JP2009541794A - Memsディスプレイを駆動するためのシステムおよび方法 - Google Patents
Memsディスプレイを駆動するためのシステムおよび方法 Download PDFInfo
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Abstract
Description
ここで、σ0は、例えば基準温度での残留応力であり、kは定数である。一般的な基準温度は、約摂氏25度の室温である。一実施形態におけるこれらのパラメータ間の関係の例として、温度が摂氏1度上昇するごとに、可動反射層中の応力が2MPa変化し、動作電圧が〜11mVシフトすることになる。一般的な実施形態では、干渉変調器60の層14内の応力(σ)は、引っ張り応力であり、このことは、σがゼロ以上であることを意味する。
ΔCTE=α1-α2 式4
ここで、α1=13.0×10-6/℃(ニッケルのCTE)、α2=3.76×10-6/℃(Corning Glass No.1737のCTE)である。次に、熱歪みεTは、次式で表されることがある。
εT=(ΔCTE)(ΔT) 式5
ここで、ΔTは、基準温度に対する温度変化である。次に、結果として生じる熱応力は、次式で表されることがある。
σT(T)=ElεT=El(ΔCTE)(ΔT) 式6
ここでElはニッケルの弾性率であり、ΔTは基準温度に対する温度変化である。次に、作動電圧は、以下の式のどれかで示されるように温度の関数として表されることがある。
Cx=Cs*R1/R2 式9
試験撓み構造62のキャパシタンスは、温度を示す信号としてアレイ駆動装置22に送られる。
14 可動反射層、試験撓み要素
16 光学スタック
18 柱、支持物
19 ギャップ
20 基板
21 プロセッサ
22 アレイ駆動装置
24 行駆動装置回路
26 列駆動装置回路
28 フレームバッファ
29 駆動装置コントローラ
30 表示アレイ、ディスプレイ
34 撓み可能層
40 ディスプレイ装置
47 トランシーバ
48 入力装置
60 干渉変調器
62 試験撓み構造、可変コンデンサ
64 試験回路
66 温度感知回路、センサ
70 電圧源
72 試験撓み構造のアレイ(試験アレイ)
Claims (69)
- ディスプレイ装置であって、
MEMSディスプレイ要素のアレイと、
少なくとも1つの試験撓み要素と、
前記試験撓み要素に接続された撓み感知回路と、を備え、前記撓み感知回路が、前記試験撓み要素を作動させることなしに前記試験撓み要素の撓みを監視し、かつ前記撓みに基づいて、MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す信号を供給するように構成されているディスプレイ装置。 - 前記アレイおよび前記撓み感知回路に接続された駆動回路をさらに備え、前記駆動回路が、前記撓み感知回路から伝えられる信号に少なくとも部分的に基づいて、前記アレイを駆動するための信号を供給するように構成されている、請求項1に記載の装置。
- 前記撓み感知回路が、前記駆動回路中に位置付けされている、請求項2に記載の装置。
- 各MEMSディスプレイ要素が、干渉変調器を備え、前記干渉変調器が、電極層、撓み要素、および前記電極層と前記撓み要素によって画定されたギャップを備え、前記撓み要素が、前記撓み要素と前記電極層の間に加えられる電圧に応答して、前記ギャップの中で動く、請求項1に記載の装置。
- 前記試験撓み要素の撓みが、MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータの関数である、請求項1に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す前記信号が、前記試験撓み要素の撓みを示す信号を有する、請求項1に記載の装置。
- 前記試験撓み要素が、基板上に形成されている、請求項1に記載の装置。
- 前記撓み感知回路が、前記試験撓み要素と前記基板の間のキャパシタンスを監視することによって前記試験撓み要素の撓みを監視するように構成されている、請求項7に記載の装置。
- 前記撓み感知回路が、前記試験撓み要素と前記基板の間に実質的に一定の電圧を加えるように構成されている、請求項7に記載の装置。
- 前記撓み感知回路は、前記試験撓み要素の撓みが基準値と実質的に同じであるように、前記試験撓み要素と前記基板の間に加えられる前記電圧を第1の電圧に調整するように構成されている、請求項7に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す前記信号が、前記第1の電圧を有する、請求項10に記載の装置。
- 前記試験撓み要素と前記基板の間に基準電圧が加えられ、かつ前記試験撓み要素が基準温度であるとき、前記試験撓み要素の撓みが前記基準値である、請求項10に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、それぞれ第1および第2の電気機械応答を有し、前記第1および第2の電気機械応答が予め決められた互いの関係を有する、請求項4に記載の装置。
- 前記第1および第2の電気機械応答が、各々、温度の関数である、請求項13に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同じである、請求項4に記載の装置。
- 前記試験撓み要素の規模が、干渉変調器の前記アレイの前記撓み要素の規模よりも実質的に大きい、請求項4に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同じ材料から作られている、請求項4に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同じプロセスで形成されている、請求項4に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同時に形成されている、請求項4に記載の装置。
- 前記試験撓み要素および干渉変調器の前記アレイが、共通の基板上に形成されている、請求項1に記載の装置。
