JP2010107416A5 - - Google Patents

Download PDF

Info

Publication number
JP2010107416A5
JP2010107416A5 JP2008280949A JP2008280949A JP2010107416A5 JP 2010107416 A5 JP2010107416 A5 JP 2010107416A5 JP 2008280949 A JP2008280949 A JP 2008280949A JP 2008280949 A JP2008280949 A JP 2008280949A JP 2010107416 A5 JP2010107416 A5 JP 2010107416A5
Authority
JP
Japan
Prior art keywords
detection
vibration
drive
manufacturing
angular velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008280949A
Other languages
English (en)
Japanese (ja)
Other versions
JP5360676B2 (ja
JP2010107416A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008280949A priority Critical patent/JP5360676B2/ja
Priority claimed from JP2008280949A external-priority patent/JP5360676B2/ja
Publication of JP2010107416A publication Critical patent/JP2010107416A/ja
Publication of JP2010107416A5 publication Critical patent/JP2010107416A5/ja
Application granted granted Critical
Publication of JP5360676B2 publication Critical patent/JP5360676B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008280949A 2008-10-31 2008-10-31 角速度検出装置の製造方法 Expired - Fee Related JP5360676B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008280949A JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008280949A JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013183840A Division JP5700090B2 (ja) 2013-09-05 2013-09-05 角速度検出装置の製造方法

Publications (3)

Publication Number Publication Date
JP2010107416A JP2010107416A (ja) 2010-05-13
JP2010107416A5 true JP2010107416A5 (enExample) 2011-11-17
JP5360676B2 JP5360676B2 (ja) 2013-12-04

Family

ID=42296992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008280949A Expired - Fee Related JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

Country Status (1)

Country Link
JP (1) JP5360676B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP2014197010A (ja) * 2014-05-29 2014-10-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP7293839B2 (ja) 2019-04-23 2023-06-20 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3430711B2 (ja) * 1995-05-30 2003-07-28 松下電器産業株式会社 角速度センサ
JP2000171257A (ja) * 1998-12-04 2000-06-23 Toyota Motor Corp 角速度検出装置
JP4449110B2 (ja) * 1999-08-18 2010-04-14 パナソニック株式会社 角速度センサ
JP4924858B2 (ja) * 2001-07-06 2012-04-25 セイコーエプソン株式会社 角速度測定装置
JP4163067B2 (ja) * 2003-07-14 2008-10-08 日本碍子株式会社 物理量測定方法および装置
JP2007071706A (ja) * 2005-09-07 2007-03-22 Japan Aviation Electronics Industry Ltd 音叉型振動ジャイロ

Similar Documents

Publication Publication Date Title
JP2009198206A5 (enExample)
JP2018159674A5 (enExample)
JP2013130720A5 (enExample)
JP2010540975A5 (enExample)
JP2013130836A5 (ja) 防振制御装置、防振制御方法、光学機器、撮像装置
JP2007212556A5 (enExample)
JP2015184157A5 (enExample)
FR2920224B1 (fr) Procede de determination d'une vitesse de rotation d'un capteur vibrant axisymetrique, et dispositif inertiel mettant en oeuvre le procede
ATE496279T1 (de) Mikromechanischer coriolis-drehratensensor
EP2607850A3 (en) Micromechanical Coriolis Rate of Rotation Sensor
JP2012173055A5 (enExample)
MX343155B (es) Deteccion de un cambio en el area en seccion transversal de un tubo de fluido en un medidor vibratorio al determinar la rigidez en modo lateral.
EP2489981A3 (en) Angular velocity sensor and electronic device
JP2010107416A5 (enExample)
EP2955480A3 (en) Mems sensor with decoupled drive system
EP1840704A3 (en) Inclination calculation apparatus and inclination calculation program, and game apparatus and game program
JP2009031195A5 (enExample)
JPWO2018229566A1 (ja) 車間距離警告システムのための処理ユニット及び処理方法、車間距離警告システム、及び、モータサイクル
JP2009041983A5 (enExample)
JP2009159774A5 (enExample)
EP1790955A4 (en) CORIOLIS FLOWMETER OF THE TERTIARY MODEL VIBRATION TYPE
JP2014041520A5 (enExample)
WO2011128606A3 (fr) Mesure gyroscopique par un gyroscope vibrant en precession
US20150068306A1 (en) Movable device having drop resistive protection
JP2015094716A5 (ja) 振動素子製造用基板、振動素子の製造方法、物理量検出装置、電子機器、および移動体