JP2010157586A5 - - Google Patents

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Publication number
JP2010157586A5
JP2010157586A5 JP2008334532A JP2008334532A JP2010157586A5 JP 2010157586 A5 JP2010157586 A5 JP 2010157586A5 JP 2008334532 A JP2008334532 A JP 2008334532A JP 2008334532 A JP2008334532 A JP 2008334532A JP 2010157586 A5 JP2010157586 A5 JP 2010157586A5
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JP
Japan
Prior art keywords
substrate
drying apparatus
station
transfer
heating furnace
Prior art date
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Granted
Application number
JP2008334532A
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English (en)
Japanese (ja)
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JP5144492B2 (ja
JP2010157586A (ja
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Priority to JP2008334532A priority Critical patent/JP5144492B2/ja
Priority claimed from JP2008334532A external-priority patent/JP5144492B2/ja
Publication of JP2010157586A publication Critical patent/JP2010157586A/ja
Publication of JP2010157586A5 publication Critical patent/JP2010157586A5/ja
Application granted granted Critical
Publication of JP5144492B2 publication Critical patent/JP5144492B2/ja
Active legal-status Critical Current
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JP2008334532A 2008-12-26 2008-12-26 乾燥装置 Active JP5144492B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008334532A JP5144492B2 (ja) 2008-12-26 2008-12-26 乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008334532A JP5144492B2 (ja) 2008-12-26 2008-12-26 乾燥装置

Publications (3)

Publication Number Publication Date
JP2010157586A JP2010157586A (ja) 2010-07-15
JP2010157586A5 true JP2010157586A5 (https=) 2011-11-10
JP5144492B2 JP5144492B2 (ja) 2013-02-13

Family

ID=42575286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008334532A Active JP5144492B2 (ja) 2008-12-26 2008-12-26 乾燥装置

Country Status (1)

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JP (1) JP5144492B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101353247B1 (ko) * 2011-03-25 2014-01-24 삼성전기주식회사 원적외선 건조기를 이용한 인쇄회로기판의 포토솔더 레지스트 공정방법
CN111433546B (zh) * 2017-12-06 2022-10-25 快力胶囊股份有限公司 柱状结构物的干燥装置和柱状结构物的制造方法
CN115479456B (zh) * 2022-09-20 2023-09-12 常州光迅工业设备有限公司 一种无尘无氧pi烘箱水冷循环系统
KR102915266B1 (ko) * 2022-09-28 2026-01-21 주식회사미인골드 금박 가공 방법 및 금박 가공 장치
CN117685754A (zh) * 2024-02-04 2024-03-12 江西农业大学 一种过热蒸汽热泵中药材蒸晒装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3517121B2 (ja) * 1998-08-12 2004-04-05 東京エレクトロン株式会社 処理装置
JP2001110793A (ja) * 1999-10-12 2001-04-20 Dainippon Screen Mfg Co Ltd 熱処理装置および基板処理装置
JP4274736B2 (ja) * 2002-03-28 2009-06-10 大日本スクリーン製造株式会社 基板処理装置
JP3963846B2 (ja) * 2003-01-30 2007-08-22 東京エレクトロン株式会社 熱的処理方法および熱的処理装置

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