JP2009526659A5 - - Google Patents

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Publication number
JP2009526659A5
JP2009526659A5 JP2008554444A JP2008554444A JP2009526659A5 JP 2009526659 A5 JP2009526659 A5 JP 2009526659A5 JP 2008554444 A JP2008554444 A JP 2008554444A JP 2008554444 A JP2008554444 A JP 2008554444A JP 2009526659 A5 JP2009526659 A5 JP 2009526659A5
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JP
Japan
Prior art keywords
ito
cmp
polishing
composition
cmp composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008554444A
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English (en)
Japanese (ja)
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JP2009526659A (ja
JP5431736B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2007/003978 external-priority patent/WO2007095322A1/en
Publication of JP2009526659A publication Critical patent/JP2009526659A/ja
Publication of JP2009526659A5 publication Critical patent/JP2009526659A5/ja
Application granted granted Critical
Publication of JP5431736B2 publication Critical patent/JP5431736B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008554444A 2006-02-14 2007-02-14 インジウム錫酸化物表面をｃｍｐする方法 Expired - Fee Related JP5431736B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US77310506P 2006-02-14 2006-02-14
US60/773,105 2006-02-14
US83023406P 2006-07-12 2006-07-12
US60/830,234 2006-07-12
PCT/US2007/003978 WO2007095322A1 (en) 2006-02-14 2007-02-14 Compositions and methods for cmp of indium tin oxide surfaces

Publications (3)

Publication Number Publication Date
JP2009526659A JP2009526659A (ja) 2009-07-23
JP2009526659A5 true JP2009526659A5 (OSRAM) 2010-03-18
JP5431736B2 JP5431736B2 (ja) 2014-03-05

Family

ID=38371856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008554444A Expired - Fee Related JP5431736B2 (ja) 2006-02-14 2007-02-14 インジウム錫酸化物表面をｃｍｐする方法

Country Status (7)

Country Link
US (1) US20070190789A1 (OSRAM)
JP (1) JP5431736B2 (OSRAM)
KR (1) KR101333866B1 (OSRAM)
CN (1) CN101370898B (OSRAM)
MY (1) MY154806A (OSRAM)
TW (1) TWI341325B (OSRAM)
WO (1) WO2007095322A1 (OSRAM)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8367798B2 (en) * 2008-09-29 2013-02-05 The Regents Of The University Of California Active materials for photoelectric devices and devices that use the materials
JP5355099B2 (ja) * 2009-01-08 2013-11-27 ニッタ・ハース株式会社 研磨組成物
US20100276071A1 (en) * 2009-04-29 2010-11-04 Solarmer Energy, Inc. Tandem solar cell
CN101941001B (zh) * 2009-07-03 2014-04-02 3M创新有限公司 亲水涂层、制品、涂料组合物和方法
US8440496B2 (en) * 2009-07-08 2013-05-14 Solarmer Energy, Inc. Solar cell with conductive material embedded substrate
US8372945B2 (en) * 2009-07-24 2013-02-12 Solarmer Energy, Inc. Conjugated polymers with carbonyl substituted thieno[3,4-B]thiophene units for polymer solar cell active layer materials
US8399889B2 (en) 2009-11-09 2013-03-19 Solarmer Energy, Inc. Organic light emitting diode and organic solar cell stack
JP5695367B2 (ja) 2010-08-23 2015-04-01 株式会社フジミインコーポレーテッド 研磨用組成物及びそれを用いた研磨方法
GB201018141D0 (en) 2010-10-27 2010-12-08 Pilkington Group Ltd Polishing coated substrates
EP2761629B1 (en) * 2011-09-30 2018-11-07 View, Inc. Improved optical device fabrication
JP6028046B2 (ja) * 2015-01-05 2016-11-16 株式会社フジミインコーポレーテッド 研磨用組成物及びそれを用いた研磨方法
JP6282708B2 (ja) * 2016-10-07 2018-02-21 株式会社フジミインコーポレーテッド 研磨用組成物、それを用いた研磨方法、及びその製造方法
KR102122125B1 (ko) * 2018-06-01 2020-06-11 주식회사 케이씨텍 연마용 슬러리 조성물
SG10201904669TA (en) * 2018-06-28 2020-01-30 Kctech Co Ltd Polishing Slurry Composition
KR102784411B1 (ko) * 2018-10-19 2025-03-21 솔브레인 주식회사 금속산화물막 연마용 슬러리 조성물 및 이를 이용한 반도체 소자의 제조방법
KR102698381B1 (ko) * 2018-11-23 2024-08-23 솔브레인 주식회사 연마용 조성물 및 이를 이용하는 연마 방법
EP4495204A4 (en) 2022-04-20 2025-04-23 Resonac Corporation POLISHING AGENT AND POLISHING METHOD
CN117511415A (zh) * 2023-11-03 2024-02-06 昂士特科技(深圳)有限公司 化学机械抛光组合物及其抛光方法

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
US5630918A (en) * 1994-06-13 1997-05-20 Tosoh Corporation ITO sputtering target
US6743723B2 (en) * 1995-09-14 2004-06-01 Canon Kabushiki Kaisha Method for fabricating semiconductor device
EP0786504A3 (en) * 1996-01-29 1998-05-20 Fujimi Incorporated Polishing composition
KR19980024900A (ko) * 1996-09-24 1998-07-06 마르타 앤 피네칸 화학적 기계적 연마용 복수 산화제 슬러리
US6039891A (en) * 1996-09-24 2000-03-21 Cabot Corporation Multi-oxidizer precursor for chemical mechanical polishing
JP3576364B2 (ja) * 1997-10-13 2004-10-13 株式会社日鉱マテリアルズ Ｉｔｏスパッタリングターゲットのクリーニング方法
CN1092697C (zh) * 1998-02-20 2002-10-16 长兴化学工业股份有限公司 用于加工半导体的化学机械研磨组合物
TW416104B (en) * 1998-08-28 2000-12-21 Kobe Steel Ltd Method for reclaiming wafer substrate and polishing solution composition for reclaiming wafer substrate
JP2001020087A (ja) * 1999-07-05 2001-01-23 Toshiba Corp 銅の化学機械研磨用水系分散体
JP2001303027A (ja) * 2000-04-26 2001-10-31 Seimi Chem Co Ltd 研磨用組成物及び研磨方法
US6811680B2 (en) * 2001-03-14 2004-11-02 Applied Materials Inc. Planarization of substrates using electrochemical mechanical polishing
US7104869B2 (en) * 2001-07-13 2006-09-12 Applied Materials, Inc. Barrier removal at low polish pressure
WO2003094216A1 (en) * 2002-04-30 2003-11-13 Hitachi Chemical Co., Ltd. Polishing fluid and polishing method
US20060199473A1 (en) * 2003-04-03 2006-09-07 Masao Suzuki Polishing pad, process for producing the same and method of polishing therewith
KR100538810B1 (ko) * 2003-12-29 2005-12-23 주식회사 하이닉스반도체 반도체소자의 소자분리 방법
JP2005268667A (ja) * 2004-03-19 2005-09-29 Fujimi Inc 研磨用組成物

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