JP2010226610A5 - - Google Patents

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Publication number
JP2010226610A5
JP2010226610A5 JP2009073742A JP2009073742A JP2010226610A5 JP 2010226610 A5 JP2010226610 A5 JP 2010226610A5 JP 2009073742 A JP2009073742 A JP 2009073742A JP 2009073742 A JP2009073742 A JP 2009073742A JP 2010226610 A5 JP2010226610 A5 JP 2010226610A5
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JP
Japan
Prior art keywords
bending vibration
region
vibration piece
groove
bending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009073742A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010226610A (ja
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Publication date
Application filed filed Critical
Priority to JP2009073742A priority Critical patent/JP2010226610A/ja
Priority claimed from JP2009073742A external-priority patent/JP2010226610A/ja
Publication of JP2010226610A publication Critical patent/JP2010226610A/ja
Publication of JP2010226610A5 publication Critical patent/JP2010226610A5/ja
Withdrawn legal-status Critical Current

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JP2009073742A 2009-03-25 2009-03-25 屈曲振動片およびそれを用いた発振器 Withdrawn JP2010226610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009073742A JP2010226610A (ja) 2009-03-25 2009-03-25 屈曲振動片およびそれを用いた発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009073742A JP2010226610A (ja) 2009-03-25 2009-03-25 屈曲振動片およびそれを用いた発振器

Publications (2)

Publication Number Publication Date
JP2010226610A JP2010226610A (ja) 2010-10-07
JP2010226610A5 true JP2010226610A5 (enExample) 2012-03-29

Family

ID=43043282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009073742A Withdrawn JP2010226610A (ja) 2009-03-25 2009-03-25 屈曲振動片およびそれを用いた発振器

Country Status (1)

Country Link
JP (1) JP2010226610A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP5617392B2 (ja) 2010-07-09 2014-11-05 セイコーエプソン株式会社 振動片、振動子及び発振器
JP5659585B2 (ja) 2010-07-09 2015-01-28 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
US11512958B2 (en) * 2017-09-21 2022-11-29 Sumitomo Precision Products Co., Ltd. Angular rate sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967713A (ja) * 1982-10-01 1984-04-17 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JPS6098710A (ja) * 1983-11-04 1985-06-01 Matsushita Electric Ind Co Ltd 圧電磁器濾波器
JPS61176821U (enExample) * 1984-12-10 1986-11-05
JP3915640B2 (ja) * 2002-07-02 2007-05-16 株式会社大真空 水晶ｚ板のエッチング方法及びその方法によって成形された水晶ウェハ
JP2006054221A (ja) * 2004-08-09 2006-02-23 Nitto Denko Corp 熱伝導シート
JP2006086996A (ja) * 2004-09-17 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP2007081749A (ja) * 2005-09-13 2007-03-29 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動子
JP2008113098A (ja) * 2006-10-28 2008-05-15 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片

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