JP2010120123A - Orthogonal robot, component mounting device equipped with the orthogonal robot, and method of controlling the orthogonal robot - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To ensure the positioning accuracy of a component carried by a head unit, and to improve accuracy when a plurality of components are simultaneously held by a plurality of tools equipped to the head unit. <P>SOLUTION: The orthogonal robot has: a first driving means extending in a predetermined first axis direction; a second driving means extending in a second axis direction intersecting the first axis direction; the head unit moving along the second axis by driving of the second driving means; and a controlling means controlling each driving means. The controlling means is configured to detect deviation amount when the second axis shifts from the direction orthogonal to the first axis of a main shaft, and to drive the two first driving means while shifting a parameter for synchronously driving the two first driving means by an amount corresponding to the deviation amount. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an orthogonal robot that moves a head unit including a plurality of suction heads in a horizontal direction, a component mounting apparatus including the orthogonal robot, and a method for controlling the orthogonal robot.

  Conventionally, in order to mount an electronic component at a predetermined position on a print base or to inspect the electronic component, an orthogonal robot that transports the electronic component from a component supply unit to a predetermined position is used. The orthogonal robot is configured to move a head unit provided with a suction head in the horizontal direction.

  For example, Patent Document 1 discloses an orthogonal robot for a chip mounter that includes two longitudinal movement axes, a lateral movement axis supported at both ends by the longitudinal movement axis, and a head unit supported by the lateral movement axis. Has been. Among these, the left / right movement axis is provided to be movable along the longitudinal direction of the front / rear movement axis, and the head unit is provided to be movable along the longitudinal direction of the left / right movement axis.

In such an orthogonal robot, the electronic component is transported in a state in which two axes (in Patent Document 1, the front-rear movement axis and the left-right movement axis) are strictly perpendicular to each other. It is accurately placed at the position. If the two axes of the orthogonal robot do not form a right angle due to assembly errors, etc., the correction amount obtained from the error angle is used to accurately place the electronic component at the mounting position. The electronic parts were transported reflecting the amount of unit movement.
Japanese Patent Laid-Open No. 9-183086

  However, if the two axes do not form a right angle, the head unit itself supported by the left and right moving shafts still remains tilted even if the technique disclosed in Patent Document 1 is used. The problem was left. For example, in the case of a component mounting apparatus, when there are a plurality of suction heads provided in the head unit, usually, a plurality of suction heads are arranged in correspondence with the placement of the suction heads and the placement of the component supply positions of the component supply unit. Are designed to be able to pick up parts simultaneously, but if they are not orthogonal due to the inclination of the left / right movement axis, even if the movement position is corrected as shown in Patent Document 1 above, Since there is no change in that the moving axis is not orthogonal, the plurality of suction head rows do not match the row of the component supply positions of the component supply unit. Therefore, there is a problem that it is difficult to simultaneously suck a plurality of components with a plurality of suction heads at the component supply position.

  The present invention has been made in view of the problems that occur when the above-described head unit is tilted, and a plurality of units provided in the head unit while ensuring the positioning accuracy of components conveyed by the head unit. It is an object of the present invention to provide an orthogonal robot, a component mounting apparatus including the orthogonal robot, and a control method for the orthogonal robot that can improve the accuracy when performing a plurality of operations simultaneously with the tool.

  The orthogonal robot according to the present invention includes a first driving means having two driving shafts, a main shaft and a sub shaft, extending in the direction of a predetermined first axis and spaced apart from each other. Extends in the direction of the second axis that intersects the direction of the axis of the two, is installed on the two first driving means, and moves along the first axis by the driving of the two first driving means Second driving means and a plurality of tools for holding a part are arranged in a row parallel to the direction of the second axis, and the second axis is driven by the second driving means. And a control unit that controls each of the driving units, and the control unit is configured such that the second axis is deviated from a direction orthogonal to the first axis of the main shaft. Is detected and the two first driving means are synchronized to drive. While shifting by an amount corresponding to parameters of order on the shift amount, characterized in that it is configured to drive the first driving means of the two.

