JP2009527097A - 不要イオンを抑制した微量ガス漏れ検出用質量分析計 - Google Patents
不要イオンを抑制した微量ガス漏れ検出用質量分析計 Download PDFInfo
- Publication number
- JP2009527097A JP2009527097A JP2008555280A JP2008555280A JP2009527097A JP 2009527097 A JP2009527097 A JP 2009527097A JP 2008555280 A JP2008555280 A JP 2008555280A JP 2008555280 A JP2008555280 A JP 2008555280A JP 2009527097 A JP2009527097 A JP 2009527097A
- Authority
- JP
- Japan
- Prior art keywords
- ions
- electron
- operating
- source
- helium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 150000002500 ions Chemical class 0.000 title claims abstract description 147
- 239000001307 helium Substances 0.000 claims abstract description 56
- 229910052734 helium Inorganic materials 0.000 claims abstract description 56
- 239000007789 gas Substances 0.000 claims abstract description 41
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- 230000001133 acceleration Effects 0.000 claims abstract description 11
- -1 helium ions Chemical class 0.000 claims description 18
- 238000000605 extraction Methods 0.000 description 40
- 238000001514 detection method Methods 0.000 description 19
- 238000012360 testing method Methods 0.000 description 15
- 238000010884 ion-beam technique Methods 0.000 description 12
- 230000005684 electric field Effects 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 11
- 238000005259 measurement Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 9
- 239000000700 radioactive tracer Substances 0.000 description 8
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000010220 ion permeability Effects 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 229910003452 thorium oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/354,410 US7459677B2 (en) | 2006-02-15 | 2006-02-15 | Mass spectrometer for trace gas leak detection with suppression of undesired ions |
| PCT/US2007/003379 WO2007097919A2 (en) | 2006-02-15 | 2007-02-08 | Mass spectrometer for trace gas leak detection with suppression of undesired ions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009527097A true JP2009527097A (ja) | 2009-07-23 |
| JP2009527097A5 JP2009527097A5 (enExample) | 2010-04-02 |
Family
ID=38294256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008555280A Withdrawn JP2009527097A (ja) | 2006-02-15 | 2007-02-08 | 不要イオンを抑制した微量ガス漏れ検出用質量分析計 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7459677B2 (enExample) |
| EP (1) | EP1994545B1 (enExample) |
| JP (1) | JP2009527097A (enExample) |
| CN (1) | CN101405829B (enExample) |
| MX (1) | MX2008010498A (enExample) |
| WO (1) | WO2007097919A2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7855361B2 (en) * | 2008-05-30 | 2010-12-21 | Varian, Inc. | Detection of positive and negative ions |
| US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
| FR2943173B1 (fr) * | 2009-03-11 | 2016-03-18 | Alcatel Lucent | Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant |
| US8756978B2 (en) * | 2010-04-09 | 2014-06-24 | Inficon Gmbh | Leak detector with optical tracer gas detection |
| RU2517985C2 (ru) * | 2010-04-19 | 2014-06-10 | ООО "Политест" | Узел регистрации ионного тока в масс-спектрометрическом течеискателе |
| CN101866811B (zh) * | 2010-05-28 | 2011-09-28 | 中国航天科技集团公司第五研究院第五一〇研究所 | 一种小型磁偏转质谱计离子源 |
| US8692186B2 (en) * | 2010-08-10 | 2014-04-08 | Wilco Ag | Method and apparatus for leak testing containers |
| CN103123290B (zh) * | 2012-12-28 | 2016-06-15 | 浙江跃岭股份有限公司 | 一种检测轮毂气密性的设备及其应用方法 |
| WO2014164198A1 (en) * | 2013-03-11 | 2014-10-09 | David Rafferty | Automatic gain control with defocusing lens |
| US8969794B2 (en) | 2013-03-15 | 2015-03-03 | 1St Detect Corporation | Mass dependent automatic gain control for mass spectrometer |
| CN108109898B (zh) * | 2017-12-20 | 2020-02-21 | 南京华东电子真空材料有限公司 | 一种选择性抽气的溅射离子泵 |
| GB2569800B (en) * | 2017-12-22 | 2022-09-07 | Thermo Fisher Scient Bremen Gmbh | Method and device for crosstalk compensation |
| JP2023109360A (ja) * | 2022-01-27 | 2023-08-08 | 島津産機システムズ株式会社 | 水素リークディテクタ |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3355587A (en) * | 1951-01-28 | 1967-11-28 | Jenckel Ludolf | Gas analysis apparatus comprising plural ionization chambers with different ionizing electron beam energy levels in the chambers |
