JP5084573B2

JP5084573B2 - Substrate storage container

Info

Publication number: JP5084573B2
Application number: JP2008069697A
Authority: JP
Inventors: 和正大貫
Original assignee: Shin Etsu Polymer Co Ltd
Current assignee: Shin Etsu Polymer Co Ltd
Priority date: 2008-03-18
Filing date: 2008-03-18
Publication date: 2012-11-28
Anticipated expiration: 2028-03-18
Also published as: JP2009224685A

Description

本発明は、半導体ウェーハ、化合物半導体ウェーハ、ガラスウェーハ等に代表される基板を収納する基板収納容器に関するものである。 The present invention relates to a substrate storage container that stores substrates represented by semiconductor wafers, compound semiconductor wafers, glass wafers, and the like.

従来の基板収納容器は、図示しないが、所定枚数の半導体ウェーハを収納するフロントオープンボックスタイプの容器本体と、この容器本体の開口した正面部を開閉する着脱自在の蓋体とを備え、半導体製造工程の工程間の搬送、保管、工場間の輸送等に使用されており、使用の前後に洗浄液で適宜洗浄されることにより、繰り返し使用されている（特許文献１参照）。 Although not shown, a conventional substrate storage container includes a front open box type container main body that stores a predetermined number of semiconductor wafers, and a detachable lid that opens and closes an open front portion of the container main body. It is used for conveyance between processes, storage, transportation between factories, and the like, and it is used repeatedly by washing it appropriately with a cleaning liquid before and after use (see Patent Document 1).

容器本体は、所定の成形材料により、２５枚の半導体ウェーハを収納可能な大きさに成形されたり、半導体生産のスループットを向上させる観点から、２枚の半導体ウェーハを収納可能な大きさに成形される。この容器本体の内部両側には、半導体ウェーハを水平に支持する一対のティースが対設され、この一対のティースが容器本体の上下方向に所定の間隔をおき複数配列されている。複数のティースは、容器本体の内部両側にインサート成形法や二色成形法により一体成形されたり、容器本体とは別に成形された後、成形された容器本体の内部に後から装着される。
特開２００６‐２４５２０６号公報 The container body is molded to a size that can accommodate 25 semiconductor wafers by a predetermined molding material, or from the viewpoint of improving the throughput of semiconductor production, and is molded to a size that can accommodate 2 semiconductor wafers. The A pair of teeth for horizontally supporting the semiconductor wafer is provided on both sides inside the container body, and a plurality of pairs of teeth are arranged at predetermined intervals in the vertical direction of the container body. The plurality of teeth are integrally formed on both sides of the container main body by an insert molding method or a two-color molding method, or formed separately from the container main body, and then attached to the interior of the molded container main body.
JP 2006-245206 A

従来における基板収納容器は、以上のように構成されているので、容器本体の内部に複数のティースが一体成形される場合には、成形材料の相溶性や種類により、容器本体とティースとを一体化することが困難なことがあり、しかも、容器本体が２枚の半導体ウェーハを収納するタイプのときには、金型の構造が複雑化してコストアップを招くという問題がある。 Since the conventional substrate storage container is configured as described above, when a plurality of teeth are integrally formed inside the container body, the container body and the teeth are integrated according to the compatibility and type of the molding material. In addition, when the container body is of a type that accommodates two semiconductor wafers, there is a problem that the structure of the mold is complicated and the cost is increased.

係る問題を解消するには、ティースを容器本体とは別に成形して容器本体に後付けすれば良いが、そうすると、洗浄時の洗浄液の水分が残存して半導体ウェーハの汚染源になるという問題が新たに生じることとなる。この問題は、半導体回路の加工線の最小幅が９０ｎｍ以下に微細化し、半導体ウェーハの汚染を極力排除しなければならないという最近の情勢に鑑みるに、きわめて重要である。また、容器本体に複数のティースを後付けする際、装着作業の作業性が悪化したり、位置精度の低下を招きやすく、結果として半導体ウェーハの出し入れに支障を来たすおそれもある。 To solve this problem, it is sufficient to form the teeth separately from the container body and attach it to the container body. Will occur. This problem is extremely important in view of the recent situation that the minimum width of the processing line of the semiconductor circuit is reduced to 90 nm or less and contamination of the semiconductor wafer must be eliminated as much as possible. In addition, when a plurality of teeth are retrofitted to the container body, the workability of the mounting work is deteriorated and the positional accuracy is liable to be lowered, and as a result, there is a possibility that the semiconductor wafer may be taken in and out.

本発明は上記に鑑みなされたもので、洗浄時の水分が残存して基板の汚染源になることが少なく、容器本体に別体の支持体を取り付ける際の作業性や位置精度を向上させ、基板を円滑に出し入れできる安価な基板収納容器を提供することを目的としている。 The present invention has been made in view of the above, and moisture at the time of cleaning is less likely to become a source of substrate contamination, improving workability and positional accuracy when attaching a separate support to the container body, An object of the present invention is to provide an inexpensive substrate storage container that can smoothly put in and out.

本発明においては上記課題を解決するため、基板を開口部から収納する容器本体に、基板を支持する別体の支持体を内蔵したものであって、
支持体は、容器本体の側壁内面に対向する中間片と、この中間片に形成されて容器本体の側壁内面の開口部側に位置する先端片と、中間片に形成されて容器本体の側壁内面の閉塞部側に位置する末端片と、少なくとも中間片に突出形成されて基板を支持する棚板片とを含み、中間片、先端片、末端片、及び棚板片の少なくともいずれかに水切り孔を穿孔し、
容器本体の側壁内面の開口部側に係止溝を形成して凹部とし、先端片の先端部を屈曲させて係止溝に嵌まる凸部とするとともに、先端片の先端部を略櫛形に形成してその櫛歯には傾斜突部を形成し、凹部と凸部との嵌め合わせにより、容器本体の側壁内面に先端片を固定するようにしたことを特徴としている。 In the present invention, in order to solve the above-mentioned problem, the container main body that accommodates the substrate from the opening incorporates a separate support for supporting the substrate,
The support includes an intermediate piece facing the inner side wall of the container body, a tip piece formed on the intermediate piece and positioned on the opening side of the inner side wall of the container body, and an intermediate piece formed on the intermediate piece. Including a terminal piece positioned on the closing portion side and a shelf piece protruding from at least the intermediate piece to support the substrate, and draining holes in at least one of the intermediate piece, the tip piece, the terminal piece, and the shelf piece. Perforate and
A locking groove is formed on the opening side of the inner side wall of the container body to form a recess, the tip of the tip piece is bent to form a projection that fits into the locking groove, and the tip of the tip piece has a substantially comb shape. The comb teeth are formed with inclined protrusions, and the tip piece is fixed to the inner surface of the side wall of the container body by fitting the concave and convex portions .

なお、容器本体を、３枚以下の基板を収納可能な背の低いフロントオープンボックスタイプとしてその正面部を開口部とし、容器本体の側壁の開口部側に透視窓を設けることができる。
また、容器本体の側壁内面に、支持体の中間片と末端片のいずれかを挟んで位置決めする複数の位置決めリブを形成することができる。 In addition, the container main body is a short front open box type capable of storing three or less substrates, and the front portion thereof is an opening, and a transparent window can be provided on the opening side of the side wall of the container main body.
In addition, a plurality of positioning ribs can be formed on the inner surface of the side wall of the container body, with the intermediate piece and the end piece of the support being interposed therebetween.

