 | 1999-04-27 | Minnesota Mining & Mfg | Abrasive article method of manufacture of same method of using same for finishing and a production tool |
US5454844A (en) * | 1993-10-29 | 1995-10-03 | Minnesota Mining And Manufacturing Company | Abrasive article, a process of making same, and a method of using same to finish a workpiece surface |
US5482499A (en) * | 1993-11-18 | 1996-01-09 | Ryobi Limited | Sanding apparatus |
US5505747A (en) * | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
DE69511068T2 (de) * | 1994-02-22 | 2000-04-06 | Minnesota Mining And Mfg. Co. | Schleifartikel, verfahren zum herstellen derselben, und verfahren zum anwenden desselben bei endbearbeitung |
JPH10506579A (ja) * | 1994-09-30 | 1998-06-30 | ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー | 被覆研磨物品、その製造法及び使用方法 |
US5846123A (en) * | 1994-11-18 | 1998-12-08 | Minnesota Mining And Manufacturing Company | Compounding elements and use thereof |
JPH08309654A (ja) * | 1995-05-16 | 1996-11-26 | Ryobi Ltd | サンディング工具 |
WO1997006926A1 (en) * | 1995-08-11 | 1997-02-27 | Minnesota Mining And Manufacturing Company | Method of making a coated abrasive article having multiple abrasive natures |
US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
WO1997014535A1 (en) * | 1995-10-20 | 1997-04-24 | Minnesota Mining And Manufacturing Company | Abrasive article containing an inorganic metal orthophosphate |
WO1997020662A1 (en) * | 1995-12-04 | 1997-06-12 | Minnesota Mining And Manufacturing Company | Abrasive article back up pad with foam layer |
US5822821A (en) * | 1996-01-12 | 1998-10-20 | Pentalpha Enterprises Ltd. | Electric toothbrush |
US5994450A (en) * | 1996-07-01 | 1999-11-30 | Teksource, Lc | Gelatinous elastomer and methods of making and using the same and articles made therefrom |
US6797765B2 (en) * | 1996-02-14 | 2004-09-28 | Edizone, Lc | Gelatinous elastomer |
US5700302A (en) * | 1996-03-15 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Radiation curable abrasive article with tie coat and method |
JPH09267251A (ja) * | 1996-04-02 | 1997-10-14 | S P Air Kk | 研磨装置 |
CN1092095C (zh) * | 1996-05-08 | 2002-10-09 | 明尼苏达矿业和制造公司 | 包括抗填充成分的磨料制品 |
US5766277A (en) * | 1996-09-20 | 1998-06-16 | Minnesota Mining And Manufacturing Company | Coated abrasive article and method of making same |
US5851247A (en) * | 1997-02-24 | 1998-12-22 | Minnesota Mining & Manufacturing Company | Structured abrasive article adapted to abrade a mild steel workpiece |
US5910471A (en) * | 1997-03-07 | 1999-06-08 | Minnesota Mining And Manufacturing Company | Abrasive article for providing a clear surface finish on glass |
DE19723987A1 (de) * | 1997-06-06 | 1998-12-10 | Engelbert Gmeilbauer | Schleifwerkzeug, insbesondere für Hand-Oszillationsgeräte |
US6013711A (en) * | 1997-06-18 | 2000-01-11 | Ck Witco Corporation | Hydrophilic polysiloxane compositions |
US5942015A (en) * | 1997-09-16 | 1999-08-24 | 3M Innovative Properties Company | Abrasive slurries and abrasive articles comprising multiple abrasive particle grades |
US6142858A (en) * | 1997-11-10 | 2000-11-07 | 3M Innovative Properties Company | Backup pad for abrasive articles |
DE19809937A1 (de) * | 1998-03-07 | 1999-09-09 | Fein C & E | Schleifgerät |
US6139594A (en) * | 1998-04-13 | 2000-10-31 | 3M Innovative Properties Company | Abrasive article with tie coat and method |