  According to the orthogonal robot of the present invention, when the second axis is deviated from the direction orthogonal to the first axis of the main axis, the deviation is detected, and the two first drive means are driven in synchronization. The two first driving means are driven while shifting the parameters for the shift by an amount corresponding to the shift amount. In this way, when a deviation occurs in the parameters for driving the two first driving means in synchronization, the driving state of one first driving means and the driving state of the other first driving means are changed. It becomes different from each other, and there is a difference between the amount of movement of one end of the second driving means and the amount of movement of the other end. As a result, when the second axis of the second driving means is not orthogonal to the first axis of the main axis of the first driving means, one end side of the second driving means is set to the other end. The second axis of the second driving means is orthogonal to the first axis of the main axis of the first driving means by moving along the first axis of the first driving means more or less than the part side To be adjusted. In addition, the first axis of the main axis of the first driving unit and the second axis of the second driving unit are strictly orthogonal to each other so that a plurality of tool columns and work position columns provided in the head unit are arranged. Therefore, simultaneous work by a plurality of tools can be performed with high accuracy. In addition, if only one type of parameter for synchronizing the two first driving means is shifted, the driving states of the two first driving means are controlled to be different from each other, so it is necessary to adjust a plurality of parameters. There is no.

  Further, it is preferable that the control means provides an upper limit for the shift amount of the parameter.

  According to the present invention, by setting an upper limit to the amount of parameter shift, the amount by which the second driving means tilts is limited. As a result, it is possible to avoid an excessive load at the connecting portion between the first driving means and the second driving means, and it is possible to prevent the generation of abnormal noise and the deterioration of durability.

  The component mounting apparatus according to the present invention includes a base, board transport means for carrying the board to a predetermined position on the base, the base mounted on the base, and extending in the direction of the predetermined first axis. A first drive means having two drive shafts, ie, a main shaft and a sub shaft, which are spaced apart from each other, and extending in the direction of a second axis intersecting the direction of the first axis, the two A plurality of suction heads for holding a component, and a second driving means that moves along the first axis by driving the two first driving means. A head unit which is provided so as to form a row parallel to the direction of the second axis, and which moves along the second axis by driving of the second driving means, and a component supply position is the transport of the substrate The component supply unit provided so as to be parallel to the direction, and the drive means are controlled. And the control means detects the amount of deviation when the second axis is deviated from a direction perpendicular to the first axis of the main shaft, and the two first driving The two first driving means are driven while shifting a parameter for driving the means synchronously by an amount corresponding to the deviation.

  The orthogonal robot control method of the present invention includes a first drive unit that has two drive shafts, a main shaft and a sub shaft, extending in the direction of a predetermined first axis and spaced apart from each other. It extends in the direction of a second axis that intersects the direction of the first axis, is installed on the two first driving means, and is driven by the two first driving means to the first axis. And a plurality of tools arranged in a row parallel to the direction of the second axis, and driven by the second driving means along the second axis. A control method for an orthogonal robot having a moving head unit, wherein the orthogonality measures an orthogonality between a first axis of the main axis of the first driving means and a second axis of the second driving means. Degree measuring step, and the second axis is perpendicular to the first axis of the main axis A shift amount calculating step for calculating an amount corresponding to the shift amount when the shift is away from, and a parameter for driving the two first driving means in synchronization with each other by an amount corresponding to the shift amount. However, it includes an orthogonality adjustment step for controlling the two first driving means to drive.

  According to the present invention, in the orthogonal robot, it is possible to improve the accuracy of simultaneous work with a plurality of tools provided in the head unit while ensuring the positioning accuracy of the head unit. Thus, it is possible to improve the accuracy of holding a plurality of components with a plurality of suction heads while securing the positioning accuracy of the components to be conveyed and mounted.

  Hereinafter, the orthogonal robot of the present embodiment, the component mounting apparatus including the orthogonal robot, and the control method of the orthogonal robot will be described in detail with reference to the drawings.

(Embodiment 1)
FIG. 1 is a conceptual diagram for explaining a component mounting apparatus provided with an orthogonal robot according to the present embodiment.

  The orthogonal robot according to the first embodiment is used in a component mounting apparatus for mounting an electronic component at a predetermined position on a printed circuit board.

