JP2002028880A - Biaxial parallel drive type moving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a biaxial parallel drive type moving device having two driving means and capable of safely and quickly stopping the work when a moving body cannot be controlled by the occurrence of an abnormality. SOLUTION: This biaxial parallel drive type moving device is provided with the moving body (beam) 60 extending to the right and left, two driving means 120 moving both end sections of the moving body, a position detecting means 130 detecting the positions of both the right and left end sections of the moving body, a control means 10 controlling the driving means, and displacement measuring means 140 measuring the relative displacement quantities of both end sections of the moving body. When an abnormality occurs on a driving means or the like, the control based on the positions detected by the position detecting means is switched to the control based on the displacement quantities detected by the displacement measuring means, and the driving means having no abnormality is controlled to keep the displacement quantities in a fixed range. The displacement quantities at both end portions of the moving body are suppressed small, and the occurrence of a twist or a crack can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-axis parallel drive type moving device having two driving means and capable of stopping the operation safely and promptly when the control of the moving body becomes impossible due to occurrence of an abnormality.

[0002]

2. Description of the Related Art In recent years, as electronic parts have become widespread, their shapes, weights, and sizes have also become diverse. In order to form an electronic circuit by combining these electronic components, there is an electronic component mounting apparatus for mounting the electronic components on a circuit board.
As shown in FIGS. 6 and 7, for example, the electronic component mounting apparatus 100 includes a component supply body 10 including an electronic component 11 and the like.
A suction nozzle 30 that sucks the electronic component 11 and mounts the electronic component 11 at a predetermined position on the circuit board 20; a board transfer device 40 for transferring the circuit board 20;
Further, two support beams 50 provided so as to straddle the substrate transfer device 40, a beam 60 bridged between the two support beams 50 so as to be movable in the Y direction, and the beam 60
The head 70 and the like are attached so as to be movable in the length direction of the camera. A driving unit 80 (timing belts 81 and 84 and a rotary motor 8 described later) moves the beam 60 in the Y direction and moves the head 70 in the X direction.
2, 83, 85, etc.). The control of the suction nozzle 30 and the driving unit 80 is performed by a control unit (not shown).
It is performed by

As described above, both ends of the beam 60 are joined to the timing belts 81 attached to the two support beams 50, respectively. These timing belts 81 are each a rotary motor (first Y-axis motor). 82,
The second Y-axis motor 83). By driving the first Y-axis motor 82 and the second Y-axis motor 83 independently, the beam 60 and, consequently, the beam 6
0 can be moved in the Y direction. The head 70 is joined to a timing belt 84 attached to the beam 60,
The timing belt 84 is wound around a rotary motor (X-axis motor 85). And this X-axis motor 8
By driving the head 5, the head can be moved in the X direction.

[0004] The control means controls the driving of each motor by means of position detecting means (not shown) for detecting the positions of the beam 60 and the head 70 and various information (beam 60 and head 70) sent from a storage device. Of the electronic component 11 on the circuit board 20, information on the position of the electronic component 11 on the component supply 10, and the like, so that the head 70 is moved to a predetermined position on the component supply 10. The electronic component 11 is sucked by the suction nozzle 30 of the head 70. Then, the head 70 is moved to a predetermined position on the circuit board 20, and the electronic component 11 is mounted on the circuit board 20. Note that, for example, a linear motor may be used as the driving unit 80, or a ball screw may be used instead of the timing belt.

However, with respect to the structure as described above, that is, the movement of the head 70 in the Y direction, the two right and left support beams 50 are required.
And the driving means 80 is attached to each support beam 50. In a case where the beam 60 is moved by independently driving each of the driving means 80 in a state where the beam 60 is movably supported at both ends of the beam 60, for example, the positions of both ends of the beam 60 are detected. The position detecting means (not shown) may be partially disconnected, or the timing belt 81 of the driving means 80 may be broken, causing a large positional deviation at both ends of the beam 60. There is a risk of twisting or cracking. In addition, an excessive load is applied to the motors (82, 83) provided in the driving means 80 due to the displacement, and
There is a risk of causing a failure such as burn-in.

