JP2009527098A - 微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計 - Google Patents

微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計 Download PDF

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JP2009527098A
JP2009527098A JP2008555281A JP2008555281A JP2009527098A JP 2009527098 A JP2009527098 A JP 2009527098A JP 2008555281 A JP2008555281 A JP 2008555281A JP 2008555281 A JP2008555281 A JP 2008555281A JP 2009527098 A JP2009527098 A JP 2009527098A
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Japan
Prior art keywords
slit
extraction
electrode
gap
ion
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JP2008555281A
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English (en)
Japanese (ja)
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JP2009527098A5 (enExample
Inventor
ジェイスト，ジェイ．，ダニエル
ディエップ，ジェフリー
ウィリアムス，ピーター
パーキンス，チャールズ，ダブリュ．
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Varian Inc
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Varian Inc
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Application filed by Varian Inc filed Critical Varian Inc
Publication of JP2009527098A publication Critical patent/JP2009527098A/ja
Publication of JP2009527098A5 publication Critical patent/JP2009527098A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2008555281A 2006-02-15 2007-02-08 微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計 Withdrawn JP2009527098A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/354,737 US7427751B2 (en) 2006-02-15 2006-02-15 High sensitivity slitless ion source mass spectrometer for trace gas leak detection
PCT/US2007/003385 WO2007097920A2 (en) 2006-02-15 2007-02-08 High sensitivity slitless ion source mass spectrometer for trace gas leak detection

Publications (2)

Publication Number Publication Date
JP2009527098A true JP2009527098A (ja) 2009-07-23
JP2009527098A5 JP2009527098A5 (enExample) 2010-03-25

Family

ID=38294259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008555281A Withdrawn JP2009527098A (ja) 2006-02-15 2007-02-08 微量ガス漏れ検出用の高感度スリットなしイオン源質量分析計

Country Status (6)

Country Link
US (1) US7427751B2 (enExample)
EP (1) EP1994546B1 (enExample)
JP (1) JP2009527098A (enExample)
CN (1) CN101405830B (enExample)
MX (1) MX2008010497A (enExample)
WO (1) WO2007097920A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011210698A (ja) * 2010-03-11 2011-10-20 Jeol Ltd タンデム型飛行時間型質量分析装置
JP2023505040A (ja) * 2019-11-27 2023-02-08 エム ケー エス インストルメンツ インコーポレーテッド イオン源を有するガス分析器システム

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
FR2943173B1 (fr) * 2009-03-11 2016-03-18 Alcatel Lucent Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
JP6141772B2 (ja) 2011-02-14 2017-06-07 マサチューセッツ インスティテュート オブ テクノロジー 質量分析の方法、装置、及びシステム
FR2984593B1 (fr) * 2011-12-15 2014-09-12 Thales Sa Systeme de detection et de comptage d'ions
US10879030B2 (en) 2018-07-12 2020-12-29 Perkinelmer Health Sciences, Inc. Dynamic electron impact ion source
CN109738835B (zh) * 2018-12-31 2021-05-28 聚光科技(杭州)股份有限公司 离子源灯丝的工作方法
JP7522986B2 (ja) * 2021-06-28 2024-07-26 島津産機システムズ株式会社 リークディテクタ及びリークディテクタ用イオン源

Family Cites Families (24)

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GB1082819A (en) 1963-12-20 1967-09-13 Nat Res Corp Improved mass spectrometer
NL6609292A (enExample) * 1966-07-02 1968-01-03
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US3742275A (en) * 1971-03-04 1973-06-26 Varian Associates Ion source having improved ion beam alignment and focus structure
US4124801A (en) * 1976-09-24 1978-11-07 Phrasor Technology Incorporated Apparatus and process for separating materials
US4155008A (en) * 1977-02-04 1979-05-15 Jersey Nuclear-Avco Isotopes, Inc. Vapor coated emissive cathode
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4761553A (en) * 1983-10-06 1988-08-02 The United States Of America As Represented By The United States Department Of Energy Gaseous leak detector
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
GB8803837D0 (en) * 1988-02-18 1988-03-16 Vg Instr Group Mass spectrometer
US5313061A (en) * 1989-06-06 1994-05-17 Viking Instrument Miniaturized mass spectrometer system
GB9105073D0 (en) * 1991-03-11 1991-04-24 Vg Instr Group Isotopic-ratio plasma mass spectrometer
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5506412A (en) 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
FR2734633B1 (fr) 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6541781B1 (en) * 2000-07-25 2003-04-01 Axcelis Technologies, Inc. Waveguide for microwave excitation of plasma in an ion beam guide
US6885010B1 (en) * 2003-11-12 2005-04-26 Thermo Electron Corporation Carbon nanotube electron ionization sources

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011210698A (ja) * 2010-03-11 2011-10-20 Jeol Ltd タンデム型飛行時間型質量分析装置
JP2023505040A (ja) * 2019-11-27 2023-02-08 エム ケー エス インストルメンツ インコーポレーテッド イオン源を有するガス分析器システム

Also Published As

Publication number Publication date
MX2008010497A (es) 2008-10-09
WO2007097920A3 (en) 2008-08-07
EP1994546A2 (en) 2008-11-26
US20070187592A1 (en) 2007-08-16
WO2007097920B1 (en) 2008-10-02
CN101405830A (zh) 2009-04-08
CN101405830B (zh) 2010-11-10
WO2007097920A2 (en) 2007-08-30
US7427751B2 (en) 2008-09-23
HK1131256A1 (en) 2010-01-15
EP1994546B1 (en) 2016-12-14

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