JP2009527097A5 - - Google Patents

Download PDF

Info

Publication number
JP2009527097A5
JP2009527097A5 JP2008555280A JP2008555280A JP2009527097A5 JP 2009527097 A5 JP2009527097 A5 JP 2009527097A5 JP 2008555280 A JP2008555280 A JP 2008555280A JP 2008555280 A JP2008555280 A JP 2008555280A JP 2009527097 A5 JP2009527097 A5 JP 2009527097A5
Authority
JP
Japan
Prior art keywords
filament
helium ions
electron
ionization chamber
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008555280A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009527097A (ja
Filing date
Publication date
Priority claimed from US11/354,410 external-priority patent/US7459677B2/en
Application filed filed Critical
Publication of JP2009527097A publication Critical patent/JP2009527097A/ja
Publication of JP2009527097A5 publication Critical patent/JP2009527097A5/ja
Withdrawn legal-status Critical Current

Links

JP2008555280A 2006-02-15 2007-02-08 不要イオンを抑制した微量ガス漏れ検出用質量分析計 Withdrawn JP2009527097A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/354,410 US7459677B2 (en) 2006-02-15 2006-02-15 Mass spectrometer for trace gas leak detection with suppression of undesired ions
PCT/US2007/003379 WO2007097919A2 (en) 2006-02-15 2007-02-08 Mass spectrometer for trace gas leak detection with suppression of undesired ions

Publications (2)

Publication Number Publication Date
JP2009527097A JP2009527097A (ja) 2009-07-23
JP2009527097A5 true JP2009527097A5 (enExample) 2010-04-02

Family

ID=38294256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008555280A Withdrawn JP2009527097A (ja) 2006-02-15 2007-02-08 不要イオンを抑制した微量ガス漏れ検出用質量分析計

Country Status (6)

Country Link
US (1) US7459677B2 (enExample)
EP (1) EP1994545B1 (enExample)
JP (1) JP2009527097A (enExample)
CN (1) CN101405829B (enExample)
MX (1) MX2008010498A (enExample)
WO (1) WO2007097919A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
FR2943173B1 (fr) * 2009-03-11 2016-03-18 Alcatel Lucent Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant
US8756978B2 (en) * 2010-04-09 2014-06-24 Inficon Gmbh Leak detector with optical tracer gas detection
RU2517985C2 (ru) * 2010-04-19 2014-06-10 ООО "Политест" Узел регистрации ионного тока в масс-спектрометрическом течеискателе
CN101866811B (zh) * 2010-05-28 2011-09-28 中国航天科技集团公司第五研究院第五一〇研究所 一种小型磁偏转质谱计离子源
US8692186B2 (en) * 2010-08-10 2014-04-08 Wilco Ag Method and apparatus for leak testing containers
CN103123290B (zh) * 2012-12-28 2016-06-15 浙江跃岭股份有限公司 一种检测轮毂气密性的设备及其应用方法
WO2014164198A1 (en) * 2013-03-11 2014-10-09 David Rafferty Automatic gain control with defocusing lens
US8969794B2 (en) 2013-03-15 2015-03-03 1St Detect Corporation Mass dependent automatic gain control for mass spectrometer
CN108109898B (zh) * 2017-12-20 2020-02-21 南京华东电子真空材料有限公司 一种选择性抽气的溅射离子泵
GB2569800B (en) * 2017-12-22 2022-09-07 Thermo Fisher Scient Bremen Gmbh Method and device for crosstalk compensation
JP2023109360A (ja) * 2022-01-27 2023-08-08 島津産機システムズ株式会社 水素リークディテクタ

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3355587A (en) * 1951-01-28 1967-11-28 Jenckel Ludolf Gas analysis apparatus comprising plural ionization chambers with different ionizing electron beam energy levels in the chambers
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output
GB1082819A (en) 1963-12-20 1967-09-13 Nat Res Corp Improved mass spectrometer
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3581195A (en) * 1968-06-10 1971-05-25 Varian Associates Detection of vacuum leaks by gas ionization method and apparatus providing decreased vacuum recovery time
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
US5340983A (en) * 1992-05-18 1994-08-23 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method and apparatus for mass analysis using slow monochromatic electrons
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5451781A (en) * 1994-10-28 1995-09-19 Regents Of The University Of California Mini ion trap mass spectrometer
US5506412A (en) 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
FR2734633B1 (fr) 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
US5600136A (en) * 1995-06-07 1997-02-04 Varian Associates, Inc. Single potential ion source
EP0827179B1 (en) * 1996-08-30 2001-11-28 Varian, Inc. Single potential ion source
FR2761776B1 (fr) 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6781117B1 (en) * 2002-05-30 2004-08-24 Ross C Willoughby Efficient direct current collision and reaction cell
CN2549462Y (zh) * 2002-07-08 2003-05-07 郭跃辉 一种宽量程氦质谱检漏仪
US7060987B2 (en) * 2003-03-03 2006-06-13 Brigham Young University Electron ionization source for othogonal acceleration time-of-flight mass spectrometry

Similar Documents

Publication Publication Date Title
JP2009527097A5 (enExample)
US9153405B2 (en) Ion source device and ion beam generating method
Bacal Physics aspects of negative ion sources
WO2006115686A3 (en) Method for controlling space charge-driven ion instabilities in electron impact ion sources
UA109032C2 (en) ELECTRONIC BEAM GENERATION DEVICE
WO2007097919A3 (en) Mass spectrometer for trace gas leak detection with suppression of undesired ions
JP2009527098A5 (enExample)
US20140184074A1 (en) Ion source using field emitter array cathode and electromagnetic confinement
Yang et al. A preliminary study of a negative hydrogen PIG-type ion source for the compact cyclotron
US8822912B2 (en) Ion source having increased electron path length
Yan et al. Measurement of the atomic ion fraction of ion emitted from a miniature penning ion source
US20140183349A1 (en) Ion source using spindt cathode and electromagnetic confinement
CN1594649A (zh) 一种金属离子源
JP5663973B2 (ja) ガスクラスターイオンビーム装置
US8866068B2 (en) Ion source with cathode having an array of nano-sized projections
Chiad et al. Characteristics and operation conditions of a closed-field unbalanced dual magnetrons plasma sputtering system
Ahmad Carbon cluster formation in regenerative sooting plasmas
FR2926395B1 (fr) Source pulsee d'electrons, procede d'alimentation electrique pour source pulsee d'electrons et procede de commande d'une source pulsee d'electrons
JP4580698B2 (ja) ジャイラック加速電子型ｅｃｒイオン源及び多価イオン生成方法
US8779351B2 (en) Ion source employing secondary electron generation
RU76164U1 (ru) Газоразрядный источник ионов
Das et al. Study of Compact Penning Ion Source for Material Studies
Stockli Volume and surface-enhanced volume negative ion sources
JP2004311135A (ja) カーボンナノチューブを用いた負イオン源
Hansknecht et al. Sensitive Ion Pump Current Monitoring Using an In‐House Built Ion Pump Power Supply