- 前記撓み感知回路が、実質的に連続的に撓みを監視するように構成されている、請求項1に記載の装置。
- ディスプレイと、
前記ディスプレイと通信するように構成されたプロセッサであって、画像データを処理するように構成されたプロセッサと、
前記プロセッサと通信するように構成されたメモリ素子と、をさらに備える、請求項1に記載の装置。 - 少なくとも1つの信号を前記ディスプレイに送るように構成された駆動装置回路をさらに備える、請求項22に記載の装置。
- 前記画像データの少なくとも部分を前記駆動装置回路に送るように構成されたコントローラをさらに備える、請求項23に記載の装置。
- 前記画像データを前記プロセッサに送るように構成された画像源モジュールをさらに備える、請求項22に記載の装置。
- 前記画像源モジュールが、受信器、トランシーバ、および送信器のうちの少なくとも1つを備える、請求項25に記載の装置。
- 入力データを受け取り、前記入力データを前記プロセッサに伝えるように構成された入力装置をさらに備える、請求項22に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータが、温度を有する、請求項1に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータが、経年変化を有する、請求項1に記載の装置。
- ディスプレイ装置であって、
MEMSディスプレイ要素のアレイと、
基板上に形成された試験撓み要素のアレイであって、各試験撓み要素が並列に接続されている試験撓み要素のアレイと、
試験撓み要素の前記アレイに接続された撓み感知回路と、を備え、前記撓み感知回路が、試験撓み要素の前記アレイのキャパシタンスを監視し、かつ前記キャパシタンスに基づいて、MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す信号を供給するように構成されているディスプレイ装置。 - 各MEMSディスプレイ要素が、干渉変調器を備え、前記干渉変調器が、電極層、撓み要素、および前記電極層と前記撓み要素によって画定されたギャップを備え、前記撓み要素が、前記撓み要素と前記電極層の間に加えられる電圧に応答して、前記ギャップの中で動く、請求項30に記載の装置。
- 各試験撓み要素の撓みが、MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータの関数である、請求項30に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す前記信号が、前記キャパシタンスを示す信号を有する、請求項30に記載の装置。
- 前記撓み感知回路が、各試験撓み要素と前記基板の間に共通の実質的に一定の電圧を加えるように構成されている、請求項30に記載の装置。
- 前記撓み感知回路は、各試験撓み要素の撓みが基準値と実質的に同じであるように、各試験撓み要素と前記基板の間に加えられる前記共通の電圧を第1の電圧に調整するように構成されている、請求項34に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す前記信号が、前記第1の電圧を有する、請求項35に記載の装置。
- 前記試験撓み要素と前記基板の間に基準電圧が加えられ、かつ前記試験撓み要素が基準温度であるとき、各試験撓み要素の撓みが前記基準値である、請求項35に記載の装置。
- 各試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、それぞれ第1および第2の電気機械応答を有し、前記第1および第2の電気機械応答が予め決められた互いの関係を有する、請求項31に記載の装置。
- 前記第1および第2の電気機械応答が、各々、温度の関数である、請求項38に記載の装置。
- 各試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同じである、請求項31に記載の装置。
- 各試験撓み要素および干渉変調器の前記アレイの前記撓み要素が、実質的に同じ材料から作られている、請求項31に記載の装置。
- 試験撓み要素の前記アレイおよび干渉変調器の前記アレイの前記撓み要素が、実質的に同じプロセスで形成されている、請求項31に記載の装置。
- 試験撓み要素の前記アレイおよび干渉変調器の前記アレイの前記撓み要素が、実質的に同時に形成されている、請求項31に記載の装置。
- 試験撓み要素の前記アレイおよび干渉変調器の前記アレイが、共通の基板上に形成されている、請求項30に記載の装置。
- MEMSディスプレイ要素の前記アレイおよび前記撓み感知回路に接続された駆動回路をさらに備え、前記駆動回路が、前記撓み感知回路から伝えられる前記信号に基づいて、MEMSディスプレイ要素の前記アレイを駆動するための信号を供給するように構成されている、請求項30に記載の装置。
- 前記撓み感知回路は、各試験撓み要素が作動されるのを妨げるように構成されている、請求項30に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす前記1つまたは複数のパラメータが、温度を有する、請求項30に記載の装置。
- MEMSディスプレイ要素の前記アレイの動作に影響を及ぼす前記1つまたは複数のパラメータが、経年変化を有する、請求項30に記載の装置。
- 干渉変調器のアレイを駆動する方法であって、
1つまたは複数の試験撓み要素の両端間に電圧を加えるステップであって、前記電圧は、前記1つまたは複数の試験撓み要素が非作動状態のままであるように選ばれるステップと、
前記1つまたは複数の試験撓み要素の撓みを測定するステップと、
前記撓み測定に少なくとも部分的に基づいて干渉変調器のアレイに駆動信号を供給するステップと、を有する方法。 - 撓みを測定する前記ステップが、前記1つまたは複数の試験撓み要素と前記基板の間のキャパシタンスを測定することを有する、請求項49に記載の方法。
- 前記電圧が、実質的に一定である、請求項49に記載の方法。
