JP2009536466A - 探査プローブ(ssp)記憶装置のためのビット消去アーキテクチャ - Google Patents
探査プローブ(ssp)記憶装置のためのビット消去アーキテクチャ Download PDFInfo
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- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
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Abstract
【選択図】図3
Description
図示しないが、メモリ200は、各メモリセルから/にデータを読み/書きするプローブ102のような、または、他のタイプのプローブなどの1つ以上のプローブも含みうる。一実施形態では、メモリ200は、すべてのメモリセル204において読み書きができる1つのプローブを含みうるが、他の実施形態では、より多くのプローブが用いられうる。いくつかの実施形態では、例えば、それぞれメモリセル204は、各自が1つ以上のプローブを有し、一方他の実施形態では、単一のプローブがアレイ202内のメモリセル204のサブセットを担当しうる。さらに他の実施形態は、アレイ202全体に対し、または、個別のメモリセルもしくはメモリセル群に対し読み書きする個別のプローブを含みうる。
Claims (30)
- 基板と、
前記基板上に形成され、ヒータ層、および、前記ヒータ層に電気的に結合される第1および第2の電極を有するヒータと、
前記ヒータ上に形成された相変化層と、
を備える装置。 - 前記第1の電極は、前記基板と前記ヒータ層との間にあり、前記第2の電極は、前記ヒータ層と前記相変化層との間にある、請求項1に記載の装置。
- 前記ヒータ層および前記第1の電極は、誘電層内に配置される、請求項2に記載の装置。
- 前記第1の電極は、前記ヒータ層の一方の端部に結合され、前記第2の電極は、前記ヒータ層の他方の端部に結合される、請求項1に記載の装置。
- 前記相変化層は、カルコゲナイド層である、請求項1に記載の装置。
- 前記ヒータは、個別にアドレス指定可能である、請求項1に記載の装置。
- 前記相変化層上に形成される保護層をさらに備える、請求項1に記載の装置。
- プロセッサと、
前記プロセッサに結合されるDRAMメモリと、
前記プロセッサに結合される相変化メモリとを備えるシステムであって、
前記相変化メモリは、
基板と、
前記基板上に形成され、ヒータ層、および、前記ヒータ層に電気的に結合される第1および第2の電極を有するヒータと、
前記ヒータ上に形成される相変化層と、
を含むシステム。 - 前記第1の電極は、前記基板と前記ヒータ層との間にあり、前記第2の電極は、前記ヒータ層と前記相変化層との間にある、請求項8に記載のシステム。
- 前記ヒータ層および前記第1の電極は、誘電層内に配置される、請求項9に記載のシステム。
- 前記第1の電極は、前記ヒータ層の一方の端部に結合され、前記第2の電極は、前記ヒータ層の他方の端部に結合される、請求項8に記載のシステム。
- 前記相変化層は、カルコゲナイド層である、請求項8に記載のシステム。
- 前記ヒータは、個別にアドレス指定可能である、請求項8に記載のシステム。
- 前記相変化層上に形成された保護層をさらに備える、請求項8に記載のシステム。
- ヒータ層と、前記ヒータ層に電気的に結合される第1および第2の電極とを備えるヒータを基板上に形成する工程と、
前記ヒータ上に相変化層を形成する工程と、
を含むプロセス。 - 前記第1および第2の電極を形成する工程は、
前記第1の電極を前記基板と前記ヒータ層との間に形成する工程と、
前記第2の電極を前記ヒータ層と前記相変化層との間に形成する工程と、
を含む、請求項15に記載のプロセス。 - 前記ヒータ層および前記第1の電極は、誘電層内に配置される、請求項16に記載のプロセス。
- 前記第1および第2の電極を形成する工程は、
前記第1の電極を前記ヒータ層の実質的に一方の端部に形成する工程と、
前記第2の電極を前記ヒータ層の他方の端部に沿って形成する工程と、
を含む、請求項15に記載のプロセス。 - 前記相変化層は、カルコゲナイド層である、請求項15に記載のプロセス。
- 前記ヒータは、個別にアドレス指定可能である、請求項15に記載のプロセス。
- 前記相変化層上に保護層を形成する工程をさらに含む、請求項15に記載のプロセス。
- 1つ以上の相変化メモリセルを含む相変化メモリに書き込まれた1つ以上のデータビットを消去する工程を含むプロセスであって、前記1つ以上の相変化メモリセルのそれぞれを消去する工程は、
基板上に形成され、前記基板と相変化層との間に配置されるヒータを起動する工程あって、前記相変化層には1つ以上のデータビットが書き込まれ、各データビットは、第1の相領域に囲まれる第2の相領域を含む工程と、
前記相変化層の実質的に全体が同じ相になるまで前記相変化層を加熱する工程と、
前記ヒータを停止させる工程と、
前記相変化層の実質的に全体が前記第1の相領域になるまで前記相変化層を冷却する工程と、
を含むプロセス。 - 前記相変化層における前記1つ以上のデータビットは、実質的に同時に消去される、請求項22に記載のプロセス。
- 前記データビットは、およそ1テラビット/秒を上回る速度で前記相変化メモリから消去される、請求項23に記載のプロセス。
- 前記相変化層には、消去後、前記第2の相領域は残っていない、請求項22に記載のプロセス。
- 前記相変化メモリは、実質的に同時に消去されうるアドレス指定可能な相変化メモリセルアレイを含む、請求項22に記載のプロセス。