[0006] In order to solve such a problem, for example, there is a control device as disclosed in Japanese Patent No. 2962624. As described above, this control device is used in a component mounting apparatus including two driving units provided at both ends of the beam for moving the beam in the Y direction. As a specific control method, position detection means for detecting the positions of both ends of the beam is provided in each of the two driving means. Then, the amount of displacement in the Y direction at both ends of the beam is detected from the values sent from the two position detecting means. Then, for example, when a failure occurs in one of the driving means and the beam cannot be moved on one side and the amount of displacement exceeds a predetermined limit value, the power supply of the two driving means is turned off. I do. By performing such control, it is possible to prevent an excessive load from being applied to each member for a long time, and as a result, it is possible to suppress the occurrence of torsion and cracks.

[0007]

However, in the control method using the above-described control device, for example, when the displacement amount exceeds the limit value due to failure of one of the driving means, the two driving means are not controlled. Immediately, an emergency stop command (starts the dynamic brake to turn off the power supply) is issued, but there is a time lag until both driving means stop, and one of the driving means is stopped. Nevertheless, there is a possibility that the other drive means is moving,
In this case, there is a possibility that a position shift occurs at both ends of the beam.

In particular, when the driving means includes a relatively rigid component such as a linear motor, the displacement may not be absorbed in some cases, and there is a possibility that twisting or cracking may occur.

Conventionally, in order to obtain the effect of absorbing the position shift at the time of emergency stop as described above,
In some cases, a structure that reduces the rigidity of the moving body (beam) or the joint strength between the moving body and the driving means is adopted. In this case, the rigidity and strength of each part are low. As a result, it is difficult to mount components at high speed and with high accuracy because the natural frequency is lowered and the movable body is bent when stopped.

SUMMARY OF THE INVENTION An object of the present invention is to provide a two-axis parallel drive which is provided with two driving means and can stop the operation safely and promptly in the event that control of a moving body becomes impossible due to an abnormality. It is to provide a mold moving device.

[0011]

In order to solve the above-mentioned problems, a two-axis parallel drive type moving apparatus according to claim 1 comprises a moving body (beam 60) extending left and right, and both right and left ends of the moving body. Two driving means (120) for driving the moving parts independently along the same direction, and position detecting means (1) for detecting the positions of the left and right ends of the moving body, respectively.
30) and a control means (110) for controlling the driving means based on the positions of the left and right ends of the moving body detected by the position detecting means to slide the moving body. The apparatus further comprises a displacement measuring unit (140) for measuring a relative displacement between a left end portion and a right end portion of the moving body, and the control unit controls the displacement amount measured by the displacement measuring unit. The drive means can be controlled based on the, when an abnormality occurs in at least one of the drive means and the position detection means, control of the drive means by the control means, The control based on the position detected by the position detecting means is switched to the control based on the amount of positional deviation detected by the positional deviation measuring means, and the positional deviation amounts of the left and right ends of the moving body are within a certain range. Keep as, and controlling the drive means no abnormality occurred.

According to the two-axis parallel drive type moving device of the first aspect, even when an abnormality such as a failure occurs in one of the two driving means and at least one of the position detecting means. Since the amount of displacement at both ends of the moving body (beam) can be suppressed to a small extent, it is possible to prevent torsion and cracks from occurring. In addition, by controlling the movement of the movable body on the side where no failure has occurred so as to converge the displacement, it is possible to prevent the displacement for a long time and to prevent an excessive load from being applied to the driving means. Also,
The rigidity of the moving body and the joining strength between the moving body and the driving means can be increased, and the occurrence of bending and vibration can be suppressed, and components can be mounted at high speed and with high accuracy. In addition, basically, when an abnormality occurs in one of the driving units and at least one of the position detection units, until the driving unit on which the abnormality has occurred stops, The driving means on the side where no abnormality has occurred is controlled so as to keep the displacement amount within a certain range. When the drive unit on which the abnormality has occurred stops, the drive unit on which the abnormality has not occurred is moved and stopped until the position shift amount becomes zero.

The two-axis parallel drive type moving device according to the second aspect is the two-axis parallel drive type moving device according to the first aspect,
The displacement measuring means (140) is provided in a part of the driving means which moves integrally with one of the left and right ends or one of the left and right ends of the moving body, and emits a linear spot light. Means (141) and a part of the driving means which moves integrally with the other of the left and right ends or the other of the left and right ends of the moving body, and detects a light receiving position of the spot light emitted from the light emitting means. Light receiving position detecting means (142) for detecting, wherein the control means is capable of controlling the driving means by using a change amount of the light receiving position detected by the light receiving position detecting means as a positional deviation amount. And

According to the two-axis parallel drive type moving device of the second aspect, the same effects as those of the first aspect can be obtained, and high accuracy can be achieved by employing a measuring means using light as the displacement measuring means. Can be measured. Further, since measurement can be performed without contact, it is not necessary to consider an error due to the influence of friction or the like. Further, since it is hardly affected by a magnetic field, that is, it is strong against so-called electromagnetic noise, even when a device that generates a magnetic field such as a linear motor is used as a driving unit, it is hardly affected by the magnetic field, and accurate measurement can be performed.