US6228133B1 (en) * | 1998-05-01 | 2001-05-08 | 3M Innovative Properties Company | Abrasive articles having abrasive layer bond system derived from solid, dry-coated binder precursor particles having a fusible, radiation curable component |
US6077601A (en) * | 1998-05-01 | 2000-06-20 | 3M Innovative Properties Company | Coated abrasive article |
US6261682B1 (en) * | 1998-06-30 | 2001-07-17 | 3M Innovative Properties | Abrasive articles including an antiloading composition |
US6059850A (en) * | 1998-07-15 | 2000-05-09 | 3M Innovative Properties Company | Resilient abrasive article with hard anti-loading size coating |
RU2158852C1 (ru) * | 1999-03-12 | 2000-11-10 | Смертин Александр Спиридонович | Роликолопастная машина |
WO2001053040A1 (en) * | 2000-01-19 | 2001-07-26 | Rodel Holdings, Inc. | Printing of polishing pads |
US20030022604A1 (en) * | 2001-05-07 | 2003-01-30 | 3M Innovative Properties Company | Abrasive product and method of making and using the same |
US20020090901A1 (en) * | 2000-11-03 | 2002-07-11 | 3M Innovative Properties Company | Flexible abrasive product and method of making and using the same |
US20030207659A1 (en) * | 2000-11-03 | 2003-11-06 | 3M Innovative Properties Company | Abrasive product and method of making and using the same |
US6846232B2 (en) * | 2001-12-28 | 2005-01-25 | 3M Innovative Properties Company | Backing and abrasive product made with the backing and method of making and using the backing and abrasive product |
US6908979B2 (en) * | 2002-11-18 | 2005-06-21 | Huntsman International Llc | Polyurethane elastomer gels |
KR101018942B1 (ko) * | 2003-01-10 | 2011-03-02 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 화학 기계적 평탄화 적용을 위한 패드 구조물 |
RU2289501C2 (ru) * | 2004-04-12 | 2006-12-20 | Александр Владимирович Смирнов | Насадка шлифовальная, полировальная с дисковым рабочим органом (варианты) |
US7121924B2 (en) * | 2004-04-20 | 2006-10-17 | 3M Innovative Properties Company | Abrasive articles, and methods of making and using the same |
RU2009134876A (ru) | 2007-03-21 | 2011-04-27 | 3М Инновейтив Пропертиз Компани (3M Innovative Properties Company) (US) | Способы устранения дефектов поверхностей |
-
2007
- 2007-03-21 US US11/689,250 patent/US20080233845A1/en not_active Abandoned
-
2008
- 2008-03-20 JP JP2009554730A patent/JP5427613B2/ja not_active Expired - Fee Related
- 2008-03-20 AU AU2008228852A patent/AU2008228852B2/en not_active Ceased
- 2008-03-20 CA CA2681520A patent/CA2681520C/en not_active Expired - Fee Related
- 2008-03-20 BR BRPI0809240-0A patent/BRPI0809240A2/pt not_active IP Right Cessation
- 2008-03-20 EP EP08732540A patent/EP2134509A2/en not_active Withdrawn
- 2008-03-20 KR KR1020097020437A patent/KR101580335B1/ko active IP Right Grant
- 2008-03-20 KR KR1020157023336A patent/KR20150104219A/ko not_active Application Discontinuation
- 2008-03-20 MX MX2009010035A patent/MX2009010035A/es not_active Application Discontinuation
- 2008-03-20 CN CN200880009124.9A patent/CN101641183B/zh not_active Expired - Fee Related
- 2008-03-20 RU RU2009134879/02A patent/RU2471606C2/ru not_active IP Right Cessation
- 2008-03-20 WO PCT/US2008/057610 patent/WO2008116043A2/en active Application Filing
-
2012
- 2012-08-01 US US13/563,986 patent/US8758089B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016359A (ja) * | 1984-06-06 | 1985-01-28 | Nobuhiko Yasui | 研磨装置 |
JPH0839400A (ja) * | 1985-11-15 | 1996-02-13 | Fein Verwaltung Gmbh | 可搬式研削盤 |
JPH07642U (ja) * | 1993-06-04 | 1995-01-06 | 日立工機株式会社 | 回転式研削工具 |