- 前記データビットは、およそ1テラビット/秒を上回る速度で前記相変化メモリから消去される、請求項26に記載のプロセス。
- 前記相変化層は、カルコゲナイド層である、請求項22に記載のプロセス。
- 前記第1の相は、非晶相であり、前記第2の相は、多結晶相である、請求項28に記載のプロセス。
- 前記相変化層を加熱する工程は、前記相変化層の温度が前記相変化層の融解温度以上になるまで加熱する工程を含む、請求項22に記載のプロセス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US11/477,276 | 2006-06-28 | ||
US11/477,276 US7750333B2 (en) | 2006-06-28 | 2006-06-28 | Bit-erasing architecture for seek-scan probe (SSP) memory storage |
PCT/US2007/072163 WO2008002943A1 (en) | 2006-06-28 | 2007-06-26 | Bit-erasing architecture for seek-scan probe (ssp) memory storage |
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JP2009536466A true JP2009536466A (ja) | 2009-10-08 |
JP5057589B2 JP5057589B2 (ja) | 2012-10-24 |
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US (2) | US7750333B2 (ja) |
JP (1) | JP5057589B2 (ja) |
KR (1) | KR101017489B1 (ja) |
CN (1) | CN101479850B (ja) |
GB (1) | GB2453283B (ja) |
TW (1) | TWI349999B (ja) |
WO (1) | WO2008002943A1 (ja) |
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US7545667B2 (en) * | 2006-03-30 | 2009-06-09 | International Business Machines Corporation | Programmable via structure for three dimensional integration technology |
US7646006B2 (en) * | 2006-03-30 | 2010-01-12 | International Business Machines Corporation | Three-terminal cascade switch for controlling static power consumption in integrated circuits |
US7750333B2 (en) | 2006-06-28 | 2010-07-06 | Intel Corporation | Bit-erasing architecture for seek-scan probe (SSP) memory storage |
US7622780B2 (en) * | 2006-12-21 | 2009-11-24 | Intel Corporation | Seek-scan probe (SSP) including see-saw scan probe with redundant tip |
US7633079B2 (en) * | 2007-09-06 | 2009-12-15 | International Business Machines Corporation | Programmable fuse/non-volatile memory structures in BEOL regions using externally heated phase change material |
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CN101479850A (zh) | 2009-07-08 |
WO2008002943A1 (en) | 2008-01-03 |
KR101017489B1 (ko) | 2011-02-25 |
TW200818488A (en) | 2008-04-16 |
GB0822743D0 (en) | 2009-01-21 |
TWI349999B (en) | 2011-10-01 |
US20100080051A1 (en) | 2010-04-01 |
US7750333B2 (en) | 2010-07-06 |
KR20090027208A (ko) | 2009-03-16 |
US8338813B2 (en) | 2012-12-25 |
US20080012094A1 (en) | 2008-01-17 |
GB2453283B (en) | 2012-01-11 |
CN101479850B (zh) | 2011-08-17 |
JP5057589B2 (ja) | 2012-10-24 |
GB2453283A (en) | 2009-04-01 |
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