JP2009520377A - InP基板上のII−VI/III−V層状構造体 - Google Patents
InP基板上のII−VI/III−V層状構造体 Download PDFInfo
- Publication number
- JP2009520377A JP2009520377A JP2008547224A JP2008547224A JP2009520377A JP 2009520377 A JP2009520377 A JP 2009520377A JP 2008547224 A JP2008547224 A JP 2008547224A JP 2008547224 A JP2008547224 A JP 2008547224A JP 2009520377 A JP2009520377 A JP 2009520377A
- Authority
- JP
- Japan
- Prior art keywords
- iii
- layered structure
- layer
- materials
- alloys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 135
- 238000002310 reflectometry Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 72
- 239000000956 alloy Substances 0.000 abstract description 72
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 21
- 229910017115 AlSb Inorganic materials 0.000 description 19
- 229910005542 GaSb Inorganic materials 0.000 description 19
- 229910000673 Indium arsenide Inorganic materials 0.000 description 19
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 19
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 19
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 17
- 229910015894 BeTe Inorganic materials 0.000 description 16
- 229910004613 CdTe Inorganic materials 0.000 description 16
- 229910017680 MgTe Inorganic materials 0.000 description 16
- 229910007709 ZnTe Inorganic materials 0.000 description 16
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 16
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 15
- 229910052950 sphalerite Inorganic materials 0.000 description 15
- 229910052984 zinc sulfide Inorganic materials 0.000 description 15
- 238000001451 molecular beam epitaxy Methods 0.000 description 9
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 6
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 3
- 229910052793 cadmium Inorganic materials 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Inorganic materials [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 1
- 238000000603 solid-source molecular beam epitaxy Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
- H10F30/2212—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction the devices comprising active layers made of only Group II-VI materials, e.g. HgCdTe infrared photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
- H10F30/2215—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction the devices comprising active layers made of only Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/124—Active materials comprising only Group III-V materials, e.g. GaAs
- H10F77/1248—Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Luminescent Compositions (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/275,237 US7119377B2 (en) | 2004-06-18 | 2005-12-20 | II-VI/III-V layered construction on InP substrate |
| PCT/US2006/042614 WO2007073449A1 (en) | 2005-12-20 | 2006-10-31 | Ii-vi/iii-v layered construction on inp substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009520377A true JP2009520377A (ja) | 2009-05-21 |
| JP2009520377A5 JP2009520377A5 (enExample) | 2009-11-05 |
Family
ID=38188997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008547224A Pending JP2009520377A (ja) | 2005-12-20 | 2006-10-31 | InP基板上のII−VI/III−V層状構造体 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7119377B2 (enExample) |
| EP (1) | EP1963094A4 (enExample) |
| JP (1) | JP2009520377A (enExample) |
| KR (1) | KR20080080540A (enExample) |
| CN (1) | CN101341022B (enExample) |
| TW (1) | TW200725933A (enExample) |
| WO (1) | WO2007073449A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7244630B2 (en) * | 2005-04-05 | 2007-07-17 | Philips Lumileds Lighting Company, Llc | A1InGaP LED having reduced temperature dependence |
| TWI298555B (en) * | 2006-06-05 | 2008-07-01 | Epistar Corp | Light emitting device |
| US20080067370A1 (en) * | 2006-07-01 | 2008-03-20 | Mccaffrey John Patrick | Electron microscope and scanning probe microscope calibration device |
| EP2122695A4 (en) * | 2007-03-08 | 2013-09-11 | 3M Innovative Properties Co | NETWORK OF LUMINESCENT ELEMENTS |
| US8525021B2 (en) * | 2007-09-25 | 2013-09-03 | First Solar, Inc. | Photovoltaic devices including heterojunctions |
