JP2010503897A5 - - Google Patents

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Publication number
JP2010503897A5
JP2010503897A5 JP2009528463A JP2009528463A JP2010503897A5 JP 2010503897 A5 JP2010503897 A5 JP 2010503897A5 JP 2009528463 A JP2009528463 A JP 2009528463A JP 2009528463 A JP2009528463 A JP 2009528463A JP 2010503897 A5 JP2010503897 A5 JP 2010503897A5
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JP
Japan
Prior art keywords
beam splitter
beamlet
beamlets
splitter
prism member
Prior art date
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JP2009528463A
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English (en)
Japanese (ja)
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JP2010503897A (ja
JP5324448B2 (ja
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Priority claimed from US11/531,870 external-priority patent/US7551359B2/en
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Publication of JP2010503897A publication Critical patent/JP2010503897A/ja
Publication of JP2010503897A5 publication Critical patent/JP2010503897A5/ja
Application granted granted Critical
Publication of JP5324448B2 publication Critical patent/JP5324448B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009528463A 2006-09-14 2007-09-13 ビームスプリッタ機器 Expired - Fee Related JP5324448B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/531,870 2006-09-14
US11/531,870 US7551359B2 (en) 2006-09-14 2006-09-14 Beam splitter apparatus and system
PCT/US2007/078357 WO2008033977A1 (en) 2006-09-14 2007-09-13 Beam splitter apparatus and system

Publications (3)

Publication Number Publication Date
JP2010503897A JP2010503897A (ja) 2010-02-04
JP2010503897A5 true JP2010503897A5 (https=) 2010-09-30
JP5324448B2 JP5324448B2 (ja) 2013-10-23

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ID=39184133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009528463A Expired - Fee Related JP5324448B2 (ja) 2006-09-14 2007-09-13 ビームスプリッタ機器

Country Status (5)

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US (2) US7551359B2 (https=)
EP (1) EP2074469A4 (https=)
JP (1) JP5324448B2 (https=)
CN (2) CN101529309B (https=)
WO (1) WO2008033977A1 (https=)

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