MX2008010497A - Espectrometro de masa de fuente ionica de cuña de alta sensibilidad para deteccion de fuga de gas traza. - Google Patents
Espectrometro de masa de fuente ionica de cuña de alta sensibilidad para deteccion de fuga de gas traza.Info
- Publication number
- MX2008010497A MX2008010497A MX2008010497A MX2008010497A MX2008010497A MX 2008010497 A MX2008010497 A MX 2008010497A MX 2008010497 A MX2008010497 A MX 2008010497A MX 2008010497 A MX2008010497 A MX 2008010497A MX 2008010497 A MX2008010497 A MX 2008010497A
- Authority
- MX
- Mexico
- Prior art keywords
- slit
- extractor
- electrode
- ions
- cavity
- Prior art date
Links
- 230000035945 sensitivity Effects 0.000 title description 8
- 238000001514 detection method Methods 0.000 title description 7
- 150000002500 ions Chemical class 0.000 claims abstract description 136
- 230000003287 optical effect Effects 0.000 claims description 18
- 230000005684 electric field Effects 0.000 claims description 16
- 238000000605 extraction Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 230000035515 penetration Effects 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 24
- 239000001307 helium Substances 0.000 description 17
- 229910052734 helium Inorganic materials 0.000 description 17
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 14
- 238000012360 testing method Methods 0.000 description 12
- 238000010884 ion-beam technique Methods 0.000 description 10
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- -1 helium ions Chemical class 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 229910003452 thorium oxide Inorganic materials 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/354,737 US7427751B2 (en) | 2006-02-15 | 2006-02-15 | High sensitivity slitless ion source mass spectrometer for trace gas leak detection |
| PCT/US2007/003385 WO2007097920A2 (en) | 2006-02-15 | 2007-02-08 | High sensitivity slitless ion source mass spectrometer for trace gas leak detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2008010497A true MX2008010497A (es) | 2008-10-09 |
Family
ID=38294259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2008010497A MX2008010497A (es) | 2006-02-15 | 2007-02-08 | Espectrometro de masa de fuente ionica de cuña de alta sensibilidad para deteccion de fuga de gas traza. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7427751B2 (enExample) |
| EP (1) | EP1994546B1 (enExample) |
| JP (1) | JP2009527098A (enExample) |
| CN (1) | CN101405830B (enExample) |
| MX (1) | MX2008010497A (enExample) |
| WO (1) | WO2007097920A2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7855361B2 (en) * | 2008-05-30 | 2010-12-21 | Varian, Inc. | Detection of positive and negative ions |
| US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
| FR2943173B1 (fr) * | 2009-03-11 | 2016-03-18 | Alcatel Lucent | Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant |
| JP2011210698A (ja) * | 2010-03-11 | 2011-10-20 | Jeol Ltd | タンデム型飛行時間型質量分析装置 |
| US8453493B2 (en) * | 2010-11-02 | 2013-06-04 | Agilent Technologies, Inc. | Trace gas sensing apparatus and methods for leak detection |
| JP6141772B2 (ja) * | 2011-02-14 | 2017-06-07 | マサチューセッツ インスティテュート オブ テクノロジー | 質量分析の方法、装置、及びシステム |
| FR2984593B1 (fr) * | 2011-12-15 | 2014-09-12 | Thales Sa | Systeme de detection et de comptage d'ions |
| US10879030B2 (en) | 2018-07-12 | 2020-12-29 | Perkinelmer Health Sciences, Inc. | Dynamic electron impact ion source |
| CN109738835B (zh) * | 2018-12-31 | 2021-05-28 | 聚光科技(杭州)股份有限公司 | 离子源灯丝的工作方法 |
| US10948456B1 (en) * | 2019-11-27 | 2021-03-16 | Mks Instruments, Inc. | Gas analyzer system with ion source |
| JP7522986B2 (ja) * | 2021-06-28 | 2024-07-26 | 島津産機システムズ株式会社 | リークディテクタ及びリークディテクタ用イオン源 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1082820A (en) | 1963-12-20 | 1967-09-13 | Nat Res Corp | Improved mass spectrometer |