| WO2009148717A2 (en) * | 2008-06-05 | 2009-12-10 | 3M Innovative Properties Company | Light emitting diode with bonded semiconductor wavelength converter |
| WO2010027581A1 (en) | 2008-09-04 | 2010-03-11 | 3M Innovative Properties Company | Monochromatic light source |
| WO2010027648A1 (en) * | 2008-09-04 | 2010-03-11 | 3M Innovative Properties Company | I i-vi mqw vcsel on a heat sink optically pumped by a gan ld |
| CN102804411A (zh) * | 2009-05-05 | 2012-11-28 | 3M创新有限公司 | 利用铟耗尽机理在含铟衬底上生长的半导体器件 |
| JP2012526394A (ja) | 2009-05-05 | 2012-10-25 | スリーエム イノベイティブ プロパティズ カンパニー | Ledとともに使用するための再発光半導体キャリア素子及び製造方法 |
| CN102473817A (zh) | 2009-06-30 | 2012-05-23 | 3M创新有限公司 | 无镉再发光半导体构造 |
| CN102474932B (zh) | 2009-06-30 | 2015-12-16 | 3M创新有限公司 | 具有可调节色温的白光电致发光器件 |
| US8304976B2 (en) | 2009-06-30 | 2012-11-06 | 3M Innovative Properties Company | Electroluminescent devices with color adjustment based on current crowding |
| SE534345C2 (sv) * | 2009-09-24 | 2011-07-19 | Svedice Ab | Fotodiod av typen lavinfotodiod. |
| WO2011153141A2 (en) * | 2010-06-03 | 2011-12-08 | 3M Innovative Properties Company | Light converting and emitting device with suppressed dark-line defects |
| CN103597614B (zh) * | 2011-06-15 | 2017-03-01 | 3M创新有限公司 | 具有改善的转换效率的太阳能电池 |
| CN102280548A (zh) * | 2011-09-05 | 2011-12-14 | 厦门乾照光电股份有限公司 | 发光二极管结构及其制造方法 |
| US8895337B1 (en) * | 2012-01-19 | 2014-11-25 | Sandia Corporation | Method of fabricating vertically aligned group III-V nanowires |
| GB2504977B (en) | 2012-08-16 | 2017-10-04 | Airbus Defence & Space Gmbh | Laser power converter |
| US20180151301A1 (en) * | 2016-11-25 | 2018-05-31 | The Boeing Company | Epitaxial perovskite materials for optoelectronics |
| BR102017000116A2 (pt) * | 2017-01-03 | 2018-07-24 | Carolina Dias Machado Paula | tri diodo para laserterapia e equipamento baseado em tri diodo para emprego em laserterapia |
| CN107230734A (zh) * | 2017-05-23 | 2017-10-03 | 中国人民解放军63791部队 | 一种背对背肖特基结构的BeMgZnO基紫外探测器及其制备方法 |
| RU178900U1 (ru) * | 2017-12-15 | 2018-04-23 | Федеральное государственное бюджетное учреждение науки Научно-технологический центр микроэлектроники и субмикронных гетероструктур Российской академии наук (НТЦ микроэлектроники РАН) | Полупроводниковая гетероструктура для фотопреобразователей |
| US11585970B2 (en) * | 2019-10-04 | 2023-02-21 | Teledyne Scientific & Imaging, Llc | Low loss single crystal multilayer optical component and method of making same |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05343796A (ja) * | 1992-06-08 | 1993-12-24 | Nec Corp | 面出射形半導体レーザ |
| JPH07249835A (ja) * | 1994-03-11 | 1995-09-26 | Hitachi Ltd | 半導体光素子 |
| JPH10321950A (ja) * | 1997-02-10 | 1998-12-04 | Korea Electron Telecommun | チューナブルレーザ製造方法 |
| JPH11145555A (ja) * | 1997-11-12 | 1999-05-28 | Oki Electric Ind Co Ltd | 面発光レーザ用ミラー構造およびその形成方法 |
| JPH11274565A (ja) * | 1998-03-25 | 1999-10-08 | Nec Corp | InP基板上II−VI族化合物半導体薄膜 |
| JP2004531904A (ja) * | 2001-06-29 | 2004-10-14 | スリーエム イノベイティブ プロパティズ カンパニー | 導波路付きレーザダイオードチップ |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3202985B2 (ja) * | 1989-09-04 | 2001-08-27 | 日本オプネクスト株式会社 | 半導体レーザ装置 |
| US5206871A (en) | 1991-12-27 | 1993-04-27 | At&T Bell Laboratories | Optical devices with electron-beam evaporated multilayer mirror |
| FR2699337B1 (fr) | 1992-12-15 | 1995-06-09 | Deveaud Pledran Benoit | Laser a cavite verticale de faible resistivite. |
| JP3333330B2 (ja) * | 1994-09-30 | 2002-10-15 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
| US5956362A (en) | 1996-02-27 | 1999-09-21 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting device and method of etching |
| US5732103A (en) | 1996-12-09 | 1998-03-24 | Motorola, Inc. | Long wavelength VCSEL |
| JP2938445B1 (ja) | 1998-09-07 | 1999-08-23 | 株式会社日立製作所 | 量子井戸光変調器とそれを用いた光通信用モジュールおよび光通信システム |
| JP2001085790A (ja) * | 1999-09-16 | 2001-03-30 | Toshiba Corp | 発光増幅素子 |
| US20020158265A1 (en) | 2001-04-26 | 2002-10-31 | Motorola, Inc. | Structure and method for fabricating high contrast reflective mirrors |
| JP2003124508A (ja) | 2001-10-15 | 2003-04-25 | Sharp Corp | 発光ダイオード、デバイス、該デバイスを用いた表示または通信用光源装置 |