  Specifically, as shown in FIG. 1, the component mounting apparatus includes a base 1, a conveyor (board transport means) 2 for transporting the printed board P onto the base 1, and both outer sides of the conveyor 2. The component supply unit 6 disposed at a predetermined position, the component recognition device 8 disposed between the component supply unit 6 and the conveyor 2, and an orthogonal robot installed on the base 1.

  The conveyor 2 is installed across the base 1. The conveyor 2 carries the printed circuit board P onto the base 1 and stops when the printed circuit board P reaches a predetermined mounting work position. Further, when the mounting operation of the electronic components on the printed circuit board P is completed, the conveyor 2 carries the printed circuit board P out of the mounting work position on the base 1.

  The component supply unit 6 includes a plurality of tape feeders that supply chip components such as ICs using a tape as a carrier, and a parts feeder 6a such as a bulk feeder that supplies components while sliding down by its own weight along an inclined path. And the component supply position Sup of each part feeder 6a is arrange | positioned so that the row | line | column parallel to the conveyance direction of the printed circuit board P may be made | formed as the component supply part 6 whole.

  The component recognition device 8 includes an image sensor such as a CCD area sensor. The head unit 5 passes above the component recognition device 8 when the electronic component is transported from the component supply position Sup onto the printed circuit board P. The component recognition device 8 captures an image of the electronic component held by the suction head 51 when the suction head 51 of the head unit 5 is positioned above, and the electronic component for the suction head 51 based on the obtained image data. It is designed to measure misalignment, etc.

  In the following description, the direction parallel to the conveyance direction of the printed circuit board P is defined as the X direction, the direction orthogonal to the X direction, and the horizontal direction as the Y direction.

  The orthogonal robot is provided with a main Y direction moving device 31 (first driving means) extending in the direction of the first axis Ax1 parallel to the Y direction and a predetermined distance L from the main Y direction moving device 31. The Y-direction moving device 3 constituted by the sub-Y-direction moving device (first driving means) 32 extending in the direction of the first axis Ax1 ′ parallel to the Y direction and the Y-direction moving device 3 An X-direction moving device (second driving means) 4 supported so as to be movable in the Y direction, a head unit 5 supported by the X-direction moving device 4, a main Y-direction moving device 31, and a sub-Y-direction moving device 32. And a control device (control means) 7 for comprehensively controlling the X-direction moving device 4 and the head unit 5.

  The main Y-direction moving device 31 is screwed into the servo motor 31a, the ball screw shaft 31b extending in the Y direction that receives the driving force of the servo motor 31a and rotating in the Y direction, and the ball screw shaft 31b to rotate the ball screw shaft 31b. A ball nut 31c that moves in the longitudinal direction of the ball screw shaft 31b is included. Here, the first axis Ax1 is the axis of the ball screw shaft 31b of the main Y-direction moving device 31 installed on the base 1 so that the longitudinal direction is strictly parallel to the Y direction, that is, Means the axis of the main axis.

  Similarly to the main Y-direction moving device 31, the secondary Y-direction moving device 32 is screwed into the servo motor 32a, the ball screw shaft 32b extending in the Y direction that receives the driving force of the servo motor 32a, and the ball screw shaft 32b. And a ball nut 32c that moves in the longitudinal direction of the ball screw shaft 32b as the ball screw shaft 32b rotates. Here, the first axis Ax1 'means the axis of the ball screw shaft 32b of the secondary Y-direction moving device 32, that is, the axis of the secondary shaft.

  The X-direction moving device 4 is engaged with the servo motor 4a, the ball screw shaft 4b extending in the X direction that receives the driving force of the servo motor 4a, and the ball screw shaft 4b. As the ball screw shaft 4b rotates, It includes a ball nut 4c that moves in the longitudinal direction of the ball screw shaft 4b, and a head unit support member (not shown) that extends in the X direction. The ball nuts 31c and 32c are fixed to both ends of the head unit support member, and are supported to be movable in the Y direction by guide means (not shown). In other words, the axis of the ball screw shaft 4b of the X-direction moving device 4 (hereinafter referred to as the second axis Ax2) intersects the first axis Ax1.

  In the present embodiment, the main Y-direction moving device 31 and the sub-Y-direction moving device 32 are driven in a driving state according to the orthogonality between the first axis Ax1 and the second axis Ax2. This makes a difference between the amount of movement of one end 41 of the X-direction moving device 4 and the amount of movement of the other end 42.

