JP2010043352A5 - - Google Patents
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- Publication number
- JP2010043352A5 JP2010043352A5 JP2009153960A JP2009153960A JP2010043352A5 JP 2010043352 A5 JP2010043352 A5 JP 2010043352A5 JP 2009153960 A JP2009153960 A JP 2009153960A JP 2009153960 A JP2009153960 A JP 2009153960A JP 2010043352 A5 JP2010043352 A5 JP 2010043352A5
- Authority
- JP
- Japan
- Prior art keywords
- plate
- pair
- vacuum vessel
- closed space
- plate members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009153960A JP5580004B2 (ja) | 2008-07-14 | 2009-06-29 | 真空容器、および真空処理装置 |
| US12/499,926 US8763833B2 (en) | 2008-07-14 | 2009-07-09 | Vacuum vessel, vacuum processing apparatus comprising vacuum vessel, and vacuum vessel manufacturing method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008182470 | 2008-07-14 | ||
| JP2008182470 | 2008-07-14 | ||
| JP2009153960A JP5580004B2 (ja) | 2008-07-14 | 2009-06-29 | 真空容器、および真空処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010043352A JP2010043352A (ja) | 2010-02-25 |
| JP2010043352A5 true JP2010043352A5 (cg-RX-API-DMAC7.html) | 2012-08-30 |
| JP5580004B2 JP5580004B2 (ja) | 2014-08-27 |
Family
ID=41504165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009153960A Active JP5580004B2 (ja) | 2008-07-14 | 2009-06-29 | 真空容器、および真空処理装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8763833B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5580004B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012141105A (ja) * | 2011-01-05 | 2012-07-26 | Shimadzu Corp | 真空チャンバ |
| US20140250658A1 (en) * | 2013-03-05 | 2014-09-11 | Applied Materials, Inc. | Vacuum chambers and components for semiconductor substrate processing and methods of fabrication |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1307584A (en) * | 1919-06-24 | Pheyes | ||
| US1909136A (en) * | 1929-07-24 | 1933-05-16 | Thomas & Betts Corp | Conduit box |
| US2488710A (en) * | 1946-09-23 | 1949-11-22 | Allegheny Ludlum Steel | Enclosing shield for electrical applications |
| US4102557A (en) * | 1977-03-01 | 1978-07-25 | Pace Incorporated | Collapsible container |
| JPS5881268A (ja) | 1981-11-06 | 1983-05-16 | Japanese National Railways<Jnr> | 真空槽 |
| EP0452778B1 (en) * | 1990-04-20 | 1995-03-15 | Applied Materials, Inc. | Pressure vacuum vessel and method of manufacture |
| JPH05103972A (ja) | 1990-11-28 | 1993-04-27 | Plasma Syst:Kk | 真空容器 |
| JPH04236777A (ja) * | 1991-01-17 | 1992-08-25 | Kobe Steel Ltd | 半導体製造装置用真空チャンバの箱体 |
| JPH05263936A (ja) * | 1992-03-17 | 1993-10-12 | Kobe Steel Ltd | 高真空チャンバの壁板の製造方法 |
| JP3206962B2 (ja) | 1992-05-27 | 2001-09-10 | 日本発条株式会社 | 真空容器 |
| JPH0629100A (ja) | 1992-07-07 | 1994-02-04 | Mitsubishi Electric Corp | 加速器用真空容器 |
| JPH0864542A (ja) | 1994-08-25 | 1996-03-08 | Plasma Syst:Kk | 半導体処理装置用真空チャンバーおよびその製造方法 |
| JPH09209150A (ja) | 1996-02-06 | 1997-08-12 | Tokyo Electron Ltd | 真空チャンバ及びその製造方法 |
| US6349843B1 (en) * | 1999-04-01 | 2002-02-26 | The Vollrath Company Llc | Pan removal ramp |
| JP2005163964A (ja) * | 2003-12-04 | 2005-06-23 | Toyo Sekkei Kogyo Kk | 半導体製造装置用開閉装置 |
| US7267229B2 (en) * | 2004-11-12 | 2007-09-11 | Cheng Shun Chen | Foldable container device |
| JP4926530B2 (ja) * | 2006-04-27 | 2012-05-09 | 東京エレクトロン株式会社 | シール部材、減圧容器、減圧処理装置、減圧容器のシール機構、および減圧容器の製造方法 |
| US20090294281A1 (en) | 2006-07-07 | 2009-12-03 | Canon Anelva Corporation | Plasma film forming apparatus and film manufacturing method |
| JP2008021487A (ja) | 2006-07-12 | 2008-01-31 | Mitsubishi Electric Corp | 真空容器及びその製造方法 |
| JP4660570B2 (ja) | 2008-04-15 | 2011-03-30 | キヤノンアネルバ株式会社 | 真空成膜装置及び成膜方法 |
| JP2009299184A (ja) | 2008-05-12 | 2009-12-24 | Canon Anelva Corp | 磁場発生装置、磁場発生方法、スパッタ装置及びデバイスの製造方法 |
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2009
- 2009-06-29 JP JP2009153960A patent/JP5580004B2/ja active Active
- 2009-07-09 US US12/499,926 patent/US8763833B2/en active Active