| WO2003067724A1 (en) * | 2002-02-08 | 2003-08-14 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light-emitting device and its manufacturing method |
| US6801558B2 (en) * | 2002-06-14 | 2004-10-05 | Agilent Technologies, Inc. | Material systems for long wavelength lasers grown on InP substrates |
| US20050243887A1 (en) * | 2004-04-30 | 2005-11-03 | Honeywell International Inc. | DBR using the combination of II-VI and III-V materials for the application to 1.3-1.55 mum |
-
2005
- 2005-12-20 US US11/275,237 patent/US7119377B2/en not_active Expired - Fee Related
- 2005-12-22 TW TW094145960A patent/TW200725933A/zh unknown
-
2006
- 2006-10-31 CN CN200680048486XA patent/CN101341022B/zh not_active Expired - Fee Related
- 2006-10-31 KR KR1020087014312A patent/KR20080080540A/ko not_active Ceased
- 2006-10-31 JP JP2008547224A patent/JP2009520377A/ja active Pending
- 2006-10-31 WO PCT/US2006/042614 patent/WO2007073449A1/en not_active Ceased
- 2006-10-31 EP EP06827254.1A patent/EP1963094A4/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05343796A (ja) * | 1992-06-08 | 1993-12-24 | Nec Corp | 面出射形半導体レーザ |
| JPH07249835A (ja) * | 1994-03-11 | 1995-09-26 | Hitachi Ltd | 半導体光素子 |
| JPH10321950A (ja) * | 1997-02-10 | 1998-12-04 | Korea Electron Telecommun | チューナブルレーザ製造方法 |
| JPH11145555A (ja) * | 1997-11-12 | 1999-05-28 | Oki Electric Ind Co Ltd | 面発光レーザ用ミラー構造およびその形成方法 |
| JPH11274565A (ja) * | 1998-03-25 | 1999-10-08 | Nec Corp | InP基板上II−VI族化合物半導体薄膜 |
| JP2004531904A (ja) * | 2001-06-29 | 2004-10-14 | スリーエム イノベイティブ プロパティズ カンパニー | 導波路付きレーザダイオードチップ |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080080540A (ko) | 2008-09-04 |
| WO2007073449A1 (en) | 2007-06-28 |
| US20060102916A1 (en) | 2006-05-18 |
| CN101341022A (zh) | 2009-01-07 |
| EP1963094A1 (en) | 2008-09-03 |
| EP1963094A4 (en) | 2014-03-19 |
| US7119377B2 (en) | 2006-10-10 |
| TW200725933A (en) | 2007-07-01 |
| CN101341022B (zh) | 2012-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100479279C (zh) | InP基板上的Ⅱ-Ⅵ/Ⅲ-Ⅴ多层结构 | |
| JP2009520377A (ja) | InP基板上のII−VI/III−V層状構造体 | |
| US6798817B2 (en) | Distributed bragg reflectors incorporating SB material for long-wavelength vertical cavity surface emitting lasers | |
| US5226053A (en) | Light emitting diode | |
| US8148731B2 (en) | Films and structures for metal oxide semiconductor light emitting devices and methods | |
| KR20090094091A (ko) | 반도체 디바이스 및 그 제조 방법과 반도체 디바이스를 포함하는 장치 | |
| JPH0644665B2 (ja) | 縦方向空洞半導体レーザ装置 | |
| US20030086467A1 (en) | DBR comprising GaP, and use thereof in a semiconductor resonant cavity device | |
| US6697412B2 (en) | Long wavelength laser diodes on metamorphic buffer modified gallium arsenide wafers | |
| EP1302791A1 (en) | Distributed Bragg Reflector comprising a GaP layer, and a semiconductor resonant cavity device comprising such a DBR | |
| Sagnes et al. | MOCVD InP/AlGaInAs distributed Bragg reflector for 1.55 µm VCSELs | |
| JPH10200202A (ja) | 可視波長の垂直空洞面発光レーザー | |
| US6631154B2 (en) | Method of fabricating a distributed Bragg reflector having enhanced thermal and electrical properties | |
| Ledentsov et al. | Merging nanoepitaxy and nanophotonics | |
| US8050305B2 (en) | Semiconductor device | |
| Roberts et al. | High performance microcavity resonator devices grown by atmospheric pressure MOVPE | |
| Sviechnikov et al. | Optoelectronics: radiation sources and detectors | |
| Ahn et al. | Optimum conditions of the distributed bragg reflector in 850-nm GaAs infrared light-emitting diodes | |
| DeCorby et al. | Resonant-cavity MSM photodetector employing a Burstein-shifted In/sub 0.49/Ga/sub 0.51/P-GaAs reflector | |
| Mauk et al. | Resonant cavity LEDs by lateral epitaxy | |
| JP5028177B2 (ja) | 半導体素子 | |
| Zogg et al. | IV-VI mid-IR tunable lasers and detectors with external resonant cavities | |
| Sun | Copyright by Xiaoguang Sun 2002 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090908 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090908 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120529 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20121023 |