According to a third aspect of the present invention, there is provided a two-axis parallel drive type moving apparatus according to the first aspect.
The displacement measuring means (140) is a strain measuring means (strain sensor 150) provided on the moving body, and the control means is configured such that the strain measured by the strain measuring means indicates a displacement amount. The driving means can be controlled so that the distortion converges to a predetermined value or less.

According to the third aspect of the present invention, the same effect as in the first aspect can be obtained, and the distortion (torsion) of the moving body is directly measured by the distortion measuring means. Since the driving means is controlled so as to eliminate the problem, the torsion of the moving body can be reliably detected, and the occurrence of cracks due to the torsion can be prevented.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which a two-axis parallel drive type moving device according to the present invention is used as a part of an electronic component mounting device will be described below with reference to the drawings. The drawings are only schematically shown to the extent that the invention can be understood, and thus the invention is not limited to the illustrated examples.

An electronic component mounting apparatus is a device for mounting a circuit board on a circuit board conveyed to a predetermined position on an upper surface of a base by a conveyor.
After the head vacuum-adsorbs the electronic component from the electronic component supply unit, the head is moved to a predetermined position on the circuit board by operating the head driving unit and the driving unit, and the device mounts the electronic component on the circuit board. is there. Note that the electronic component mounting apparatus according to the present embodiment has substantially the same structure as the well-known electronic component mounting apparatus as shown in the above-described conventional technique, and therefore, the same configuration will be described below. , And a detailed description thereof will be omitted. The control means 110 and the drive means 120 provided in the two-axis parallel drive type moving device according to the present invention will be mainly described.

In the following description, as shown in FIG.
The Y direction is a moving direction of the beam 60, and the X direction is a direction orthogonal to the Y direction in a horizontal plane. In FIG. 2, a head driving unit for moving the head 70 in the X direction is not shown, but a head driving unit substantially similar to that shown in the related art is used.

The control means 110 includes a driving means 12 which will be described later.
The head 70 is provided to control the head 70 and the head driving means to move the head 70 to a predetermined position. As shown in the block circuit diagram of FIG.
11, a light spot position calculating unit 112, a command switching unit 113, and a current amplifier unit 114. Note that the position command in the figure refers to a destination coordinate and a feed speed of the head 70 specified in advance, and a movement amount of a movable portion 121a of the linear motor 121, which will be described later, calculated based on the current position of the head 70. Directive. Also, FIG. 1 shows one position / speed control unit 111 and one current amplifier unit 114, but actually, in order to control the movement of each end of the beam, Two current amplifiers 114 are provided respectively.

The position / speed control unit 111 controls each of the two drive units 120 so as to reduce the deviation between the position command and a feedback signal regarding the actual position and speed of the movable unit 121a sent from the linear encoder 131 described later. Provided for control. The light spot position calculating means 112 is provided to calculate the amount of displacement of the two movable parts 121a from the value sent from the displacement measuring means 140 described later. The command switching means 113 controls the two driving means 120 by the control means 110 when an abnormality occurs in at least one of the two driving means 120 and the position detecting means 130 as described later. The control is performed based on a feedback signal sent from a linear encoder 131 included in the position detection unit 130 described below, and the displacement between the two movable parts 121a calculated based on information from the displacement measurement unit 140 described later. It is provided to switch to control based on quantity.

As shown in FIG. 2, the driving means 120 is a device for moving the beam 60 and, consequently, the head 70 in the Y direction, and includes a linear motor 121. In the electronic component mounting apparatus 100 according to the present embodiment, one beam 60 is provided on each of the left and right ends. A linear motor 121 is provided on the support beam 50 to move the beam in the Y direction. The linear motor 121 has a movable part 121a and a fixed part 121b. The fixing portion 121b is provided along the length direction of the support beam 50. The fixed portion 121b includes a guide (not shown), and the guide is slidably fitted to a movable portion 121a described later, thereby enabling the movable portion 121a to move in the Y direction. ing. The movable portion 121a is made of a member having magnetism, and is joined to one end of the beam 60 in a state of being slidably fitted to the fixed portion 121b as described above. Then, the magnetic field generated by passing a current through the coil of the electromagnet included in the movable portion 121a and the magnet (not shown) provided in the fixed portion 121b attract and repel the movable portion 121a, and thus the movable portion 121a. And the beam 60 joined at both ends thereof can be moved in the Y direction.