また、容器本体の側壁内面に、支持体を挟む複数のガイドリブを形成してこのガイドリブの端部には位置決め溝を形成し、支持体の先端片には、位置決め溝に嵌まる位置決め突部を形成することが可能である。 Also, a plurality of guide ribs sandwiching the support are formed on the inner wall of the side wall of the container body, a positioning groove is formed at the end of the guide rib, and a positioning protrusion that fits into the positioning groove is formed at the end piece of the support. It is possible to form.

また、支持体の先端片に、容器本体のガイドリブに接触して位置合わせする位置合わせ突部を形成することが可能である。
また、容器本体の側壁内面の閉塞部側に係合溝を形成し、末端片の末端部には、係合溝に嵌まる係合突部を形成することが可能である。
また、容器本体の側壁内面の閉塞部側に、支持体の末端片を支持する複数の保持リブを形成しても良い。 Further, it is possible to form an alignment protrusion on the tip piece of the support so as to contact and align with the guide rib of the container body.
In addition, it is possible to form an engagement groove on the closed side of the inner surface of the side wall of the container body, and to form an engagement protrusion that fits into the engagement groove at the end of the end piece.
In addition, a plurality of holding ribs for supporting the end piece of the support may be formed on the closed portion side of the inner surface of the side wall of the container body.

また、容器本体の側壁内面の閉塞部側と支持体の末端片とのいずれかに、末端片の撓みを規制する撓み規制ストッパを形成しても良い。
また、支持体の末端片に、容器本体に収納される基板の収納位置を規制する位置規制部を形成しても良い。 Moreover, you may form the bending control stopper which controls the bending of a terminal piece in either the obstruction | occlusion part side of the side wall inner surface of a container main body, or the terminal piece of a support body.
Moreover, you may form in the terminal piece of a support body the position control part which controls the accommodation position of the board | substrate accommodated in a container main body.

さらに、棚板片の基板を支持する支持面に、容器本体の開口部側に位置する肉厚部を形成し、この肉厚部により、容器本体に収納された基板の飛び出しを規制することもできる。
さらにまた、支持体の棚板片を分割し、この分割した複数の棚板片を支持体の長手方向に間隔をおいて配列することもできる。 Furthermore, a thick portion located on the opening side of the container body is formed on the support surface that supports the substrate of the shelf board piece, and the jump out of the substrate stored in the container body can be regulated by this thick portion. it can.
Furthermore, the shelf board piece of a support body can be divided | segmented, and this divided | segmented several shelf board piece can also be arranged at intervals in the longitudinal direction of a support body.

ここで、特許請求の範囲における基板には、少なくとも単数複数の半導体ウェーハ（例えば、２００ｍｍ、３００ｍｍ、４５０ｍｍタイプ等）、化合物半導体ウェーハ、ガラスウェーハ、フォトマスクガラス、ハードディスク等が含まれる。容器本体は、２５、２６枚の基板を収納可能な大きさでも良いし、２、３枚の基板を収納可能な大きさでも良い。この容器本体は、フロントオープンボックスタイプあるいはトップオープンボックスタイプとすることができる。 Here, the substrate in the claims includes at least one semiconductor wafer (for example, 200 mm, 300 mm, 450 mm type, etc.), compound semiconductor wafer, glass wafer, photomask glass, hard disk and the like. The container body may be large enough to accommodate 25 or 26 substrates, or may be large enough to accommodate two or three substrates. The container body can be a front open box type or a top open box type.

本発明によれば、洗浄時の水分が残存して基板の汚染源になることが少なく、容器本体に別体の支持体を取り付ける際の作業性や位置精度を向上させ、基板を円滑に出し入れできる基板収納容器を安価に提供することができるという効果がある。また、容器本体の側壁内面の開口部側に係止溝を形成して凹部とし、先端片の先端部を屈曲させて係止溝に嵌まる凸部とし、この先端片の先端部を略櫛形に形成してその櫛歯に傾斜突部を形成するので、先端片先端部の可撓性を向上させて係止溝に円滑に嵌めることができる。また、櫛歯の傾斜突部により、係止溝に対する先端片先端部の嵌め入れを滑らかにすることができる。
また、容器本体の側壁内面に、支持体の中間片と末端片のいずれかを挟んで位置決めする複数の位置決めリブを形成すれば、簡易な構成で支持体の平行度を調整することができる。 According to the present invention, moisture at the time of cleaning hardly remains and becomes a source of contamination of the substrate, improves workability and positional accuracy when attaching a separate support to the container body, and allows the substrate to be taken in and out smoothly. There is an effect that the substrate storage container can be provided at low cost. In addition, a locking groove is formed on the opening side of the inner wall of the container body to form a recess, and the tip of the tip piece is bent to fit into the locking groove, and the tip of the tip piece is substantially comb-shaped. Since the inclined protrusions are formed on the comb teeth, the flexibility of the tip end portion of the tip piece can be improved and it can be smoothly fitted into the locking groove. Further, the insertion of the tip end of the tip piece into the locking groove can be smoothed by the inclined protrusion of the comb teeth.
In addition, if a plurality of positioning ribs are formed on the inner surface of the side wall of the container body with the intermediate piece or the end piece of the support interposed therebetween, the parallelism of the support can be adjusted with a simple configuration.

また、容器本体の側壁内面に、支持体を挟む複数のガイドリブを形成してこのガイドリブの端部には位置決め溝を形成し、支持体の先端片には、位置決め溝に嵌まる位置決め突部を形成すれば、支持体の少なくとも中間片を適切な位置にセットすることが可能となる。また、位置決め突部により、支持体を挿入方向に適切に位置決めすることが可能となる。 Also, a plurality of guide ribs sandwiching the support are formed on the inner wall of the side wall of the container body, a positioning groove is formed at the end of the guide rib, and a positioning protrusion that fits into the positioning groove is formed at the end piece of the support. If formed, at least the intermediate piece of the support can be set at an appropriate position. Moreover, it becomes possible to position a support body appropriately in an insertion direction by a positioning protrusion.

また、支持体の先端片に、容器本体のガイドリブに接触して位置合わせする位置合わせ突部を形成すれば、収納された基板の並ぶ方向に支持体や棚板片を位置決めすることが可能になる。
また、容器本体の側壁内面の閉塞部側に係合溝を形成し、末端片の末端部には、係合溝に嵌まる係合突部を形成すれば、この係合突部の嵌め合わせ作用により、支持体の容器本体内への脱落が規制される。 In addition, if the alignment protrusion is formed on the tip of the support to contact and align with the guide ribs of the container body, the support and shelf pieces can be positioned in the direction in which the stored substrates are arranged. Become.
Further, if an engagement groove is formed on the closed side of the inner surface of the side wall of the container body, and an engagement protrusion that fits into the engagement groove is formed at the end of the end piece, the engagement protrusion is fitted. Due to the action, dropping of the support into the container body is restricted.

また、容器本体の側壁内面の閉塞部側に、支持体の末端片を支持する複数の保持リブを形成すれば、支持体の容器本体内への脱落が規制される。
また、容器本体の側壁内面の閉塞部側と支持体の末端片とのいずれかに、末端片の撓みを規制する撓み規制ストッパを形成すれば、撓み規制ストッパが容器本体の側壁内面に対向して末端片の撓みを規制する。 Moreover, if the several holding rib which supports the terminal piece of a support body is formed in the obstruction | occlusion part side of the side wall inner surface of a container main body, drop | omission into the container main body of a support body will be controlled.
In addition, if a deflection regulating stopper that regulates the bending of the end piece is formed on either the closed side of the inner side wall of the container body or the end piece of the support, the deflection regulating stopper faces the inner side wall of the container body. To regulate the bending of the end piece.

