JP2010226115A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
【解決手段】 耐熱性200℃の接続方法として、室温から200℃においてCu6Sn5相を含有するSn系はんだとNi系めっきを組合せることで界面反応を抑制させ、200℃以上の耐熱性をもつ半導体装置の提供を実現する。
【選択図】 図4
Description
200℃の耐熱温度が要求される。そのため、半導体素子の接続には例えば固相線が300℃付近の高Pbはんだ(例えば95重量%のPbと5重量%のSnを含む固相線300℃液相線314℃のPb−Sn合金)が接続に使用される。
(1)半導体素子と、半導体素子の第一の面と第一の接続材料も用いて接続される支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続材料を用いて接続されるリード電極体とを有する半導体装置であって、前記支持部材の接続部及び前記リード電極体の接続部にはNi系めっきが施されており、前記第一の接続材料及び前記第二の接続材料は共晶組成よりCu6Sn5相の含有量が多い組成のSn系はんだであることを特徴とする半導体装置。
(2)半導体素子と、半導体素子の第一の面と第一の接続材料も用いて接続される支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続材料を用いて接続されるリード電極体とを有する半導体装置であって、前記支持部材の接続部及び前記リード電極体の接続部にはNi系めっきが施されており、前記第一の接続材料及び前記第二の接続材料材は、室温から200℃においてCu6Sn5相を含有するSn系はんだであることを特徴とする半導体装置。
(3)半導体素子と、半導体素子の第一の面と第一の接続部材を介して接続された支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続部材を介して接続されたリード電極体とを有する半導体装置であって、前記支持部材と前記第一の接続部材の界面、及び、前記第一の接続部材と前記半導体素子の界面には、Ni系めっき層とCu-Sn化合物層を有し、前記リード電極体と前記第二の接続部材の界面、及び、前記第二の接続部材と前記半導体素子の界面には、Ni系めっき層とCu-Sn化合物層を有することを特徴とする半導体装置。
(4)車載用交流発電機であって、前記上記(1)乃至(3)のいずれかの半導体装置を搭載したことを特徴とする車載用交流発電機。
(5)半導体素子と、半導体素子の一側と室温から200℃においてCu6Sn5相を含有するSn系はんだを介して接続されるNi系めっきを施した支持電極体と、該支持電極体に支持された前記半導体素子の他側とを室温から200℃においてCu6Sn5相を含有するSn系はんだを介して接続されるNi系めっきを施したリード電極体を備える半導体装置において、室温から200℃においてCu6Sn5相を含有するSn系はんだによる接続工程が、220〜450℃、還元性雰囲気で行うことを特徴とする半導体装置の製造方法。
(6)半導体素子と、半導体素子の一側と接続部材およびNi系めっきを施した応力熱膨張率差緩衝材を介して接続されるNi系めっきを施した支持電極体と、該支持電極体に支持された前記半導体素子の他側とを接続部材を介して接続されるNi系めっきを施したリード電極体を備える半導体装置において、接続部材として室温から200℃においてCu6Sn5相を含有するSn系はんだを用いることを特徴とした半導体装置において、室温から200℃においてCu6Sn5相を含有するSn系はんだによる接続工程が、220〜450℃、還元性雰囲気で行うことを特徴とする半導体装置の製造方法。
(7)Pbフリーはんだ接続材料であって、共晶組成よりCu6Sn5相の含有量が多い組成のSn系はんだであることを特徴とするPbフリーはんだ接続材料。
(8)Pbフリーはんだ接続材料であって、室温から200℃においてCu6Sn5相を含有するSn系はんだであることを特徴とするPbフリーはんだ接続材料。
(9)Pbフリーはんだ接続材料であって、Cu6Sn5相を内部に有するSn系はんだであることを特徴とするPbフリーはんだ。
ついて測定した結果を以下説明する。
いる。