The position detecting means 130 is provided along the length direction of the support beam 50 and has a linear encoder 131 for detecting the position of the movable portion 121a. The movable part 12 detected by the linear encoder 131
The actual position and speed of 1a are sent as feedback signals to the position / speed control unit 111 provided in the control unit 110 as described above.

The displacement measuring means 140 is provided for measuring the relative displacement between the two movable parts 121a. The two movable parts 121a are respectively
Since it is joined to the left and right ends of the beam 60, the displacement between the two movable parts 121a matches the displacement between the left and right ends of the beam 60. Position shift measuring means 1
40 includes a light emitting unit 141 and a light receiving position detecting unit 142. In the present embodiment, the light emitting unit 141
And the light receiving position detecting means 142
It is assumed that it is provided in the 0 movable part 121a. The light emitting means 141 includes a semiconductor laser, and the semiconductor laser emits a spot light 143 so as to be horizontal and parallel to the X axis, and the spot light 143 is transmitted to a light receiving position detecting means 142 described later. Reach.

The light receiving position detecting means 142 includes a PSD (Positoin Sensitibe Device: semiconductor position detecting element) 142a as shown in FIG.
Receiving the spot light 143 emitted from the two movable parts 121
This is provided to detect the amount of positional deviation between a. PSD
142a is a P layer on the front surface of the silicon plate and an N layer on the back surface.
And an intermediate I layer. When the spot light 143 emitted from the light emitting means 141 is incident on the PSD 142a, an electric charge proportional to the light energy is generated at the incident position. The generated charge passes through the resistance layer as a photocurrent and is output (output 1, output 2) from the electrode 142b. Here, the resistance layer is formed so as to have a uniform resistance value over the entire surface, and the photocurrent is divided and output in inverse proportion to the distance to the electrode (resistance value). From the output 2, the displacement position (the amount of displacement) can be measured by the light spot position calculator 112. (See FIG. 1)

Hereinafter, the operation of the electronic component mounting apparatus 100 according to the present embodiment will be described in detail with reference to the flowchart of FIG. In the following description, the position / speed control unit 111 and the current amplifier unit 114 included in the control unit 110 are collectively referred to as a driver.

First, the electronic component mounting apparatus 100 is started, and the head 70 and the beam 60 are moved to predetermined positions. Then, the position of the head 70 at this time is detected as the origin position on the X axis and the Y axis. (S1) In this state, the spot light 14 is emitted from the light emitting means 141.
The light receiving position of the spot light 143 on the light receiving position detecting means (light receiving device) 142 side is stored as the origin of the light spot. (S2) Then, the position command is transmitted to each of the two driving means 120, and the movable part 121a of each driving means 120, that is, the beam joined to the movable part 121a is moved in the Y direction.

Next, a feedback signal from the linear encoder 131 is sent to the position / speed controller 111. The position / speed control unit 111 controls the driving unit 120 so as to reduce the deviation between the feedback signal and the position command. (S3) By controlling each driving means 120 in this way, the beam 60 can be moved to a predetermined position while correcting the movement amount of the beam 60, and accurate positioning can be performed. The control means 110 controls the movement of the head 70 in the X direction at the same time as the movement of the beam 60 in the Y direction. Thus, the head 70
Is moved to a predetermined position on the component supply 10, the electronic component 11 of the component supply 10 is sucked by the suction nozzle 30, the head 70 is moved to a predetermined position on the circuit board 20, and the electronic component 11 is It is mounted on the substrate 20. By repeating this operation, the electronic components 11 on the circuit board 20 are removed.
Is completed.

Next, a case where a failure occurs in a part of the position detecting means 130 or one of the two driving means 120 during the operation will be described. Here, for convenience,
Driving means, position detecting means and control means for controlling them provided on one support beam are collectively described as Y1 axis, and driving means, position detecting means and control means for controlling these are provided on the other supporting beam. Are collectively described as a Y2 axis.