また、棚板片の基板を支持する支持面に、容器本体の開口部側に位置する肉厚部を形成すれば、この肉厚部により、容器本体に収納された基板の開口部方向への飛び出し規制が期待できる。
さらに、支持体の棚板片を分割し、この分割した複数の棚板片を支持体の長手方向に間隔をおいて配列すれば、棚板片と基板との接触面積を減少させて基板の汚染を抑制したり、製造時の棚板片の変形を防いだり、材料コストの削減が期待できる。 In addition, if a thick part located on the opening side of the container body is formed on the support surface that supports the substrate of the shelf board piece, this thick part leads to the opening part direction of the substrate stored in the container body. You can expect pop-out regulation.
Furthermore, if the shelf pieces of the support are divided and the plurality of divided shelf pieces are arranged at intervals in the longitudinal direction of the support, the contact area between the shelf pieces and the substrate is reduced. It can be expected to suppress contamination, prevent deformation of shelf boards during manufacturing, and reduce material costs.

以下、図面を参照して本発明に係る基板収納容器の好ましい実施形態を説明すると、本実施形態における基板収納容器は、図１ないし図９に示すように、少数枚の基板である半導体ウェーハを収納可能な平面略多角形の容器本体１と、この容器本体１に別体として内蔵されて半導体ウェーハを水平に支持する左右一対の支持体３０とを備え、各支持体３０を、中間片３１、先端片３２、末端片３９、及び一対のティース４５とから一体成形するようにしている。 Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 9, the substrate storage container according to the present embodiment includes a semiconductor wafer that is a small number of substrates. A container body 1 having a substantially polygonal shape that can be stored, and a pair of left and right support bodies 30 that are housed separately in the container body 1 and support a semiconductor wafer horizontally are provided. The tip piece 32, the end piece 39, and the pair of teeth 45 are integrally formed.

半導体ウェーハは、図示しないが、例えば薄く丸いφ３００ｍｍのシリコンタイプからなり、周縁部に位置合わせや識別用のノッチが選択的に形成されており、表面には回路パターンが形成される。 Although not shown, the semiconductor wafer is made of, for example, a thin and round silicon type of φ300 mm, and a notch for alignment and identification is selectively formed on the peripheral edge, and a circuit pattern is formed on the surface.

容器本体１は、図１や図２に示すように、金型に所定の樹脂を含有する成形材料が射出されることにより、２枚の半導体ウェーハを上下に整列収納する背の低いフロントオープンボックスタイプに成形され、開口した横長の正面部２に同形の蓋体２０がエンドレスのガスケットを介し着脱自在に嵌合されるとともに、この蓋体２０には、容器本体１の正面部２を嵌合閉塞した蓋体２０を施錠する施錠機構が内蔵されており、図示しないロードポート装置にスライド可能に搭載されてその出し入れ口に正面部２を対向接触させる。 As shown in FIG. 1 and FIG. 2, the container body 1 is a short front open box that stores two semiconductor wafers in an up-and-down arrangement by injecting a molding material containing a predetermined resin into a mold. A lid 20 having the same shape is detachably fitted to the horizontally long front portion 2 which is molded into an open shape through an endless gasket, and the front portion 2 of the container body 1 is fitted to the lid 20. A locking mechanism that locks the closed lid 20 is built in, and is slidably mounted on a load port device (not shown) so that the front surface portion 2 is brought into contact with the loading / unloading port.

容器本体１を成形する成形材料の樹脂としては、例えば力学的性質、耐熱性、寸法安定性等に優れるポリブチレンテレフタレート、ポリカーボネート、ポリエーテルイミド、シクロオレフィン樹脂等があげられる。これらの樹脂は、選択的に２種以上組み合わされ、インサート成形や二色成形等に用いられる。また、これらの樹脂には、導電性を向上させる観点からカーボンブラック、カーボンフィラー、カーボンナノチューブ、導電性高分子等が添加されたり、透過波長を制御する観点からヒンダートアミン等の紫外線吸収剤が添加されたり、あるいは剛性を向上させるためガラス繊維が加えられる。 Examples of the resin of the molding material for molding the container body 1 include polybutylene terephthalate, polycarbonate, polyether imide, and cycloolefin resin, which are excellent in mechanical properties, heat resistance, dimensional stability, and the like. Two or more kinds of these resins are selectively combined and used for insert molding, two-color molding, and the like. In addition, carbon black, carbon filler, carbon nanotube, conductive polymer, etc. are added to these resins from the viewpoint of improving conductivity, or UV absorbers such as hindered amines are used from the viewpoint of controlling the transmission wavelength. Glass fibers are added or added to improve rigidity.

容器本体１は、図２に示すように、両側壁の正面部２側がそれぞれ直線的に形成され、両側壁の背面壁側（閉塞部側）がそれぞれ断面略へ字形に屈曲形成されることにより、内部の正面部２側が広く、内部の背面壁側が狭く区画形成される。この容器本体１の各側壁内面の正面部２側、換言すれば、容器本体１の正面部内周には図２や図８に示すように、支持体３０の先端片３２を固定するための係止溝３が上下方向に切り欠かれる。 As shown in FIG. 2, the container body 1 is formed by linearly forming the front surface 2 side of both side walls and bending the back wall side (closed portion side) of both side walls into a substantially cross-sectional shape. The interior front portion 2 side is wide and the interior back wall side is narrowly formed. As shown in FIGS. 2 and 8, the front end piece 32 of the support body 30 is fixed to the front portion 2 side of the inner surface of each side wall of the container main body 1, in other words, to the inner periphery of the front portion of the container main body 1. The stop groove 3 is cut out in the vertical direction.

各側壁内面には、図５、図６、図８に示すように、支持体３０の少なくとも中間片３１、具体的には、中間片３１や先端片３２を僅かな隙間を介して案内挟持する上下一対のガイドリブ４が形成され、各ガイドリブ４が容器本体１の前後方向に細長い板形あるいは棒形に形成されてその正面部２側の先端部には断面略し字形、略Ｃ字形、略Ｊ字形、略Ｕ字形等の位置決め溝５が凹み形成される。一対のガイドリブ４は、中間片３１や先端片３２の高さに相当する間隔をおいて対向配置され、容器本体１の正面部２から背面壁側にかけて徐々に間隔が狭くなるよう傾斜する。 As shown in FIGS. 5, 6, and 8, at least the intermediate piece 31 of the support 30, specifically, the intermediate piece 31 and the tip piece 32 are guided and sandwiched between the inner surfaces of the side walls through a slight gap. A pair of upper and lower guide ribs 4 is formed. Each guide rib 4 is formed in a plate shape or a rod shape elongated in the front-rear direction of the container body 1, and the front end portion of the front portion 2 has an abbreviated cross section, a substantially C shape, A positioning groove 5 such as a letter shape or a substantially U shape is formed in a recessed shape. The pair of guide ribs 4 are disposed to face each other with an interval corresponding to the height of the intermediate piece 31 and the tip piece 32, and are inclined so that the interval gradually decreases from the front part 2 of the container body 1 to the rear wall side.

