CN101405830B - 用于跟踪气体泄漏检测的高灵敏度无缝离子源质谱仪 - Google Patents

用于跟踪气体泄漏检测的高灵敏度无缝离子源质谱仪 Download PDF

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Publication number
CN101405830B
CN101405830B CN2007800102234A CN200780010223A CN101405830B CN 101405830 B CN101405830 B CN 101405830B CN 2007800102234 A CN2007800102234 A CN 2007800102234A CN 200780010223 A CN200780010223 A CN 200780010223A CN 101405830 B CN101405830 B CN 101405830B
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China
Prior art keywords
ion
extractor
seam
electrode
source
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Expired - Fee Related
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CN2007800102234A
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English (en)
Chinese (zh)
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CN101405830A (zh
Inventor
J·D·杰斯特
J·迪普
P·威廉姆斯
C·W·帕金斯
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Varian Inc
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Varian Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN2007800102234A 2006-02-15 2007-02-08 用于跟踪气体泄漏检测的高灵敏度无缝离子源质谱仪 Expired - Fee Related CN101405830B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/354,737 US7427751B2 (en) 2006-02-15 2006-02-15 High sensitivity slitless ion source mass spectrometer for trace gas leak detection
US11/354,737 2006-02-15
PCT/US2007/003385 WO2007097920A2 (en) 2006-02-15 2007-02-08 High sensitivity slitless ion source mass spectrometer for trace gas leak detection

Publications (2)

Publication Number Publication Date
CN101405830A CN101405830A (zh) 2009-04-08
CN101405830B true CN101405830B (zh) 2010-11-10

Family

ID=38294259

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800102234A Expired - Fee Related CN101405830B (zh) 2006-02-15 2007-02-08 用于跟踪气体泄漏检测的高灵敏度无缝离子源质谱仪

Country Status (6)

Country Link
US (1) US7427751B2 (enExample)
EP (1) EP1994546B1 (enExample)
JP (1) JP2009527098A (enExample)
CN (1) CN101405830B (enExample)
MX (1) MX2008010497A (enExample)
WO (1) WO2007097920A2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
FR2943173B1 (fr) * 2009-03-11 2016-03-18 Alcatel Lucent Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant
JP2011210698A (ja) * 2010-03-11 2011-10-20 Jeol Ltd タンデム型飛行時間型質量分析装置
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
JP6141772B2 (ja) * 2011-02-14 2017-06-07 マサチューセッツ インスティテュート オブ テクノロジー 質量分析の方法、装置、及びシステム
FR2984593B1 (fr) * 2011-12-15 2014-09-12 Thales Sa Systeme de detection et de comptage d'ions
US10879030B2 (en) 2018-07-12 2020-12-29 Perkinelmer Health Sciences, Inc. Dynamic electron impact ion source
CN109738835B (zh) * 2018-12-31 2021-05-28 聚光科技(杭州)股份有限公司 离子源灯丝的工作方法
US10948456B1 (en) * 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source
JP7522986B2 (ja) * 2021-06-28 2024-07-26 島津産機システムズ株式会社 リークディテクタ及びリークディテクタ用イオン源

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742275A (en) * 1971-03-04 1973-06-26 Varian Associates Ion source having improved ion beam alignment and focus structure
US4124801A (en) * 1976-09-24 1978-11-07 Phrasor Technology Incorporated Apparatus and process for separating materials

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GB1082820A (en) 1963-12-20 1967-09-13 Nat Res Corp Improved mass spectrometer
NL6609292A (enExample) * 1966-07-02 1968-01-03
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US4155008A (en) * 1977-02-04 1979-05-15 Jersey Nuclear-Avco Isotopes, Inc. Vapor coated emissive cathode
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4761553A (en) * 1983-10-06 1988-08-02 The United States Of America As Represented By The United States Department Of Energy Gaseous leak detector
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
GB8803837D0 (en) * 1988-02-18 1988-03-16 Vg Instr Group Mass spectrometer
US5313061A (en) * 1989-06-06 1994-05-17 Viking Instrument Miniaturized mass spectrometer system
GB9105073D0 (en) * 1991-03-11 1991-04-24 Vg Instr Group Isotopic-ratio plasma mass spectrometer
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5506412A (en) 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
FR2734633B1 (fr) 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6541781B1 (en) * 2000-07-25 2003-04-01 Axcelis Technologies, Inc. Waveguide for microwave excitation of plasma in an ion beam guide
US6885010B1 (en) * 2003-11-12 2005-04-26 Thermo Electron Corporation Carbon nanotube electron ionization sources

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742275A (en) * 1971-03-04 1973-06-26 Varian Associates Ion source having improved ion beam alignment and focus structure
US4124801A (en) * 1976-09-24 1978-11-07 Phrasor Technology Incorporated Apparatus and process for separating materials

Also Published As

Publication number Publication date
US20070187592A1 (en) 2007-08-16
CN101405830A (zh) 2009-04-08
MX2008010497A (es) 2008-10-09
JP2009527098A (ja) 2009-07-23
WO2007097920A3 (en) 2008-08-07
HK1131256A1 (en) 2010-01-15
US7427751B2 (en) 2008-09-23
WO2007097920A2 (en) 2007-08-30
EP1994546A2 (en) 2008-11-26
WO2007097920B1 (en) 2008-10-02
EP1994546B1 (en) 2016-12-14

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