JP2010001049A - Glass substrate inverting apparatus and glass substrate inverting method using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate inverting apparatus that inverts glass substrates when they are transferred between the position where many glass substrates are stacked so that their processed sides, to be subjected to predetermined processing, face down and the position where the glass substrates are accommodated in a substrate accommodating tray so that their processed sides may face up. <P>SOLUTION: The glass substrate inverting apparatus inverts the glass substrates when they are transferred between the position where many glass substrates are stacked so that their processed sides, to be subjected to predetermined processing, face downward and the position where the glass substrates are accommodated in the substrate accommodating tray so that the processed sides face upward. The apparatus includes a stage with a substrate floating face from which the glass substrates are floated, a tray fixing means for fixing a substrate accommodating tray on the substrate floating face side of the stage, and a stage inverting means for inverting the stage with the substrate accommodating tray fixed thereon. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an apparatus used when transferring a glass substrate for a display panel such as a liquid crystal display panel. More specifically, the present invention relates to a large number of glass substrates so that a processing surface on which a predetermined processing is performed is on the lower side. The present invention relates to a glass substrate reversing device that reverses a glass substrate when the glass substrate is transferred between a state where the glass substrates are stacked and a state where the glass substrate is accommodated in a substrate storage tray so that the processing surface is on the upper side.

  2. Description of the Related Art In recent years, as a packaging form for a large glass substrate used for a flat display panel such as a liquid crystal display panel for truck transportation, for example, there is a packaging form disclosed in Patent Document 1 below.

  As shown in FIG. 8A, a plurality of glass substrates 90 are stacked at an inclination on the pallet 102, and a slip sheet 101 as a buffer material is interposed between the glass substrates 90. .

  In order to transport the glass substrate 90 from such a glass substrate packing form 100 to a processing line or the like, the glass substrates 90 are taken out one by one while removing the interleaf paper 101. Usually, in the glass substrate packing form 100 shown to Fig.8 (a), the glass substrate 90 is laminated | stacked so that the process surface 90a which will perform a predetermined | prescribed processing process may become a lower side.

  Therefore, the glass substrate 90 is taken out by adsorbing the back surface 90b opposite to the processing surface 90a of the glass substrate 90 with an adsorption hand or the like having a plurality of adsorption pads (not shown) and maintaining the adsorption state. This is done by lifting 90.

  Moreover, as another packaging form of the glass substrate at the time of trucking etc., there exists a thing of the packaging form using the board | substrate storage tray disclosed by the following patent document 2, for example. In the glass substrate packing form 200 shown in FIG. 8B, the glass substrates 90 are stored in the substrate storage trays 201 stacked in the vertical direction on the pallet 202 so that the processing surfaces 90a are on the upper side. Yes. Each glass substrate storage tray 201 has a pin insertion hole 201a into which a substrate support pin (not shown) is inserted from below.

  Such removal of the glass substrate 90 from the substrate storage tray 201 lifts the upper substrate storage trays 201, 201, 201,... Then, a substrate support pin (not shown) is inserted into the pin insertion hole 201a from below, and the glass substrate 90 is lifted on the substrate storage tray 201 positioned at the bottom.

  When the glass substrate 90 is taken out by a substrate transfer arm (not shown), the glass substrate 90 is taken out from the lowermost substrate storage tray 201 by lowering the substrate storage trays 201, 201, 201,. It will be. By repeating such an operation, the glass substrates 90 are taken out one by one from the stacked substrate storage trays 201 and conveyed to a predetermined processing line or the like.

JP 2005-298062 A JP 2004-186249 A

  The processing surface 90a taken out from the glass substrate packing form 100 shown in FIG. 8 (a) is the lower glass substrate 90 and the processing surface 90a is the upper side due to the existing facilities that transport the glass substrate to the processing line or the like. The glass substrate 90 is reversed so that it is transferred to the substrate storage tray 201 of the glass substrate packing form 200 shown in FIG. 8B, and the glass substrates 90 are taken out one by one from the substrate storage tray 201 and processed. There is a case where it is desired to transport it.

  However, when the transfer of the glass substrate 90 from the glass substrate packing form 100 of FIG. 8A to the substrate storage tray 201 of the glass substrate packing form 200 of FIG. It is difficult to reverse 90, and even if it can be reversed, there is a problem in terms of safety such that the glass substrate 90 may be unexpectedly dropped during the reversal and the operator may be injured.

  On the other hand, when it is desired to transfer the glass substrate 90 from the glass substrate packing form 200 in FIG. 8B to the glass substrate packing form 100 in FIG. There was a similar problem with it.

  Therefore, the problem to be solved by the present invention is that a large number of glass substrates are stacked so that the processing surface on which a predetermined processing is performed is on the lower side, and the processing surface is on the upper side. It is to provide a glass substrate reversing device for reversing a glass substrate when the glass substrate is transferred between a state in which the glass substrate is accommodated in a substrate storage tray and a glass substrate reversing method using the same.

  In order to solve the above problems, the present invention provides a state in which a large number of glass substrates are stacked such that a processing surface on which a predetermined processing is performed is on the lower side, and the glass substrate is a substrate on which the processing surface is on the upper side. A glass substrate reversing device for reversing the glass substrate when the glass substrate is transferred between a state accommodated in a storage tray, and a stage provided with a substrate floating surface for levitating the glass substrate; The gist of the invention is that a tray fixing means for fixing the substrate storage tray to the substrate floating surface side of the stage and a stage reversing means for reversing the stage to which the substrate storage tray is fixed are provided. .

  In this case, the substrate floating surface of the stage may be configured to be an air ejection surface that ejects air to float the glass substrate. Moreover, it is good to set it as the structure provided with the board | substrate outer peripheral part support means which supports the outer peripheral part of the said glass substrate in the board | substrate floating surface side of the said stage. Further, the substrate outer peripheral portion supporting means may be configured to be a resin pad that contacts the outer peripheral portion of the glass substrate or a suction pad that adsorbs the outer peripheral portion of the glass substrate.

  And in the glass substrate transfer method using such a glass substrate reversing device, the step of floating the glass substrate whose processing surface is lower on the substrate floating surface side of the stage with the substrate floating surface facing upward; A step of fixing the substrate storage tray before substrate storage to the substrate floating surface side of the stage by the tray fixing means, a step of reversing the stage to which the substrate storage tray is fixed by the stage reversing means, and a reversal And a step of releasing the fixation of the substrate storage tray to the stage by the tray fixing means so that the substrate storage tray can be taken out later.

  Further, in such a glass substrate reversal method, when the substrate outer peripheral portion supporting means for supporting the outer peripheral portion of the glass substrate on the substrate floating surface side of the stage is further provided, the substrate floating surface side of the stage It is preferable that a step of supporting the outer peripheral portion of the glass substrate that has been levitated by the substrate outer peripheral portion supporting means is provided.

  Furthermore, in the glass substrate transfer method using such a glass substrate reversing apparatus, the substrate storage tray in which the glass substrate is stored on the substrate floating surface side of the stage with the substrate floating surface facing downward is disposed on the tray. A step of fixing by the fixing means, a step of reversing the stage on which the substrate storage tray is fixed by the stage reversing means, and the glass substrate whose processing surface is lower on the substrate floating surface side of the stage after the reversal. It is preferable that the method includes a step of floating and a step of releasing the fixation of the substrate storage tray to the stage by the tray fixing means after the reversal so that the substrate storage tray and the glass substrate can be respectively taken out.

  In this case, in such a glass substrate reversal method, when the substrate outer peripheral portion supporting means for supporting the outer peripheral portion of the glass substrate on the substrate floating surface side of the stage is further provided, the substrate of the stage after the reversal A step of supporting the outer peripheral portion of the glass substrate levitated on the air bearing surface side by the substrate outer peripheral portion supporting means may be provided.

  According to the glass substrate reversing apparatus having the above-described configuration and the glass substrate reversing method using the same, a stage provided with a substrate floating surface for floating the glass substrate, and a tray for fixing the substrate storage tray on the substrate floating surface side of the stage Since the fixing means and the stage reversing means for reversing the stage on which the substrate storage tray is fixed are provided, a large number of glass substrates are stacked so that the processing surface on which a predetermined processing is performed is on the lower side. The apparatus performs reversal of the glass substrate when the glass substrate is transferred between the state where the glass substrate is accommodated in the substrate storage tray so that the processing surface is on the upper side.

  Therefore, when transferring a glass substrate from a state in which a large number of glass substrates are stacked so that the processing surface is on the lower side to a state in which the glass substrate is accommodated in the substrate storage tray so that the processing surface is on the upper side. Take out the glass substrate with the processing surface still on the bottom, place it on the stage of the glass substrate reversing device, place the substrate storage tray before storing the substrate on it, and after reversing the substrate after storing the substrate from the glass substrate reversing device You only need to take out the storage tray.

  On the contrary, the glass substrate is changed from a state in which the glass substrate is accommodated in the substrate storage tray so that the processing surface is on the upper side to a state in which a large number of glass substrates are stacked so that the processing surface is on the lower side. When transferring the substrate, it is only necessary to take out the substrate storage tray in which the glass substrate is stored and fix it to the stage of the glass substrate reversing device, and after the reversing, take out the substrate storage tray and the glass substrate from the glass substrate reversing device. It will be. It should be noted that these operations may be performed by a separately prepared device, further reducing the burden on the operator.

  As described above, the glass substrate reversing apparatus according to the present invention performs the work of reversing the glass substrate, which has been difficult for the worker in the past, so that the glass substrate unexpectedly falls and is injured. Safety is ensured without fear.

  Furthermore, according to such a glass substrate reversing apparatus and a glass substrate reversing method using the same, in a state where the substrate floating surface of the stage faces upward, the glass substrate with the processing surface on the lower side is levitated, and the substrate of the stage In the state where the air bearing surface faces downward, since the glass substrate on the upper side of the processing surface is stored in the substrate storage tray, the processing surface of the glass substrate is prevented from being damaged before and after the inversion by the stage. Yes.

  In addition, if the substrate floating surface of the stage is configured to be an air ejection surface that ejects air to float the glass substrate, the glass substrate can be easily floated on the stage. Note that the glass substrate may be floated on the substrate air bearing surface of the stage with substrate support pins protruding from the substrate air bearing surface.

  Furthermore, if the outer peripheral portion supporting means for supporting the outer peripheral portion of the glass substrate levitated on the substrate floating surface side of the stage is provided, the levitated glass substrate is prevented from being displaced in the horizontal direction. The

  In this case, if the outer peripheral portion supporting means is configured to be a resin pad that contacts the outer peripheral portion of the glass substrate or a suction pad that adsorbs the outer peripheral portion of the glass substrate, the outer peripheral portion of the glass substrate has a simple structure. Can be supported.

  Embodiments of a glass substrate reversing apparatus and a glass substrate reversing method using the same according to the present invention will be described below in detail with reference to the drawings.

  FIG. 1 is a diagram showing a schematic configuration of a glass substrate reversing device according to a first embodiment of the present invention, and FIG. 2 is a diagram showing a glass substrate and a substrate storage tray when placed on the stage of the glass substrate reversing device of FIG. FIG. 3 to FIG. 6 are diagrams sequentially showing steps of storing the substrate in the substrate storage tray while inverting the glass substrate by the glass substrate inverting device of FIG.

  As shown in FIG. 1, the glass substrate reversing device 1 reverses the stage 10 that can float the glass substrate 90, the tray fixing means 20 that fixes the substrate storage tray 201 to the stage 10, and the stage 10. A stage inverting means 30 and a control unit 40 for controlling these operations are provided.

  As shown in the drawing, a plurality of air outlets 10a are formed on the air ejection surface 10b as the substrate floating surface of the stage 10, and the air ejected from these air outlets 10a is shown in FIG. 2 (a). A glass substrate 90 as shown can be floated on the stage 10.

  A compressed air pipe 71 as shown in the figure is connected to such an air outlet 10a. A compressed air valve 72 is connected to the compressed air pipe 71, and a compressed air pump 73 is connected to the compressed air valve 72. When the pneumatic valve 72 is set to the open state by the control unit 40, the air supplied from the pneumatic pump 73 is ejected from the air outlet 10a, and the glass substrate 90 is in a horizontal state on the air ejection surface 10b of the stage 10. Can be brought to the surface.

  Further, a resin pad 51 which is a substrate outer peripheral portion supporting means 50 for supporting the outer peripheral portion 90 c of the glass substrate 90 is provided on the outer peripheral portion of the stage 10, and the upper surface of the resin pad 51 is the air ejection surface 10 b of the stage 10. By abutting and supporting the outer peripheral portion 90c of the glass substrate 90 that has been air levitated above, the glass substrate 90 that has been air levitated is prevented from shifting in the horizontal direction.

  The tray fixing means 20 is provided on both the left and right side surfaces of the stage 10, and the storage surface 201 b as shown in FIG. 2 (b) is placed on the lower substrate storage tray 201 on the air ejection surface 10 b of the stage 10. An arm 21 is provided for fixing the substrate storage tray 201 so as not to be detached from the stage 10 when the substrate storage tray 201 is reversed.

  The base end of the arm 21 is connected and fixed to the rotating shaft 22 a of the motor 22. When the motor 22 is rotated inward by the driving of the motor 22, the locking portion 21 a at the tip of the arm 21 is placed on the outer periphery of the substrate storage tray 201. The protruding flange portion 201c is locked so as not to be easily detached. The locking portion 21a of the arm 21 includes a locking piece 21b that contacts the side edge of the flange portion 201c, and a coil spring 21c that biases the locking piece 21b in the contact direction. By contracting at the time of locking, an excessive load is prevented from being applied to the flange portion 201c of the substrate storage tray 201.

  Driving of the motor 22 for rotating the arm 21 provided in the tray fixing means 20 is controlled by the control unit 40. Such an arm 21 may be configured to be operated in a linear direction by an air cylinder or the like, in addition to being operated in the rotation direction by the motor 22 described above.

  The stage reversing means 30 includes a motor 31 having a rotating shaft 31 a connected and fixed to the center of the stage 10. The motor 31 is fixed to the upper end of a column 33 erected on the pedestal 32, and the stage 10 is rotatable on the pedestal 32 around the rotation shaft 31 a by driving the motor 31. In this case, the drive of the motor 31 is controlled by the control unit 40.

  A glass substrate 90 shown in FIG. 2A is, for example, a glass substrate for a liquid crystal display panel. In this case, when a thin film transistor (TFT) is formed on the processing surface 90a of the glass substrate 90, it is configured as a TFT array substrate, and is configured as a CF substrate on which a color filter (CF) is formed on the processing surface 90a. The liquid crystal display panel has a configuration in which the TFT array substrate and the CF substrate are bonded to each other and liquid crystal is filled therein.

  As shown in the figure, the glass substrate 90 has a processing surface 90a on which a predetermined processing is performed for forming a thin film transistor and a color filter on the lower side, and an opposite back surface 90b on the upper side. The glass substrate 90 of FIG. 2A shows a state when the glass substrate 90 is placed on the stage 10 with the air ejection surface 10b of the glass reversing apparatus 1 described above facing upward, and FIG. It is the state which took out the processing surface 90a from the glass substrate packing form 100 shown by the lower side.

  A plurality of glass substrates 90 before being reversed by the glass substrate reversing apparatus 1 described above are stacked in an inclined manner on a pallet 102 of a glass substrate packing form 100 as shown in FIG. A slip sheet 101 as a buffering agent is inserted between the stacked glass substrates 90 so that the glass substrates 90 are not touched and damaged.

  In this case, the glass substrates 90 are stacked so that the processing surface 90a is on the lower side. The uppermost glass substrate 90 is taken out and placed on the stage 10 of the glass substrate reversing apparatus 1. The uppermost glass substrate 90 is taken out by sucking the back surface 90b of the glass substrate 90 with a suction hand or the like having a plurality of suction pads (not shown) and lifting the glass substrate 90 while maintaining the suction state. Yes.

  In the substrate storage tray 201 shown in FIG. 2B, the storage surface 201b on which the glass substrate 90 is stored is on the lower side. The substrate storage tray 201 shown in FIG. 2B shows a state when being placed on the stage 10 included in the glass substrate reversing apparatus 1 described above, and before storing the glass substrate 90 as shown in FIG. The substrate storage tray 201 is taken out and inverted.

  A plurality of pin insertion holes 201 a are formed in the accommodation surface 201 b of the substrate storage tray 201. The pin insertion hole 201a is provided for inserting a substrate support pin (not shown) when the glass substrate 90 placed on the accommodation surface 201b is taken out from the substrate storage tray 201. Further, a flange portion 201c protruding outward is formed on the outer periphery of the substrate storage tray 201, and the flange portion 201c is locked by the arm 21 of the tray fixing means 20 provided in the glass substrate reversing device 1 described above. It is like that.

  Next, the process of inverting the glass substrate 90 when the glass substrate 90 is transferred from the glass substrate packing form 100 to the glass substrate packing form 200 using the glass substrate inverting apparatus 1 described above with reference to FIGS. To do.

  First, as shown in FIG. 3, one glass substrate 90 taken out from the glass substrate packing form 100 is placed on the air ejection surface 10b of the stage 10 with the air ejection surface 10b facing upward. When the compressed air valve 72 is set in the open state by the control unit 40 and the air supplied from the compressed air pump 73 is ejected from the air outlet 10 a of the stage 10, the placed glass substrate 90 is moved on the stage 10. It is floated horizontally.

  At this time, the glass substrate 90 is floated on the air ejection surface 10b with the processing surface 90a on the lower side, and the processing surface 90a is prevented from being damaged. Furthermore, the outer peripheral portion 90c of the glass substrate 90 is supported from below by a resin pad 51 provided on the stage 10, and the glass substrate 90 is prevented from being displaced in the horizontal direction.

  Then, the substrate storage tray 201 with the storage surface 201b on the lower side is placed on the stage 10 in this state as shown in FIG. This substrate storage tray 201 is obtained by taking out the substrate storage tray 201, 201, 201 located at the top of the substrate storage tray 201 before storing the glass substrates 90 stacked on the left pallet 202. .

  The substrate storage tray 201 placed on the air ejection surface 10b side of the stage 10 is fixed to the air ejection surface 10b side of the stage 10 by the arm 21 of the tray fixing means 20, as shown in FIG. At this time, when the motor 22 of the tray fixing means 20 is driven by the control unit 40, the arm 21 connected to the rotation shaft 22 a of the motor 22 is rotated inward, and the substrate is placed on the locking portion 21 a at the tip of the arm 21. The flange portion 201c of the storage tray 201 is locked. By this tray fixing means 20, the substrate storage tray 201 is integrally fixed so as not to be easily detached on the air ejection surface 10b side of the stage 10.

  Next, as shown in FIG. 5, the substrate storage tray 201 together with the stage 10 is rotated 180 degrees and reversed by the stage reversing means 30. At this time, when the motor 31 of the stage reversing means 30 is driven by the control unit 40, the stage 10 that is coupled to the rotating shaft 31a of the motor 31 is rotated 180 degrees around the rotating shaft 31a. The air ejection surface 10b is changed from a state facing upward to a state facing downward.

  As shown in FIG. 5, the glass substrate 90 is stored on the storage surface 201 b of the substrate storage tray 201 after being inverted by dropping due to its own weight. In this case, the distance at which the glass substrate 90 falls is set so that the glass substrate 90 is not damaged, so that the glass substrate 90 is prevented from being damaged due to inversion.

  Next, as shown in FIG. 6, when the fixing of the substrate storage tray 201 to the stage 10 by the tray fixing means 20 is released, the substrate storage tray 201 can be taken out. The taken-out substrate storage tray 201 is placed on the other substrate storage trays 201, 201, 201 stacked on the right pallet 202.

  By repeating these steps, the glass substrate 90 in the glass substrate packing form 100 is transferred to the substrate storage tray 201 in the glass substrate packing form 200. Then, the glass substrate 90 is conveyed to a processing line etc. in the state of the glass substrate packing form 200, and a predetermined process is performed.

  Next, the process of reversing the glass substrate 90 when the glass substrate 90 is transferred from the glass substrate packing form 200 to the glass substrate packing form 100 in reverse to the process described above using the glass substrate reversing apparatus 1 will be described.

  The substrate storage tray in which the glass substrate 90 taken out from the right glass substrate packaging form 200 is stored on the air ejection surface 10b side of the stage 1 with the air ejection surface 10b facing downward as shown in FIG. 201 is fixed. As shown in FIG. 5, the substrate storage tray 210 is fixed to the air ejection surface 10 b side of the stage 10 by the arm 21 of the tray fixing means 20.

  Next, as shown in FIG. 4, the substrate storage tray 201 together with the stage 10 is rotated 180 degrees and reversed by the stage reversing unit 30. At this time, when the motor 31 of the stage reversing means 30 is driven by the control unit 40, the stage 10 that is coupled to the rotating shaft 31a of the motor 31 is rotated 180 degrees around the rotating shaft 31a. The air ejection surface 10b is changed from a state facing downward to a state facing upward.

  Before and after such reversal, the control unit 40 sets the compressed air valve 72 to the open state, and the air supplied from the compressed air pump 73 is ejected from the air outlet 10a of the stage 10, and after the reversal, the glass substrate 90 is levitated in a horizontal state on the air ejection surface 10b of the stage 10 facing upward.

  At this time, the glass substrate 90 is air-floated in a state where the processing surface 90a is on the lower side, and the processing surface 90a is prevented from being damaged. Furthermore, the outer peripheral portion 90c of the glass substrate 90 is supported from below by a resin pad 51 provided on the stage 10, and the glass substrate 90 is prevented from being displaced in the horizontal direction.

  As shown in FIG. 3, when the fixing of the substrate storage tray 201 to the stage 10 by the tray fixing means 20 is released, the substrate storage tray 201 and the glass substrate 90 can be taken out. The taken-out substrate storage tray 201 is placed on the other substrate storage trays 201 and 201 stacked on the left pallet 202. Moreover, the taken-out glass substrate 90 is mounted on the other glass substrate 90,90,90, ... stacked on the pallet 101 via the slip sheet 101.

  By repeating these steps, the glass substrate 90 stored in the substrate storage tray 201 of the glass substrate packing form 200 is reloaded into the glass substrate packing form 100. Then, the glass substrate 90 is conveyed to a processing line etc. in the state of the glass substrate packing form 100, and a predetermined process is performed.

  Next, a glass substrate reversing device and a glass substrate reversing method using the same according to the second embodiment of the present invention will be described with reference to FIG. In addition, about the same structure as the glass substrate inversion apparatus 1 of 1st Embodiment mentioned above, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted and it demonstrates centering on a different point.

  As shown in the drawing, a suction pad 52 that is a substrate outer peripheral portion supporting means 50 for supporting an outer peripheral portion 90c of the glass substrate 90 that has been air levitated is provided on the outer peripheral portion of the stage 10 provided in the glass substrate reversing device 300. In addition, the suction pad 52 sucks and supports the outer peripheral portion 90c of the glass substrate 90 that is air-floated on the stage 10, so that the glass substrate 90 that is air-floated is prevented from being displaced in the horizontal direction. .

  A vacuum pipe 81 as shown is connected to the suction port 52 a opened on the upper surface of the suction pad 52. A vacuum valve 82 is connected to the vacuum pipe 81, and a vacuum pump 83 is connected to the vacuum valve 82. When the vacuum valve 82 is set to the open state by the controller 40, the suction pad 52 can suck the outer peripheral portion 90c of the glass substrate 90.

  Next, the process of reversing the glass substrate 90 when transferring the glass substrate 90 from the glass substrate packing form 100 to the glass substrate packing form 200 using such a glass substrate reversing apparatus 300 will be described.

  First, as shown in FIG. 3, one glass substrate 90 taken out from the glass substrate packing form 100 is placed on the air ejection surface 10b of the stage 10 with the air ejection surface 10b facing upward. At this time, when the pneumatic valve 72 is set in the open state by the control unit 40 and the air supplied from the pneumatic pump 73 is ejected from the air outlet 10a, the placed glass substrate 90 is placed on the stage 10. It is raised.

  In addition, the outer peripheral portion 90c of the glass substrate 90 that has been levitated is sucked and supported by the suction pad 52 provided on the stage 10, and the glass substrate 90 is prevented from being displaced in the horizontal direction. At this time, the vacuum valve 82 is set in the open state by the control unit 40, and the outer peripheral portion 90 c of the glass substrate 90 is sucked by the suction pad 52 by suction from the vacuum pump 83.

  Then, the substrate storage tray 201 with the storage surface 201b on the lower side is placed on the stage 10 in this state as shown in FIG. The placed substrate storage tray 201 is fixed to the stage 10 by the arm 21 of the tray fixing means 20. Next, as shown in FIG. 5, the substrate storage tray 201 is rotated 180 degrees together with the stage 10 by the stage reversing means 30 and reversed.

  At this time, when the motor 31 of the stage reversing means 30 is driven by the control unit 40, the stage 10 that is coupled to the rotating shaft 31a of the motor 31 is rotated 180 degrees around the rotating shaft 31a. The air ejection surface 10b is changed from a state facing upward to a state facing downward.

  As shown in FIG. 5, the glass substrate 90 is stored on the storage surface 201 b of the substrate storage tray 201 after being inverted by dropping due to its own weight.

  After that, as shown in FIG. 6, when the fixing of the substrate storage tray 201 to the stage 10 by the tray fixing means 20 is released, the substrate storage tray 201 can be taken out. At this time, the vacuum valve 82 is set to the closed state by the control unit 40, and the suction of the outer peripheral portion 90c of the glass substrate 90 by the suction pad 52 is released.

  By repeating these steps, the glass substrate 90 in the glass substrate packing form 100 is transferred to the substrate storage tray 201 in the glass substrate packing form 200.

  Next, the process of reversing the glass substrate 90 when the glass substrate 90 is transferred from the glass substrate packing form 200 to the glass substrate packing form 100 in the reverse manner to the process described above using the glass substrate reversing apparatus 300 will be described.

  The substrate storage tray in which the glass substrate 90 taken out from the right glass substrate packaging form 200 is stored on the air ejection surface 10b side of the stage 10 with the air ejection surface 10b facing downward as shown in FIG. 201 is fixed. As shown in FIG. 5, the substrate storage tray 201 is fixed to the air ejection surface 10 b side of the stage 10 by the arm 21 of the tray fixing means 20.

  Next, as shown in FIG. 4, the substrate storage tray 201 together with the stage 10 is rotated 180 degrees and reversed by the stage reversing unit 30. At this time, when the motor 31 of the stage reversing means 30 is driven by the control unit 40, the stage 10 that is coupled to the rotating shaft 31a of the motor 31 is rotated 180 degrees around the rotating shaft 31a. The air ejection surface 10b is changed from a state facing downward to a state facing upward.

  Before and after such reversal, the control unit 40 sets the compressed air valve 72 to the open state, and the air supplied from the compressed air pump 73 is ejected from the air outlet 10a of the stage 10, and after the reversal, the glass substrate 90 is levitated in a horizontal state on the air ejection surface 10b of the stage 10 facing upward.

  At this time, the glass substrate 90 is air-floated in a state where the processing surface 90a is on the lower side, and the processing surface 90a is prevented from being damaged. Furthermore, the outer peripheral portion 90c of the glass substrate 90 that has been air-floated is sucked and supported by the suction pad 52 provided on the stage 10, and the glass substrate 90 is prevented from being displaced in the horizontal direction.

  As shown in FIG. 3, when the fixing of the substrate storage tray 201 to the stage 10 by the tray fixing means 20 is released, the substrate storage tray 201 can be taken out. The taken-out substrate storage tray 201 is placed on the other substrate storage trays 201 and 201 stacked on the left pallet 202.

  Further, after the substrate storage tray 201 is taken out, the controller 40 sets the vacuum valve 82 to a closed state, and when the suction of the outer peripheral portion 90c of the glass substrate 90 by the suction pad 52 is released, the glass substrate 90 can be taken out. become. And the taken-out glass substrate 90 is mounted on the other glass substrate 90,90,90, ... stacked on the pallet 101 via the slip sheet 101.

  By repeating these steps, the glass substrate 90 stored in the substrate storage tray 201 of the glass substrate packing form 200 is reloaded into the glass substrate packing form 100.

  According to the glass substrate reversing apparatus 1, 300 described above and the glass substrate reversing method using the same, the stage 10 provided with the air ejection surface 10 b as the substrate floating surface for floating the glass substrate 90, and the air of the stage 10 Since the tray fixing means 20 for fixing the substrate storage tray 201 on the ejection surface 10b side and the stage reversing means 30 for reversing the stage 10 to which the substrate storage tray 201 is fixed are provided, the processing surface 90a is on the lower side. Between the glass substrate packaging form 100 in which a large number of glass substrates 90 are stacked and the glass substrate packaging form 200 in which the glass substrate 90 is accommodated in the substrate storage tray 201 so that the processing surface 90a is on the upper side, When the glass substrate 90 is transferred, the glass substrate 90 is reversed by the glass substrate reversing device 1300. It becomes door.

  Therefore, from the glass substrate packing form 100 in which a large number of glass substrates 90 are stacked so that the processing surface 90a is on the lower side, the glass substrate 90 is accommodated in the substrate storage tray 201 so that the processing surface 90a is on the upper side. When the glass substrate 90 is transferred to the substrate packing form 200, the operator takes out the glass substrate 90 with the processing surface 90a still below from the glass substrate packing form 100 as shown in FIG. Place on the stage 10 of the apparatus 1,300, and then place the substrate storage tray 201 before storing the substrate thereon as shown in FIG. 4, and after reversing, from the glass substrate reversing apparatus 1,300 as shown in FIG. It is only necessary to take out the substrate storage tray 201 after storing the substrates.

  On the contrary, when the glass substrate 90 is transferred from the glass substrate packing form 200 to the glass substrate packing form 100, the operator moves the glass substrate 90 from the glass substrate packing form 200 as shown in FIG. The stored substrate storage tray 201 is taken out and fixed to the stage 10 of the glass substrate reversing device 1,200. After the reversal, the substrate storage tray 201 and the glass substrate 90 are moved from the glass substrate reversing device 1,300 as shown in FIG. You only need to take out each one.

  In addition, these operations are performed by a device for taking out the glass substrate 90 from the glass substrate packing form 100 and placing it on the stage 10, a device for placing the substrate storage tray 201 on the stage 10, a device for taking out the substrate storage tray 201 after reversing, or a glass A device for taking out the substrate storage tray 201 in which the glass substrate 90 is stored from the substrate packing form 200, a device for taking out the substrate storage tray 201 after the reversal, a device for taking out the glass substrate 90 after the reversal and placing it on the glass substrate packing form 100 May be prepared separately, and all steps of transferring the glass substrate 90 between the glass substrate packing form 100 and the glass substrate packing form 200 are performed by the apparatus, further reducing the burden on the operator. can do.

  As described above, since the operation of inverting the glass substrate 90 that has been difficult for the worker in the past is performed by the glass substrate inverting device 1300 according to the present invention, the glass substrate 90 as in the case of inverting the operator is obtained. Safety is secured without the risk of accidental injuries.

  Further, according to such a glass substrate reversing device 1300 and a glass substrate reversing method using the same, in the state where the air ejection surface 10b as the substrate floating surface of the stage 10 faces upward, the processing surface 90a is lowered. When the glass substrate 90 on the side is floated and the air ejection surface 10a of the stage 10 faces downward, the processing surface 90a is configured such that the upper glass substrate 90 is stored in the substrate storage tray 201. The processing surface 90a of the glass substrate 90 is prevented from being damaged before and after the inversion.

  The embodiments of the glass substrate reversing apparatus and the glass substrate reversing method using the same according to the present invention have been described above, but the present invention is not limited to these embodiments and departs from the gist of the present invention. Needless to say, the present invention can be implemented in various modes within the range not to be performed.

  For example, as the substrate floating surface of the stage 10 for floating the glass substrate 90, the air ejection surface 10b provided with the air outlet 10a for air floating the glass substrate 90 has been described. For example, the glass substrate 90 may be levitated by the method described above, and is not limited to the embodiment described above. As the means for floating the glass substrate 90 so as not to affect the processing surface 90a of the glass substrate 90, the above-described air floating is most preferable.

It is the figure which showed schematic structure of the glass substrate inversion apparatus which concerns on the 1st Embodiment of this invention. (A) is the figure which showed schematic structure of the glass substrate at the time of mounting on the stage with which the glass substrate inversion apparatus of FIG. 1 is equipped, (b) is at the time of mounting on the stage with which the glass substrate inversion apparatus of FIG. 1 is equipped. It is the figure which showed schematic structure of the board | substrate storage tray. It is the figure which showed the state by which the glass substrate is levitation | floating on the stage of the glass substrate inversion apparatus of FIG. It is the figure which showed the state by which the board | substrate storage tray was fixed to the stage of the glass substrate inversion apparatus of FIG. It is the figure which showed the state in which the stage of the glass substrate inversion apparatus of FIG. 1 was inverted with the substrate storage tray. It is the figure which showed the state from which the board | substrate storage tray was taken out after the stage of the glass substrate inversion apparatus of FIG. 1 was inverted. It is the figure which showed schematic structure of the glass substrate inversion apparatus which concerns on the 2nd Embodiment of this invention. (A) is the figure which showed schematic structure of the glass substrate packing form used conventionally, (b) is the figure which showed schematic structure of the glass substrate packing form which used the substrate storage tray used conventionally.

Explanation of symbols

1,300 Glass substrate reversing device 10 Stage 10b Substrate floating surface (air ejection surface)
20 Tray fixing means 21 Arm 22 Motor 30 Stage reversing means 31 Motor 50 Substrate outer periphery support means 51 Resin pad 52 Adsorption pad 52a Adsorption port 90 Glass substrate 90a Processing surface 90c Outer periphery 100 Glass substrate packaging form 101 Interleaf 102 Pallet 200 Glass Substrate packing form 201 Substrate storage tray 201b Storage surface 201c Flange

Claims (9)

  Between a state in which a large number of glass substrates are stacked so that the processing surface on which a predetermined processing is performed is on the lower side, and a state in which the glass substrates are accommodated in the substrate storage tray so that the processing surface is on the upper side A glass substrate reversing apparatus for reversing the glass substrate when the glass substrate is transferred, the stage having a substrate floating surface for floating the glass substrate, and the substrate on the substrate floating surface side of the stage A glass substrate reversing apparatus comprising: a tray fixing means for fixing a storage tray; and a stage reversing means for reversing the stage on which the substrate storage tray is fixed.   The glass substrate reversing apparatus according to claim 1, wherein the substrate floating surface of the stage is an air ejection surface that ejects air to float the glass substrate.   3. The glass substrate reversing device according to claim 1, further comprising a substrate outer peripheral portion supporting means for supporting the outer peripheral portion of the glass substrate on the substrate air bearing surface side of the stage.   The glass substrate reversing device according to claim 3, wherein the substrate outer peripheral portion supporting means is a resin pad that contacts the outer peripheral portion of the glass substrate.   The glass substrate reversing device according to claim 3, wherein the substrate outer peripheral portion supporting means is a suction pad that sucks the outer peripheral portion of the glass substrate.   A glass substrate reversing method using the glass substrate reversing device according to claim 1, wherein the glass substrate is a substrate floating surface side of the stage with the substrate floating surface facing upward and the processing surface is on the lower side. , A step of fixing the substrate storage tray before storing the substrate on the substrate floating surface side of the stage by the tray fixing means, and reversing the stage to which the substrate storage tray is fixed by the stage inverting means And a step of releasing the fixing of the substrate storage tray to the stage by the tray fixing means and enabling the substrate storage tray to be taken out after the reversing.   A glass substrate reversing method using the glass substrate reversing device according to any one of claims 3 to 5, wherein the substrate air bearing surface side of the stage with the substrate air bearing surface facing upward is the processing surface on the lower side. A step of levitating the glass substrate; a step of supporting the outer peripheral portion of the glass substrate levitated on the substrate floating surface side of the stage by the substrate outer peripheral portion supporting means; and before storing the substrate on the substrate floating surface side of the stage A step of fixing the substrate storage tray by the tray fixing means, a step of reversing the stage to which the substrate storage tray is fixed by the stage reversing means, and the substrate to the stage by the tray fixing means after the reversal. And a step of releasing the fixing of the storage tray so that the substrate storage tray can be taken out.   A glass substrate reversing method using the glass substrate reversing device according to claim 1, wherein the glass substrate is housed on the substrate floating surface side of the stage with the substrate floating surface facing downward. A step of fixing the storage tray by the tray fixing means, a step of reversing the stage to which the substrate storage tray is fixed by the stage reversing means, and a processing surface on the substrate floating surface side of the stage after the reversal. And a step of releasing the fixing of the substrate storage tray to the stage by the tray fixing means so that the substrate storage tray and the glass substrate can be respectively taken out. A glass substrate reversal method characterized by the above.   6. A glass substrate reversing method using the glass substrate reversing device according to claim 3, wherein the glass substrate is housed on the substrate air bearing surface side of the stage with the substrate air bearing surface facing downward. A step of fixing the substrate storage tray by the tray fixing means, a step of reversing the stage to which the substrate storage tray is fixed by the stage reversing means, and a processing surface on the substrate floating surface side of the stage after the reversal. A step of levitating the lower glass substrate, a step of supporting the outer peripheral portion of the glass substrate levitated on the substrate floating surface side of the stage after inversion by the substrate outer peripheral portion supporting means, and the tray fixing means after inversion Releasing the fixing of the substrate storage tray to the stage by enabling the substrate storage tray and the glass substrate to be taken out respectively. Glass substrate reversal method characterized by there.

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