JP2010107416A5 - - Google Patents

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Publication number
JP2010107416A5
JP2010107416A5 JP2008280949A JP2008280949A JP2010107416A5 JP 2010107416 A5 JP2010107416 A5 JP 2010107416A5 JP 2008280949 A JP2008280949 A JP 2008280949A JP 2008280949 A JP2008280949 A JP 2008280949A JP 2010107416 A5 JP2010107416 A5 JP 2010107416A5
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JP
Japan
Prior art keywords
detection
vibration
drive
manufacturing
angular velocity
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JP2008280949A
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English (en)
Japanese (ja)
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JP2010107416A (ja
JP5360676B2 (ja
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Priority claimed from JP2008280949A external-priority patent/JP5360676B2/ja
Publication of JP2010107416A publication Critical patent/JP2010107416A/ja
Publication of JP2010107416A5 publication Critical patent/JP2010107416A5/ja
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Publication of JP5360676B2 publication Critical patent/JP5360676B2/ja
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JP2008280949A 2008-10-31 2008-10-31 角速度検出装置の製造方法 Expired - Fee Related JP5360676B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008280949A JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008280949A JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013183840A Division JP5700090B2 (ja) 2013-09-05 2013-09-05 角速度検出装置の製造方法

Publications (3)

Publication Number Publication Date
JP2010107416A JP2010107416A (ja) 2010-05-13
JP2010107416A5 true JP2010107416A5 (enExample) 2011-11-17
JP5360676B2 JP5360676B2 (ja) 2013-12-04

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ID=42296992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008280949A Expired - Fee Related JP5360676B2 (ja) 2008-10-31 2008-10-31 角速度検出装置の製造方法

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JP (1) JP5360676B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP2014197010A (ja) * 2014-05-29 2014-10-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP7293839B2 (ja) 2019-04-23 2023-06-20 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3430711B2 (ja) * 1995-05-30 2003-07-28 松下電器産業株式会社 角速度センサ
JP2000171257A (ja) * 1998-12-04 2000-06-23 Toyota Motor Corp 角速度検出装置
JP4449110B2 (ja) * 1999-08-18 2010-04-14 パナソニック株式会社 角速度センサ
JP4924858B2 (ja) * 2001-07-06 2012-04-25 セイコーエプソン株式会社 角速度測定装置
JP4163067B2 (ja) * 2003-07-14 2008-10-08 日本碍子株式会社 物理量測定方法および装置
JP2007071706A (ja) * 2005-09-07 2007-03-22 Japan Aviation Electronics Industry Ltd 音叉型振動ジャイロ

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