容器本体１の各側壁内面の背面壁側には図５、図６、図９に示すように、支持体３０の末端片３９を挟持する上下一対の位置決めリブ６が突出形成される。また、各側壁内面の背面壁側には、位置決めリブ６の後方に位置する断面略Ｌ字形、Ｕ字形、Ｖ字形の係合溝７がリブを介して形成される。また、各側壁内面の背面壁側には、係合溝７の上下近傍に位置する上下一対の保持リブ８が形成され、この一対の保持リブ８が各側壁内面の背面壁側との間に支持体３０の末端片３９を挟持するよう機能する。各保持リブ８は、容器本体１の前後方向に細長い板形に形成され、位置決めリブ６の後方に位置する。 As shown in FIGS. 5, 6, and 9, a pair of upper and lower positioning ribs 6 that sandwich the end piece 39 of the support 30 are formed to protrude on the back wall side of the inner surface of each side wall of the container body 1. In addition, on the back wall side of the inner surface of each side wall, engagement grooves 7 having substantially L-shaped, U-shaped and V-shaped cross sections located behind the positioning rib 6 are formed via the ribs. In addition, a pair of upper and lower holding ribs 8 are formed on the back wall side of the inner surface of each side wall, and the pair of upper and lower holding ribs 8 are located near the upper and lower sides of the engagement groove 7. It functions to sandwich the end piece 39 of the support 30. Each holding rib 8 is formed in a plate shape elongated in the front-rear direction of the container body 1, and is positioned behind the positioning rib 6.

容器本体１の外周面には、機械的強度や剛性を高めるリブフランジ９が形成され、このリブフランジ９が容器本体１の脱型時に突出しピンに対向する。このリブフランジ９は、容器本体１の背面壁と両側壁とに外側から一体形成され、変形した平面略Ｕ字形を呈する。背面壁のリブフランジ９の両側部は、容器本体１の正面部２が下方に傾かないよう金属製のバランスウェイト１０が後付けで螺着され、容器本体１の金型からの脱型時に複数の突出しピンに外側から対向するよう機能する。 A rib flange 9 is formed on the outer peripheral surface of the container body 1 to increase mechanical strength and rigidity. The rib flange 9 protrudes when the container body 1 is removed and faces the pin. The rib flange 9 is integrally formed on the back wall and both side walls of the container body 1 from the outside, and has a deformed planar substantially U shape. Both sides of the rib flange 9 on the back wall are screwed with a metal balance weight 10 so that the front part 2 of the container body 1 does not tilt downward, and a plurality of parts are removed when the container body 1 is removed from the mold. It functions to face the protruding pin from the outside.

背面壁のリブフランジ９の中央部は、略Ｗ字形に屈曲形成されて凹部を形成し、この凹部の開口が下方に向いて容器本体１のロードポート装置に対する位置決め部１１として機能する。また、各側壁のリブフランジ９の前部は、略逆Ｖ字形に屈曲して凹部を形成し、この凹部の開口が下方に向いてロードポート装置に対する位置決め部１１として機能する。また、容器本体１の天井中心部には、複数の被取付リブ１２が立設され、この複数の被取付リブ１２には、図示しない搬送機構に把持される平面略三角形の吊持フランジ１３が締結具を介し着脱自在に螺着される。 A central portion of the rib flange 9 on the back wall is bent into a substantially W shape to form a concave portion, and the opening of the concave portion faces downward and functions as a positioning portion 11 for the load port device of the container body 1. Further, the front portion of the rib flange 9 on each side wall is bent into a substantially inverted V shape to form a concave portion, and the opening of the concave portion functions downward as a positioning portion 11 for the load port device. In addition, a plurality of attached ribs 12 are erected at the center of the ceiling of the container body 1, and a planar substantially triangular suspension flange 13 held by a transport mechanism (not shown) is provided on the plurality of attached ribs 12. It is detachably screwed through a fastener.

容器本体１の正面部２は外方向に広がるよう膨出形成されてリムフランジ１４を形成し、このリムフランジ１４の内部両側には、蓋体２０施錠用の施錠溝１５が上下方向に切り欠かれる。リムフランジ１４の左右に張り出した両側部には図２、図５、図６に示すように、複数の取付孔１６が上下方向に並べて穿孔されており、この複数の取付孔１６に情報表示パッドであるインフォパッドが選択的に挿入され、かつロードポート装置の検出センサに検出されることにより、半導体ウェーハの有無や枚数、半導体ウェーハの収納位置、基板収納容器のタイプ等がロードポート装置に識別される。 The front portion 2 of the container body 1 is formed to bulge outwardly to form a rim flange 14, and locking grooves 15 for locking the lid 20 are notched in the vertical direction on both sides inside the rim flange 14. It is. As shown in FIGS. 2, 5, and 6, a plurality of mounting holes 16 are drilled side by side in the vertical direction on both sides of the rim flange 14 projecting to the left and right, and information display pads are formed in the mounting holes 16. As the infopad is selectively inserted and detected by the detection sensor of the load port device, the presence or number of semiconductor wafers, the storage position of the semiconductor wafer, the type of the substrate storage container, etc. are identified to the load port device. Is done.

蓋体２０は、図１に示すように、容器本体１の正面部２に着脱自在に嵌合され、施錠機構を内蔵する横長の筐体と、この筐体の開口した正面部（表面部）に螺着されて被覆する表面カバー２１とを備えて構成され、容器本体１に対してロードポート装置の蓋体開閉装置により取り付け、取り外しされる。この蓋体２０の材料としては、例えば容器本体１と同様の成形材料が使用される。 As shown in FIG. 1, the lid 20 is detachably fitted to the front part 2 of the container body 1, and has a horizontally long case containing a locking mechanism, and an open front part (surface part) of the case. And a front cover 21 that is screwed onto the container body 1 and attached to and removed from the container body 1 by a lid opening / closing device of the load port device. As a material of the lid 20, for example, a molding material similar to that of the container body 1 is used.

筐体の裏面中央部には、横長の取付穴が凹み形成され、この取付穴には、半導体ウェーハの周縁部前方を弾性片により弾発的に保持するフロントリテーナが装着される。また、筐体の裏面周縁部には、横長で枠形の取付溝が切り欠かれ、この取付溝には、容器本体１との間に介在する弾性のガスケットが嵌合される。 A horizontally long mounting hole is formed in the center of the rear surface of the housing, and a front retainer that elastically holds the front of the peripheral edge of the semiconductor wafer with an elastic piece is mounted in the mounting hole. In addition, a horizontally long frame-shaped mounting groove is cut out at the peripheral edge of the rear surface of the housing, and an elastic gasket interposed between the container main body 1 is fitted into the mounting groove.

表面カバー２１は、横長の略矩形に形成され、両側部には、施錠機構用の操作口２２がそれぞれ略凸字形に穿孔されており、中央部と最両側部とには、ロードポート装置の蓋体開閉装置に真空吸着される正面円形の吸着領域がそれぞれ形成される。 The front cover 21 is formed in a horizontally long and substantially rectangular shape, and operation ports 22 for a locking mechanism are formed in both sides so as to have a substantially convex shape, respectively. A front circular suction region that is vacuum-sucked by the lid opening / closing device is formed.

