JP2010190817A - Indenter attaching jig, hardness tester, and method for attaching indenter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an indenter phase adjusting jig for accurately and easily adjusting a positional shift of an indenter, a hardness tester, and a method for attaching the indenter. <P>SOLUTION: An indenter attaching jig 100 includes: an indenter support section 111; a cross line 120a corresponding to a ridge line 13aa of the indenter 13; a reticle 120 having a reticle mark 120b aligned with a reference mark 16 on a side face; a reticle support section 113 for turnably supporting the reticle 120 around an axis of the indenter 13; and an attaching/detaching section 130 for detachably attaching an eyepiece lens 11 at a position where a state that the ridge line 13aa at a tip 13a of the indenter 13 supported by the indenter support section 111 and the cross line 120a of the reticle 120 are overlapped can be observed. While the ridge line 13aa of the indenter 13 and the cross line 120a of the reticle 120 are matched, the reference mark 16 and the reticle mark 120b are matched, and the indenter 13 is attached to the indenter attaching section 15a. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an indenter mounting jig, a hardness tester, and an indenter mounting method.

  Conventionally, in a hardness tester that measures the Vickers hardness and Knoop hardness of a sample, the indenter with a pyramid-shaped tip is pressed against the sample to form a recess, and the hardness is measured by observing the sample and the recess. ing.

  For example, in the Vickers hardness tester, since the tip of the indenter is formed in a quadrangular pyramid shape, a quadrangular pyramid depression is formed when pressed against the sample. Then, when the indentation is observed with a microscope, a projected image of a quadrangle can be confirmed. Therefore, the hardness is measured by measuring the two diagonal lengths of the quadrangle (for example, see Patent Document 1).

JP-A-8-122238

Here, for convenience of measurement, the mounting position of the indenter is adjusted so that the two diagonal lines coincide with two predetermined orthogonal biaxial directions (reference directions), and the mounting position is displaced. An error may occur in the measured value of hardness.
Therefore, a circular index that can grasp the reference direction is provided on the side wall of the indenter, and the user refers to the index and rotates the indenter while visually checking the ridge line at the tip of the indenter to adjust the mounting position deviation. I was doing work to do.

  However, in the adjustment method as described above, since only the circular index provided on the side wall of the indenter is used as a reference in the mounting position adjustment, only the approximate direction can be grasped, and the misalignment adjustment is complicated. Since it is difficult to grasp the fine displacement of the mounting position because the ridge line is visually confirmed, there is a problem that the displacement of the mounting position cannot be accurately adjusted.

  An object of the present invention is to provide an indenter mounting jig, a hardness tester, and an indenter mounting method capable of accurately and easily adjusting the displacement of the mounting position of the indenter.

  In order to solve the above-mentioned problem, the invention according to claim 1 includes a reference mark that serves as a positioning reference when a pyramid-shaped indenter is attached, and an indenter mounting portion for attaching the indenter based on the reference mark. An indenter attaching jig for attaching the indenter to the indenter attaching part of a hardness tester having an observation part for observing a depression formed on the surface of the sample by the indenter, wherein the indenter is An indenter support portion that is inserted and supported from the distal end side, and the indenter is detachable, and an indicator that is provided on the distal end side of the indenter in the indenter support portion, has light transmittance, and corresponds to a ridge line of the indenter An index portion having a positioning mark on the peripheral surface for alignment with the reference mark, a rotation support portion that supports the index portion so as to be rotatable around an axis of the indenter, and the indenter support portion. Said supported A ridge line of the indenter and an index of the index part, and a mounting part for detachably mounting the observation part at a position where the overlapping state of the index line of the index part and the index of the index part can be observed The reference mark and the positioning mark of the index part are matched to each other so that the indenter is attached to the indenter attaching part.

  According to a second aspect of the present invention, in the indenter mounting jig according to the first aspect, the indicator portion is a reticle.

  According to a third aspect of the present invention, in the indenter mounting jig according to the first or second aspect, the observation unit includes a detachable CCD camera or an eyepiece that captures a projection image of the recess, and the mounting The unit is characterized in that the CCD camera or the eyepiece is detachably attached.

