JP2010016140A - Substrate storing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storing container that suppresses hindrance to a positioning operation, etc., less causes a decrease in positioning precision, and improves slidability of a positioner. <P>SOLUTION: A plurality of positioners 8 into which a pair of positioning pins 51 are inserted are fitted to a bottom plate 2 of a container body 1 storing a semiconductor wafer, and each of the positioners 8 includes a pair of positioning blocks 9 to be opposed to each other in a state where a pair of positioning pins 51 are inserted. Each of the positioning blocks 9 is formed in a plan-view nearly square shape having an opposite surface 11 made open, and also recessed in a nearly V cross-sectioned shape such that the inclined internal surfaces 12 thereof come into contact with upper parts of positioning pins, opened opposite surfaces 11 of the pair of positioning blocks 9 being made to contact each other to communicate. The positioners 8 are post-installed, so the positioners 8 are made thin and surfaces of the positioners 8 are prevented from being uneven or from deforming owing to a deficiency in cooling during molding to cause hindrance to the positioning operation etc. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate storage container that supports a substrate such as a semiconductor wafer.

  A conventional substrate storage container for storing semiconductor wafers is not shown, but for example, a front open box container body for aligning and storing a plurality of thin semiconductor wafers having a diameter of 300 mm, and an open front portion of the container body are opened and closed via a gasket. And a detachable lid that is positioned and mounted on the lid opening / closing device (see Patent Documents 1, 2, 3, 4, 5, and 6).

The container body is injection-molded using a resin-containing molding material, and a substrate storage container, specifically, an elongated positioning tool for positioning the container body is disposed on both the front side and the rear center of the bottom part. ing. The positioning tool is installed in the transport device when the first contact portion that comes into contact with each of the first positioning pins of a set of three, such as a lid opening / closing device, from above, and when transferred from this state to another device or the like. Each of the set of three second positioning pins is formed in a substantially rectangular or oval shape with a second contact portion that contacts from above, and is integrally formed on the bottom of the container body or retrofitted as a separate part. Has been.
WO99 / 39994 JP 2000-306988 A JP 2004-214269 A JP 2006-128461 A JP 2002-68364 A Japanese Patent Laid-Open No. 2003-174080

  The conventional substrate storage container is configured as described above, and a plurality of positioning tools are simply formed integrally on the bottom of the container main body, or are retrofitted as separate parts, and thus have the following problems.

  First, when a plurality of positioning tools are integrally formed on the bottom of the container body, the thickness of the positioning tool becomes thicker due to molding. There is a problem of causing troubles. In particular, since a plurality of positioning tools are generally formed on the container main body instead of one, the positioning accuracy is lowered. In addition, when the container body and a plurality of positioning tools are integrally formed, they are formed of the same molding material, so that the slipperiness that slides in contact with the positioning pins of the positioning tool is deteriorated and positioned at the correct position. It may not be possible.

  Next, when a plurality of positioning tools are retrofitted as separate parts to the bottom of the container main body, the container main body and the positioning tool can be formed of different molding materials, so that improvement in the slipperiness of the positioning tool is expected. Although it can, the attachment error at the time of attaching a positioning tool to the bottom part of a container main body accumulates, and there exists a possibility of causing the remarkable fall of positioning accuracy. Furthermore, since the conventional positioning tool is simply formed in a substantially rectangular or elliptical shape having the first and second contact portions, it can be fitted to both the first positioning pin and the second positioning pin with high accuracy. There is a problem that it is difficult to adjust the height.

  The present invention has been made in view of the above, and provides a substrate storage container that can prevent the positioning operation and the like from being hindered, reduce the positioning accuracy, and improve the slipperiness of the positioning tool. The purpose is that.