  A bracket (not shown) fixed to the ball nut 4c of the X-direction moving device 4 is attached to the head unit 5, and the head unit 5 is supported by the bracket so as to be movable in the direction of the second axis Ax2. . The head unit 5 is a board recognition camera that picks up and recognizes a plurality of suction heads (tools) 51 for sucking, holding, and mounting electronic components, and various marks provided at predetermined positions on the printed board P. 52.

  Specifically, each suction head 51 has a suction nozzle (not shown) that sucks an electronic component at the tip, and can suck the electronic component with a suction force by a negative pressure supplied to the suction nozzle. ing. The substrate recognition camera 52 includes an image sensor such as a CCD area sensor. The board recognition camera 52 picks up an image of a board mark (fiducial mark, etc.) applied to the printed board P when mounting an electronic component on the printed board P located at the mounting work position on the base 1. The image data is obtained. And the position of the printed circuit board P is recognized based on this image data.

  In the present embodiment, a plurality of seven suction heads 51 are provided in a row in a direction parallel to the second axis Ax2, and the arrangement interval corresponds to the arrangement interval of the component supply positions Sup. . Therefore, if the second axis Ax2 is accurately in the state parallel to the X direction, the row of the component supply positions Sup of the component supply unit 6 and the row of the suction heads 5 of the head unit 5 are parallel in plan view. When the suction head 51 is positioned above the component supply position Sup, the plurality of suction heads 51 and the component supply position Sup are aligned in plan view, and a plurality of component suction operations are performed. Can be performed at once.

  FIG. 2 is a conceptual diagram for explaining the X-direction moving device 4 of the orthogonal robot.

  In the present embodiment, since the Y-direction moving device 3 and the X-direction moving device 4 are not installed at right angles, the first axis Ax2 is the axis of the main Y-direction moving device 31. If the axis Ax1 is not exactly orthogonal, the second axis Ax2 is structurally orthogonal to the first axis Ax1. Thus, the second axis Ax2 is in a state parallel to the X direction, and a plurality of electronic components can be simultaneously sucked by the plurality of suction heads 51. In addition, since the ideal state of the first axis Ax1 and the second axis Ax2 is realized, the amount of movement of the head unit 5 due to the first axis Ax1 and the second axis Ax2 not being orthogonal to each other. It is not necessary to perform the correction.

  In the present embodiment, the board recognition camera 52 inspects whether or not the first axis Ax1 and the second axis Ax2 that are axes of the main Y-direction moving device 31 are exactly 90 degrees. Used for. Specifically, the jig substrate is placed in a predetermined position on the base 1, and three or four marks shown at predetermined positions on the upper surface of the jig substrate are set as measurement objects. The substrate recognition camera 52 is moved to a position corresponding to the mark by driving the Y-direction moving device 31, the sub-Y-direction moving device 32, and the X-direction moving device 4, and the position (coordinates) of the mark is determined based on the data obtained by imaging the mark. ). Then, with respect to the coordinates of the three or four marks, an error angle (orthogonality) ψ (see FIG. 2) is calculated from a theoretical value and a measured value stored in advance.

  FIG. 3 is a conceptual diagram for explaining the control device 7 and a portion controlled by the control device 7.

  The control device 7 is an image that processes image data obtained by the main recognition unit, storage unit, IO control unit, communication control unit, axis control unit 71 that controls the servo motors 31a, 32a, and 4a, and the board recognition camera 52. A processing unit 72 and the like are included. Among these, the main arithmetic unit, the storage unit, the IO control unit, and the communication control unit are not particularly limited in the present embodiment, and thus detailed description thereof is omitted here. Specifically, the control device 7 includes a well-known CPU that executes a logical operation, a ROM that stores various programs for controlling the CPU in advance, a RAM that temporarily stores various data during operation of the device, and the like. It is configured.

The control device 7 receives signals from encoders (not shown) provided in the servo motors 31a, 32a, 4a, and drives the driving speeds of the main Y direction moving device 31, the sub Y direction moving device 32, and the X direction moving device 4. And control the driving amount.