- 前記撓みが、干渉変調器の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータの関数である、請求項49に記載の方法。
- 前記1つまたは複数のパラメータが、温度を有する、請求項52に記載の方法。
- 前記1つまたは複数のパラメータが、経年変化を有する、請求項52に記載の方法。
- 干渉変調器のアレイを駆動する方法であって、
1つまたは複数の試験撓み要素の両端間に可変電圧を加えるステップであって、前記可変電圧がDC成分を有するステップと、
前記1つまたは複数の試験撓み要素の撓みが基準値と実質的に同じであるように前記DC成分の電圧をある値に調整するステップであって、前記1つまたは複数の試験撓み要素が非作動状態のままであるステップと、
前記値に少なくとも部分的に基づいて干渉変調器のアレイに駆動信号を供給するステップと、を有する方法。 - 前記撓みが、前記1つまたは複数の試験撓み要素と前記基板の間のキャパシタンスに少なくとも部分的に基づいて測定される、請求項55に記載の方法。
- ディスプレイ装置であって、
画像データを表示するための手段と、
前記表示手段の動作に影響を及ぼす1つまたは複数のパラメータを示す信号を供給するための手段と、
前記信号に基づいて前記表示手段を駆動するための手段と、を備えるディスプレイ装置。 - 前記表示手段が、干渉変調器のアレイを備える、請求項57に記載の装置。
- 前記1つまたは複数のパラメータが、温度を有する、請求項57に記載の装置。
- 前記1つまたは複数のパラメータが、経年変化を有する、請求項57に記載の装置。
- 信号を供給するための前記手段が、
基板上に形成された試験撓み要素のアレイであって、各試験撓み要素が並列に接続されている試験撓み要素のアレイと、
試験撓み要素の前記アレイに接続された撓み感知回路と、を備え、前記撓み感知回路が、試験撓み要素の前記アレイのキャパシタンスを監視し、かつ前記キャパシタンスに基づいて、干渉変調器の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータを示す信号を供給するように構成されている、請求項58に記載の装置。 - コンピュータ読取り可能媒体であって、
ある回路に、1つまたは複数の試験撓み要素の両端間に電圧を加えさせるための手段であって、前記電圧が、前記1つまたは複数の試験撓み要素が非作動状態のままであるように選ばれる手段と、
ある回路に、前記1つまたは複数の試験撓み要素の撓みを測定させるための手段と、
ある回路に、前記撓み測定に少なくとも部分的に基づいて干渉変調器のアレイに駆動信号を供給させるための手段と、を備えるコンピュータ読取り可能媒体。 - ある回路に撓みを測定させるための手段が、ある回路に、前記1つまたは複数の試験撓み要素と前記基板の間のキャパシタンスを測定させるための手段を備える、請求項62に記載のコンピュータ読取り可能媒体。
- 前記電圧が、実質的に一定である、請求項62に記載のコンピュータ読取り可能媒体。
- 前記撓みが、干渉変調器の前記アレイの動作に影響を及ぼす1つまたは複数のパラメータの関数である、請求項62に記載のコンピュータ読取り可能媒体。
- 前記1つまたは複数のパラメータが、温度を有する、請求項65に記載のコンピュータ読取り可能媒体。
- 前記1つまたは複数のパラメータが、経年変化を有する、請求項65に記載のコンピュータ読取り可能媒体。
- コンピュータ読取り可能媒体であって、
ある回路に、1つまたは複数の試験撓み要素の両端間に可変電圧を加えさせるための手段であって、前記可変電圧がDC成分を有する手段と、
前記1つまたは複数の試験撓み要素の撓みが基準値と実質的に同じであるように、ある回路に、前記DC成分の電圧をある値に調整させるための手段であって、前記1つまたは複数の試験撓み要素が非作動状態のままである手段と、
ある回路に、前記値に少なくとも部分的に基づいて干渉変調器のアレイに駆動信号を供給させるための手段と、を備えるコンピュータ読取り可能媒体。 - 前記撓みが、前記1つまたは複数の試験撓み要素と前記基板の間のキャパシタンスに少なくとも部分的に基づいて測定される、請求項68に記載のコンピュータ読取り可能媒体。
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JP2013516658A (ja) * | 2010-01-06 | 2013-05-13 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | ディスプレイライン更新の順序再配置 |
JP2015501007A (ja) * | 2011-11-29 | 2015-01-08 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | アナログ干渉変調器を駆動するためのシステム、デバイス、および方法 |
Also Published As
Publication number | Publication date |
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WO2007149284A2 (en) | 2007-12-27 |
US7702192B2 (en) | 2010-04-20 |
CN101501750B (zh) | 2011-11-09 |
US20070296691A1 (en) | 2007-12-27 |
JP5102292B2 (ja) | 2012-12-19 |
KR101346343B1 (ko) | 2013-12-31 |
WO2007149284A3 (en) | 2008-03-27 |
CN101501750A (zh) | 2009-08-05 |
TW200815786A (en) | 2008-04-01 |
KR20090033445A (ko) | 2009-04-03 |
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