JP2010194629A - 切削工具用ダイヤモンド皮膜 - Google Patents
切削工具用ダイヤモンド皮膜 Download PDFInfo
- Publication number
- JP2010194629A JP2010194629A JP2009039535A JP2009039535A JP2010194629A JP 2010194629 A JP2010194629 A JP 2010194629A JP 2009039535 A JP2009039535 A JP 2009039535A JP 2009039535 A JP2009039535 A JP 2009039535A JP 2010194629 A JP2010194629 A JP 2010194629A
- Authority
- JP
- Japan
- Prior art keywords
- film
- coating layer
- cutting tool
- layer
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 67
- 239000010432 diamond Substances 0.000 title claims abstract description 67
- 239000013078 crystal Substances 0.000 claims abstract description 42
- 239000000463 material Substances 0.000 claims abstract description 41
- 239000011247 coating layer Substances 0.000 claims description 93
- 239000010410 layer Substances 0.000 claims description 49
- 239000002245 particle Substances 0.000 claims description 27
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 238000001069 Raman spectroscopy Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010030 laminating Methods 0.000 claims description 5
- 238000004611 spectroscopical analysis Methods 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 238000005299 abrasion Methods 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 9
- 229910002804 graphite Inorganic materials 0.000 description 9
- 239000010439 graphite Substances 0.000 description 9
- 239000012528 membrane Substances 0.000 description 9
- 238000001237 Raman spectrum Methods 0.000 description 4
- 238000005422 blasting Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/279—Diamond only control of diamond crystallography
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】基材上に形成される切削工具用ダイヤモンド皮膜であって、0.3μm以上3μm以下の平均結晶粒径を有する第一皮膜層と該第一皮膜層より平均結晶粒径が大きい第二皮膜層とが交互に各1層以上積層して成る多層皮膜層を少なくとも1層以上含み、前記基材直上に1μm以上10μm以下の膜厚で前記第一皮膜層が形成されている切削工具用ダイヤモンド皮膜。
【選択図】なし
Description
上記第一皮膜層と同様の構成を有する第一皮膜、上記第二皮膜層と同様の構成を有する第二皮膜、上記第三皮膜層と同様の構成を有する第三皮膜の夫々を、超硬合金母材(φ3超硬丸棒、WC粒子の平均粒径:1μm、Co含有量:6重量%)に、熱フィラメント型CVD装置を用い、母材温度を650〜750℃とし、ガス圧力が500Paとなるように、H2ガス、CH4ガス及びO2ガスを導入しながら、膜厚が7〜8μmとなるように成膜を行った。また、ガス流量比は、H2:CH4:O2で、第一皮膜は100:1:0、第二皮膜は100:1:1、第三皮膜は100:3:1とした。
照射角度:皮膜に対して垂直方向
ノズル径:φ0.8
砥粒:SiC#180
エア圧:t3ソーダライムガラスに20秒で穴が貫通する圧力
超硬合金母材(2枚刃スクエアタイプのφ10超硬エンドミル、WC粒子の平均粒径:1μm、Co含有量:6重量%)に、熱フィラメント型CVD装置を用い、実験例1と同様の母材温度、ガス種、ガス圧力及びガス流量比で、第一皮膜、第二皮膜及び第三皮膜を夫々下記の積層構成で総厚が11〜12μmとなるように成膜した多層膜A、多層膜B及び多層膜Cに、実験例1のブラスト条件と同様の条件でエンドミルの切れ刃逃げ面に対してブラスト照射を行い、各膜のブラスト寿命を測定した。その結果を図8に示す。尚、図8中の第一皮膜(単層膜)は、第一皮膜のみを実施例1と同様の条件で11〜12μmの厚さで母材に成膜した比較例である。
(膜厚比 1:2:2)
・多層膜B・・・母材/第一皮膜/第二皮膜/第一皮膜/第二皮膜
(膜厚比 1:1:1:1)
・多層膜C・・・母材/第一皮膜/第二皮膜/第一皮膜/第二皮膜/第三皮膜
(膜厚比 8:7:6:7:12)
Claims (5)
- 基材上に形成される切削工具用ダイヤモンド皮膜であって、このダイヤモンド皮膜は、0.3μm以上3μm以下の平均結晶粒径を有する第一皮膜層と該第一皮膜層より平均結晶粒径が大きい第二皮膜層とが交互に各1層以上積層して成る多層皮膜層を少なくとも1層以上含み、前記基材直上に1μm以上10μm以下の膜厚で前記第一皮膜層が形成されていることを特徴とする切削工具用ダイヤモンド皮膜。
- 請求項1記載の切削工具用ダイヤモンド皮膜において、前記第一皮膜層及び前記第二皮膜層に対して夫々、波長532nmのレーザー光を用いてラマン散乱分光分析を行った際、前記第一皮膜層の、ラマンシフト1333cm−1近傍のピーク強度IDとラマンシフト1450〜1600cm−1近傍のピーク強度IGとの比[ID/IG]が0.9〜1.5の範囲にあり、且つ、前記第二皮膜層の[ID/IG]が前記第一皮膜層の[ID/IG]より大きいことを特徴とする切削工具用ダイヤモンド皮膜。
- 請求項1,2いずれか1項に記載の切削工具用ダイヤモンド皮膜において、最表層に0.5μm以上10μm以下の膜厚で第三皮膜層が形成され、この第三皮膜層の平均結晶粒径が、前記第一皮膜層の平均結晶粒径より小さいことを特徴とする切削工具用ダイヤモンド皮膜。
- 請求項3記載の切削工具用ダイヤモンド皮膜において、前記第一皮膜層及び前記第三皮膜層に対して夫々、波長532nmのレーザー光を用いてラマン散乱分光分析を行った際、前記第一皮膜層の、ラマンシフト1333cm−1近傍のピーク強度IDとラマンシフト1450〜1600cm−1近傍のピーク強度IGとの比[ID/IG]が、前記第三皮膜層の[ID/IG]より大きいことを特徴とする切削工具用ダイヤモンド皮膜。