  The invention described in claim 4 has a reference mark for positioning when attaching a pyramid-shaped indenter at the tip, and is formed on the surface of the sample by the indenter mounting portion for attaching the indenter based on the reference mark. A hardness tester having an observation section for observing the indentation, comprising an indenter mounting jig for mounting the indenter to the indenter mounting section, the indenter mounting jig inserting the indenter from the tip side And an indenter support part that is detachable from the indenter, and provided on the tip side of the indenter in the indenter support part, has optical transparency, and includes an index corresponding to a ridge line of the indenter, An index portion having a positioning mark on the peripheral surface for alignment with a reference mark, a rotation support portion that supports the index portion so as to be rotatable around an axis of the indenter, and the indenter support portion Indenter tip A mounting portion for detachably mounting the observation unit at a position where the overlapping state of the ridge line and the index of the index unit can be observed, and the ridge line of the indenter and the index of the index unit match In the state, the indenter is attached to the indenter attaching portion by matching the reference mark with the positioning mark of the indicator portion.

  According to a fifth aspect of the present invention, there is provided an indenter mounting method in which the indenter is mounted on the indenter mounting portion using the indenter mounting jig according to any one of the first to third aspects. An indenter support part attaching step for attaching to the support part, an observation part attaching step for attaching the observation part to the attachment part, a ridge line at the tip of the indenter by the observation part, and an index of the indicator part, An adjusting step for rotating the indicator portion around the indenter axis so that the ridge line at the tip of the indenter matches the indicator of the indicator portion, and an observation portion for removing the observation portion from the attachment portion A removal step; an indenter attachment step for attaching the indenter to the indenter attachment portion so that the reference mark and the positioning mark coincide; and a removal step for removing the indenter from the indenter support portion. Toss .

According to the present invention, the indenter is attached to the indenter mounting portion by aligning the reference mark of the indenter mounting portion with the positioning mark of the index portion in a state where the ridge line of the indenter matches the index of the index portion. The displacement of the mounting position of the indenter can be accurately adjusted compared to the case where only the circular index provided on the side wall of the indenter is used as a reference for adjusting the mounting position. . Furthermore, since the ridge line of the indenter and the index of the index part can be observed by the observation part, it is possible to easily adjust the fine displacement of the mounting position compared to the visual confirmation.
Therefore, it can be said that the present invention is an indenter phase adjustment jig, a hardness tester, and an indenter attachment method that can accurately and easily adjust the displacement of the attachment position of the indenter.

It is a side view which shows schematic structure of the testing machine main body of the hardness testing machine which concerns on this invention. It is a side view which shows schematic structure of the jig | tool for indenter attachment with which the hardness tester which concerns on this invention is equipped. It is a figure for demonstrating the state which attached the jig | tool for indenter attachment to the testing machine main body of the hardness testing machine which concerns on this invention. It is a schematic diagram which shows the state which looked at the main-body part of the indenter attachment jig | tool which concerns on this invention from the top. It is an enlarged view which shows the state by which the CCD camera was mounted | worn with the testing machine main body of the hardness testing machine which concerns on this invention. It is a side view which shows the state with which the CCD camera was mounted | worn with the indenter attachment jig | tool which concerns on this invention. It is a flowchart explaining the attachment method of the indenter using the indenter attachment jig | tool which concerns on this invention.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. In the following description, the left-right direction of the tester body 10 in FIG. 1 is the X direction, the front-rear direction is the Y direction, and the height direction is the Z direction.

  The hardness tester 1000 is, for example, a Vickers hardness tester. As shown in FIGS. 1 and 2, the tester body 10, the indenter mounting jig 100, and the overall control of the hardness tester 1000 are performed. It is comprised from the control part (illustration omitted) etc. to perform.

  As shown in FIG. 1, for example, the tester main body 10 includes a measuring unit 1, a sample stage 2 on which a sample is placed, a stage 3 that supports the sample stage 2 so as to be movable, and a sample stage 2 (and stage 3). ), And the like.