For example, when an abnormality occurs in the Y2-axis driving means (S4), first, the Y2-axis driver applies an emergency stop (dynamic brake) to the Y2-axis linear motor 121. (S5) Then, the Y2 axis driver sends an alarm signal to the Y1 axis driver. (S6) At this time, Y
The 2-axis driver turns off the power and the Y2-axis linear motor 121
To stop. (S7 ') Y receiving the alarm signal
The one-axis driver (S7) changes the control based on the position error amount (light spot position calculation output) sent from the position error measuring means (light receiver) 140 from the control based on the feedback signal sent from the linear encoder 131 so far. Switch to (S8) That is, the movable part 121a on the side where the dynamic brake is applied is no longer in the Y2-axis linear motor 12
1 cannot be controlled by the movable part 121a.
Finally stops while slightly moving due to inertia.
Here, the movement of the movable part 121a on the side where no failure has occurred so that the positional deviation between the two movable parts 121a measured by the positional deviation measuring means 140 falls within a preset allowable value. Control means (Y1-axis driver) 1
10 controls. (S9) Then, the two movable parts 121
The movable part 121 is moved so that the amount of displacement between
a is moved to the origin position of the light spot. (S10) Thereafter, the Y1-axis driver turns off the power and stops the Y1-axis linear motor 121. (S11) The same control is performed when an abnormality occurs in the Y1 axis.

In the present embodiment, the light emitting means 141 and the light receiving position detecting means 14 are used as the position shift measuring means 140 for detecting the amount of position shift at both ends of the beam 60.
2, but a plurality of strain sensors 150 may be provided at both ends of the beam 60 as shown in FIG. In this case, the driving means 120
If the position shift occurs at both ends of the beam 60 due to the failure of the position detecting means 130 or the position detecting means 130, the beam 60 is twisted. Here, similarly to the above case, the control unit 110
Detects the failure and applies an emergency stop (dynamic brake) to the drive means 120 on the side where the failure has occurred. At the same time, the control means 110 sends an instruction to the command switching means 113,
The control based on the feedback signal sent from the linear encoder 131 to the control based on the amount of twist of the beam sent from the strain sensor 150 is switched.
That is, the movable portion 121a on the side where no failure has occurred so that the amount of twist between the two movable portions 121a measured by the strain sensor 150 falls within a preset allowable value.
Is controlled by the control means 110. The movable part 1 is moved so that the amount of twist between the two movable parts 121a becomes zero.
21a is moved. Thereafter, the power supply of the drive unit 120 on the side where no failure has occurred is turned off.

As described above, even when a distortion sensor is used as the displacement measuring means 140, the electronic component mounting apparatus 10 using the light emitting means 141 and the light receiving position detecting means 142 described above.
The same effect as 0 can be obtained. Further, since the distortion measuring means directly measures the distortion (twist) of the moving body and controls the driving means so as to eliminate the torsion, the torsion of the moving body can be reliably detected, and the occurrence of cracks due to the torsion, etc. Can be prevented beforehand.

Further, as the light emitting means 141, for example, a device such as an LED which can project light with a small diameter spot may be used. As the light receiving position detecting means 142, for example, a device capable of detecting a light spot position such as a CCD camera may be used. Further, as the driving means 120, for example, a combination of a rotary motor and a timing belt,
A well-known drive device such as a combination of a rotary motor and a ball screw may be used. Further, as the position detecting means 130, for example, a device such as a rotary encoder capable of detecting the moving amount of both ends of the beam may be used. Also,
The position detecting means 130 (such as a linear encoder) may be provided on only one of the two ends of the beam, and the movement of the other side of the beam may be controlled based on a feedback signal sent from the position detecting means 130. good.

As described above, in the two-axis parallel drive type moving device according to the present invention, at least one of the two driving means 120 and the position detecting means 130 has an abnormality such as failure. The moving object (beam 6)
Since the amount of misalignment at both end portions of 0) can be suppressed within a preset allowable value, it is possible to prevent the occurrence of torsion and cracks. Further, by controlling the movement of the movable portion 121a on the side where no failure has occurred so as to converge the position shift, it is possible to prevent a long-time position shift and prevent an excessive load from being applied to the driving means 120. . In addition, it is not necessary to absorb the displacement at the time of the emergency stop in the moving body, the joint between the moving body and the driving means 120, and the like. Therefore, by increasing the rigidity of the moving body and the bonding strength between the moving body and the driving means 120, the occurrence of bending and vibration can be suppressed, and components can be mounted at high speed and with high accuracy.
In the above-described embodiment, the case where the so-called XY integrated electronic component mounting device 100 uses the two-axis parallel drive type moving device according to the present invention is described. The apparatus 100 may use a two-axis parallel drive type moving apparatus.