In the present invention, in order to solve the above-mentioned problem, a positioning tool that is inserted and fitted into a pair of positioning pins is attached to the bottom of the container body that stores the substrate,
The positioning tool includes a pair of positioning blocks that are respectively inserted and fitted into a pair of positioning pins and face each other. Each positioning block is formed in a substantially square shape with an opening on the facing surface, and is recessed in a substantially V-shaped cross section. The inclined inner surface can be brought into contact with the upper portion of the positioning pin, and the opposed surfaces opened by the pair of positioning blocks are brought into contact with each other so as to be substantially communicated (approximately communicated).

A plurality of height adjustment plates that contact the positioning block of the positioning tool can be provided side by side at the bottom of the container body.
In addition, the bottom plate can be supported at the bottom of the container body at an interval, and the bottom plate can be provided with an exposure hole for exposing the positioning tool.
Further, the opposing surfaces of the pair of positioning blocks can be abutted with a space.

Alternatively, the mounting flanges can be protruded from both side portions of the positioning block to form positioning bosses on the mounting flanges, and the fasteners penetrating the positioning bosses can be screwed onto the bottom of the container body.
It is also possible to provide a locking claw on one of the bottom of the container main body and the positioning block and a locking hole on the other, and to detachably fit the locking claw and the locking hole.
Furthermore, the positioning block can be molded from a molding material having excellent slipperiness.

  Here, the substrate in the claims includes at least φ200, φ300, φ450 mm semiconductor wafer, glass substrate, mask glass, and the like. Further, the container body is not particularly limited to transparent, opaque, translucent, front open box type, top open box type and the like. It is preferable that a plurality of the pair of positioning pins is provided on a semiconductor manufacturing apparatus including, for example, a semiconductor processing apparatus, a lid opening / closing apparatus, a gas replacement apparatus, and a transfer apparatus. Fasteners include at least screws, bolts, and screw members that are functionally similar to these.

  The molding material having excellent sliding property means a molding material having a small static friction coefficient so as to be superior to at least the resin material for molding the container body. The static friction coefficient in the relationship between the resin material and steel is 0.3. The following is preferable. Examples of the resin material having a static friction coefficient of 0.3 or less include polyacetal, polyether ether ketone, polybutylene terephthalate, polyethylene, fluororesin, and liquid crystal polymer. The resin material can be mixed with a resin having good slidability, or a fluororesin or mica can be added to reduce the static friction coefficient.

  According to the present invention, for example, the positioning tool of the container body is inserted and fitted into a pair of positioning pins such as a semiconductor manufacturing apparatus, the inclined inner surface of the positioning block is slid down on each positioning pin, and the positioning block is placed above the positioning pin. If the valley portions of the substrate are brought into contact with each other, the substrate storage container can be positioned with high accuracy.

According to the present invention, it is possible to prevent the positioning operation of the substrate storage container from being hindered and reduce the positioning accuracy.
In addition, if a plurality of height adjustment plates that contact the positioning block of the positioning tool are provided side by side at the bottom of the container body, the positioning tool can be raised by adjusting the contact amount of the positioning block with respect to the plurality of height adjustment plates. It can be easily positioned in the vertical direction.

Further, if the opposing surfaces of the pair of positioning blocks are abutted with a space therebetween, water droplets are prevented from accumulating between the pair of positioning blocks at the time of cleaning the container body and the like, thereby preventing generation of particles. be able to.
In addition, if the mounting flange protrudes from both sides of the positioning block, a positioning boss is formed on each mounting flange, and a fastener passing through the positioning boss is screwed into the bottom of the container body, the bottom of the container body It is possible to attach the positioning block of the positioning tool with high accuracy and prevent the positioning block from being displaced.

  Furthermore, if the positioning block is formed of a molding material having excellent slipperiness, it is possible to improve the slipperiness of the positioning tool with respect to the positioning pin and prevent the positioning tool from being stopped midway during the positioning operation.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. The substrate storage container in the present embodiment is a front for storing a plurality of semiconductor wafers W as shown in FIGS. An open box container main body 1 and a lid 60 that opens and closes the open front portion 29 of the container main body 1 are provided, and a plurality of positioning tools 8 for positioning the container main body 1 are retrofitted to the bottom plate 2 of the container main body 1. The separate support bodies 40 that can horizontally support the semiconductor wafer W are mounted on both sides inside the container body 1.

