JP2009508115A - 2つの実質的に平らな要素の相対位置を決定するための装置 - Google Patents
2つの実質的に平らな要素の相対位置を決定するための装置 Download PDFInfo
- Publication number
- JP2009508115A JP2009508115A JP2008530314A JP2008530314A JP2009508115A JP 2009508115 A JP2009508115 A JP 2009508115A JP 2008530314 A JP2008530314 A JP 2008530314A JP 2008530314 A JP2008530314 A JP 2008530314A JP 2009508115 A JP2009508115 A JP 2009508115A
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- Prior art keywords
- elements
- line sensor
- circuit board
- carrier
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7038—Alignment for proximity or contact printer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
Abstract
Description
Claims (7)
- Z方向に互いに離隔し、そして、一方が他方の実質的に上方に配置される2つの実質的に平らな要素間の、X‐Y平面における相対位置を決定する装置であって、前記要素間に配置され、そして、前記要素の相互に向かい合う表面の少なくとも2つの点を感知可能な少なくとも1つの光学センサと、前記少なくとも2つの点の画像を、X‐Y平面におけるそれらの相対位置に関して評価することが可能な評価ユニットとを備えるところの装置において、
前記光学センサは、少なくとも1つのラインセンサ(7,8)を備えており、前記ラインセンサは、前記2つの要素(2、3)に対して移動可能であり、前記2つの要素(2、3)の互いに向かい合う表面が、スキャナのように、少なくとも部分において光学的走査されることを特徴とする装置。 - 前記ラインセンサ(7、8)は、キャリア(4)上に配置され、前記キャリアは、駆動部(5)によって前記要素(2、3)間で、X‐Y平面において実質的に移動可能である、請求項1に記載の装置。
- 前記ラインセンサ(7、8)が、前記キャリア(4)上に移動可能に配置される、請求項2に記載の装置。
- 少なくとも2つのラインセンサ(7、8)を備える、請求項1乃至3のいずれか一項に記載の装置。
- 前記少なくとも2つのラインセンサ(7、8)は、前記キャリア(4)上に配置され、第1のラインセンサ(7)が前記第1の要素(2)の指定表面を示し、そして、第2のラインセンサ(8)が第2の要素(3)の指定表面を示す、請求項4に記載の装置。
- 前記ラインセンサ(7、8)は、カラーラインセンサである、請求項1乃至5のいずれか一項に記載の装置。
- 請求項1乃至6のいずれか一項による装置によって、回路ボード又は基板にプリント形成を施して、電気ストリップ導電体を形成するシステムであって、前記2つの要素のうちの第1の要素が、プリントステンシル(3)によって構成され、前記2つの要素のうちの第2の要素が、プリント形成対象の回路ボード(2)又はプリント形成対象の基板によって構成されることを特徴とするシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005043833A DE102005043833A1 (de) | 2005-09-13 | 2005-09-13 | Vorrichtung zur Ermittlung der Relativposition zwischen zwei im Wesentlichen flächigen Elementen |
PCT/DE2006/001413 WO2007031049A1 (de) | 2005-09-13 | 2006-08-11 | Vorrichtung zur ermittlung der relativposition zwischen zwei im wesentlichen flächigen elementen |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009508115A true JP2009508115A (ja) | 2009-02-26 |
Family
ID=37497898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008530314A Withdrawn JP2009508115A (ja) | 2005-09-13 | 2006-08-11 | 2つの実質的に平らな要素の相対位置を決定するための装置 |
Country Status (14)
Country | Link |
---|---|
US (1) | US20080283308A1 (ja) |
EP (1) | EP1924891A1 (ja) |
JP (1) | JP2009508115A (ja) |
KR (1) | KR101027880B1 (ja) |
CN (1) | CN101263433A (ja) |
AU (1) | AU2006291872B2 (ja) |
BR (1) | BRPI0617170A2 (ja) |
CA (1) | CA2622359A1 (ja) |
DE (1) | DE102005043833A1 (ja) |
EA (1) | EA011464B1 (ja) |
IL (1) | IL189803A0 (ja) |
UA (1) | UA89431C2 (ja) |
WO (1) | WO2007031049A1 (ja) |
ZA (1) | ZA200801602B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN205427436U (zh) | 2016-03-23 | 2016-08-03 | 北京京东方光电科技有限公司 | 显示器件的对位检测设备及曝光工艺系统 |
DE102017123686A1 (de) * | 2017-10-11 | 2019-04-11 | Miva Technologies Gmbh | Verfahren und Belichtungseinrichtung zur Belichtung von zumindest einer gespeicherten Darstellung auf einem lichtempfindlichen Aufzeichnungsträger |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59119204A (ja) * | 1982-12-27 | 1984-07-10 | Toshiba Corp | マ−ク位置検出方法 |
JPS62261005A (ja) * | 1986-05-07 | 1987-11-13 | Omron Tateisi Electronics Co | プリント基板の位置ずれ補正装置 |
JPH08111599A (ja) * | 1994-10-11 | 1996-04-30 | Fujitsu Ltd | 位置合わせ方法および装置 |
JPH09506302A (ja) * | 1993-11-22 | 1997-06-24 | デーイーケイ プリンテイング マシーンズ リミテツド | 位置合わせシステム |
JPH09323401A (ja) * | 1996-06-06 | 1997-12-16 | Sony Corp | スクリーン印刷装置及び印刷方法 |
JPH11245369A (ja) * | 1998-02-27 | 1999-09-14 | Tenryu Seiki Kk | 画像認識装置及びクリームはんだ印刷装置 |
JP2002160347A (ja) * | 2000-11-22 | 2002-06-04 | Matsushita Electric Ind Co Ltd | クリーム半田印刷装置及びその制御方法並びに記憶媒体 |
