JP2010226610A5 - - Google Patents
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- Publication number
- JP2010226610A5 JP2010226610A5 JP2009073742A JP2009073742A JP2010226610A5 JP 2010226610 A5 JP2010226610 A5 JP 2010226610A5 JP 2009073742 A JP2009073742 A JP 2009073742A JP 2009073742 A JP2009073742 A JP 2009073742A JP 2010226610 A5 JP2010226610 A5 JP 2010226610A5
- Authority
- JP
- Japan
- Prior art keywords
- bending vibration
- region
- vibration piece
- groove
- bending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005452 bending Methods 0.000 claims description 17
- 239000010931 gold Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073742A JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073742A JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010226610A JP2010226610A (ja) | 2010-10-07 |
| JP2010226610A5 true JP2010226610A5 (enExample) | 2012-03-29 |
Family
ID=43043282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009073742A Withdrawn JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010226610A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5499852B2 (ja) | 2010-04-08 | 2014-05-21 | セイコーエプソン株式会社 | 振動片、振動子 |
| JP5617392B2 (ja) | 2010-07-09 | 2014-11-05 | セイコーエプソン株式会社 | 振動片、振動子及び発振器 |
| JP5659585B2 (ja) | 2010-07-09 | 2015-01-28 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| JP6155897B2 (ja) | 2013-06-24 | 2017-07-05 | セイコーエプソン株式会社 | 振動片、振動子、電子デバイス、電子機器及び移動体 |
| JP6375622B2 (ja) | 2013-12-27 | 2018-08-22 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器、センサーおよび移動体 |
| JP7258760B2 (ja) * | 2017-09-21 | 2023-04-17 | 住友精密工業株式会社 | 角速度センサ |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5967713A (ja) * | 1982-10-01 | 1984-04-17 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| JPS6098710A (ja) * | 1983-11-04 | 1985-06-01 | Matsushita Electric Ind Co Ltd | 圧電磁器濾波器 |
| JPS61176821U (enExample) * | 1984-12-10 | 1986-11-05 | ||
| JP3915640B2 (ja) * | 2002-07-02 | 2007-05-16 | 株式会社大真空 | 水晶ｚ板のエッチング方法及びその方法によって成形された水晶ウェハ |
| JP2006054221A (ja) * | 2004-08-09 | 2006-02-23 | Nitto Denko Corp | 熱伝導シート |
| JP2006086996A (ja) * | 2004-09-17 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
| JP2007081749A (ja) * | 2005-09-13 | 2007-03-29 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動子 |
| JP2008113098A (ja) * | 2006-10-28 | 2008-05-15 | Nippon Dempa Kogyo Co Ltd | 音叉型圧電振動片 |
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2009
- 2009-03-25 JP JP2009073742A patent/JP2010226610A/ja not_active Withdrawn