  Specifically, when the control device 7 receives a signal from the encoder, the axis control unit 71 controls the drive of the servo motors 31a, 32a, and 4a. When the servo motor 31a is driven, the ball screw shaft 31b attached to the servo motor 31a rotates, and the ball nut 31c screwed to the ball screw shaft 31b moves along the first axes Ax1 and Ax1 '. When the servo motor 32a is driven, the ball screw shaft 32b attached to the servo motor 32a rotates, and the ball nut 32c screwed to the ball screw shaft 32b moves along the first axes Ax1 and Ax1 '. As a result, the X-direction moving device 4 supported by the ball nut 31c and the head unit support member fixed to the ball nut 32c moves along the first axes Ax1 and Ax1 '. Further, when the servo motor 4a is driven, the ball screw shaft 4b attached to the servo motor 4a rotates, and the ball nut 4c screwed to the ball screw shaft 4b moves along the second axis Ax2. Thus, the head unit 5 supported by the bracket fixed to the ball nut 4 c moves horizontally to a predetermined position on the base 1.

  In the present embodiment, in the orthogonality measurement using the substrate recognition camera 52, the control device 7 is configured such that the second axis Ax2 is not orthogonal to the first axis Ax1 that is the axis of the main Y-direction moving device 31. In addition, an angle shift with respect to the orthogonality is detected, and a parameter shift dP corresponding to the detected angle shift is detected as the number of pulses. Then, the parameter for driving the main Y-direction moving device 31 and the sub-Y-direction moving device 32 in synchronization is shifted by the above-mentioned shift amount dP, and the sub-Y-direction moving device 32 is changed from the main Y-direction moving device 31 to the basic Control is performed such that the drive is shifted by the shift amount dP with respect to a typical synchronization state. In the present embodiment, the number of pulses for specifying the position is a parameter in the control of the servomotors 31a and 32a.

  Specifically, the unknown pulse number shift dP, the error angle ψ obtained by the orthogonality measurement, the known ball screw distance L, the ball screw lead pitch Lp, and the servo motors 31a and 32a are rotated once. The relationship of Formula 1 is established with the number of pulses D.

(Formula 1)
Ltanψ = Lp · dP / D
From the relationship of Equation 1, a shift amount dP converted to the number of pulses is derived. This shift dP is reflected in the drive control of either the main Y direction moving device 31 or the sub Y direction moving device 32.

  Further, the control device 7 according to the present embodiment stops the control to make the first axis Ax1 and the second axis Ax2 orthogonal when the derived shift amount dP exceeds a predetermined threshold. It is configured. In this way, by setting an upper limit for the amount of parameter shift, it is possible to avoid the occurrence of abnormal noise and a decrease in durability due to increased friction of the ball screw shafts 31b and 32b and the ball nuts 31c and 32c. Can do.

  The orthogonal robot control method will be described in detail below with reference to the drawings.

  FIG. 4 is a flowchart for explaining a control method of the orthogonal robot, and includes an orthogonality measurement step (step S12) and a shift amount calculation step (step S14). FIG. 5 is a flowchart for explaining a control method of the orthogonal robot, and shows an orthogonality adjustment routine (steps S20 to S26).

  First, when the jig substrate (glass substrate) is positioned at a predetermined position on the base 1 (step S11), the orthogonality between the first axis Ax1 and the second axis Ax2 (that is, the error angle ψ). Is measured (step S12).

  Next, in step S13, it is determined whether or not the first axis Ax1 and the second axis Ax2 are orthogonal. If it is determined in step S13 that the first axis Ax1 and the second axis Ax2 are orthogonal, the process proceeds to step S18 and ends. In step S13, when the first axis Ax1 and the second axis Ax2 are not orthogonal (when the error angle ψ is detected), the process proceeds to step S14.

  In step S14, the number of pulses to be shifted, that is, the shift amount dP converted into the number of pulses is calculated based on the relationship of Equation 1, and the process proceeds to step S15.

  In step S15, it is determined whether or not the shift amount dP converted to the number of pulses calculated in step S14 is within a predetermined allowable range. If it is determined in step S15 that the shift amount dP exceeds the predetermined allowable range, the process proceeds to step S17, and the adjustment of the orthogonality is stopped. If it is determined in step S15 that the shift amount dP does not exceed the predetermined allowable range, the process proceeds to step S16, where the number of pulses dP to be shifted is stored in the storage unit of the control device 7, and the orthogonality adjustment routine is performed. (Step S19).