  The measurement unit 1 includes, for example, an eyepiece 11 (observation unit) for observing the surface of the sample, an illumination device 12 for illuminating the surface of the sample, an indenter 13 and an objective lens 14, and rotates around the Z-axis direction. Thus, the turret 15 that can be switched between the indenter 13 and the objective lens 14, the reference mark 16 that serves as a reference when adjusting the deviation (phase) of the ridge line of the indenter 13 from the reference position, and the like are configured. .

  One end portion of the eyepiece 11 is supported by the main body portion of the measurement unit 1, and is configured to be detachable from the tester main body 10 on the one end side. When the objective lens 14 is at the observation position, the reflected light from the sample surface of the light emitted from the illumination device 12 is formed by the sample surface and the indenter 13 by passing through the optical axis of the eyepiece lens 11. This makes it possible to observe indentations on the sample surface.

  The illumination device 12 is a light source that emits light that irradiates the surface of a sample placed on the sample stage 2.

  The turret 15 is configured to be rotatable about the axial direction (Z-axis direction) of the indenter 13, and holds an indenter mounting portion 15a for attaching the indenter 13 and a plurality of objective lenses 14 on the lower surface. By rotating a predetermined angle in the axial direction, these are selectively placed above the sample, thereby enabling formation of a recess in the sample and observation of the recess.

One end of the indenter 13 is detachably attached to the lower surface of the indenter attachment portion 15a of the turret 15, and the other end is provided with a tip portion 13a.
Then, the indenter 13 is moved toward the sample placed on the sample stage 2 by a load mechanism unit (not shown) that is driven up and down, and the tip 13a is pushed into the surface of the sample with a predetermined test force. Form.

  The distal end portion 13a is the distal end of an indenter 13 formed in a quadrangular pyramid shape, and by pressing the distal end portion 13a against the surface of the sample, a rectangular recess can be formed in an XY plan view. Further, as shown in FIG. 4, the indenter ridge line 13aa appears as a quadrangular orthogonal diagonal line in the indentation in plan view.

  The objective lens 14 is a condensing lens having different magnifications, and a plurality of objective lenses 14 are held on the lower surface of the turret 15. Further, the surface of the sample is uniformly irradiated with the light emitted from the illumination device 12.

  The reference mark 16 is a rectangular mark drawn on the side wall (above the indenter 13) of the measurement unit 1, and indicates a reference position when the user rotates the indenter 13 to adjust the displacement of the indenter mounting position.

The sample stage 2 mounts a sample on the upper surface and fixes the sample by a sample fixing unit (not shown).
The stage 3 is driven by a drive mechanism (not shown), and supports the sample stage 2 so as to be movable in the horizontal direction (front-rear left-right direction) and the vertical direction (up-down direction). That is, the stage 3 can focus on the surface of the sample by finely moving the sample table 2 up and down / horizontally based on the projection image captured by the eyepiece 11.
The elevating mechanism unit 5 is, for example, screwed to the stage 3 and rotated to rotate the stage 3 (and the sample stage 2 supported on the upper surface) in the axial direction, a square screw or a trapezoidal screw (not shown), and the corner. A motor (not shown) for driving a screw or a trapezoidal screw is provided, and the sample stage 2 and the stage 3 are moved in the vertical direction (Z-axis direction) by driving the motor and rotating the square screw or the trapezoidal screw. Move to.
The elevating mechanism unit 5 is not necessarily limited to motor drive, and may include a handle for rotating the square screw or the trapezoidal screw and manually operate the handle.

  As shown in FIG. 2, the indenter mounting jig 100 is a jig for mounting the indenter 13 on the indenter mounting portion 15a. For example, the indenter mounting jig 100 corresponds to the main body 110 as a housing and the ridge line 13aa of the indenter 13. And a reticle 120 (index unit) provided with a crosshair 120a (index) to be attached, and an attachment / detachment unit 130 (attachment unit) for detachably attaching the eyepiece 11 or the like.

  The main body 110 includes an indenter support portion 111 that supports the indenter 13, a fixing portion 115 that fixes the indenter 13 supported by the indenter support portion 111, and a reticle support portion 113 (rotation support portion) that supports the reticle 120. Are substantially cylindrical members.

