JP2010157586A5 - - Google Patents

Claims (7)

In a drying device for drying a coating film applied to a substrate,
A substrate holding station for holding the substrate in the substrate holder;
A board transfer station;
A heating furnace positioned horizontally and linearly on the opposite side of the substrate holding station across the substrate delivery station;
Said substrate holder, conveying means for loading and unloading the heating furnace from the substrate holding station through said substrate transfer station,
A cooling device disposed above the delivery station;
A transfer device that receives the substrate from the substrate holder at the substrate transfer station and moves to the cooling device;
A drying apparatus comprising: a take-out table that moves the substrate from the transfer device to a side take-out position . The substrate holder includes a shuttle arm that moves the substrate holding station, the substrate transfer station, and the heating furnace along a rail horizontally provided on a base;
A clip that holds by clamping the peripheral edge of the substrate,
The drying apparatus according to claim 1, wherein the clip is automatically opened and closed by a clip opening and closing cylinder disposed on a support base fixed to the base. The heating furnace includes a transfer port on the substrate transfer station side,
The drying apparatus according to claim 1, wherein the transfer port is formed in a minimum size that allows the substrate holder to enter the heating furnace. The take-out table includes a rotating shaft and a rotating arm that rotates in a horizontal plane around the rotating shaft, and is provided between a lower position of the cooling device and a side position that is a side of the lower position. The drying apparatus according to claim 1, wherein the drying apparatus moves. The drying apparatus according to claim 1, wherein the heating furnace includes a heating device that heats the substrate, and the heating device includes a hot air blowing nozzle and an infrared heater. The heating device according to any one of claims 1 to 5, wherein the cooling device includes a movable portion that also serves as the transfer device and a fixed portion into which cooling air is introduced. In the drying apparatus according to any one of claims 1 to 6,
Further comprising a coating device disposed adjacent to the drying device;
The substrate inlet / outlet in the coating apparatus and the substrate inlet / outlet in the drying apparatus are positioned adjacent to each other, and the substrate take-out position in the drying apparatus and the substrate inlet / outlet in the coating apparatus are positioned adjacent to each other. A drying apparatus characterized in that a plurality of the drying apparatus and the coating apparatus are provided together.