Claims (16)
- 半導体素子と、半導体素子の第一の面と第一の接続材料も用いて接続される支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続材料を用いて接続されるリード電極体とを有する半導体装置であって、前記支持部材の接続部及び前記リード電極体の接続部にはNi系めっきが施されており、前記第一の接続材料及び前記第二の接続材料は共晶組成よりCu6Sn5相の含有量が多い組成のSn系はんだであることを特徴とする半導体装置。
- 半導体素子と、半導体素子の第一の面と第一の接続材料も用いて接続される支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続材料を用いて接続されるリード電極体とを有する半導体装置であって、前記支持部材の接続部及び前記リード電極体の接続部にはNi系めっきが施されており、前記第一の接続材料及び前記第二の接続材料材は、室温から200℃においてCu6Sn5相を含有するSn系はんだであることを特徴とする半導体装置。
- 半導体素子と、半導体素子の第一の面と第一の接続部材を介して接続された支持電極体と、前記支持電極体に支持された前記半導体素子の第二の面と第二の接続部材を介して接続されたリード電極体とを有する半導体装置であって、
前記支持部材と前記第一の接続部材の界面、及び、前記第一の接続部材と前記半導体素子の界面には、Ni系めっき層とCu-Sn化合物層を有し、
前記リード電極体と前記第二の接続部材の界面、及び、前記第二の接続部材と前記半導体素子の界面には、Ni系めっき層とCu-Sn化合物層を有することを特徴とする半導体装置。 - 請求項1乃至3のいずれかに記載の半導体装置であって、
前記支持電極体と前記半導体素子との間に熱膨張率差緩衝材があることを特徴とする半導体装置。 - 請求項4記載の半導体装置であって、
前記熱膨張差緩衝材は、Al、 Mg、 Ag、 Zn、Cu、Niのいずれかであることを特徴とする半導体装置。 - 請求項4記載の半導体装置であって、
前記熱膨張差緩衝材は、Cu/インバー合金/Cu複合材、Cu/Cu2O複合材Cu-Mo合金、Ti、Mo、Wのいずれかであることを特徴とする半導体装置。 - 請求項1乃至6のいずれかに記載の半導体装置であって、
前記Ni系めっきは、Ni、Ni-P、Ni-B等のめっきのいずれかであることを特徴とする半導体装置。 - 請求項7に記載の半導体装置であって、
前記Ni系めっきの上に更にAu、Ag、Pdのうちの少なくとも一のめっきが施されていることを特徴とする半導体装置。 - 車載用交流発電機であって、
前記請求項1乃至8のいずれかの半導体装置を搭載したことを特徴とする車載用交流発電機。 - 基板と、前記基板と接続部材を介して接続された半導体素子とを有する半導体装置であって、
前記基板と前記接続部材との界面、前記接続部材と前記半導体素子との界面には、Ni系めっき層とCu-Sn化合物層とを有することを特徴とする半導体装置。 - 基板と、前記基板と接続材料を用いて接続された半導体素子とを有する半導体装置であって、
前記基板の接続面及び前記半導体素子の接続面にはNi系めっき層が設けられており、前記接続材料は、共晶組成よりCu6Sn5相の含有量が多い組成のSn系はんだであることを特徴とする半導体装置。 - 請求項3又は請求項10に記載の半導体装置であって、
前記Cu-Sn化合物はCu6Sn5であることを特徴とする半導体装置。 - 請求項1、2、11のいずれかに記載の半導体装置であって、
前記接続材料は、箔、ペースト、ワイヤのいずれかの形状であることを特徴とする半導体装置。 - Pbフリーはんだ接続材料であって、
共晶組成よりCu6Sn5相の含有量が多い組成のSn系はんだであることを特徴とするPbフリーはんだ接続材料。 - Pbフリーはんだ接続材料であって、
室温から200℃においてCu6Sn5相を含有するSn系はんだであることを特徴とするPbフリーはんだ接続材料。 - Pbフリーはんだ接続材料であって、
Cu6Sn5相を内部に有するSn系はんだであることを特徴とするPbフリーはんだ接続材料。
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