  The indenter support part 111 inserts and supports the indenter 13 from the tip part 13a side, and the indenter 13 is detachable, so that the top surface of the tip part 13a is visible from above, and has a shape of the tip part 13a. It is a support member provided with a conical hole along. Further, since the indenter support portion 111 is configured to support only the tip portion 13a, as shown in FIG. 3, the indenter 13 can be attached to the indenter attachment portion 15a while supporting the tip portion 13a. It is.

  The fixing portion 115 includes a screw (not shown) for fixing the indenter 13 and a screw hole. In the state where the indenter 13 is inserted into the indenter support portion 111, the fixing portion 115 is tightened with the screw toward the screw hole. 13 can be fixed.

As shown in FIGS. 2 and 4, for example, the reticle support portion 113 is formed in a U shape in a YZ plan view, and sandwiches a part (for example, a half circumference) of the peripheral surface of the reticle 120 in a XY plan view. The reticle 120 is a support member that can rotate around the Z-axis.
Therefore, the user can rotate the reticle 120 about the Z-axis direction while pressing the peripheral surface of the reticle 120 that is not supported by the reticle support 113 with a finger.

The reticle 120 is, for example, a light-transmitting cylindrical transparent glass substrate provided on the side of the tip 13a of the indenter 13 in the indenter support 111. As shown in FIG. A line 120a (index) is drawn, and a reticle mark 120b (positioning mark) is provided on the peripheral surface.
The crosshair 120a is two straight lines that are orthogonal to each other at the center position on the XY plane of the reticle 120, and is drawn so as to correspond to the ridgeline 13aa of the indenter 13.
The reticle mark 120b is provided on the side surface of the reticle 120 on an extension of one of the cross lines 120a and has the same width (the length in the Y-axis direction) as the reference mark 16 provided on the tester main body 10. ).

The detachable part 130 is provided on the upper part of the main body part 110 and makes the eyepiece 11 attached to the tester main body 10 detachable. That is, the crosshair 120a of the reticle 120 and the ridgeline 13aa of the indenter 13 can be observed in an overlapping manner from the direction of arrow A in FIG.
Therefore, the crosshair 120a and the ridgeline 13aa are observed in an enlarged state by the eyepiece 11, and the reticle 120 supported by the reticle support 113 is rotated to make the crosshair 120a and the ridgeline 13aa coincide. Then, the eyepiece 11 is removed from the attaching / detaching portion 130 so that the reticle mark 120b coincides with the reference mark 16 (that is, the reticle mark 120b and the reference mark 16 are arranged on the same straight line in the Z-axis direction). The main body 110 with the indenter 13 mounted is rotated around the Z axis, and the indenter 13 (indenter mounting jig 100) is mounted on the indenter mounting section 15a (tester body 10), thereby shifting the mounting position of the indenter 13. Can be adjusted.
For example, as shown in FIG. 5, instead of the eyepiece lens 11, a CCD (not shown) that can be observed in an enlarged state of the cross line 120a and the ridge line 13aa is provided, and the CCD is detachable from the tester body 10. Of course, when the camera 11a is attached to the tester main body 10, as shown in FIG.

(How to install the indenter)
Next, a method for attaching the indenter 13 to the testing machine main body 10 using the indenter attaching jig 100 will be described with reference to the flowchart of FIG.

First, the tip portion 13a of the indenter 13 is inserted into the indenter support portion 111 and fixed by the fixing portion 115, and the indenter 13 is attached to the indenter attachment jig 100 (step S1: indenter support portion attachment step).
Next, the eyepiece 11 is detached from the tester main body 10 and attached to the detachable portion 130, and the eyepiece 11 is attached to the indenter attachment jig 100 (step S2: observation portion attachment step).

  Next, the ridgeline 13aa of the tip 13a of the indenter 13 and the crosshair 120a of the reticle 120 are observed through the eyepiece 11, and the reticle 120 is rotated and adjusted so that the ridgeline 13aa and the crosshair 120a coincide ( Step S3: Adjustment step).

  Next, the eyepiece 11 is removed from the attachment / detachment unit 130 and attached to the tester main body 10 again (step S4: observation unit removal step).

  Next, the indenter mounting jig 100 is rotated so that the reticle mark 120b coincides with the reference mark 16, the mounting position of the indenter mounting jig 100 is adjusted, and the indenter 13 (indenter mounting jig 100) is moved to the turret. 15 indenter mounting portions 15a (tester body 10) are mounted (step S5: indenter mounting step).

