CN101341022B - InP基板上的Ⅱ-Ⅵ/Ⅲ-Ⅴ层状构造 - Google Patents
InP基板上的Ⅱ-Ⅵ/Ⅲ-Ⅴ层状构造 Download PDFInfo
- Publication number
- CN101341022B CN101341022B CN200680048486XA CN200680048486A CN101341022B CN 101341022 B CN101341022 B CN 101341022B CN 200680048486X A CN200680048486X A CN 200680048486XA CN 200680048486 A CN200680048486 A CN 200680048486A CN 101341022 B CN101341022 B CN 101341022B
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- China
- Prior art keywords
- iii
- alloys
- layer
- typically
- inp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
- H10F30/2212—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction the devices comprising active layers made of only Group II-VI materials, e.g. HgCdTe infrared photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
- H10F30/2215—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction the devices comprising active layers made of only Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/124—Active materials comprising only Group III-V materials, e.g. GaAs
- H10F77/1248—Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Luminescent Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/275,237 | 2005-12-20 | ||
| US11/275,237 US7119377B2 (en) | 2004-06-18 | 2005-12-20 | II-VI/III-V layered construction on InP substrate |
| PCT/US2006/042614 WO2007073449A1 (en) | 2005-12-20 | 2006-10-31 | Ii-vi/iii-v layered construction on inp substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101341022A CN101341022A (zh) | 2009-01-07 |
| CN101341022B true CN101341022B (zh) | 2012-01-11 |
Family
ID=38188997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200680048486XA Expired - Fee Related CN101341022B (zh) | 2005-12-20 | 2006-10-31 | InP基板上的Ⅱ-Ⅵ/Ⅲ-Ⅴ层状构造 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7119377B2 (enExample) |
| EP (1) | EP1963094A4 (enExample) |
| JP (1) | JP2009520377A (enExample) |
| KR (1) | KR20080080540A (enExample) |
| CN (1) | CN101341022B (enExample) |
| TW (1) | TW200725933A (enExample) |
| WO (1) | WO2007073449A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7244630B2 (en) * | 2005-04-05 | 2007-07-17 | Philips Lumileds Lighting Company, Llc | A1InGaP LED having reduced temperature dependence |
| TWI298555B (en) * | 2006-06-05 | 2008-07-01 | Epistar Corp | Light emitting device |
| US20080067370A1 (en) * | 2006-07-01 | 2008-03-20 | Mccaffrey John Patrick | Electron microscope and scanning probe microscope calibration device |
| EP2122695A4 (en) * | 2007-03-08 | 2013-09-11 | 3M Innovative Properties Co | NETWORK OF LUMINESCENT ELEMENTS |
| KR101538817B1 (ko) * | 2007-09-25 | 2015-07-22 | 퍼스트 솔라, 인코포레이티드 | 헤테로접합을 포함하는 광기전 장치 |
| CN102057504A (zh) * | 2008-06-05 | 2011-05-11 | 3M创新有限公司 | 接合有半导体波长转换器的发光二极管 |
| WO2010027648A1 (en) * | 2008-09-04 | 2010-03-11 | 3M Innovative Properties Company | I i-vi mqw vcsel on a heat sink optically pumped by a gan ld |
| US8385380B2 (en) | 2008-09-04 | 2013-02-26 | 3M Innovative Properties Company | Monochromatic light source |
| CN102804422A (zh) | 2009-05-05 | 2012-11-28 | 3M创新有限公司 | 用于与led结合使用的重发光半导体载流子器件及其制造方法 |
| US8994071B2 (en) | 2009-05-05 | 2015-03-31 | 3M Innovative Properties Company | Semiconductor devices grown on indium-containing substrates utilizing indium depletion mechanisms |
| JP2012532454A (ja) | 2009-06-30 | 2012-12-13 | スリーエム イノベイティブ プロパティズ カンパニー | カドミウム非含有の再発光半導体構成体 |
| JP2012532453A (ja) | 2009-06-30 | 2012-12-13 | スリーエム イノベイティブ プロパティズ カンパニー | 調節可能な色温度を備えた白色光エレクトロルミネセンスデバイス |
| US8304976B2 (en) | 2009-06-30 | 2012-11-06 | 3M Innovative Properties Company | Electroluminescent devices with color adjustment based on current crowding |
| SE534345C2 (sv) * | 2009-09-24 | 2011-07-19 | Svedice Ab | Fotodiod av typen lavinfotodiod. |
| US9431584B2 (en) * | 2010-06-03 | 2016-08-30 | 3M Innovative Properties Company | Light converting and emitting device with suppressed dark-line defects |
| US9318637B2 (en) * | 2011-06-15 | 2016-04-19 | 3M Innovative Properties Company | Solar cell with improved conversion efficiency |
| CN102280548A (zh) * | 2011-09-05 | 2011-12-14 | 厦门乾照光电股份有限公司 | 发光二极管结构及其制造方法 |
| US8895337B1 (en) * | 2012-01-19 | 2014-11-25 | Sandia Corporation | Method of fabricating vertically aligned group III-V nanowires |