  As shown in FIGS. 3, 12, 13 and the like, the semiconductor wafer W is made of, for example, a thin and heavy silicon wafer having a thickness of 925 μm and having a thickness of φ450 mm, and a notch for alignment and identification (not shown) is formed on the periphery. It is cut out into a circular shape, and 25 sheets are aligned and stored in the container body 1.

  The container main body 1 and the lid body 60 are each injection-molded with a molding material containing a predetermined resin. Examples of the predetermined resin in the molding material include polycarbonate, polyether ether ketone, polyether imide, and cyclic olefin resin, which are excellent in mechanical properties and heat resistance. Carbon, carbon fiber, metal fiber, carbon nanotube, conductive polymer, antistatic agent, flame retardant or the like is selectively added to the molding material as necessary.

  As shown in FIGS. 1, 3 to 6, 10, and the like, the container body 1 includes a bottom plate 2 that is larger than the semiconductor wafer W, and a top plate that faces the bottom plate 2 from above with a storage space for the semiconductor wafer W interposed therebetween. Opaque comprising a plate 19, a back wall 25 that connects the bottom plate 2 and the rear portion of the top plate 19 up and down, and a pair of left and right side walls 27 that connect the left and right sides of the bottom plate 2 and the top plate 19 up and down. It is formed on the front open box type and mounted on the lid opening / closing device 50 with the horizontally long front portion 29 opened in the horizontal horizontal direction, or washed with the washing liquid in the washing tank.

  As shown in FIGS. 3 and 4, the bottom plate 2 and the top plate 19 are basically formed in a substantially flat trapezoidal shape that is wide and long on the front surface 29 side of the container body 1 and narrow and short on the back wall 25 side. It inclines so that it may approach gradually as it goes to the back wall 25 direction from the part 29 side.

  The bottom plate 2 is provided with a large number of screw bosses 3 each having a bottomed cylindrical shape, and cylindrical filter bosses 4 are provided in the vicinity of the four corners. An air supply filter 5 and an exhaust filter 6 communicating between the inside and the outside of the container body 1 are detachably fitted via O-rings. The air supply filter 5 and the exhaust filter 6 have a built-in one-way valve, for example. In this case, the air filter 5 is connected to a gas replacement device to replace the air in the container body 1 with nitrogen gas. It functions to prevent oxidation and the like.

  As shown in FIGS. 5 to 8 and the like, a plurality of elongated height adjusting plates 7 are juxtaposed at a predetermined pitch on both sides of the front portion and the center of the rear portion of the bottom plate 2, and the plurality of height adjusting plates 7 are arranged. Further, a positioning tool 8 for positioning the substrate storage container, specifically, the container main body 1 on the lid opening / closing device 50 is screwed through the fastening screw and the screw boss 3 of the bottom plate 2.

  As shown in FIGS. 3 to 8 and the like, each positioning tool 8 includes a pair of positioning blocks 9 that are contacted and supported between the plurality of height adjusting plates 7, and the pair of positioning blocks 9 has a slight draining space 10. The pair of positioning blocks 9 are inserted into a pair of positioning pins 51 erected on the lid opening / closing device 50 from above to respectively connect the container body 1 to the lid opening / closing device. It functions to position on 50 with high accuracy.

  Each positioning block 9 is injection-molded into a planar square having an opening facing the other positioning block 9 using a molding material that is more slippery than the resin material that molds the container body 1. The concave portion is formed in a substantially V-shape so that the concave portion is directed downward, and functions so that the pair of inclined inner surfaces 12 of the concave portion are brought into sliding contact with the hemispherical upper portion of the positioning pin 51.