  Next, by removing the indenter 13 from the indenter support portion 111, the indenter mounting jig 100 is removed from the tester body 10 (step S6: removal step).

As described above, the hardness tester 1000 according to the present invention has the reference mark 16 that is used for positioning when the indenter 13 is attached, the indenter mounting portion 15a for attaching the indenter 13 based on the reference mark 16, and the indenter. 13 includes an eyepiece 11 for observing a depression formed on the surface of the sample, and an indenter mounting jig 100 for mounting the indenter 13 to the indenter mounting portion 15a. The indenter mounting jig 100 includes the indenter 13 The indenter 13 is inserted and supported from the distal end portion 13a, and the indenter 13 is detachably provided on the distal end portion 13a side of the indenter 13 in the indenter support portion 111. A reticle 120 having a crosshair 120a corresponding to 13aa and having a reticle mark 120b on the side surface for alignment with the reference mark 16, and a reticle 120 A state in which a reticle support portion 113 that is supported so as to be rotatable about the axis of the indenter 13, a ridge line 13aa of the tip portion 13a of the indenter 13 supported by the indenter support portion 111, and a cross wire 120a of the reticle 120 overlap each other. An attachment / detachment portion 130 for detachably attaching the eyepiece lens 11 is provided at an observable position, and the reference mark 16 and the reticle mark 120b are placed in a state where the ridge line 13aa of the indenter 13 and the cross line 120a of the reticle 120 coincide with each other. The indenter 13 is attached to the indenter mounting portion 15a so as to match.
That is, compared with the case where only the circular index provided on the side wall of the indenter 13 is used as the reference for adjusting the mounting position, in the present invention, the mounting position of the indenter 13 is adjusted by using the crosshair 120a as a reference. And also from the axial direction of the indenter 13 with the reticle mark 120b as a reference, the displacement of the mounting position of the indenter 13 can be accurately adjusted. Furthermore, since the ridge line 13aa of the indenter 13 and the reticle mark 120b of the reticle 120 can be observed with the eyepiece lens 11, a fine displacement of the mounting position can be easily adjusted as compared with visual confirmation.
Therefore, the present invention can be said to be an indenter mounting jig, a hardness tester, and an indenter mounting method capable of accurately and easily adjusting the displacement of the mounting position of the indenter.

Further, the attaching / detaching portion 130 of the indenter attaching jig 100 can attach or detach the eyepiece 11 or the CCD camera 11a provided in the tester main body 10 in a detachable manner.
That is, the eyepiece 11 or the CCD camera 11a, which is a component of the testing machine main body 10, can be used to enlarge and observe the ridge line 13aa and the crosshair 120a. Cost can be reduced.

The indenter attachment method using the indenter attachment jig 100 is implemented by steps S1 to S6 shown in FIG.
Here, in the step of adjusting the attachment position of the indenter attachment jig 100 and attaching the indenter 13 to the testing machine main body 10 (step S5), the indenter 13 is attached to the indenter attachment jig 100 (indenter support portion 111). Since the attachment position can be adjusted in a state where the contact is made, the user can perform the above adjustment without directly touching the distal end portion 13a of the indenter 13 with a hand.
That is, when the attachment position is adjusted by directly contacting the indenter 13 by hand, the fat content of the fingertip adheres to the indenter 13 to cause a measurement error, and therefore, it is necessary to perform a degreasing operation and reduce work efficiency. There's a problem. However, by using the indenter mounting jig 100 as described above, the user adjusts the mounting position of the indenter 13 via the indenter mounting jig 100, so that the above problem can be solved.

The scope of the present invention is not limited to the above embodiment, and various improvements and design changes may be made without departing from the spirit of the present invention.
For example, in the above embodiment, when adjusting the mounting position of the indenter 13, the reticle mark 120b is matched with the reference mark 16 in a state in which the cross line 120a and the ridge line 13aa are matched. As shown in FIG. 6, the indenter 13 may be provided with an indenter mark 13b positioned on an extension line of one of the ridge lines 13aa.
In other words, the indenter 13 is mounted so that the ridgeline 13aa and the cross wire 120a coincide with each other by rotating the indenter 13 by loosening the screw in the fixing portion 115, and the position of the indenter mark 13b at that time coincides with the reference mark 16. By rotating the main body 110 around the Z axis and mounting the indenter 13 on the indenter mounting portion 15a, the displacement of the mounting position of the indenter 13 can be accurately adjusted as in the above embodiment.

