JP2009527098A5 - - Google Patents

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Publication number
JP2009527098A5
JP2009527098A5 JP2008555281A JP2008555281A JP2009527098A5 JP 2009527098 A5 JP2009527098 A5 JP 2009527098A5 JP 2008555281 A JP2008555281 A JP 2008555281A JP 2008555281 A JP2008555281 A JP 2008555281A JP 2009527098 A5 JP2009527098 A5 JP 2009527098A5
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JP
Japan
Prior art keywords
slit
extraction
electrode
gap
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008555281A
Other languages
English (en)
Japanese (ja)
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JP2009527098A (ja
Filing date
Publication date
Priority claimed from US11/354,737 external-priority patent/US7427751B2/en
Application filed filed Critical
Publication of JP2009527098A publication Critical patent/JP2009527098A/ja
Publication of JP2009527098A5 publication Critical patent/JP2009527098A5/ja
Withdrawn legal-status Critical Current

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JP2008555281A 2006-02-15 2007-02-08 微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計 Withdrawn JP2009527098A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/354,737 US7427751B2 (en) 2006-02-15 2006-02-15 High sensitivity slitless ion source mass spectrometer for trace gas leak detection
PCT/US2007/003385 WO2007097920A2 (en) 2006-02-15 2007-02-08 High sensitivity slitless ion source mass spectrometer for trace gas leak detection

Publications (2)

Publication Number Publication Date
JP2009527098A JP2009527098A (ja) 2009-07-23
JP2009527098A5 true JP2009527098A5 (enExample) 2010-03-25

Family

ID=38294259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008555281A Withdrawn JP2009527098A (ja) 2006-02-15 2007-02-08 微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計

Country Status (6)

Country Link
US (1) US7427751B2 (enExample)
EP (1) EP1994546B1 (enExample)
JP (1) JP2009527098A (enExample)
CN (1) CN101405830B (enExample)
MX (1) MX2008010497A (enExample)
WO (1) WO2007097920A2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
FR2943173B1 (fr) * 2009-03-11 2016-03-18 Alcatel Lucent Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant
JP2011210698A (ja) * 2010-03-11 2011-10-20 Jeol Ltd タンデム型飛行時間型質量分析装置
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
SG192703A1 (en) 2011-02-14 2013-09-30 Massachusetts Inst Technology Methods, apparatus, and system for mass spectrometry
FR2984593B1 (fr) * 2011-12-15 2014-09-12 Thales Sa Systeme de detection et de comptage d'ions
US10879030B2 (en) 2018-07-12 2020-12-29 Perkinelmer Health Sciences, Inc. Dynamic electron impact ion source
CN109738835B (zh) * 2018-12-31 2021-05-28 聚光科技(杭州)股份有限公司 离子源灯丝的工作方法
US10948456B1 (en) * 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source
JP7522986B2 (ja) * 2021-06-28 2024-07-26 島津産機システムズ株式会社 リークディテクタ及びリークディテクタ用イオン源

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Publication number Priority date Publication date Assignee Title
GB1082820A (en) 1963-12-20 1967-09-13 Nat Res Corp Improved mass spectrometer
NL6609292A (enExample) * 1966-07-02 1968-01-03
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US3742275A (en) * 1971-03-04 1973-06-26 Varian Associates Ion source having improved ion beam alignment and focus structure
US4124801A (en) * 1976-09-24 1978-11-07 Phrasor Technology Incorporated Apparatus and process for separating materials
US4155008A (en) * 1977-02-04 1979-05-15 Jersey Nuclear-Avco Isotopes, Inc. Vapor coated emissive cathode
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4761553A (en) * 1983-10-06 1988-08-02 The United States Of America As Represented By The United States Department Of Energy Gaseous leak detector
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
GB8803837D0 (en) * 1988-02-18 1988-03-16 Vg Instr Group Mass spectrometer
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GB9105073D0 (en) * 1991-03-11 1991-04-24 Vg Instr Group Isotopic-ratio plasma mass spectrometer
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5506412A (en) 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
FR2734633B1 (fr) 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6541781B1 (en) * 2000-07-25 2003-04-01 Axcelis Technologies, Inc. Waveguide for microwave excitation of plasma in an ion beam guide
US6885010B1 (en) * 2003-11-12 2005-04-26 Thermo Electron Corporation Carbon nanotube electron ionization sources

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