  Examples of the molding material for the positioning block 9 include slippery, heat-resistant, chemical-resistant, and flame-retardant polyether ether ketone, polybutylene terephthalate, and polybutylene naphthalate. For example, when the container body 1 is made of polycarbonate, the static friction coefficient of the positioning block 9 is about 0.33 because the static friction coefficient of the container body 1 against steel is about 0.33. 0.3 or less is preferable.

  Mounting flanges 13 are formed on both sides of the positioning block 9 so as to protrude horizontally. A cylindrical positioning boss 14 having a step is integrally formed on each mounting flange 13 and penetrates through the positioning boss 14. When the fastening screw is screwed into the screw boss 3, the positioning block 9 is positioned on the container body 1 with high accuracy.

  Of the peripheral edge of the positioning block 9, at least the edge of the facing surface 11 that faces and opposes the other positioning block 9 is formed with a taper from the viewpoint of improving moldability and draining performance during cleaning. Further, a substantially hinge-shaped support plate 15 located between the pair of left and right positioning bosses 14 is integrally mounted on the rear surface of the positioning block 9, and the support plate 15 has a posture of the positioning block 9 when screwed. It functions to optimize and add rigidity.

  The pair of positioning pins 51 is provided on the lid opening / closing device 50 as a set at a predetermined interval, for a total of three. Further, in the case of a transport device for handling a substrate storage container, another set of positioning pins 51 is erected and can be brought into contact with the substrate storage container positioning tool 8 positioned on the lid opening / closing device 50, It is possible to transfer the substrate storage container by fitting so as to be adjacent to each of the pair of positioning pins 51 of the previous set.

  As shown in FIGS. 2, 3, 9, etc., the screw boss 3 of the bottom plate 2 covers the bottom plate 2 and exposes a plurality of air supply filters 5, exhaust filters 6, and positioning tools 8. The plate 16 is screwed horizontally through a fastening screw. The bottom plate 16 is formed in a similar shape that is slightly smaller than the bottom plate 2, the peripheral edge portion is erected and reinforced, and conveyor rails for conveyance are selectively formed on both left and right sides.

  A plurality of cylindrical screw bosses 3A and positioning bosses 14A are disposed together with linear reinforcing ribs on the inner surface of the bottom plate 16 facing the bottom plate 2, and the screw bosses 3A and positioning bosses 14A are connected to each other. The bottom screw 16 is positioned on the bottom plate 2 with high accuracy by screwing the penetrating fastening screws into the screw bosses 3 of the bottom plate 2. Near the four corners of the bottom plate 16, circular or semicircular exposure holes 17 that expose the air supply filter 5 and the exhaust filter 6 in close proximity are formed, respectively. In the center of the rear part, rectangular exposure holes 17A for exposing the positioning tool 8 in close proximity are respectively drilled.

  A plurality of identification holes 18 located in the vicinity of the exposure holes 17A are drilled in the rear part of the bottom plate 16, and a detachable information identification pad (not shown) is selectively inserted into the plurality of identification holes 18, The type of the substrate storage container, the number of semiconductor wafers W, and the like are identified by the lid opening / closing device 50 and the like.

  A pair of screw bosses 3B positioned on the upper surface of the side wall 27 are arranged in the front and rear sides, as shown in FIG. The top flange 20 for conveyance gripped by the factory ceiling conveyance mechanism is horizontally screwed to the plurality of pairs of screw bosses 3B via fastening screws. The pair of screw bosses 3B are provided with reinforcing connecting ribs 21 that are in contact with or close to the back surface of the top flange 20, each screw boss 3B is formed in a bottomed cylindrical shape, and the outer peripheral surface has a center of the container body 1 on its outer peripheral surface. Reinforcing ribs 22 that are inclined and extend in the front direction are integrally formed.

  As shown in FIGS. 1, 3, 4 and the like, the top flange 20 is formed in a plane polygonal flat plate that is wide and long on the front surface 29 side of the container body 1 and narrow and short on the back wall 25 side. The holding hole 23 penetrating through the pair of holding claws of the ceiling transport mechanism and held by interference is drilled into a planar rectangle.