  If the predetermined allowable range is exceeded, the limit value of the allowable range may be shifted to dP.

  In the adjustment of the orthogonality performed in step S19, as shown in FIG. 5, first, in step S21, to which position in the direction orthogonal to the conveyance direction of the printed circuit board P, the X direction moving device 4 is moved. That is, the target position is acquired from the storage unit of the control device 7, and the process proceeds to step S22.

  In step S22, the shift amount dP converted to the number of pulses stored in the storage unit is acquired, and the process proceeds to step S23.

  In step S23, the target pulse number of the main Y-direction moving device 31 is calculated based on the information on the target position acquired in step S21, and the process proceeds to step S24.

  In step S24, the target pulse number of the secondary Y-direction moving device 31 is calculated based on the target position information acquired in step S21 and the shift amount dP converted into the pulse number acquired in step S22, and the process proceeds to step S25.

  In step S25, the axis control unit 71 drives the servo motor 31a and the servo motor 32a based on the respective target pulse numbers calculated in step S23 and step S24, and the one end 41 of the X-direction moving device 4 is driven. By making a difference between the amount of movement and the amount of movement of the other end 42, the first axis Ax1 and the second axis Ax2 are made orthogonal to complete the adjustment (step S26).

  According to the above embodiment, when the second axis Ax2 is deviated from the direction orthogonal to the first axis Ax1, the deviation is detected, and the main Y direction moving device 31 and the sub Y direction moving device 32 are detected. The main Y-direction moving device 31 and the sub-Y-direction moving device 32 are driven while shifting the parameter for driving in synchronization with the shift amount dP corresponding to the shift amount. As described above, when the parameters for driving the main Y-direction moving device 31 and the sub-Y-direction moving device 32 in synchronization are shifted, the driving state of the main Y-direction moving device 31 and the driving of the sub-Y-direction moving device 32 are driven. The states become different from each other, and there is a difference between the amount of movement of one end 41 of the X-direction moving device 4 and the amount of movement of the other end 42. As a result, when the second axis Ax2 of the X-direction moving device 4 is not orthogonal to the first axis Ax1 of the main Y-direction moving device 31, the other end 42 side of the X-direction moving device 4 is moved. The second axis Ax2 of the X-direction moving device 4 is moved along the secondary Y-direction moving device 32 by moving more or less along the secondary Y-direction moving device 32 than the one end 41 side. Adjustment is made so as to be orthogonal to the first axis Ax1. Further, the plurality of suction heads of the head unit 5 can be obtained by strictly orthogonalizing the first axis Ax1 of the main Y direction moving device 31 and the sub Y direction moving device 32 and the second axis Ax2 of the X direction moving device 4. Since the 51 rows and the electronic component supply position rows can be matched, a plurality of electronic components can be simultaneously picked up by the plurality of suction heads 51 with high accuracy, greatly increasing the time for picking up the electronic components. Can be shortened. Therefore, it is possible to improve the accuracy when a plurality of electronic components are sucked simultaneously by the plurality of suction heads 51 while ensuring the positioning accuracy of the components conveyed by the head unit 5.

  In addition, if only one type of parameter for synchronizing the main Y direction moving device 31 and the sub Y direction moving device 32 is shifted, control is performed so that the driving states of the main Y direction moving device 31 and the sub Y direction moving device 32 are different from each other. Therefore, it is not necessary to adjust a plurality of parameters.

  Furthermore, since the relationship between the first axis Ax1, Ax1 ′ and the second axis Ax2 can be adjusted after installing the orthogonal robot on the base 1, when installing the orthogonal robot on the base 1, Only the first axis Ax1 needs to be installed strictly, and no excessive consideration is required for the relationship between the first axis Ax1 ′ and the second axis Ax2. Therefore, the installation work of the orthogonal robot becomes easy.

  In the above-described embodiment, the first driving means has been described as including the servo motor, the ball screw shaft, and the ball nut. However, the present invention is not limited to this, and the first driving means As a means, a linear motor may be used. Even in this case, the error angle ψ of the second axis Ax2 with respect to the first axis Ax1 is detected, and the shift amount dP converted to the number of pulses is calculated using the error angle ψ. Then, the shift amount dP is reflected in a parameter for driving the two linear motors in synchronization.

