JP2009510321A - ガスをポンピングする方法 - Google Patents

ガスをポンピングする方法 Download PDF

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Publication number
JP2009510321A
JP2009510321A JP2008532854A JP2008532854A JP2009510321A JP 2009510321 A JP2009510321 A JP 2009510321A JP 2008532854 A JP2008532854 A JP 2008532854A JP 2008532854 A JP2008532854 A JP 2008532854A JP 2009510321 A JP2009510321 A JP 2009510321A
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JP
Japan
Prior art keywords
stage
gas
pump
intake
slm
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Pending
Application number
JP2008532854A
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English (en)
Japanese (ja)
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JP2009510321A5 (https=
Inventor
ピーター ヒュー バーチ
マイケル ロジャー チャーニアック
Original Assignee
エドワーズ リミテッド
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Application filed by エドワーズ リミテッド filed Critical エドワーズ リミテッド
Publication of JP2009510321A publication Critical patent/JP2009510321A/ja
Publication of JP2009510321A5 publication Critical patent/JP2009510321A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Chemical Vapour Deposition (AREA)
JP2008532854A 2005-09-28 2006-09-06 ガスをポンピングする方法 Pending JP2009510321A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas
PCT/GB2006/003286 WO2007036689A1 (en) 2005-09-28 2006-09-06 Method of pumping gas

Publications (2)

Publication Number Publication Date
JP2009510321A true JP2009510321A (ja) 2009-03-12
JP2009510321A5 JP2009510321A5 (https=) 2009-10-01

Family

ID=35394887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008532854A Pending JP2009510321A (ja) 2005-09-28 2006-09-06 ガスをポンピングする方法

Country Status (6)

Country Link
US (1) US20090269231A1 (https=)
EP (1) EP1931880A1 (https=)
JP (1) JP2009510321A (https=)
KR (1) KR20080049788A (https=)
GB (1) GB0519742D0 (https=)
WO (1) WO2007036689A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023103911A (ja) * 2022-01-14 2023-07-27 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法
JP2024506811A (ja) * 2021-01-25 2024-02-15 ファイファー バキユーム 乾式真空ポンプ式の真空ポンプおよび吸排気ユニット

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481019B2 (ja) * 2007-06-05 2014-04-23 エドワーズ株式会社 真空ポンプ配管構造とその真空ポンプ配管の洗浄方法
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
JP5102068B2 (ja) * 2008-02-29 2012-12-19 株式会社荏原製作所 多段真空ポンプ
GB0922564D0 (en) 2009-12-24 2010-02-10 Edwards Ltd Pump
WO2012076204A2 (fr) * 2010-12-10 2012-06-14 Ateliers Busch Sa Pompe à vide pour applications dans des machines d'emballage sous vide
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
GB2621854A (en) * 2022-08-24 2024-02-28 Edwards Korea Ltd Apparatus and method for delivering purge gas to a vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
JPH02294589A (ja) * 1989-05-10 1990-12-05 Unozawagumi Tekkosho:Kk ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
JPH10209058A (ja) * 1997-12-17 1998-08-07 Furukawa Electric Co Ltd:The 有機金属気相成長装置
JP2003129978A (ja) * 2001-10-24 2003-05-08 Aisin Seiki Co Ltd 多段真空ポンプ
WO2004083643A1 (en) * 2003-03-19 2004-09-30 Ebara Corporation Positive-displacement vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
JPH02294589A (ja) * 1989-05-10 1990-12-05 Unozawagumi Tekkosho:Kk ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
JPH10209058A (ja) * 1997-12-17 1998-08-07 Furukawa Electric Co Ltd:The 有機金属気相成長装置
JP2003129978A (ja) * 2001-10-24 2003-05-08 Aisin Seiki Co Ltd 多段真空ポンプ
WO2004083643A1 (en) * 2003-03-19 2004-09-30 Ebara Corporation Positive-displacement vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024506811A (ja) * 2021-01-25 2024-02-15 ファイファー バキユーム 乾式真空ポンプ式の真空ポンプおよび吸排気ユニット
JP2023103911A (ja) * 2022-01-14 2023-07-27 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法
JP7692374B2 (ja) 2022-01-14 2025-06-13 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法

Also Published As

Publication number Publication date
EP1931880A1 (en) 2008-06-18
WO2007036689A1 (en) 2007-04-05
GB0519742D0 (en) 2005-11-09
US20090269231A1 (en) 2009-10-29
KR20080049788A (ko) 2008-06-04

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