[0035]

According to the two-axis parallel driving type moving apparatus of the first aspect, the amount of displacement at both ends of the moving body (beam) can be suppressed to a small extent, thereby preventing the occurrence of twisting and cracks. be able to. In addition, by controlling the movement of the movable part on the side where no failure has occurred so as to converge the displacement, while preventing displacement for a long time,
It is possible to prevent an excessive load from being applied to the driving means. Further, the rigidity of the moving body and the joining strength between the moving body and the driving means can be increased, and the occurrence of bending and vibration can be suppressed, and high-speed, high-precision component mounting becomes possible.

According to the two-axis parallel drive type moving device of the second aspect, the same effect as that of the first aspect can be obtained, and the measurement can be performed with high accuracy. Further, it is not necessary to consider an error due to the influence of friction or the like. Further, the measurement is hardly affected by the magnetic field, and accurate measurement can be performed.

According to the two-axis parallel drive type moving device of the third aspect, the same effect as in the first aspect can be obtained, and at the same time, the torsion of the moving body can be reliably detected and the occurrence of cracks due to the torsion can be prevented. It can be prevented beforehand.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a part of a control method of an electronic component mounting device by a control device.

FIG. 2 is a plan view of a main part showing a structure of the electronic component mounting apparatus shown in the embodiment.

FIG. 3 is a sectional view of a principal part showing a structure of a PSD.

FIG. 4 is a flowchart illustrating a control method of the electronic component mounting device during an emergency stop.

FIG. 5 is a main part plan view showing the structure of the electronic component mounting apparatus shown in the embodiment.

FIG. 6 is a perspective view illustrating an appearance of the electronic component mounting apparatus.

FIG. 7 is a plan view of a main part showing a structure of a conventional electronic component mounting apparatus.

[Explanation of symbols]

 Reference Signs List 60 Moving object (beam) 110 Control means 120 Driving means 130 Position detecting means 140 Position shift measuring means 141 Light emitting means 142 Light receiving position detecting means 150 Strain measuring means (distortion sensor)

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Anzai 8-2, Kokuryo-cho, Chofu-shi, Tokyo F-term in Juke Corporation (reference) 2F065 AA20 BB15 CC00 DD00 DD06 FF23 FF67 GG06 GG12 HH04 JJ16 NN20 QQ23 QQ28 2F069 AA17 AA68 BB04 GG01 GG04 GG06 GG07 GG12 GG17 HH14 HH15 HH30 MM40 3F059 AA03 AA14 BA01 CA07 DC01 DC08 DD06 DD11 DE02 FB15 3F060 AA03 AA07 DA03 EB06 EC07 GA13 GB00 GB02 GD02

Claims (3)

[Claims] 1. A moving body extending left and right, two driving means for driving the left and right ends of the moving body independently to move in the same direction, and the left and right ends of the moving body. And a control means for controlling the driving means based on the positions of the right and left ends of the moving body detected by the position detecting means to slide the moving body. In the parallel drive type moving device, a position shift measuring unit that measures a relative position shift amount between a left end portion and a right end portion of the moving body, and the control unit detects the position shift measured by the position shift measuring unit. The drive unit can be controlled based on the amount, and when at least one of the drive unit and the position detection unit has an abnormality, the control unit controls the drive unit. The control based on the position detected by the position detecting means is switched to the control based on the amount of positional deviation detected by the positional deviation measuring means, and the positional deviation amounts of the left and right ends of the moving body are within a certain range. A two-axis parallel drive type moving device characterized by controlling a driving means in which no abnormality has occurred so as to maintain the same. 2. The driving device according to claim 1, wherein the displacement measuring unit moves integrally with one of the left and right ends or one of the left and right ends of the moving body. A light emitting means for emitting a spot light, and a light emitting means provided on a part of the driving means moving integrally with the other of the left and right ends or the other of the left and right ends of the moving body, Light receiving position detecting means for detecting a light receiving position of the spot light emitted from the light receiving means, wherein the control means can control the driving means by using a change amount of the light receiving position detected by the light receiving position detecting means as a displacement amount. A two-axis parallel drive type moving device, characterized in that: 3. The two-axis parallel drive type moving device according to claim 1, wherein the displacement measuring means is a strain measuring means provided on the moving body, and the control means measures by the strain measuring means. A two-axis parallel drive type moving apparatus, wherein the driving means is capable of controlling the driving means to converge the distortion to a predetermined value or less, assuming that the generated distortion indicates the amount of displacement.