  Screw holes 24 and positioning bosses 14B that protrude downward and face the plurality of screw bosses 3B of the top plate 19 are arranged in parallel at both end portions of the top flange 20, respectively. And the top flange 20 is positioned with high accuracy on the top plate 19, and the fork of the ceiling transport mechanism is rearward between these 19 and 20. A narrow holding space for entering from the inside is defined.

  As shown in FIGS. 5 and 6, the rear wall 25 is formed with a transparent viewing window 26 in the center by using a two-color molding method. The viewing window 26 allows the inside of the container body 1 to be exposed from the outside. Observed and grasped visually.

  As shown in FIG. 5 and the like, each side wall 27 is formed in a substantially straight plate shape on the front side according to the shape of the bottom plate 2 and the top plate 19, and the rear side is inclined inwardly of the bottom plate 2 and the top plate 19. The rear portion is integrally connected to the side portion of the back wall 25. In addition to reinforcing and preventing deformation, a substantially trapezoidal grip portion 28 that can interfere with a finger or the like extends in the front-rear direction on the surface of each side wall 27 to form a recess.

  As shown in FIGS. 1, 3 to 5, 10, 11, etc., the front portion 29 of the container main body 1 has a rim flange 30 that protrudes outward from its peripheral edge via a small triangular holding rib. A lid 60 that is formed and detachable is fitted into the rim flange 30 by a lid opening / closing device 50. The rim flange 30 has a front frame-shaped mounting groove 31 cut out on the inner peripheral surface thereof, and a lip-type gasket 32 that surrounds and press-fits the lid 60 is tightly fitted in the mounting groove 31. Locking holes 33 located at the rear of the gasket 32 are formed in both the upper and lower sides of the inner peripheral surface.

  The gasket 32 is molded into a frame shape that can be elastically deformed using, for example, fluoro rubber, silicone rubber, various thermoplastic elastomers (for example, olefin-based, polyester-based, polystyrene-based) having excellent heat resistance and weather resistance as a molding material. In addition, a tapered projecting piece 34 extending in the direction of the front portion 29 of the container body 1 is integrally formed on the facing surface facing the lid 60 in an endless manner. The projecting pieces 34 gradually incline inward of the container main body 1 toward the front portion 29 of the container main body 1 and press against the outer peripheral surface of the peripheral wall of the lid body 60 to ensure airtightness.

  Of the outer peripheral surface of the rim flange 30, a pair of front and rear frame ribs 35 having a substantially frame shape are arranged at intervals on at least the upper part and the left and right side parts, and between the pair of frame ribs 35, A plurality of X ribs 36 for securing strength are connected and installed side by side. Of the upper part between the pair of frame ribs 35 and the left and right side parts, at least both side parts are selectively formed integrally with plate-shaped strength holding ribs 37 that divide the plurality of X ribs 36 into front and rear. The holding rib 37 further improves the rigidity of the rim flange 30. Further, a conveyor rail 38 for conveyance positioned in alignment with the front of the bottom plate 16 is provided at the lower portion of the outer peripheral surface of the rim flange 30.

  Each support 40 is injection-molded with a molding material containing a predetermined resin, for example, polybutylene terephthalate, polyetheretherketone, polycarbonate, COP or the like having excellent slipperiness. Carbon fibers, metal fibers, carbon nanotubes, conductive polymers, resins imparted with conductivity, and the like are selectively added to the molding material as necessary.

  As shown in FIGS. 3, 12, 13, etc., each support body 40 protrudes in a state in which the frame body 41 is opposed to the inner surface of the side wall 27 of the container body 1, and is vertically aligned from the frame body 41. A plurality of support pieces 42 that support W, and each support piece 42 projects horizontally from the frame body 41 to horizontally support at least the front side of the peripheral edge of the semiconductor wafer W. And rear support pieces 44 that protrude horizontally from the frame body 41 and horizontally support at least the rear side of the periphery of the semiconductor wafer W, and are respectively attached to the inner surfaces of the side walls 27 of the container body 1. Can be installed freely.