1000 Hardness tester 1 Measuring unit 10 Tester body 11 Eyepiece (observation unit)
11a CCD camera (observation part)
13 Indenter 13a Tip part 13aa Ridge line 15a Indenter attachment part 16 Reference mark 100 Indenter attachment jig 110 Main body part 111 Indenter support part 113 Reticle support part (rotation support part)
120 reticle (index section)
120a Crosshair (indicator)
120b Reticle mark (positioning mark)
130 Detachable part (mounting part)

Claims (5)

Observation having a reference mark as a positioning reference when attaching a pyramid-shaped indenter and observing a depression formed on the surface of the sample by the indenter, and an indenter mounting portion for attaching the indenter based on the reference mark An indenter mounting jig for mounting the indenter on the indenter mounting portion of the hardness tester having a portion,
The indenter is inserted and supported from the tip side, and the indenter is detachable from the indenter support part,
An indicator portion that is provided on the tip side of the indenter in the indenter support portion, has a light transmission property, has an indicator corresponding to a ridge line of the indenter, and has a positioning mark on the peripheral surface for alignment with the reference mark When,
A rotation support portion for supporting the indicator portion so as to be rotatable around the axis of the indenter;
An attachment part for detachably attaching the observation part at a position where the state where the ridge line of the tip of the indenter supported by the indenter support part and the index of the index part overlap can be observed;
With
The indenter is attached to the indenter mounting portion by matching the reference mark and the positioning mark of the indicator portion in a state where the ridge line of the indenter and the indicator of the indicator portion coincide with each other. Indenter mounting jig. In the indenter mounting jig according to claim 1,
The indenter mounting jig, wherein the indicator portion is a reticle. In the indenter mounting jig according to claim 1 or 2,
The observation unit includes a detachable CCD camera or eyepiece that captures a projection image of the depression,
The indenter attaching jig, wherein the attaching portion attaches the CCD camera or eyepiece detachably. A tip having a reference mark for positioning when attaching a pyramid-shaped indenter; an indenter mounting portion for attaching an indenter based on the reference mark; an observation portion for observing a depression formed on the surface of the sample by the indenter; In a hardness tester having
An indenter mounting jig for mounting the indenter to the indenter mounting portion;
The indenter mounting jig is
The indenter is inserted and supported from the tip side, and the indenter is detachable from the indenter support part,
An indicator portion that is provided on the tip side of the indenter in the indenter support portion, has a light transmission property, has an indicator corresponding to a ridge line of the indenter, and has a positioning mark on the peripheral surface for alignment with the reference mark When,
A rotation support portion for supporting the indicator portion so as to be rotatable around the axis of the indenter;
An attachment part for detachably attaching the observation part at a position where the state where the ridge line of the tip of the indenter supported by the indenter support part and the index of the index part overlap can be observed;
With
The indenter is attached to the indenter mounting portion by matching the reference mark and the positioning mark of the indicator portion in a state where the ridge line of the indenter and the indicator of the indicator portion coincide with each other. Hardness tester. In the indenter attachment method of attaching the indenter to the indenter attachment portion using the indenter attachment jig according to any one of claims 1 to 3,
An indenter support part attaching step of attaching the indenter to the indenter support part;
An observing part attaching step of attaching the observing part to the attaching part;
The observation unit observes the ridge line of the tip of the indenter and the index of the index unit, and rotates the index unit around the axis of the indenter, and the ridge line of the tip of the indenter and the index unit An adjustment process for adjusting the index to match,
An observation part removing step for removing the observation part from the attachment part;
An indenter attaching step for attaching the indenter to the indenter attaching portion so that the reference mark and the positioning mark coincide;
Removing the indenter from the indenter support,
An indenter mounting method comprising:

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