各支持体３０は、図２ないし図４、図７ないし図９に示すように、容器本体１の側壁内面に対向する中間片３１と、この中間片３１に一体形成されて容器本体１の側壁内面の正面部２側に位置する細長い矩形の先端片３２と、中間片３１に形成されて容器本体１の側壁内面の背面壁側に位置する細長い矩形の末端片３９と、中間片３１と末端片３９とに形成されて半導体ウェーハの周縁部を水平に支持する上下一対のティース４５とを備えて形成される。 As shown in FIGS. 2 to 4 and 7 to 9, each support 30 is provided with an intermediate piece 31 that faces the inner surface of the side wall of the container main body 1, and a side wall of the container main body 1 that is integrally formed with the intermediate piece 31. An elongated rectangular tip piece 32 positioned on the front surface 2 side of the inner surface, an elongated rectangular end piece 39 formed on the intermediate piece 31 and positioned on the back wall side of the inner wall of the container body 1, and the intermediate piece 31 and the distal end A pair of upper and lower teeth 45 that are formed on the piece 39 and horizontally support the peripheral edge of the semiconductor wafer are formed.

支持体３０を成形する成形材料の樹脂としては、例えば滑性、耐熱性、寸法安定性等に優れるポリエーテルエーテルケトン、ポリブチレンテレフタレート、ポリカーボネート、ポリエーテルイミド、シクロオレフィン樹脂等があげられる。これらの樹脂は、選択的に２種以上組み合わされ、インサート成形や二色成形等に用いられる。また、これらの樹脂には、導電性を向上させる観点からカーボンブラック、カーボンフィラー、カーボンナノチューブ、導電性高分子等が添加されたり、透過波長を制御する観点からヒンダートアミン等の紫外線吸収剤が添加されたり、あるいは剛性を向上させるためガラス繊維が加えられる。 Examples of the resin of the molding material that molds the support 30 include polyether ether ketone, polybutylene terephthalate, polycarbonate, polyether imide, and cycloolefin resin that are excellent in lubricity, heat resistance, dimensional stability, and the like. Two or more kinds of these resins are selectively combined and used for insert molding, two-color molding, and the like. In addition, carbon black, carbon filler, carbon nanotube, conductive polymer, etc. are added to these resins from the viewpoint of improving conductivity, or UV absorbers such as hindered amines are used from the viewpoint of controlling the transmission wavelength. Glass fibers are added or added to improve rigidity.

支持体３０の中間片３１は、図３や図４に示すように、一対のガイドリブ４の間に介在して容器本体１の前後方向に伸びる細長い矩形に形成され、先端部に先端片３２が直線的に伸長形成されており、末端部に末端片３９が容器本体１の内部内方向、換言すれば、半導体ウェーハの中心部方向に向け屈曲して形成される。 As shown in FIGS. 3 and 4, the intermediate piece 31 of the support 30 is formed in an elongated rectangular shape that is interposed between a pair of guide ribs 4 and extends in the front-rear direction of the container body 1. The end piece 39 is formed to be bent in the inner inner direction of the container main body 1, in other words, toward the center portion of the semiconductor wafer.

先端片３２は、図３や図４に示すように、洗浄液の水切りを容易にする複数の水切り孔３３が格子形に並べて穿孔され、各水切り孔３３が前後方向に細長い矩形に形成されており、容器本体１の一対のガイドリブ４間に介在して挟持される。この先端片３２の先端部３４は、容器本体１の内部外方向に向け略Ｌ字形に屈曲形成され、容器本体１の係止溝３に着脱自在に嵌入係止されて支持体３０の脱落を防止する。 As shown in FIG. 3 and FIG. 4, the tip piece 32 has a plurality of drain holes 33 arranged in a lattice shape for facilitating draining of the cleaning liquid, and each drain hole 33 is formed in an elongated rectangular shape in the front-rear direction. And interposed between the pair of guide ribs 4 of the container body 1. The distal end portion 34 of the distal end piece 32 is bent and formed in an approximately L shape toward the inside and outside of the container main body 1, and is detachably fitted and locked in the locking groove 3 of the container main body 1 to remove the support 30. To prevent.

先端片３２の先端部３４は、図３、図４、図６に示すように、可撓性や柔軟性を確保する観点から櫛形に形成され、各櫛歯３５の表裏面の少なくともいずれか一方には、係止溝３との摩擦を低減する複数の傾斜突部３６が間隔をおいて選択的に並設されており、この複数の配列された傾斜突部３６が係止溝３に対する嵌入を容易にしたり、水切り性を向上させる。また、先端片３２の上下面には、ガイドリブ４の位置決め溝５に嵌入する位置決め突部３７がそれぞれ突出形成され、この一対の位置決め突部３７が支持体３０をその挿入方向に位置決めする。 The tip portion 34 of the tip piece 32 is formed in a comb shape from the viewpoint of ensuring flexibility and flexibility as shown in FIGS. 3, 4, and 6, and at least one of the front and back surfaces of each comb tooth 35. A plurality of inclined protrusions 36 that reduce friction with the locking groove 3 are selectively arranged in parallel with each other, and the plurality of arranged inclined protrusions 36 are fitted into the locking groove 3. To facilitate or improve drainage. In addition, positioning protrusions 37 that are fitted into the positioning grooves 5 of the guide rib 4 are respectively formed on the upper and lower surfaces of the tip piece 32 to project the pair of positioning protrusions 37 in the insertion direction.

各位置決め突部３７は、ピン形に突出形成され、先端片３２の先端部３４よりも後方に位置する。また、先端片３２の上下面には図３、図４、図８に示すように、容器本体１のガイドリブ４の対向面に接触する位置合わせ突部３８がそれぞれ突出形成され、この一対の位置合わせ突部３８が支持体３０やティース４５を上下方向に位置決めするよう機能する。各位置合わせ突部３８は、位置決め突部３７よりも低く、摩擦低減の観点から半球形に突出形成されており、位置決め突部３７の後方に隣接する。 Each positioning projection 37 is formed to protrude in a pin shape, and is positioned rearward of the distal end portion 34 of the distal end piece 32. Further, as shown in FIGS. 3, 4, and 8, alignment protrusions 38 that are in contact with the opposing surfaces of the guide rib 4 of the container body 1 are formed on the upper and lower surfaces of the tip piece 32, respectively. The mating protrusion 38 functions to position the support 30 and the teeth 45 in the vertical direction. Each alignment protrusion 38 is lower than the positioning protrusion 37, is formed in a hemispherical shape from the viewpoint of reducing friction, and is adjacent to the rear of the positioning protrusion 37.

末端片３９は、図３、図４、図６、図８に示すように、その末端部に取付片４０が一体形成され、この取付片４０には、容器本体１に収納された半導体ウェーハに接触して収納位置を規制する位置規制部４１が突出形成されており、取付片４０の上下面が容器本体１の一対の位置決めリブ６に挟持して位置決めされることにより、平行度が調整される。取付片４０の末端部には、中間片３１と平行に伸びる端壁部４２が一体形成され、この端壁部４２の上下が容器本体１の側壁内面の背面壁側と一対の保持リブ８との間に挟持される。 As shown in FIGS. 3, 4, 6, and 8, the end piece 39 is integrally formed with a mounting piece 40 at its end, and the mounting piece 40 is formed on a semiconductor wafer housed in the container body 1. A position restricting portion 41 that contacts and restricts the storage position is formed so as to project, and the upper and lower surfaces of the attachment piece 40 are positioned by being sandwiched between the pair of positioning ribs 6 of the container body 1 to adjust the parallelism. The An end wall portion 42 extending in parallel with the intermediate piece 31 is integrally formed at the end portion of the attachment piece 40, and the upper and lower sides of the end wall portion 42 are on the back wall side of the inner surface of the side wall of the container body 1 and the pair of holding ribs 8. Is sandwiched between.