  As shown in FIGS. 1, 3, 11, 14, and 15, the lid 60 includes a horizontally long casing 61 that fits in the opened rim flange 30 of the container body 1, and the casing 61. The surface plate 76 which covers the opened surface (front surface) of the slab, and the locking mechanism 80 interposed between the housing 61 and the surface plate 76 are configured.

  The casing 61 is basically formed in a shallow, substantially cross-sectional dish shape with a frame-shaped peripheral wall, and a central portion 62 is formed so as to protrude from the back side to the front side in a substantially box shape. An installation space for the locking mechanism 80 is partitioned and formed with a plurality of screw bosses between the central portion 62 and the left and right side portions of the peripheral wall. A plurality of door guides 63 for facilitating the attachment and detachment of the lid 60 are respectively disposed in the vicinity of the rounded four corners of the outer peripheral surface of the peripheral wall of the casing 61. The through holes 64 are respectively perforated, and each through hole 64 faces the locking hole 33 of the rim flange 30.

  A plurality of reinforcing ribs 65 oriented in the vertical direction are juxtaposed on the raised surface of the central portion 62 of the casing 61 at a predetermined pitch, and the concave back surface of the central portion 62 is horizontally aligned in the horizontal direction. Directing protective shelf boards 66 are juxtaposed in a vertical direction at a predetermined pitch, and function to partition the front sides of the peripheral edges of the plurality of semiconductor wafers W in which the protective shelf boards 66 are stored in a non-contact manner. A plurality of small triangular interference ribs 67 capable of interfering with the front of the peripheral edge of the semiconductor wafer W that is displaced are formed on the front and back surfaces of the protective shelf board 66.

  On both sides of the rear surface of the housing 61, lattice ribs 68 are provided so as to be rigid and prevent the warp by providing rigidity to the housing 61, and between the lattice ribs 68 and the plurality of protective shelf boards 66, respectively. The front retainers 69 that elastically hold the semiconductor wafer W are detachably mounted.

  Each front retainer 69 is detachably mounted between the lattice rib 68 and the protective shelf board 66 via a pressing claw, and is positioned behind the locking mechanism 80 to prevent the lid body 60 from being deformed. 70 (see FIG. 15 and the like), and an elastic piece 71 extending vertically while being inclined in the direction of the protective shelf 66 is integrally formed in a vertical cross section adjacent to the protective shelf 66 of the frame 70. A small holding block 72 that holds the front of the peripheral edge of the semiconductor wafer W with a V-groove is integrally formed at the tip of each elastic piece 71.

  A frame-shaped fitting groove 73 is formed on the peripheral edge of the rear surface of the housing 61, and a lip that sandwiches the plurality of through holes 64 and the locking mechanism 80 between the fitting groove 73 and the gasket 32 of the rim flange 30. A type of gasket 74 is tightly fitted (see FIG. 11), and the gasket 74 is pressed into the rim flange 30. The gasket 74 has a frame shape that can be elastically deformed using, for example, a fluoro rubber, silicone rubber, various thermoplastic elastomers (for example, olefin-based, polyester-based, polystyrene-based, etc.) having excellent heat resistance and weather resistance as a molding material. Molded and located behind the gasket 32.

  On the outer peripheral surface of the gasket 74, a bent protrusion 75 having a substantially heavier cross section extending from the front portion 29 of the container body 1 toward the rear wall 25 is integrally formed, and the bent protrusion 75 is formed in the container body 1. It extends from the direction outward and presses while bending to the inner peripheral surface of the rim flange 30 to function to ensure airtightness.

  The surface plate 76 is formed in a horizontally long flat plate so as to correspond to the opened surface of the housing 61, and a plurality of mounting holes are drilled in the left and right sides together with an operation port 77 for the locking mechanism 80. The fastening screws penetrating the plurality of mounting holes are screwed into the screw bosses of the casing 61, whereby the positioning screws are positioned and fixed on the surface of the casing 61. A plurality of engaging ribs 78 that are engaged with the outer peripheral surface of the peripheral wall of the housing 61 are arranged at a predetermined pitch on the peripheral edge of the surface plate 76.

