JP2010226608A - 屈曲振動片およびそれを用いた発振器 - Google Patents

屈曲振動片およびそれを用いた発振器 Download PDF

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Publication number
JP2010226608A
JP2010226608A JP2009073738A JP2009073738A JP2010226608A JP 2010226608 A JP2010226608 A JP 2010226608A JP 2009073738 A JP2009073738 A JP 2009073738A JP 2009073738 A JP2009073738 A JP 2009073738A JP 2010226608 A JP2010226608 A JP 2010226608A
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region
vibrating
heat conduction
groove
main surface
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Japanese (ja)
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JP2010226608A5 (enrdf_load_stackoverflow
Inventor
Hiroki Kawai
宏紀 河合
Akinori Yamada
明法 山田
Makoto Furuhata
誠 古畑
裕史 ▲浜▼山
Yuji Hamayama
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Seiko Epson Corp
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JP2009073738A 2009-03-25 2009-03-25 屈曲振動片およびそれを用いた発振器 Withdrawn JP2010226608A (ja)

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JP2010226608A5 JP2010226608A5 (enrdf_load_stackoverflow) 2012-03-29

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8102103B2 (en) * 2009-10-01 2012-01-24 Seiko Epson Corporation Tuning-fork resonator with grooves on principal surfaces
US8482358B2 (en) 2010-07-09 2013-07-09 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US8760235B2 (en) 2010-07-09 2014-06-24 Seiko Epson Corporation Resonator element, resonator, and oscillator
US8816572B2 (en) 2010-04-08 2014-08-26 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
JP2015050540A (ja) * 2013-08-30 2015-03-16 京セラクリスタルデバイス株式会社 恒温槽付圧電発振器
US9354128B2 (en) 2013-12-27 2016-05-31 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
US9705472B2 (en) 2013-06-24 2017-07-11 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967713A (ja) * 1982-10-01 1984-04-17 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JPS6098710A (ja) * 1983-11-04 1985-06-01 Matsushita Electric Ind Co Ltd 圧電磁器濾波器
JPS61176821U (enrdf_load_stackoverflow) * 1984-12-10 1986-11-05
JPH02264507A (ja) * 1989-04-04 1990-10-29 Matsushita Electric Ind Co Ltd 圧電振動子装置
JP2004088706A (ja) * 2002-07-02 2004-03-18 Daishinku Corp エッチング方法及びその方法によって成形されたエッチング成形品
JP2004253579A (ja) * 2003-02-20 2004-09-09 Matsushita Electric Ind Co Ltd 半導体装置
JP2005136499A (ja) * 2003-10-28 2005-05-26 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2005151423A (ja) * 2003-11-19 2005-06-09 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2005292853A (ja) * 2001-08-08 2005-10-20 Seiko Epson Corp 光学装置、およびプロジェクタ
JP2006054221A (ja) * 2004-08-09 2006-02-23 Nitto Denko Corp 熱伝導シート
JP2006060727A (ja) * 2004-08-24 2006-03-02 River Eletec Kk 音叉型水晶振動子及びその製造方法
JP2006086996A (ja) * 2004-09-17 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP2007081749A (ja) * 2005-09-13 2007-03-29 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動子
JP2007258640A (ja) * 2006-03-27 2007-10-04 Victor Co Of Japan Ltd 半導体素子及びその製造方法
JP2007279089A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp 電気光学装置及びプロジェクタ
JP2008051999A (ja) * 2006-08-24 2008-03-06 Seiko Epson Corp 光学素子の製造方法及びプロジェクタ
JP2008113098A (ja) * 2006-10-28 2008-05-15 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片
JP2008227104A (ja) * 2007-03-12 2008-09-25 Denso Corp レーザ装置及びその製造方法
JP2009036917A (ja) * 2007-07-31 2009-02-19 Sharp Corp 液晶表示装置

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967713A (ja) * 1982-10-01 1984-04-17 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JPS6098710A (ja) * 1983-11-04 1985-06-01 Matsushita Electric Ind Co Ltd 圧電磁器濾波器
JPS61176821U (enrdf_load_stackoverflow) * 1984-12-10 1986-11-05
JPH02264507A (ja) * 1989-04-04 1990-10-29 Matsushita Electric Ind Co Ltd 圧電振動子装置
JP2005292853A (ja) * 2001-08-08 2005-10-20 Seiko Epson Corp 光学装置、およびプロジェクタ
JP2004088706A (ja) * 2002-07-02 2004-03-18 Daishinku Corp エッチング方法及びその方法によって成形されたエッチング成形品
JP2004253579A (ja) * 2003-02-20 2004-09-09 Matsushita Electric Ind Co Ltd 半導体装置
JP2005136499A (ja) * 2003-10-28 2005-05-26 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2005151423A (ja) * 2003-11-19 2005-06-09 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2006054221A (ja) * 2004-08-09 2006-02-23 Nitto Denko Corp 熱伝導シート
JP2006060727A (ja) * 2004-08-24 2006-03-02 River Eletec Kk 音叉型水晶振動子及びその製造方法
JP2006086996A (ja) * 2004-09-17 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP2007081749A (ja) * 2005-09-13 2007-03-29 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動子
JP2007258640A (ja) * 2006-03-27 2007-10-04 Victor Co Of Japan Ltd 半導体素子及びその製造方法
JP2007279089A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp 電気光学装置及びプロジェクタ
JP2008051999A (ja) * 2006-08-24 2008-03-06 Seiko Epson Corp 光学素子の製造方法及びプロジェクタ
JP2008113098A (ja) * 2006-10-28 2008-05-15 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片
JP2008227104A (ja) * 2007-03-12 2008-09-25 Denso Corp レーザ装置及びその製造方法
JP2009036917A (ja) * 2007-07-31 2009-02-19 Sharp Corp 液晶表示装置

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8288926B2 (en) 2009-10-01 2012-10-16 Seiko Epson Corporation Tuning-fork resonator having juxtaposed grooves
US8102103B2 (en) * 2009-10-01 2012-01-24 Seiko Epson Corporation Tuning-fork resonator with grooves on principal surfaces
US9252741B2 (en) 2010-04-08 2016-02-02 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US8816572B2 (en) 2010-04-08 2014-08-26 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US9257961B2 (en) 2010-04-08 2016-02-09 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US8482358B2 (en) 2010-07-09 2013-07-09 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US9325278B2 (en) 2010-07-09 2016-04-26 Seiko Epson Corporation Resonator element, resonator, and oscillator
US8760235B2 (en) 2010-07-09 2014-06-24 Seiko Epson Corporation Resonator element, resonator, and oscillator
US9166554B2 (en) 2010-07-09 2015-10-20 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US9705472B2 (en) 2013-06-24 2017-07-11 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object
US10659006B2 (en) 2013-06-24 2020-05-19 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
JP2015050540A (ja) * 2013-08-30 2015-03-16 京セラクリスタルデバイス株式会社 恒温槽付圧電発振器
US9354128B2 (en) 2013-12-27 2016-05-31 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object

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