端壁部４２の末端部には、容器本体１の係合溝７に嵌合するピン形の係合突部４３が一体形成され、この係合突部４３の嵌合と保持リブ８の挟持作用とにより、支持体３０の容器本体１内への脱落や落下が有効に防止される。また、位置規制部４１は、収納された半導体ウェーハと共に形成する角度が９０°以上の鈍角となるよう傾斜形成されたり、あるいは断面略半円形や略半楕円形に形成され、位置決めリブ６の近傍やティース４５の後部近傍に位置する。 A pin-shaped engagement protrusion 43 that fits into the engagement groove 7 of the container body 1 is integrally formed at the end portion of the end wall portion 42, and the engagement of the engagement protrusion 43 and the holding rib 8 are sandwiched. The action effectively prevents the support 30 from dropping or dropping into the container body 1. Further, the position restricting portion 41 is formed so as to have an obtuse angle of 90 ° or more with the accommodated semiconductor wafer, or is formed in a substantially semicircular or substantially semielliptical cross section, and in the vicinity of the positioning rib 6. It is located near the rear part of the teeth 45.

取付片４０の裏面には、位置規制部４１の裏側に位置する板形の撓み規制ストッパ４４が架設され、この撓み規制ストッパ４４が容器本体１の側壁内面の背面壁側に接触して末端片３９やティース４５の撓みを規制するよう機能する。この撓み規制ストッパ４４は、容器本体１の正面部２から蓋体２０を取り外した際の半導体ウェーハの位置ずれを抑制防止するよう機能する。 On the back surface of the mounting piece 40, a plate-shaped bending restriction stopper 44 located on the back side of the position restriction portion 41 is installed, and this bending restriction stopper 44 comes into contact with the rear wall side of the inner wall of the container main body 1 to contact the end piece. It functions to regulate the bending of 39 and teeth 45. The deflection regulating stopper 44 functions to suppress and prevent the positional deviation of the semiconductor wafer when the lid 20 is removed from the front part 2 of the container body 1.

各ティース４５は、図２ないし図４に示すように、容器本体１の前後方向に細長い板形に形成され、支持体３０の中間片３１から末端片３９に亘る領域に略水平に突出形成される。このティース４５の半導体ウェーハの周縁部を水平に支持する表面には、容器本体１の正面部２側に位置する細長い平面略三角形の肉厚部４６が半導体ウェーハの厚さ分だけ積層形成され、この肉厚部４６の端面に半導体ウェーハの周縁部前方が接触することにより、ロードポート装置上で前後方向にスライドする容器本体１に収納された半導体ウェーハの正面部２方向への飛び出しが有効に規制される。 As shown in FIGS. 2 to 4, each tooth 45 is formed in a plate shape elongated in the front-rear direction of the container body 1, and is formed so as to protrude substantially horizontally in a region extending from the intermediate piece 31 to the end piece 39 of the support 30. The On the surface of the tooth 45 that horizontally supports the peripheral edge of the semiconductor wafer, a thin, thin, substantially triangular thick portion 46 positioned on the front surface 2 side of the container body 1 is laminated and formed by the thickness of the semiconductor wafer. The front end of the peripheral portion of the semiconductor wafer contacts the end face of the thick portion 46, so that the semiconductor wafer accommodated in the container body 1 that slides in the front-rear direction on the load port device effectively jumps out in the front portion 2 direction. Be regulated.

上記において、容器本体１の内部に支持体３０を装着する場合には、先ず、容器本体１の内部に支持体３０を一対のガイドリブ４を介して挿入し、容器本体１の係合溝７に支持体３０の係合突部４３を嵌入するとともに、容器本体１の側壁内面の背面壁側と保持リブ８とに支持体３０の端壁部４２を挟持させ、一対の位置決めリブ６に支持体３０の末端片３９を挟持させる。この際、一対のガイドリブ４が徐々に狭まるよう傾斜して位置決め作用やガタツキ防止作用を営むので、支持体３０の中間片３１や末端片３９を適切に挿入してスライドさせることができる。 In the above, when the support body 30 is mounted inside the container body 1, first, the support body 30 is inserted into the container body 1 via the pair of guide ribs 4 and is inserted into the engagement groove 7 of the container body 1. The engaging protrusion 43 of the support body 30 is fitted, the end wall portion 42 of the support body 30 is sandwiched between the rear wall side of the inner wall of the container body 1 and the holding rib 8, and the pair of positioning ribs 6 support the support body. Thirty end pieces 39 are clamped. At this time, the pair of guide ribs 4 are inclined so as to be gradually narrowed to perform positioning action and rattling prevention action, so that the intermediate piece 31 and the end piece 39 of the support 30 can be appropriately inserted and slid.

こうして容器本体１の内部に支持体３０の中間片３１や末端片３９を適切に挿入して脱落しないようにしたら、容器本体１の係止溝３に先端片３２の先端部３４を嵌入係止し、各ガイドリブ４の位置決め溝５に位置決め突部３７を嵌入して支持体３０を挿入方向に位置決めし、かつガイドリブ４の対向面に位置合わせ突部３８を圧接してティース４５を上下方向に位置決めすれば、容器本体１の内部に支持体３０を装着して一体化することができる。 Thus, when the intermediate piece 31 and the end piece 39 of the support 30 are properly inserted into the container body 1 so as not to fall off, the distal end portion 34 of the distal end piece 32 is fitted and locked in the locking groove 3 of the container body 1. Then, the positioning protrusions 37 are fitted into the positioning grooves 5 of the guide ribs 4 to position the support 30 in the insertion direction, and the alignment protrusions 38 are pressed against the opposing surfaces of the guide ribs 4 so that the teeth 45 are moved vertically. If it positions, the support body 30 can be mounted | worn with the inside of the container main body 1, and can be integrated.

上記構成によれば、容器本体１の内部に複数のティース４５を一体成形しないので、成形材料の相溶性や種類にかかわらず、容器本体１とティース４５とを一体化することができる。また、例え容器本体１が２枚の半導体ウェーハを収納するタイプの場合でも、金型の構造が複雑化して成形の困難化やコストアップを招くことがなく、安価な製造が期待できる。また、支持体３０の先端片３２に複数の水切り孔３３を穿孔するので、洗浄時の洗浄液の水分が残存して半導体ウェーハの汚染源になるのを防止することができる。 According to the said structure, since the some teeth 45 are not integrally molded inside the container main body 1, the container main body 1 and the teeth 45 can be integrated irrespective of the compatibility and kind of molding material. Further, even when the container body 1 is of a type that accommodates two semiconductor wafers, the structure of the mold is not complicated, and molding is not difficult and the cost is not increased, so that inexpensive manufacturing can be expected. Further, since the plurality of drain holes 33 are drilled in the tip piece 32 of the support 30, it is possible to prevent the moisture of the cleaning liquid during cleaning from remaining as a contamination source of the semiconductor wafer.

