JP2009515722A5 - - Google Patents

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Publication number
JP2009515722A5
JP2009515722A5 JP2008541226A JP2008541226A JP2009515722A5 JP 2009515722 A5 JP2009515722 A5 JP 2009515722A5 JP 2008541226 A JP2008541226 A JP 2008541226A JP 2008541226 A JP2008541226 A JP 2008541226A JP 2009515722 A5 JP2009515722 A5 JP 2009515722A5
Authority
JP
Japan
Prior art keywords
workpiece
actuator
tool
cutting
tool tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008541226A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009515722A (ja
Filing date
Publication date
Priority claimed from US11/273,875 external-priority patent/US7350441B2/en
Application filed filed Critical
Publication of JP2009515722A publication Critical patent/JP2009515722A/ja
Publication of JP2009515722A5 publication Critical patent/JP2009515722A5/ja
Withdrawn legal-status Critical Current

Links

JP2008541226A 2005-11-15 2006-11-08 同時に２つの独立した速度でワークピース内へのｘ方向の変動動作を有するマイクロ構造作製用切削ツール Withdrawn JP2009515722A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/273,875 US7350441B2 (en) 2005-11-15 2005-11-15 Cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
PCT/US2006/043449 WO2007058840A1 (en) 2005-11-15 2006-11-08 Cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures

Publications (2)

Publication Number Publication Date
JP2009515722A JP2009515722A (ja) 2009-04-16
JP2009515722A5 true JP2009515722A5 (enExample) 2009-12-17

Family

ID=38039395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008541226A Withdrawn JP2009515722A (ja) 2005-11-15 2006-11-08 同時に２つの独立した速度でワークピース内へのｘ方向の変動動作を有するマイクロ構造作製用切削ツール

Country Status (7)

Country Link
US (2) US7350441B2 (enExample)
EP (2) EP1948391B1 (enExample)
JP (1) JP2009515722A (enExample)
KR (1) KR101312129B1 (enExample)
CN (1) CN101304838B (enExample)
TW (1) TWI378852B (enExample)
WO (1) WO2007058840A1 (enExample)

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US7923373B2 (en) 2007-06-04 2011-04-12 Micron Technology, Inc. Pitch multiplication using self-assembling materials
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US20100129617A1 (en) * 2008-11-21 2010-05-27 Corrigan Thomas R Laser ablation tooling via sparse patterned masks
US20100188751A1 (en) * 2009-01-29 2010-07-29 3M Innovative Properties Company Optical films with internally conformable layers and method of making the films
US20100186570A1 (en) * 2009-01-29 2010-07-29 3M Innovative Properties Company Method for making an optical film having a variable prismatic structured surface
FR2944722B1 (fr) * 2009-04-28 2014-10-10 Arts Tete de percage a vibrations axiales
US20110070398A1 (en) * 2009-09-18 2011-03-24 3M Innovative Properties Company Laser ablation tooling via distributed patterned masks
CN102078968B (zh) * 2011-01-20 2012-06-20 天津大学 一种带有斜面的光学镜的超精密车削加工方法
JP7078560B2 (ja) * 2019-01-25 2022-05-31 ファナック株式会社 精密工作機械

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