| GB2504977B (en) * | 2012-08-16 | 2017-10-04 | Airbus Defence & Space Gmbh | Laser power converter |
| US20180151301A1 (en) * | 2016-11-25 | 2018-05-31 | The Boeing Company | Epitaxial perovskite materials for optoelectronics |
| BR102017000116A2 (pt) * | 2017-01-03 | 2018-07-24 | Carolina Dias Machado Paula | tri diodo para laserterapia e equipamento baseado em tri diodo para emprego em laserterapia |
| CN107230734A (zh) * | 2017-05-23 | 2017-10-03 | 中国人民解放军63791部队 | 一种背对背肖特基结构的BeMgZnO基紫外探测器及其制备方法 |
| RU178900U1 (ru) * | 2017-12-15 | 2018-04-23 | Федеральное государственное бюджетное учреждение науки Научно-технологический центр микроэлектроники и субмикронных гетероструктур Российской академии наук (НТЦ микроэлектроники РАН) | Полупроводниковая гетероструктура для фотопреобразователей |
| US11585970B2 (en) * | 2019-10-04 | 2023-02-21 | Teledyne Scientific & Imaging, Llc | Low loss single crystal multilayer optical component and method of making same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5544193A (en) * | 1992-12-15 | 1996-08-06 | France Telecom | Vertical cavity laser of low resistivity |
| CN1602569A (zh) * | 2002-02-08 | 2005-03-30 | 松下电器产业株式会社 | 半导体发光元件及其制造方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3202985B2 (ja) * | 1989-09-04 | 2001-08-27 | 日本オプネクスト株式会社 | 半導体レーザ装置 |
| US5206871A (en) | 1991-12-27 | 1993-04-27 | At&T Bell Laboratories | Optical devices with electron-beam evaporated multilayer mirror |
| JPH05343796A (ja) * | 1992-06-08 | 1993-12-24 | Nec Corp | 面出射形半導体レーザ |
| JPH07249835A (ja) | 1994-03-11 | 1995-09-26 | Hitachi Ltd | 半導体光素子 |
| JP3333330B2 (ja) * | 1994-09-30 | 2002-10-15 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
| US5956362A (en) | 1996-02-27 | 1999-09-21 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting device and method of etching |
| US5732103A (en) | 1996-12-09 | 1998-03-24 | Motorola, Inc. | Long wavelength VCSEL |
| KR100237188B1 (ko) * | 1997-02-10 | 2000-02-01 | 정선종 | 튜너블 레이저 제조 방법 |
| JPH11145555A (ja) * | 1997-11-12 | 1999-05-28 | Oki Electric Ind Co Ltd | 面発光レーザ用ミラー構造およびその形成方法 |
| JP3334598B2 (ja) * | 1998-03-25 | 2002-10-15 | 日本電気株式会社 | InP基板上II−VI族化合物半導体薄膜 |
| JP2938445B1 (ja) | 1998-09-07 | 1999-08-23 | 株式会社日立製作所 | 量子井戸光変調器とそれを用いた光通信用モジュールおよび光通信システム |
| JP2001085790A (ja) * | 1999-09-16 | 2001-03-30 | Toshiba Corp | 発光増幅素子 |
| US20020158265A1 (en) | 2001-04-26 | 2002-10-31 | Motorola, Inc. | Structure and method for fabricating high contrast reflective mirrors |
| US6873638B2 (en) * | 2001-06-29 | 2005-03-29 | 3M Innovative Properties Company | Laser diode chip with waveguide |
| JP2003124508A (ja) | 2001-10-15 | 2003-04-25 | Sharp Corp | 発光ダイオード、デバイス、該デバイスを用いた表示または通信用光源装置 |
| US6801558B2 (en) * | 2002-06-14 | 2004-10-05 | Agilent Technologies, Inc. | Material systems for long wavelength lasers grown on InP substrates |
| US20050243887A1 (en) * | 2004-04-30 | 2005-11-03 | Honeywell International Inc. | DBR using the combination of II-VI and III-V materials for the application to 1.3-1.55 mum |
-
2005
- 2005-12-20 US US11/275,237 patent/US7119377B2/en not_active Expired - Fee Related
- 2005-12-22 TW TW094145960A patent/TW200725933A/zh unknown
-
2006
- 2006-10-31 CN CN200680048486XA patent/CN101341022B/zh not_active Expired - Fee Related
- 2006-10-31 WO PCT/US2006/042614 patent/WO2007073449A1/en not_active Ceased
- 2006-10-31 KR KR1020087014312A patent/KR20080080540A/ko not_active Ceased
- 2006-10-31 EP EP06827254.1A patent/EP1963094A4/en not_active Withdrawn
- 2006-10-31 JP JP2008547224A patent/JP2009520377A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5544193A (en) * | 1992-12-15 | 1996-08-06 | France Telecom | Vertical cavity laser of low resistivity |
| CN1602569A (zh) * | 2002-02-08 | 2005-03-30 | 松下电器产业株式会社 | 半导体发光元件及其制造方法 |
Non-Patent Citations (2)
| Title |
|---|
| JP特开平7-249835A 1995.09.26 |
| JP特开平8-102548A 1996.04.16 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080080540A (ko) | 2008-09-04 |
| WO2007073449A1 (en) | 2007-06-28 |
| EP1963094A1 (en) | 2008-09-03 |
| US20060102916A1 (en) | 2006-05-18 |
| EP1963094A4 (en) | 2014-03-19 |
| US7119377B2 (en) | 2006-10-10 |
| JP2009520377A (ja) | 2009-05-21 |
| CN101341022A (zh) | 2009-01-07 |
| TW200725933A (en) | 2007-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20171031 |