| US3247373A (en) * | 1962-12-18 | 1966-04-19 | Gca Corp | Mass spectrometer leak detector with means for controlling the ion source output |
| GB1082819A (en) | 1963-12-20 | 1967-09-13 | Nat Res Corp | Improved mass spectrometer |
| DE1648648C3 (de) | 1967-04-12 | 1980-01-24 | Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar | Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip |
| US3591827A (en) | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
| US3581195A (en) * | 1968-06-10 | 1971-05-25 | Varian Associates | Detection of vacuum leaks by gas ionization method and apparatus providing decreased vacuum recovery time |
| US3690151A (en) | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
| US4499752A (en) | 1983-06-22 | 1985-02-19 | Varian Associates, Inc. | Counterflow leak detector with cold trap |
| US4735084A (en) | 1985-10-01 | 1988-04-05 | Varian Associates, Inc. | Method and apparatus for gross leak detection |
| FR2604522B1 (fr) | 1986-09-26 | 1989-06-16 | Cit Alcatel | Installation de detection de fuite a gaz traceur et procede d'utilisation |
| US4845360A (en) | 1987-12-10 | 1989-07-04 | Varian Associates, Inc. | Counterflow leak detector with high and low sensitivity operating modes |
| US5340983A (en) * | 1992-05-18 | 1994-08-23 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Method and apparatus for mass analysis using slow monochromatic electrons |
| US5625141A (en) | 1993-06-29 | 1997-04-29 | Varian Associates, Inc. | Sealed parts leak testing method and apparatus for helium spectrometer leak detection |
| DE4326265A1 (de) | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
| US5451781A (en) * | 1994-10-28 | 1995-09-19 | Regents Of The University Of California | Mini ion trap mass spectrometer |
| US5506412A (en) | 1994-12-16 | 1996-04-09 | Buttrill, Jr.; Sidney E. | Means for reducing the contamination of mass spectrometer leak detection ion sources |
| DE19504278A1 (de) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Testgas-Lecksuchgerät |
| FR2734633B1 (fr) | 1995-05-24 | 1997-06-20 | Cit Alcatel | Installation pour detecter la presence d'helium dans un circuit de fluide |
| US5600136A (en) * | 1995-06-07 | 1997-02-04 | Varian Associates, Inc. | Single potential ion source |
| EP0827179B1 (en) * | 1996-08-30 | 2001-11-28 | Varian, Inc. | Single potential ion source |
| FR2761776B1 (fr) | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
| US6286362B1 (en) | 1999-03-31 | 2001-09-11 | Applied Materials, Inc. | Dual mode leak detector |
| US6781117B1 (en) * | 2002-05-30 | 2004-08-24 | Ross C Willoughby | Efficient direct current collision and reaction cell |
| CN2549462Y (zh) * | 2002-07-08 | 2003-05-07 | 郭跃辉 | 一种宽量程氦质谱检漏仪 |
| US7060987B2 (en) * | 2003-03-03 | 2006-06-13 | Brigham Young University | Electron ionization source for othogonal acceleration time-of-flight mass spectrometry |
-
2006
- 2006-02-15 US US11/354,410 patent/US7459677B2/en not_active Expired - Fee Related
-
2007
- 2007-02-08 CN CN2007800100224A patent/CN101405829B/zh not_active Expired - Fee Related
- 2007-02-08 WO PCT/US2007/003379 patent/WO2007097919A2/en not_active Ceased
- 2007-02-08 MX MX2008010498A patent/MX2008010498A/es active IP Right Grant
- 2007-02-08 EP EP07750234.2A patent/EP1994545B1/en not_active Not-in-force
- 2007-02-08 JP JP2008555280A patent/JP2009527097A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| HK1131255A1 (en) | 2010-01-15 |
| WO2007097919A3 (en) | 2008-07-24 |
| CN101405829B (zh) | 2010-06-02 |
| US20070187586A1 (en) | 2007-08-16 |
| US7459677B2 (en) | 2008-12-02 |
| WO2007097919A2 (en) | 2007-08-30 |
| EP1994545A2 (en) | 2008-11-26 |
| CN101405829A (zh) | 2009-04-08 |
| MX2008010498A (es) | 2008-10-17 |
| EP1994545B1 (en) | 2014-04-16 |
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| A521 | Request for written amendment filed |
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