また、ガイドリブ４、係合溝７、係合突部４３、保持リブ８、位置決めリブ６、係止溝３、先端片３２の先端部３４、位置決め溝５、位置決め突部３７、位置合わせ突部３８の活用により、容器本体１に一対の支持体３０を後付けする際の作業性や位置精度を著しく向上させることができ、これにより、半導体ウェーハを専用のロボットにより円滑に出し入れすることができる。また、先端部３４の傾斜突部３６の厚さを調整すれば、先端部３４全体を切削しなくても、先端部３４自体の厚さを容易に調整することが可能になる。 Further, the guide rib 4, the engagement groove 7, the engagement protrusion 43, the holding rib 8, the positioning rib 6, the locking groove 3, the tip end 34 of the tip piece 32, the positioning groove 5, the positioning protrusion 37, and the alignment protrusion By utilizing 38, workability and positional accuracy when the pair of support bodies 30 are retrofitted to the container body 1 can be remarkably improved, so that the semiconductor wafer can be smoothly put in and out by a dedicated robot. Further, by adjusting the thickness of the inclined protrusion 36 of the distal end portion 34, the thickness of the distal end portion 34 itself can be easily adjusted without cutting the entire distal end portion 34.

次に、図１０は本発明の第２の実施形態を示すもので、この場合には、支持体３０の各ティース４５を前後一対に分割し、この分割した前後一対のティース４５を支持体３０の長手方向に間隔をおいて配列するようにしている。 Next, FIG. 10 shows a second embodiment of the present invention. In this case, each of the teeth 45 of the support 30 is divided into a pair of front and back, and the pair of front and rear teeth 45 thus divided is supported by the support 30. Are arranged at intervals in the longitudinal direction.

一対のティース４５の表面には、半導体ウェーハを点接触又は点接触により支持する支持突起４７が選択的に形成される。各支持突起４７は、例えばティース４５と異なる材質の成形材料によりティース４５に取り付けられたり、一体化され、半球形、半円筒形、断面三角形等の突起に形成される。その他の部分については、上記実施形態と略同様であるので説明を省略する。 Support protrusions 47 for selectively supporting the semiconductor wafer by point contact or point contact are selectively formed on the surfaces of the pair of teeth 45. Each support protrusion 47 is attached to or integrated with the tooth 45 by a molding material different from the tooth 45, for example, and is formed into a protrusion having a hemispherical shape, a semi-cylindrical shape, a triangular cross section, or the like. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、各ティース４５を前後一対に分割するので、ティース４５と半導体ウェーハとの接触面積を減少させて半導体ウェーハの汚染を抑制防止したり、成形時のティース４５の変形を防いだり、材料コストの大幅な削減を図ることができるのは明らかである。 In the present embodiment, the same effect as the above embodiment can be expected, and each tooth 45 is divided into a pair of front and rear, so that the contact area between the tooth 45 and the semiconductor wafer is reduced to prevent the contamination of the semiconductor wafer. Obviously, the deformation of the teeth 45 during molding can be prevented, and the material cost can be significantly reduced.

次に、図１１は本発明の第３の実施形態を示すもので、この場合には、容器本体１の両側壁の正面部２側に光センサ用の透視窓５０をそれぞれ形成し、各透視窓５０の内面には係止溝３を凹み形成し、この係止溝３に短縮した先端片３２の先端部３４を着脱自在に嵌入係止するようにしている。
透視窓５０は、例えばＰＣ等の成形材料を使用してインサート成形法や二色成形法等により成形される。その他の部分については、上記実施形態と略同様であるので説明を省略する。 Next, FIG. 11 shows a third embodiment of the present invention. In this case, see-through windows 50 for optical sensors are respectively formed on the front surface 2 side of both side walls of the container body 1, and each see-through is shown. A locking groove 3 is formed in the inner surface of the window 50, and the tip portion 34 of the tip piece 32 shortened in the locking groove 3 is detachably fitted and locked.
The see-through window 50 is molded by an insert molding method or a two-color molding method using a molding material such as PC. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、透視窓５０により、重量センサではなく、透過型の光センサを用いて直接半導体ウェーハを検出することができるので、半導体ウェーハの有無や枚数、収納位置等を正確に検出することができるのは明らかである。また、容器本体１の構成の多様化を図ることもできる。 In this embodiment, the same effect as that of the above embodiment can be expected, and the semiconductor wafer can be directly detected by the transparent window 50 using a transmission type optical sensor instead of a weight sensor. It is clear that the presence / absence, the number of sheets, the storage position, etc. can be accurately detected. Also, the configuration of the container body 1 can be diversified.

なお、上記実施形態では容器本体１に同タイプの支持体３０を一対内蔵したが、半導体ウェーハの支持に支障を来たさなければ、一の支持体３０を異なるタイプとしても良い。また、上記実施形態の中間片３１、先端片３２、末端片３９の長さは、必要に応じて延長したり、短縮しても良い。また、容器本体１の側壁内面の正面部２側に、上下一対の凸部を間隔をおいて形成し、先端片３２の先端部３４上下に、凸部に嵌合する凹部をそれぞれ形成したり、凸部に嵌合する略クランク形の嵌合片をそれぞれ伸長形成したり、あるいは凹部付きの突片をそれぞれ形成しても良い。 In the above-described embodiment, a pair of the same type of support 30 is built in the container main body 1, but one support 30 may be of a different type as long as it does not hinder the support of the semiconductor wafer. In addition, the lengths of the intermediate piece 31, the tip piece 32, and the end piece 39 in the above embodiment may be extended or shortened as necessary. In addition, a pair of upper and lower convex portions are formed at intervals on the front surface 2 side of the inner surface of the side wall of the container body 1, and concave portions that fit into the convex portions are formed above and below the distal end portion 34 of the distal end piece 32. The substantially crank-shaped fitting pieces that fit into the convex portions may be formed to extend, or the protruding pieces with concave portions may be formed.

また、容器本体１の正面部２内周に凸部を形成するとともに、先端片３２の先端部３４に凹部を形成し、これら凸部と凹部との嵌合により、容器本体１の側壁に支持体３０を固定しても良い。また、上記実施形態では先端片３２に複数の水切り孔３３を穿孔したが、中間片３１、末端片３９、及び又はティース４５に単数複数の水切り孔３３を穿孔することも可能である。また、水切り孔３３は、矩形の他、円形、楕円形、多角形等に形成することも可能である。 Moreover, while forming a convex part in the inner periphery of the front part 2 of the container main body 1, a recessed part is formed in the front-end | tip part 34 of the front-end | tip piece 32, and it supports on the side wall of the container main body 1 by fitting with these convex part and a recessed part. The body 30 may be fixed. In the above embodiment, a plurality of drain holes 33 are drilled in the tip piece 32, but a plurality of drain holes 33 may be drilled in the intermediate piece 31, the end piece 39, and / or the teeth 45. Further, the draining hole 33 can be formed in a circular shape, an elliptical shape, a polygonal shape or the like in addition to a rectangular shape.

また、容器本体１の側壁内面に、支持体３０の末端片３９を挟んで位置決めする複数の位置決めリブ６を形成したが、支持体３０の中間片３１を挟んで位置決めする複数の位置決めリブ６を形成することも可能である。また、支持体３０の末端片３９に撓みを規制する撓み規制ストッパ４４を形成したが、容器本体１の側壁内面の背面壁側に撓み規制ストッパ４４を形成することも可能である。この撓み規制ストッパ４４は複数に増加しても良い。 In addition, a plurality of positioning ribs 6 are formed on the inner surface of the side wall of the container body 1 with the end piece 39 of the support 30 interposed therebetween, but the plurality of positioning ribs 6 positioned with the intermediate piece 31 of the support 30 interposed therebetween. It is also possible to form. Further, although the bending restriction stopper 44 for restricting the bending is formed on the end piece 39 of the support 30, the bending restriction stopper 44 can be formed on the back wall side of the inner wall of the container body 1. The deflection regulating stopper 44 may be increased to a plurality.