  The locking mechanism 80 includes a pair of left and right rotating plates 81 that are rotated by operating pins of the lid opening / closing device 50 that penetrates the operating port 77 of the surface plate 76, and a plurality of sliding mechanisms that slide in the vertical direction as each rotating plate 81 rotates. Each of the slide plates 84 and a plurality of locking claws 87 that protrude from the housing 61 as the slide plates 84 slide and are locked to the locking holes 33 of the rim flange 30. Located in.

  Each rotary plate 81 is basically formed in a disc having a substantially convex cross section, and a pair of engaging groove holes 82 are cut out in a substantially semicircular shape at intervals in the vicinity of the peripheral edge, It is pivotally supported on both the left and right sides of the surface of the housing 61 and is located in the vicinity of the front of the front retainer 69. At the center of the rotating plate 81 projecting to the surface side, a substantially oblong operation hole 83 facing the operation port 77 of the surface plate 76 is formed, and an operation pin of the lid opening / closing device 50 is formed in the operation hole 83. Is removably inserted.

  Each slide plate 84 is formed as a vertically long plate oriented in the vertical direction of the housing 61, and is supported on the left and right sides of the surface of the housing 61 via a plurality of guide pins 85 and positioned in the vicinity of the front of the front retainer 69. The end portion faces the vicinity of the peripheral edge of the surface of the rotary plate 81. An insertion pin protrudes from the end of the slide plate 84, and a roller 86 loosely fitted in the engagement groove hole 82 of the rotary plate 81 is rotatably fitted to the insertion pin.

  Each locking claw 87 is pivotally supported in the vicinity of the through hole 64 of the housing 61 so as to be swingable, and is pivotally supported at the tip of the slide plate 84 so that the through hole 64 is slid by sliding of the slide plate 84. Protrusions or retreats from. A cylindrical roller 88 is rotatably supported by the locking claw 87, and the roller 88 protrudes from the through hole 64 and is slidably contacted and locked in the locking hole 33 of the rim flange 30.

  In the above configuration, when positioning the substrate storage container on the lid opening / closing device 50, the positioning tool 8 of the container body 1 is fitted and inserted into the plurality of positioning pins 51 standing on the lid opening / closing device 50 from above. If the inclined inner surface 12 of the positioning block 9 is slid down on each positioning pin 51 and the valley of the positioning block 9 is brought into contact with the upper end of the positioning pin 51, the substrate is stored on the lid opening / closing device 50. The container can be positioned with high accuracy (see FIG. 3).

  According to the above configuration, since the plurality of positioning tools 8 are not integrally formed on the bottom of the container body 1 but are retrofitted, the thickness of the positioning tool 8 can be reduced, and the cooling during molding is insufficient. Thus, it is possible to effectively prevent the positioning tool 8 from having irregularities on the surface or deforming it to hinder positioning work or the like. In particular, since a pair of positioning blocks 9 that are individually formed are abutted to form an elongated positioning tool 8 having a substantially rectangular plane, the positioning tool 8 can be arranged in parallel with a predetermined direction in addition to the longitudinal direction of the positioning tool 8. The stabilization of quality can be greatly expected.

  In addition, since the positioning block 9 is molded into a small part having a substantially uniform wall thickness using a molding material that is more slidable than the container body 1, the valley of the positioning block 9 is appropriately brought into contact with the upper end of the positioning pin 51. Regardless of the size of the substrate storage container, it can be positioned at the correct position.