| NL6609292A (enExample) * | 1966-07-02 | 1968-01-03 | ||
| DE1648648C3 (de) | 1967-04-12 | 1980-01-24 | Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar | Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip |
| US3591827A (en) | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
| US3690151A (en) | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
| US3742275A (en) * | 1971-03-04 | 1973-06-26 | Varian Associates | Ion source having improved ion beam alignment and focus structure |
| US4124801A (en) * | 1976-09-24 | 1978-11-07 | Phrasor Technology Incorporated | Apparatus and process for separating materials |
| US4155008A (en) * | 1977-02-04 | 1979-05-15 | Jersey Nuclear-Avco Isotopes, Inc. | Vapor coated emissive cathode |
| US4499752A (en) | 1983-06-22 | 1985-02-19 | Varian Associates, Inc. | Counterflow leak detector with cold trap |
| US4761553A (en) * | 1983-10-06 | 1988-08-02 | The United States Of America As Represented By The United States Department Of Energy | Gaseous leak detector |
| US4735084A (en) | 1985-10-01 | 1988-04-05 | Varian Associates, Inc. | Method and apparatus for gross leak detection |
| FR2604522B1 (fr) | 1986-09-26 | 1989-06-16 | Cit Alcatel | Installation de detection de fuite a gaz traceur et procede d'utilisation |
| US4845360A (en) | 1987-12-10 | 1989-07-04 | Varian Associates, Inc. | Counterflow leak detector with high and low sensitivity operating modes |
| GB8803837D0 (en) * | 1988-02-18 | 1988-03-16 | Vg Instr Group | Mass spectrometer |
| US5313061A (en) * | 1989-06-06 | 1994-05-17 | Viking Instrument | Miniaturized mass spectrometer system |
| GB9105073D0 (en) * | 1991-03-11 | 1991-04-24 | Vg Instr Group | Isotopic-ratio plasma mass spectrometer |
| US5625141A (en) | 1993-06-29 | 1997-04-29 | Varian Associates, Inc. | Sealed parts leak testing method and apparatus for helium spectrometer leak detection |
| DE4326265A1 (de) | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
| US5506412A (en) | 1994-12-16 | 1996-04-09 | Buttrill, Jr.; Sidney E. | Means for reducing the contamination of mass spectrometer leak detection ion sources |
| FR2734633B1 (fr) | 1995-05-24 | 1997-06-20 | Cit Alcatel | Installation pour detecter la presence d'helium dans un circuit de fluide |
| FR2761776B1 (fr) | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
| US6286362B1 (en) | 1999-03-31 | 2001-09-11 | Applied Materials, Inc. | Dual mode leak detector |
| US6541781B1 (en) * | 2000-07-25 | 2003-04-01 | Axcelis Technologies, Inc. | Waveguide for microwave excitation of plasma in an ion beam guide |
| US6885010B1 (en) * | 2003-11-12 | 2005-04-26 | Thermo Electron Corporation | Carbon nanotube electron ionization sources |
-
2006
- 2006-02-15 US US11/354,737 patent/US7427751B2/en not_active Expired - Fee Related
-
2007
- 2007-02-08 JP JP2008555281A patent/JP2009527098A/ja not_active Withdrawn
- 2007-02-08 EP EP07750239.1A patent/EP1994546B1/en not_active Not-in-force
- 2007-02-08 CN CN2007800102234A patent/CN101405830B/zh not_active Expired - Fee Related
- 2007-02-08 MX MX2008010497A patent/MX2008010497A/es active IP Right Grant
- 2007-02-08 WO PCT/US2007/003385 patent/WO2007097920A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| US20070187592A1 (en) | 2007-08-16 |
| CN101405830A (zh) | 2009-04-08 |
| JP2009527098A (ja) | 2009-07-23 |
| WO2007097920A3 (en) | 2008-08-07 |
| HK1131256A1 (en) | 2010-01-15 |
| US7427751B2 (en) | 2008-09-23 |
| WO2007097920A2 (en) | 2007-08-30 |
| CN101405830B (zh) | 2010-11-10 |
| EP1994546A2 (en) | 2008-11-26 |
| WO2007097920B1 (en) | 2008-10-02 |
| EP1994546B1 (en) | 2016-12-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Grant or registration |