  In the above-described embodiment, the form in which the orthogonal robot is provided in the component mounting apparatus has been described. However, the present invention is not limited to this, and for example, a component inspection apparatus that inspects the performance and the like of electronic components. It may be a form in which an orthogonal robot is provided. Even in this case, a plurality of tools holding the components are arranged in a row parallel to the second axis Ax2 in the orthogonal robot that transports the components between the component supply unit and the test unit in which the test head is incorporated. Provided.

It is a conceptual diagram for demonstrating the orthogonal robot provided in the component mounting apparatus. It is a conceptual diagram for demonstrating the X direction moving apparatus of an orthogonal robot. It is a conceptual diagram for demonstrating the part controlled by a control apparatus and a control apparatus. It is a flowchart for demonstrating the control method of an orthogonal robot, and shows an orthogonality measurement step and a shift amount calculation step. It is a flowchart for demonstrating the control method of an orthogonal robot, and shows an orthogonality adjustment step.

Explanation of symbols

1 base 2 conveyor (substrate transport means)
31 Main Y-direction moving device (first driving means)
32 Sub Y-direction moving device (first driving means)
4 X-direction moving device (second driving means)
5 Head unit 51 Suction head (tool)
7 Control device (control means)
dP shift amount (amount corresponding to the shift amount, shift amount)
Ax1 first axis of the main axis Ax1 ′ first axis Ax2 second axis

Claims (4)

First driving means having two driving shafts, a main shaft and a sub shaft, extending in the direction of a predetermined first axis and spaced apart from each other;
It extends in the direction of a second axis that intersects the direction of the first axis, is installed on the two first driving means, and is driven by the two first driving means to the first axis. Second driving means moving along,
A head unit provided with a plurality of tools for holding a part so as to form a row parallel to the direction of the second axis, and moving along the second axis by driving of the second driving means; ,
Control means for controlling each driving means,
When the second axis is deviated from a direction orthogonal to the first axis of the main shaft, the control unit detects the deviation and drives the two first driving units in synchronization. An orthogonal robot configured to drive the two first driving means while shifting a parameter for the shift by an amount corresponding to the deviation.   The orthogonal robot according to claim 1, wherein the control means sets an upper limit for the shift amount of the parameter. The base,
Substrate transport means for transporting the substrate to a predetermined position on the base;
A first drive means installed on the base, extending in the direction of a predetermined first axis, and having two drive shafts, a main shaft and a sub shaft, spaced apart from each other;
It extends in the direction of a second axis that intersects the direction of the first axis, is installed on the two first driving means, and is driven by the two first driving means to the first axis. Second driving means moving along,
A head unit provided with a plurality of suction heads for holding components so as to form a row parallel to the direction of the second axis, and moving along the second axis by driving of the second driving means When,
A component supply unit provided so that the supply position of the component is parallel to the transport direction of the substrate;
Control means for controlling each driving means,
When the second axis is deviated from a direction orthogonal to the first axis of the main shaft, the control unit detects the deviation and drives the two first driving units in synchronization. A component mounting apparatus configured to drive the two first driving means while shifting a parameter for the shift by an amount corresponding to the shift amount. First drive means having two drive shafts, a main shaft and a sub shaft, extending in the direction of a predetermined first axis and spaced apart from each other, intersects the direction of the first axis. Second driving means extending in the direction of the second axis, installed on the two first driving means, and moved along the first axis by driving of the two first driving means; An orthogonal robot having a plurality of tools arranged in a row parallel to the direction of the second axis, and a head unit that moves along the second axis by driving of the second driving means. A control method,
An orthogonality measuring step for measuring an orthogonality between a first axis of the main axis of the first driving means and a second axis of the second driving means;
A shift amount calculating step of calculating an amount corresponding to the amount of shift when the second axis is shifted from a direction orthogonal to the first axis of the main shaft;
An orthogonality adjustment step for controlling the two first driving means to drive while shifting the parameter for driving the two first driving means in synchronization by an amount corresponding to the deviation. A method for controlling an orthogonal robot, comprising:

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