  In addition, the positioning tool 8 is not simply screwed to the bottom of the container body 1 but is screwed via the plurality of height adjusting plates 7 and the positioning bosses 14, which may cause misalignment and accumulation of mounting errors. Furthermore, it is possible to individually adjust the position with the height adjustment plate 7 at each position where the positioning block 9 is mounted by confirming the height dimension and inclination of the container body 1 that supports the semiconductor wafer W. . It is also possible to separately adjust the positioning when the substrate storage container is mounted on the lid opening / closing device 50 and when it is mounted on the transfer device.

  In addition, although the container main body 1 and the top flange 20 in the said embodiment may be shape | molded by the molding material containing resin, you may form using metals, such as aluminum, SUS, and a titanium alloy. In addition, the positioning tool 8 may be attached to the bottom of the container body 1 via a locking mechanism (for example, a locking claw and a locking hole that are fitted to each other). In addition, the pair of positioning blocks 9 may be brought into direct contact with each other as long as the water drainability is not particularly hindered. Moreover, you may form a taper in the peripheral part of the positioning block 9 from a viewpoint of improving a moldability and the draining property at the time of washing | cleaning.

  Further, a handle for gripping operation can be provided on the outer surface of the side wall 27 of the container body 1 as necessary. Further, an attachment portion for attaching a barcode or an RF tag of the RFID system can be formed on the bottom plate 16, for example, the rear portion thereof. Further, the roller 88 of the locking mechanism 80 is formed in a polygonal cylindrical shape instead of a cylindrical shape, and its flat surface is locked in the locking hole 33, thereby stabilizing and ensuring the locking of the lid 60. You can also.

It is a perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a bottom view showing typically an embodiment of a substrate storage container concerning the present invention. It is a section side view showing typically an embodiment of a substrate storage container concerning the present invention. It is a side view which shows typically the relationship between the container main body and the positioning tool in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the baseplate of the container body turned upside down in the embodiment of the substrate storage container according to the present invention. It is bottom explanatory drawing which shows typically the container main body and the positioning tool in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the positioning block of the positioning tool in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically the back side of a positioning block in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the inside of the bottom plate in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically a top board of a container main part in an embodiment of a substrate storage container concerning the present invention. It is a fragmentary sectional explanatory view showing typically a relation of a rim flange, a gasket, and a lid in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the support state of a semiconductor wafer in an embodiment of a substrate storage container concerning the present invention. It is a front view which shows typically the support body and semiconductor wafer in embodiment of the substrate storage container which concern on this invention. It is a perspective explanatory view showing typically the surface side of a case in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the back side of the lid in the embodiment of the substrate storage container concerning the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container body 2 Bottom plate 3 Screw boss 7 Height adjustment plate 8 Positioning tool 9 Positioning block 10 Draining space (space)
DESCRIPTION OF SYMBOLS 11 Opposite surface 12 Inner surface 13 Mounting flange 14 Positioning boss 15 Support plate 50 Lid opening / closing device 51 Positioning pin W Semiconductor wafer (substrate)

Claims (5)

A substrate storage container in which a positioning tool that is inserted and fitted into a pair of positioning pins is attached to the bottom of a container body that stores a substrate,
The positioning tool includes a pair of positioning blocks that are respectively inserted and fitted into a pair of positioning pins and face each other. Each positioning block is formed in a substantially square shape with an opening on the facing surface, and is recessed in a substantially V-shaped cross section. A substrate storage container characterized in that the inclined inner surface can be brought into contact with the upper portion of the positioning pin, and the opposed surfaces opened by the pair of positioning blocks are brought into contact with each other to be substantially communicated with each other.   The substrate storage container according to claim 1, wherein a plurality of height adjustment plates in contact with the positioning block of the positioning tool are provided side by side at the bottom of the container body.   The substrate storage container according to claim 1, wherein the opposing surfaces of the pair of positioning blocks are abutted with a space.   A mounting flange is protruded from each side of the positioning block, a positioning boss is formed on each mounting flange, and a fastener passing through the positioning boss is screwed into the bottom of the container body. Or the board | substrate storage container of 3.   The substrate storage container according to claim 1, wherein the positioning block is formed of a molding material having excellent slipperiness.

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