Family Cites Families (10)
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EP0433263A3 (en) * | 1989-12-13 | 1992-01-15 | Erich Dipl.-Ing. Thallner | Method and apparatus for the exposure of photosensitised substrates, especially semiconductor substrates |
JPH05264221A (ja) * | 1992-03-17 | 1993-10-12 | Fujitsu Ltd | 半導体露光装置用マーク位置検出装置及びこれを用いた半導体露光装置用位置合わせ装置 |
JP3991165B2 (ja) | 1995-06-20 | 2007-10-17 | 株式会社ニコン | 位置合わせ方法及び露光方法 |
US5883663A (en) * | 1996-12-02 | 1999-03-16 | Siwko; Robert P. | Multiple image camera for measuring the alignment of objects in different planes |
GB2323664A (en) * | 1997-03-25 | 1998-09-30 | Dek Printing Machines Ltd | Viewing and imaging systems |
DE60045379D1 (de) * | 1999-07-26 | 2011-01-27 | Panasonic Corp | Verfahren und vorrichtung zum drucken von lötpaste |
JP3580493B2 (ja) * | 2000-08-11 | 2004-10-20 | 株式会社サキコーポレーション | 走査ヘッドおよびそれを利用可能な外観検査方法および装置 |
GB2377908A (en) * | 2001-05-31 | 2003-01-29 | Blakell Europlacer Ltd | Screen printer for PCB with alignment apparatus |
DE10311821B4 (de) * | 2003-03-13 | 2008-11-20 | Ekra Eduard Kraft Gmbh Maschinenfabrik | Verfahren und Vorrichtung zum Ausrichten von Substrat und Druckschablone beim Lotpastendruck |
GB2403003B (en) * | 2003-06-19 | 2006-06-07 | Dek Int Gmbh | Inspection system for and method of inspecting deposits printed on workpieces |
-
2005
- 2005-09-13 DE DE102005043833A patent/DE102005043833A1/de not_active Ceased
-
2006
- 2006-08-11 EA EA200800675A patent/EA011464B1/ru not_active IP Right Cessation
- 2006-08-11 EP EP06775845A patent/EP1924891A1/de not_active Withdrawn
- 2006-08-11 JP JP2008530314A patent/JP2009508115A/ja not_active Withdrawn
- 2006-08-11 CA CA002622359A patent/CA2622359A1/en not_active Abandoned
- 2006-08-11 UA UAA200804311A patent/UA89431C2/ru unknown
- 2006-08-11 WO PCT/DE2006/001413 patent/WO2007031049A1/de active Application Filing
- 2006-08-11 AU AU2006291872A patent/AU2006291872B2/en not_active Ceased
- 2006-08-11 BR BRPI0617170-2A patent/BRPI0617170A2/pt not_active IP Right Cessation
- 2006-08-11 CN CNA2006800330397A patent/CN101263433A/zh active Pending
- 2006-08-11 KR KR1020087008692A patent/KR101027880B1/ko active IP Right Grant
- 2006-08-11 US US12/066,439 patent/US20080283308A1/en not_active Abandoned
-
2008
- 2008-02-18 ZA ZA200801602A patent/ZA200801602B/xx unknown
- 2008-02-26 IL IL189803A patent/IL189803A0/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59119204A (ja) * | 1982-12-27 | 1984-07-10 | Toshiba Corp | マ−ク位置検出方法 |
JPS62261005A (ja) * | 1986-05-07 | 1987-11-13 | Omron Tateisi Electronics Co | プリント基板の位置ずれ補正装置 |
JPH09506302A (ja) * | 1993-11-22 | 1997-06-24 | デーイーケイ プリンテイング マシーンズ リミテツド | 位置合わせシステム |
JPH08111599A (ja) * | 1994-10-11 | 1996-04-30 | Fujitsu Ltd | 位置合わせ方法および装置 |
JPH09323401A (ja) * | 1996-06-06 | 1997-12-16 | Sony Corp | スクリーン印刷装置及び印刷方法 |
JPH11245369A (ja) * | 1998-02-27 | 1999-09-14 | Tenryu Seiki Kk | 画像認識装置及びクリームはんだ印刷装置 |
JP2002160347A (ja) * | 2000-11-22 | 2002-06-04 | Matsushita Electric Ind Co Ltd | クリーム半田印刷装置及びその制御方法並びに記憶媒体 |
Also Published As
Publication number | Publication date |
---|---|
KR20080046709A (ko) | 2008-05-27 |
ZA200801602B (en) | 2008-11-26 |
AU2006291872B2 (en) | 2010-06-10 |
AU2006291872A1 (en) | 2007-03-22 |
EA200800675A1 (ru) | 2008-08-29 |
CA2622359A1 (en) | 2007-03-22 |
WO2007031049A1 (de) | 2007-03-22 |
CN101263433A (zh) | 2008-09-10 |
UA89431C2 (ru) | 2010-01-25 |
BRPI0617170A2 (pt) | 2011-07-12 |
EA011464B1 (ru) | 2009-04-28 |
US20080283308A1 (en) | 2008-11-20 |
DE102005043833A1 (de) | 2007-03-29 |
EP1924891A1 (de) | 2008-05-28 |
IL189803A0 (en) | 2008-11-03 |
KR101027880B1 (ko) | 2011-04-07 |
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