JP2004050355A (ja) * | 2002-07-19 | 2004-02-19 | Niyuurejisuton Kk | 積層型回転研磨具及びその使用方法 |
JP2005118917A (ja) * | 2003-10-14 | 2005-05-12 | Makoto Ueno | 研磨装置 |
US20050208210A1 (en) * | 2004-03-18 | 2005-09-22 | Kuta Terry M | Headlight lens resurfacing apparatus and method |
JP2006055978A (ja) * | 2004-08-24 | 2006-03-02 | Ichiro Komatsubara | サンダのパット |
JP2006341337A (ja) * | 2005-06-08 | 2006-12-21 | Kunio Yamazaki | 車体塗膜研磨方法およびバフ |
JP2007038371A (ja) * | 2005-08-05 | 2007-02-15 | Tsubasa System Co Ltd | 研磨用バフ及び研磨方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014528845A (ja) * | 2011-09-12 | 2014-10-30 | スリーエム イノベイティブ プロパティズ カンパニー | ビニル組成物タイルを改修する方法 |
WO2014016941A1 (ja) * | 2012-07-26 | 2014-01-30 | 岩本宏憲 | Pc製ライトカバーのリペア方法 |
JP5908980B2 (ja) * | 2012-07-26 | 2016-04-26 | 岩本 宏憲 | Pc製ライトカバーのリペア方法 |
JP2015524358A (ja) * | 2012-08-02 | 2015-08-24 | スリーエム イノベイティブ プロパティズ カンパニー | 精密に成形された構造部を有する研磨物品及びその作製方法 |
JP2019535538A (ja) * | 2016-11-29 | 2019-12-12 | コンチネンタル ストラクチュラル プラスティックス, インコーポレイテッド | 車両コンポーネント表面の自動研磨のための方法 |
US11383344B2 (en) | 2016-11-29 | 2022-07-12 | Teijin Automotive Technologies, Inc. | Process for automated sanding of a vehicle component surface |
JP2022116208A (ja) * | 2016-11-29 | 2022-08-09 | テイジン オートモーティブ テクノロジーズ, インコーポレイテッド | 車両コンポーネント表面の自動研磨のための方法 |
JP7123915B2 (ja) | 2016-11-29 | 2022-08-23 | テイジン オートモーティブ テクノロジーズ, インコーポレイテッド | 車両コンポーネント表面の自動研磨のための方法 |
Also Published As
Publication number | Publication date |
---|---|
US20080233845A1 (en) | 2008-09-25 |
KR20090121365A (ko) | 2009-11-25 |
BRPI0809240A2 (pt) | 2014-09-09 |
US20120295525A1 (en) | 2012-11-22 |
CA2681520A1 (en) | 2008-09-25 |
RU2009134879A (ru) | 2011-04-27 |
MX2009010035A (es) | 2009-10-12 |
CN101641183A (zh) | 2010-02-03 |
EP2134509A2 (en) | 2009-12-23 |
JP5427613B2 (ja) | 2014-02-26 |
AU2008228852B2 (en) | 2011-06-30 |
AU2008228852A1 (en) | 2008-09-25 |
RU2471606C2 (ru) | 2013-01-10 |
KR101580335B1 (ko) | 2015-12-23 |
WO2008116043A3 (en) | 2008-12-11 |
WO2008116043A2 (en) | 2008-09-25 |
KR20150104219A (ko) | 2015-09-14 |
WO2008116043A8 (en) | 2009-11-26 |
US8758089B2 (en) | 2014-06-24 |
CA2681520C (en) | 2016-07-12 |
CN101641183B (zh) | 2014-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5427613B2 (ja) | 研磨物品、回転往復ツール及び方法 | |
US8057281B2 (en) | Methods of removing defects in surfaces | |
CA2623292C (en) | Conformable abrasive articles and methods of making and using the same | |
AU2011213837B2 (en) | Abrasive articles, rotationally reciprocating tools, and methods |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110228 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110228 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130117 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130122 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130419 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130426 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130522 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130529 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130624 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130701 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130719 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131105 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131202 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5427613 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |