JP2009292595A - Substrate transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate transfer device for preventing a drive system of an elevation unit from being large even when a number of trays for storing a substrate located on a table part is increased, and preventing a capacity occupied by the substrate transfer device from increasing. <P>SOLUTION: This device comprises (1) a conveyor CV for horizontally conveying loaded trays 10 for storing a substrate, (2) a tray conveying unit 80 for (a) holding only the tray at an uppermost part and removing it upward, and (b) horizontally conveying it, moving it downward, taking and transferring a stored glass substrate on supporting pins 34 from the tray for storing the substrate, and locating the empty tray on a trestle 51, (3) the trestle 51 on which the supporting pins are vertically provided, for locating the empty tray, and (4) a robot RB for horizontally conveying the glass substrate on the supporting pins. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate transfer device used for taking out a glass substrate of a color filter for a liquid crystal display device from a substrate storage tray and storing it in a substrate storage tray.

  For example, Japanese Patent Application Laid-Open No. 2004-186249 can efficiently remove a glass substrate from each of a plurality of substrate storage trays in which glass substrates of color filters for liquid crystal display devices are respectively stored and stacked in the vertical direction. Also disclosed is a substrate transfer device that can efficiently stack empty substrate storage trays from which glass substrates have been taken out in the vertical direction.

  FIG. 1 is a plan view showing an example of a substrate storage tray (10) used in the substrate transfer apparatus, and FIG. 2 is a cross-sectional view taken along the line AA of FIG. This substrate storage tray (10) accommodates a rectangular glass substrate used for a color filter for a liquid crystal display device, particularly a glass substrate having a side of 1.3 m or more and a thickness of 0.7 mm or less. Used for transportation.

  The substrate storage tray (10) is integrally formed with a rectangular tray by resin, and a glass substrate (20) to be transported has a rectangular bottom (11) on which the glass substrate (20) is placed in a horizontal state, and a bottom ( 11) and a frame portion (12) provided so as to protrude upward at the side edge portion over the entire circumference.

  The bottom (11) has a rectangular shape that is slightly larger than the glass substrate (20) to be accommodated, and the glass substrate (20) is placed on the upper surface of the bottom (11). In the vicinity of the four corners of the bottom portion (11), rectangular through-hole portions (15) are formed, and also pass through the middle positions of the four corners of the bottom portion (11) and the central portion of the bottom portion (11). A hole (15) is formed.

Each through hole (15) provided in the bottom (11) has a support pin for taking out the glass substrate (20) placed on the top surface of the bottom (11) from the substrate storage tray (10). (11) is provided so as to be inserted from below.
The frame portion (12) is provided so as to protrude, for example, about 5 mm from the upper surface of the bottom portion (11) over the entire circumference of the side edge portion of the bottom portion (11), and is placed on the upper surface of the bottom portion (11). The glass substrate (20) is surrounded over the entire circumference with an appropriate interval in the horizontal direction.

On the upper part of the frame part (12), an engaging part (13) protruding in a flange shape is provided over the entire circumference. The engaging portion (13) has a rectangular cross-sectional shape, and a claw portion for chucking when the substrate storage tray (10) is transported to a predetermined position is engaged with the engaging portion (13). It is supposed to be.
A step is formed between the upper surface of the engaging portion (13) and the upper portion of the frame portion (12), and the positioning portion (10) of the substrate storage tray (10) in which the steps are stacked vertically. 14).

As shown in FIG. 3, the substrate storage tray (10) in which the glass substrate (20) is stored is transported in a state where a plurality of trays (10) are stacked vertically. At this time, the lower end portion of the frame portion (12) is engaged with the positioning portion (14) which is a step between the upper surface of the engaging portion (13) and the upper portion of the frame portion (12). Thus, the substrate storage trays (10) stacked in the vertical direction do not cause misalignment in the horizontal direction.
In addition, in the state where a plurality of substrate storage trays (10) are stacked in the vertical direction, an appropriate interval (D) is formed between the upper and lower engaging portions (13). The claw portion engages with the engaging portion (13).

  FIG. 4 is a cross-sectional view showing an example of a substrate transfer device used for taking out the glass substrate (20) stored in the substrate storage tray (10). FIG. 4 is a partial cross-sectional view of the substrate transfer device.

This substrate transfer device (30) includes a tray holding unit (32) provided to hold a plurality of substrate storage trays (10) stacked in the vertical direction from the left and right in FIG. The lifting / lowering base (33) provided so that the board | substrate storage tray (10) by which holding | maintenance by the tray holding | maintenance unit (32) was cancelled | released is mounted and raised / lowered, and the table part (33a) of this lifting / lowering base (33) And a support pin (34) arranged vertically so as to be inserted vertically.
The support pins (34) are inserted through the table portion (33a) in the vertical direction and the through holes (15) of the substrate storage tray (10) placed on the table portion (33a) in the vertical direction. Insert. The table portion (33a) of the lifting platform (33) has a lattice shape.

4-8 is a figure for demonstrating the operation | movement which takes out the glass substrate (20) accommodated in the board | substrate accommodation tray (10) by the board | substrate transfer apparatus (30).
FIG. 4 exemplifies a state in which three substrate storage trays (10) in which glass substrates (20) are stored are stacked on top and bottom for explanation.

  FIG. 4 shows the lowermost substrate storage among the three substrate storage trays ((10-1) to (10-3)) placed on the table portion (33a) of the lifting platform (33). Substrate storage trays ((10-2), (10-3)) other than the tray (10-1) are respectively engaged with engaging claws (36) provided on the left and right tray holding units (32). That is, of the three substrate storage trays ((10-1) to (10-3)) stacked in the vertical direction, only the lowermost substrate storage tray (10-1) is provided. It shows the stage where the height of the lifting platform (33) is adjusted so that it is not engaged.

  Then, at the next stage, as shown by arrows in FIG. 4, the left and right tray holding units (32) move so as to approach each other. Accordingly, the engaging portions of the substrate storing trays ((10-2), (10-3)) other than the lowermost substrate storing tray (10-1) are respectively engaged by the engaging claw portions (36). And is held by the tray holding unit (32). Further, the lowermost substrate storage tray (10-1) is maintained on the table portion (33a) without being held by the tray holding unit (32).

  In such a state, when the lifting platform (33) is lowered, the lowermost substrate storage tray (10-1) placed on the table portion (33a) is integrated with the table portion (33a). And descend. As the lifting platform (33) is lowered, the support pins (34) are inserted through the grid-like table portion (33a) of the lifting platform (33), and the lowermost substrate storage tray (10-1) is inserted. It penetrates in each through-hole part (15) provided in the bottom part.

When the lifting platform (33) is further lowered, as shown in FIG. 5, the upper ends of the support pins (34) of the glass substrate (20) stored in the lowermost substrate storage tray (10-1). The glass substrate (20) comes into contact with the back surface and is lifted from the bottom (11) of the lowermost substrate storage tray (10-1) by the support pins (34).
When the upper end portion of each support pin (34) protrudes above the lowermost substrate storage tray (10-1) and the glass substrate (20) reaches a predetermined height, the lifting platform (33 ) Stops. The glass substrate (20) is held in a horizontal state on each support pin (34).

  The glass substrate (20) held in a horizontal state on the support pins (34) is taken out from the support pins (34) by a conveying means such as a suction hand and is conveyed to a predetermined position.

  When the glass substrate (20) held on the support pins (34) is carried out, the lifting platform (33) rises, and the lowermost substrate storage tray (10-1), which is empty, It abuts on the substrate storage tray (10-2) held by the tray holding unit (32). In this state, the lifting platform (33) stops rising. In FIG. 6, the arrow (a) represents the rise of the lifting platform (33) at this time.

  Next, the tray holding unit (32) is moved away from each other (arrow (b) in FIG. 6), and the substrate storage trays ((10-2), (10-3)) are engaged. The state is released, and the substrate storage trays ((10-2), (10-3) are placed on the empty bottom substrate storage tray (10-1) placed on the table portion (33a). ) Are stacked. As shown in FIG. 6, the glass substrate (20) is not stored in the lowermost substrate storage tray (10-1), and the substrate storage tray ((10-2), (10-3)). A glass substrate (20) is accommodated in each.

  Next, as shown in FIG. 7, the lifting platform (33) is lowered by an amount corresponding to one substrate storage tray. The lowermost substrate storage tray (10-1) and the upper substrate storage tray ((10-2), (10-3)) are stacked on the table portion (33a). . This lowering adjusts the height of the lifting platform (33) so that the uppermost substrate storage tray (10-3) is engaged by the engagement claw portion (36) of the tray holding unit (32). For the descent.

  Next, the tray holding unit (32) moves so as to approach each other, and the uppermost substrate storage tray (10-3) is engaged by the engaging claw portion (36). The storage tray (10-1) and the upper substrate storage tray (10-2) are placed on the table (33a). In FIG. 8, the arrow (a) indicates the approaching movement at this time.

  In such a state, the lifting platform (33) descends (arrow (b) in FIG. 8). Along with this lowering, the lowermost substrate storage tray (10-1) and the upper substrate storage tray (10-2) descend, and each support pin (34) has a lattice-like table portion (33a). Are inserted in order through the lowermost substrate storage tray (10-1) and the through hole (15) of the substrate storage tray (10-2).

  Next, as the elevating platform (33) is further lowered, as shown in FIG. 8, the upper end portion of each support pin (34) is stored in the upper substrate storage tray (10-2). The glass substrate (20) is held in a state where it is brought into contact with the back side of the substrate (20) and raised to a predetermined height. Thereby, the glass substrate (20) is taken out upward from the bottom (11) of the upper substrate storage tray (10-2) stacked in two stages by the support pins (34), and is used for substrate storage. It is held in a horizontal state at a predetermined height above the tray (10-2).

  Next, when the descent of the lifting platform (33) stops, the glass substrate (20) held in a horizontal state on each support pin (34) is taken out by a conveying means such as a suction hand, and is moved to a predetermined position. It is conveyed to. As a result, two substrate storage trays ((10-1), (10-2)) in which the glass substrate (20) is not stored on the table portion (33a) are stacked vertically. Become.

Thereafter, by repeating the same operation, the substrate storage tray (10-3) holding the glass substrate (20) held by the tray holding unit (32) is moved to the table portion of the lifting platform (33). (33a) Stacked sequentially on empty substrate storage trays ((10-1) to (10-2)) placed on the substrate, and the lift (33) descends to lower the substrate. The glass substrate (20) stored in the storage tray is taken out in a horizontal state by the support pins (34).

  In this way, the glass substrates (20) are sequentially taken out from the lowermost substrate storage tray in the plurality of substrate storage trays in which the glass substrates (20) are stored and stacked in the vertical direction, When the taken-out glass substrate (20) is conveyed, an empty substrate storage tray in which the glass substrate (20) is not stored is vertically moved on the table portion (33a) of the lifting platform (33). It will remain in a stacked state.

  As described above, the substrate transfer apparatus can efficiently take out the glass substrate (20) from the substrate storage tray in which the glass substrates (20) are stored and stacked in the vertical direction. Moreover, since the substrate storage trays stacked in the vertical direction are separated in the vertical direction and the glass substrate (20) is taken out, the floor area occupied by the entire apparatus can be reduced.

  In addition, the substrate transfer apparatus is not limited to the case of taking out the glass substrate (20) stored in the substrate storage tray stacked in the vertical direction as described above, and performs an operation opposite to the above-described operation. By carrying out in order, a glass substrate (20) can also be accommodated in the board | substrate storage tray piled up and down in the state in which the glass substrate (20) is not accommodated.

  However, this substrate transfer apparatus is provided with a lifting / lowering unit (not shown) for lifting / lowering a lifting / lowering base (33) on which the substrate storage tray (10) is placed. 20), the packaging form of the substrate storage tray (10) when the container is accommodated and transported is, for example, a stacking number of 60 pieces in the vertical direction, and the table portion (33a) of the lifting platform (33). ) When the number of substrate storage trays (10) to be placed on the top is similarly 60 in the vertical direction, the drive system of the lifting unit for raising and lowering the lifting platform (33) is correspondingly large. There is a problem of becoming.

  Further, when the number of substrate storage trays (10) to be placed on the table portion (33a) of the lifting platform (33) reaches 60 in the vertical direction, the substrate storage placed in a stacked state is stored. The height of the tray (10) is 2 m or more. This means that the height of the support pin (34) that passes through the table portion (33a) and the substrate storage tray (10) is 2 m or more.

Such a structure and arrangement of the substrate transfer device when the support pins (34) having a height of 2 m or more are provided vertically, and a substrate transfer device on which the glass substrate (20) is transferred for transfer. In consideration of the internal flow line, a space of a suitable depth is provided under the floor of the work place, and a support pin (34) is arranged in this space.
This measure has a problem in that the volume of the clean room occupied by the substrate transfer apparatus in the workplace is increased, and the initial investment amount and the maintenance cost are increased.
JP 2004-186249 A Japanese Patent Laid-Open No. 10-287382

The present invention has been made to solve the above problems, and is used for taking out a glass substrate of a color filter for a liquid crystal display device from the inside of the substrate storage tray and storing it in the substrate storage tray. In the substrate transfer device, the packaging form of the substrate storage tray when the glass substrate is accommodated and transported is, for example, a number such that 60 pieces are stacked in the vertical direction, and the substrate placed on the table unit Even if the number of storage trays increases in the same way, the drive system of the lifting unit does not become large, and the height of the support pins for taking out the glass substrate from the bottom of the substrate storage tray is, for example, 2 m or more However, it is not necessary to provide a space of a suitable depth under the floor, that is, without causing an increase in the volume of the clean room occupied by the substrate transfer device in the workplace. It is an object to provide a device.

The present invention provides a substrate transfer capable of taking out a glass substrate stored from a substrate storage tray having a plurality of through holes provided at the bottom so that a support pin for lifting the glass substrate stored therethrough is inserted. In the device
1) A conveyor that horizontally conveys a plurality of substrate storage trays in which the glass substrates are stored and stacked in the vertical direction;
2) a) Hold only the uppermost substrate storage tray of the plurality of stacked substrate storage trays and remove it upward.
b) The substrate storage tray is horizontally transported above the support pins, the substrate storage tray is lowered, the stored glass substrate is taken out from the substrate storage tray onto a plurality of support pins, and transferred. Hold the glass substrate horizontally on multiple support pins,
c) further lowering the substrate storage tray to place the empty substrate storage tray on the gantry,
3) The plurality of support pins are vertically provided upward from the upper surface, and the pedestal placed on the upper surface in a state where the empty substrate storage trays are stacked in the vertical direction,
4) A substrate transfer apparatus characterized in that a robot for scooping up and horizontally transporting a glass substrate held in a horizontal state on the plurality of support pins from below is provided.

  The present invention includes 1) a conveyor that horizontally conveys a plurality of substrate storage trays in which glass substrates are stored and stacked in the vertical direction, and 2) a) a plurality of substrate storage trays in a stacked state. B) Holds only the uppermost substrate storage tray and removes it upward. B) Transports the substrate storage tray horizontally above the support pins, lowers the substrate storage tray, and stores the stored glass substrate for substrate storage. The substrate is taken out from the tray onto a plurality of support pins and transferred to hold the glass substrate in a horizontal state on the plurality of support pins. C) The substrate storage tray is further lowered to empty the substrate storage tray. 3) A plurality of support pins are vertically provided upward from the upper surface, and the empty substrate storage trays are stacked in the vertical direction. Mounting base placed on top 4) Since there is provided a robot for scooping up and horizontally transporting glass substrates held in a horizontal state on a plurality of support pins from below, the packaging form of the substrate storage tray when storing and transporting the glass substrates However, for example, even if the number of stacks of 60 pieces stacked in the vertical direction is increased, and the number of substrate storage trays placed on the table portion increases in the same manner, the drive system of the lifting / lowering unit does not become large. In addition, even if the height of the support pin for taking out the glass substrate from the bottom of the substrate storage tray is 2 m or more, for example, without providing a space of a suitable depth under the floor, The substrate transfer apparatus does not increase the volume of the clean room occupied by the substrate transfer apparatus.

Embodiments of the present invention will be described below.
FIG. 9 is a side view showing an example of the substrate transfer apparatus according to the present invention. The substrate transfer device according to the present invention includes a plurality of support pins for lifting the glass substrate (20) stored therein, such as the substrate storage tray (10) shown in FIGS. A substrate transfer apparatus capable of taking out a glass substrate stored in a substrate storing tray provided with a through hole (15) at the bottom and storing a glass substrate in an empty substrate storing tray. is there.

As shown in FIG. 9, the substrate transfer apparatus includes a conveyor (CV), a removal / stacking unit (40), a transfer / stacking unit (50), and a robot (RB). The conveyor (CV) horizontally conveys a plurality of substrate storage trays stacked in the vertical direction.
In FIG. 9, the horizontal conveyance indicated by the arrow (a) is a conveyance in which the substrate storage tray storing the glass substrate is removed / loaded into the stacking unit (40) when emptying the glass substrate from the substrate storage tray. In this case, the substrate storage tray is removed and transported from the stacking unit (40).
Also, when the glass substrate is stored in the empty substrate storage tray, the empty substrate storage tray is removed / transferred to the stacking unit (40), and the substrate storage tray storing the glass substrate is removed / stacked. It is conveyance carried out from a part (40).

  The removal / stacking part (40) shown in FIG. 9 is the removal / stacking part of the end of the conveyor (CV). A tray transport unit (80) is provided in the removal / stacking section (40). FIG. 9 shows a state where a plurality of substrate storage trays stacked on the pallet (41) are loaded.

The transfer / stack unit (50) is provided with a gantry (51) provided with a plurality of support pins (34) vertically from the upper surface upward. The plurality of support pins (34) hold the glass substrate stored in the substrate storage tray transported by the tray transport unit (80) in a horizontal state at its upper end.
In addition, on the upper surface of the gantry (51), empty substrate storage trays are sequentially stacked in the vertical direction. FIG. 9 shows a state in which the empty substrate storage tray is not stacked on the gantry (51).

  When the substrate transfer device takes out the glass substrate from the substrate storage tray, the robot (RB) carries out the glass substrate held in a horizontal state on the plurality of support pins (34). Further, when the substrate transfer apparatus stores the glass substrate in an empty substrate storage tray, the glass substrate is mounted in a horizontal state on the plurality of support pins (34).

FIG. 10 is a plan view showing an example of the tray transport unit (80), and FIGS. 11 and 12 are cross-sectional views taken along line BB in FIG. The tray transport unit (80) is used to hold and transport the substrate storage tray (10) shown in FIG.
The tray transport unit (80) has a rectangular frame shape and includes a frame part (81) and an opening part (82). The opening (82) has a rectangular shape that is slightly larger than the substrate storage tray (10) to be held, and the substrate storage tray (10) is held in the opening (82).

As shown in FIG. 11, the cross-sectional shape of the frame portion (81) is rectangular, and the substrate storage tray (10) is held on the lower surface of the frame portion (81) and is used for transporting to a predetermined position. An engaging claw portion (83) for king is provided. The engaging claw portion (83) is provided over the entire circumference of the frame portion (81).
In FIG. 11, the engaging claw portion (83) protrudes into the opening (82), engages the engaging portion (13) of the substrate storage tray (10), and the tray transport unit (80) is the substrate storage tray. The state which hold | maintained (10) is shown. Also, in FIG. 12, the engaging claw portion (83) is pulled into the frame portion (81) to release the engaging portion (13), and the tray transport unit (80) holds the substrate storage tray (10). It shows a state where it is not held.

When the tray transport unit (80) takes out the glass substrate from the substrate storage tray, the uppermost substrate of the plurality of stacked substrate storage trays loaded into the removal / stacking unit (40) is loaded. Holding only the storage tray and removing it upwards, horizontally transporting the substrate storage tray to the transfer / stacking unit (50), lowering the substrate storage tray, and transferring the glass substrate onto a plurality of support pins Further, the substrate storage tray is lowered, and the empty substrate storage tray is placed on the gantry.
In FIG. 9, the drive mechanism for driving the tray transport unit (80) that holds and transports the substrate storage tray (10) is omitted.

FIGS. 13-18 is a figure for demonstrating the operation | movement which the board | substrate transfer apparatus takes out the glass substrate (20) accommodated in the board | substrate storage tray (10).
In FIG. 13, a plurality of substrate storage trays in which glass substrates are stored and stacked in the vertical direction are carried into the detaching / stacking unit (40), and the tray transport unit (80) is used for storing the uppermost substrate. It shows a stage in which the tray starts to descend to hold the tray and remove it upward.

  At the time of the lowering, the engaging claw portion (83) provided in the frame portion (81) of the tray transport unit (80) is in a retracted state. Therefore, when descending, the outer periphery of the substrate storage tray (10) and the engaging claw portion (83) of the frame portion (81) do not interfere with each other, and the substrate storage tray (10) is placed in the opening (82). ) Can be accommodated. After the tray transport unit (80) is lowered and the substrate storage tray (10) is accommodated in the opening (82) as shown in FIG. 12, as shown in FIG. 83) is projected into the opening (82), and the engaging portion (13) of the substrate storage tray (10) is engaged with the engaging claw portion (83).

  FIG. 14 shows a stage in which the tray transport unit (80) moves upward while holding only the uppermost substrate storage tray (10a) and is removed upward. As shown in FIG. 15, when the uppermost substrate storage tray (10a) is horizontally transported to the transfer / stacking unit (50), as shown in FIG. It stops when it reaches a predetermined height so that the support pins (34) do not interfere.

  FIG. 15 shows a stage in which the tray transport unit (80) horizontally transports above the plurality of support pins (34) while holding the uppermost substrate storage tray (10a). Each of the plurality of through holes (15) provided at the bottom of the uppermost substrate storage tray (10a) is positioned above each of the plurality of support pins (34), and the substrate storage tray (10a) ) Is conveyed to a predetermined position so that each support pin (34) is inserted into each through hole (15).

FIG. 16 shows the stage where the uppermost substrate storage tray (10a) is lowered in the state shown in FIG. As the uppermost substrate storage tray (10a) is lowered, the upper ends of the plurality of support pins (34) are placed on the back surface of the glass substrate (20) stored in the uppermost substrate storage tray (10a). The glass substrate (20) is lifted from the bottom by a plurality of support pins (34), and is taken out and transferred onto the plurality of support pins. The glass substrate (20) is held in a horizontal state on the plurality of support pins (34).
The empty uppermost substrate storage tray (10a) is further lowered, and the empty uppermost substrate storage tray (10a) is placed on the gantry (51).

After placing the empty uppermost substrate storage tray (10a) on the gantry (51), the engaging claw portion (83) provided on the frame portion (81) of the tray transport unit (80) is placed. The engagement between the engaging portion (13) and the engaging claw portion (83) of the uppermost substrate storage tray (10a) that has been retracted is released, and the tray transport unit (80) is empty. The uppermost substrate storage tray (10a) is not held.

FIG. 17 shows a stage in which the tray transport unit (80) moves up and returns to the position shown in FIG. 13 after placing the empty uppermost substrate storage tray (10a) on the mount (51). It is a thing.
As shown in FIG. 18, the robot (RB) scoops up the glass substrate (20) held in a horizontal state on the plurality of support pins (34) from below and horizontally conveys it to the processing step.

  Thereafter, the tray transport unit (80) repeats the operation, and removes the uppermost substrate storage tray next to the plurality of stacked substrate storage trays carried into the removal / stacking section (40). The glass substrate (20) is transferred onto the plurality of support pins (34) in the transfer / stacking unit (50), and the empty substrate storage tray (10) is mounted on the pedestal (51 ) Place on top.

  Next, the glass substrates (20) stored in all the substrate storage trays (10) on the pallet are transferred and unloaded by the robot, and the empty substrate storage tray is mounted on the gantry. At this stage, the empty substrate storage trays stacked and placed on the gantry (51) by the reverse operation of the tray transport unit (80) are all removed / stacked (40 ) On the pallet. The empty substrate storage tray is carried out by a conveyor (CV).

  As described above, the substrate transfer apparatus according to the present invention does not have an elevating unit for elevating a plurality of substrate storage trays stacked in the vertical direction, unlike the conventional substrate transfer apparatus shown in FIG. Even if the packaging form of the substrate storage tray when storing and transporting the glass substrate is, for example, a stack of 60 pieces in the vertical direction, the drive system does not become large and support Even if the height of the pin is 2 m or more, for example, a space having a suitable depth is not provided under the floor. Therefore, the substrate transfer apparatus does not increase the volume of the clean room occupied by the substrate transfer apparatus in the workplace.

The substrate transfer apparatus according to the present invention is a substrate transfer apparatus for taking out a glass substrate from the substrate storage tray, and is also a substrate used for storing the glass substrate in the substrate storage tray. It is a transfer device. The operation for storing the glass substrate in the substrate storage tray is, for example, as follows.
1) The empty substrate storage trays stacked on the pallet are removed by the conveyor (CV) and carried into the stacking unit (40).
2) The tray transport unit (80) stacks all the empty substrate storage trays on the frame (51) of the transfer / stack unit (50) in order from the uppermost empty substrate storage tray. Place. 3) The robot (RB) places the glass substrate on the plurality of support pins (34).
4) The tray transport unit (80) holds and lifts the uppermost empty substrate storage tray on the gantry (51) of the transfer / stack unit (50), and on the plurality of support pins (34). The glass substrate is moved up and transferred to an empty substrate storage tray so as to be picked up.
5) The tray transport unit (80) removes and transfers the substrate storage tray storing the glass substrate onto the pallet of the stacking unit (40).
6) Repeat steps 3), 4) and 5) to store the glass substrates in all empty substrate storage trays and stack them on the pallet.
7) On the conveyor (CV), the substrate storage tray storing the glass substrates stacked on the pallet is removed / unloaded from the stacking unit (40).

It is a top view which shows an example of the board | substrate storage tray used with a board | substrate transfer apparatus. It is sectional drawing in the AA of FIG. It is explanatory drawing of the state in which a plurality of substrate storage trays were stacked up and down. It is a fragmentary sectional view of an example of a substrate transfer device. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a side view which shows an example of the board | substrate transfer apparatus by this invention. It is a top view which shows an example of a tray conveyance unit. It is sectional drawing engaged in the BB line of FIG. It is sectional drawing which canceled the engagement in the BB line of FIG. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray. It is a figure for demonstrating operation | movement which the board | substrate transfer apparatus takes out the glass substrate accommodated in the board | substrate storage tray.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Substrate storage tray 12 ... Frame part 13 ... Engagement part 15 ... Through-hole part 20 ... Glass substrate 30 ... Substrate transfer device 32 ... Tray holding unit 33 ... Elevator 34 ... Support pin 36 ... Engagement claw part 40 ... Removal / stacking part 41 ... Pallet 50 ... Transfer / stacking part 51 ... Base 80 ... Tray transport unit 81 ... frame part 82 ... opening 83 ... engagement claw part CV ... conveyor RB ... robot

Claims (1)

In the substrate transfer device capable of taking out the glass substrate stored from the substrate storage tray provided with a plurality of through holes at the bottom so that the support pins for lifting the glass substrate stored upward are inserted,
1) A conveyor that horizontally conveys a plurality of substrate storage trays in which the glass substrates are stored and stacked in the vertical direction;
2) a) Hold only the uppermost substrate storage tray of the plurality of stacked substrate storage trays and remove it upward.
b) The substrate storage tray is horizontally transported above the support pins, the substrate storage tray is lowered, the stored glass substrate is taken out from the substrate storage tray onto a plurality of support pins, and transferred. Hold the glass substrate horizontally on multiple support pins,
c) further lowering the substrate storage tray to place the empty substrate storage tray on the gantry,
3) The plurality of support pins are vertically provided upward from the upper surface, and the pedestal placed on the upper surface in a state where the empty substrate storage trays are stacked in the vertical direction,
4) A substrate transfer apparatus, wherein a robot is provided for scooping up and horizontally transporting a glass substrate held in a horizontal state on the plurality of support pins from below.

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