また、ティース４５に位置決め突部３７、及び又は位置合わせ突部３８を形成して位置決めすることもできる。さらに、各ティース４５を前後一対に分割したが、各ティース４５を前方、中央、後方の３枚等に分割して前方と後方のティース４５により半導体ウェーハを支持し、前方と後方のティース４５よりも中央のティース４５を低位に配置して半導体ウェーハに接触しないようにすることも可能である。 Further, the positioning protrusion 37 and / or the alignment protrusion 38 can be formed on the tooth 45 for positioning. Further, each tooth 45 is divided into a pair of front and rear, but each tooth 45 is divided into three pieces such as front, center, and rear, and the semiconductor wafer is supported by the front and rear teeth 45, and the front and rear teeth 45. Alternatively, the central tooth 45 may be disposed at a low position so as not to contact the semiconductor wafer.

本発明に係る基板収納容器の実施形態を模式的に示す斜視説明図である。It is a perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. 本発明に係る基板収納容器の実施形態を模式的に示す断面平面図である。It is a section top view showing typically an embodiment of a substrate storage container concerning the present invention. 本発明に係る基板収納容器の実施形態における支持体を模式的に示す斜視説明図である。It is a perspective explanatory view showing typically the support in the embodiment of the substrate storage container concerning the present invention. 図３の背面図である。FIG. 4 is a rear view of FIG. 3. 本発明に係る基板収納容器の実施形態における容器本体を模式的に示す正面説明図である。It is front explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. 本発明に係る基板収納容器の実施形態における容器本体と支持体を模式的に示す正面説明図である。It is front explanatory drawing which shows typically the container main body and support body in embodiment of the substrate storage container which concerns on this invention. 本発明に係る基板収納容器の実施形態における容器本体と支持体を模式的に示す断面側面図である。It is a section side view showing typically a container main part and a support in an embodiment of a substrate storage container concerning the present invention. 本発明に係る基板収納容器の実施形態における容器本体の側壁の正面部側を模式的に示す一部断面説明図である。It is a partial cross-section explanatory drawing which shows typically the front part side of the side wall of the container main body in embodiment of the substrate storage container which concerns on this invention. 本発明に係る基板収納容器の実施形態における容器本体の側壁の背面壁側を模式的に示す断面説明図である。It is a section explanatory view showing typically the back wall side of the side wall of the container main part in the embodiment of the substrate storage container concerning the present invention. 本発明に係る基板収納容器の第２の実施形態を模式的に示す斜視説明図である。It is a perspective explanatory view showing typically a 2nd embodiment of a substrate storage container concerning the present invention. 本発明に係る基板収納容器の第３の実施形態を模式的に示す断面説明図である。It is a section explanatory view showing typically a 3rd embodiment of a substrate storage container concerning the present invention.

Explanation of symbols

１容器本体
２正面部（開口部）
３係止溝（凹部）
４ガイドリブ
５位置決め溝
６位置決めリブ
７係合溝
８保持リブ
２０蓋体
３０支持体
３１中間片
３２先端片
３３水切り孔
３４先端部（凸部）
３５櫛歯
３６傾斜突部
３７位置決め突部
３８位置合わせ突部
３９末端片
４０取付片（末端片の一部）
４１位置規制部
４２端壁部（末端片の一部）
４３係合突部
４４撓み規制ストッパ
４５ティース（棚板片）
４６肉厚部
４７支持突起
５０透視窓 1 Container body 2 Front (opening)
3 Locking groove (concave)
4 Guide rib 5 Positioning groove 6 Positioning rib 7 Engaging groove 8 Holding rib 20 Lid body 30 Support body 31 Intermediate piece 32 End piece 33 Drain hole 34 End part (convex part)
35 Comb tooth 36 Inclined protrusion 37 Positioning protrusion 38 Positioning protrusion 39 End piece 40 Mounting piece (a part of the end piece)
41 Position restriction part 42 End wall part (part of terminal piece)
43 Engaging protrusion 44 Deflection regulating stopper 45 Teeth (shelf plate piece)
46 Thick part 47 Support projection 50 Perspective window

Claims

A substrate storage container containing a separate support for supporting a substrate in a container main body that stores the substrate from the opening,
The support includes an intermediate piece facing the inner side wall of the container body, a tip piece formed on the intermediate piece and positioned on the opening side of the inner side wall of the container body, and an intermediate piece formed on the intermediate piece. Including a terminal piece positioned on the closing portion side and a shelf piece protruding from at least the intermediate piece to support the substrate, and draining holes in at least one of the intermediate piece, the tip piece, the terminal piece, and the shelf piece. Perforate and
A locking groove is formed on the opening side of the inner side wall of the container body to form a recess, the tip of the tip piece is bent to form a projection that fits into the locking groove, and the tip of the tip piece has a substantially comb shape. A substrate storage container, characterized in that the comb teeth are formed with inclined protrusions, and the tip piece is fixed to the inner surface of the side wall of the container body by fitting the concave and convex portions .

2. The substrate storage according to claim 1, wherein the container main body is a short front open box type capable of storing three or less substrates, the front portion of which is an opening, and a transparent window is provided on the opening side of the side wall of the container main body. container.

3. The substrate storage container according to claim 1 or 2, wherein a plurality of positioning ribs are formed on the inner surface of the side wall of the container body so as to position the support member with either the intermediate piece or the end piece interposed therebetween.

A plurality of guide ribs sandwiching the support are formed on the inner surface of the side wall of the container body, a positioning groove is formed at the end of the guide rib, and a positioning protrusion that fits in the positioning groove is formed at the end piece of the support. The substrate storage container according to claim 1, 2 or 3 .

The substrate storage container according to claim 4, wherein an alignment protrusion is formed on the tip piece of the support so as to contact and align with the guide rib of the container body.

6. The substrate storage according to claim 1 , wherein an engagement groove is formed on the closed side of the inner surface of the side wall of the container body, and an engagement protrusion that fits into the engagement groove is formed at the end of the end piece. container.

The substrate storage container according to any one of claims 1 to 6, wherein a plurality of holding ribs for supporting the end piece of the support are formed on the closed portion side of the inner surface of the side wall of the container body.

The substrate storage container according to any one of claims 1 to 7, wherein a deflection regulating stopper for regulating the deflection of the end piece is formed on either the closed portion side of the inner surface of the side wall of the container body or the end piece of the support.

The substrate storage container according to any one of claims 1 to 8, wherein a position restricting portion for restricting a storage position of a substrate stored in the container main body is formed on an end piece of the support.

Claims a support surface for supporting the substrate of the shelf plate pieces, forming a thick portion located on the opening side of the container body, by the thick portion and adapted to regulate the protrusion of the substrate accommodated in the container body Item 10. A substrate storage container according to any one of Items 1 to 9 .

The substrate storage container according to any one of claims 1 to 10, wherein a shelf plate piece of the support is divided, and the plurality of divided shelf plate pieces are arranged at intervals in the longitudinal direction of the support.