- 請求項1〜4いずれか1項に記載の切削工具用ダイヤモンド皮膜において、前記基材はWCを主成分とする硬質粒子とCoを主成分とする結合材とから成る超硬合金であり、前記WC粒子の平均粒径が0.3μm〜3μmに設定され、前記Coの含有量が重量%で3〜15%に設定されたものであることを特徴とする切削工具用ダイヤモンド皮膜。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009039535A JP4733193B2 (ja) | 2009-02-23 | 2009-02-23 | 切削工具用ダイヤモンド皮膜 |
EP09015968A EP2230327A1 (en) | 2009-02-23 | 2009-12-23 | Diamond coating for cutting tool |
CN 200910265689 CN101811385B (zh) | 2009-02-23 | 2009-12-30 | 切削工具用金刚石被膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009039535A JP4733193B2 (ja) | 2009-02-23 | 2009-02-23 | 切削工具用ダイヤモンド皮膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010194629A true JP2010194629A (ja) | 2010-09-09 |
JP4733193B2 JP4733193B2 (ja) | 2011-07-27 |
Family
ID=42124556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009039535A Active JP4733193B2 (ja) | 2009-02-23 | 2009-02-23 | 切削工具用ダイヤモンド皮膜 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2230327A1 (ja) |
JP (1) | JP4733193B2 (ja) |
CN (1) | CN101811385B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012161873A (ja) * | 2011-02-07 | 2012-08-30 | Mitsubishi Materials Corp | ダイヤモンド被覆切削工具 |
US9061397B2 (en) | 2012-06-07 | 2015-06-23 | Union Tool Co. | Diamond film for cutting-tools |
KR101562950B1 (ko) | 2014-02-18 | 2015-10-23 | 한국과학기술연구원 | 다이아몬드 코팅공구 및 그 제조방법 |
JP2020099979A (ja) * | 2018-12-25 | 2020-07-02 | ユニオンツール株式会社 | 切削工具用ダイヤモンド皮膜 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102626853B (zh) * | 2011-02-07 | 2015-11-25 | 三菱综合材料株式会社 | 金刚石包覆切削工具 |
DE102017204109B4 (de) | 2017-03-13 | 2019-03-14 | Gühring KG | Verwendung einer mit Fremdatomen dotierten Diamantschicht zur Erfassung des Abnutzungsgrades einer undotierten diamantenen Funktionsschicht eines Werkzeugs |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01157412A (ja) * | 1987-12-15 | 1989-06-20 | Nippon Soken Inc | ダイヤモンド膜付基板の製造方法 |
JPH03197677A (ja) * | 1989-12-25 | 1991-08-29 | Sumitomo Electric Ind Ltd | ダイヤモンドコーティング工具及びその製造法 |
JPH06297207A (ja) * | 1993-04-13 | 1994-10-25 | Kobe Steel Ltd | 靭性に優れた気相合成ダイヤモンド切削工具 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003025117A (ja) | 2001-07-17 | 2003-01-29 | Nachi Fujikoshi Corp | ダイヤモンド被覆切削工具 |
JP3853757B2 (ja) * | 2003-05-30 | 2006-12-06 | ユニオンツール株式会社 | 切削工具用硬質皮膜 |
-
2009
- 2009-02-23 JP JP2009039535A patent/JP4733193B2/ja active Active
- 2009-12-23 EP EP09015968A patent/EP2230327A1/en not_active Withdrawn
- 2009-12-30 CN CN 200910265689 patent/CN101811385B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01157412A (ja) * | 1987-12-15 | 1989-06-20 | Nippon Soken Inc | ダイヤモンド膜付基板の製造方法 |
JPH03197677A (ja) * | 1989-12-25 | 1991-08-29 | Sumitomo Electric Ind Ltd | ダイヤモンドコーティング工具及びその製造法 |
JPH06297207A (ja) * | 1993-04-13 | 1994-10-25 | Kobe Steel Ltd | 靭性に優れた気相合成ダイヤモンド切削工具 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012161873A (ja) * | 2011-02-07 | 2012-08-30 | Mitsubishi Materials Corp | ダイヤモンド被覆切削工具 |
US9061397B2 (en) | 2012-06-07 | 2015-06-23 | Union Tool Co. | Diamond film for cutting-tools |
KR101562950B1 (ko) | 2014-02-18 | 2015-10-23 | 한국과학기술연구원 | 다이아몬드 코팅공구 및 그 제조방법 |
JP2020099979A (ja) * | 2018-12-25 | 2020-07-02 | ユニオンツール株式会社 | 切削工具用ダイヤモンド皮膜 |
Also Published As
Publication number | Publication date |
---|---|
JP4733193B2 (ja) | 2011-07-27 |
CN101811385B (zh) | 2013-03-13 |
EP2230327A1 (en) | 2010-09-22 |
CN101811385A (zh) | 2010-08-25 |
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