JP2009505411A5 - - Google Patents
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- Publication number
- JP2009505411A5 JP2009505411A5 JP2008526437A JP2008526437A JP2009505411A5 JP 2009505411 A5 JP2009505411 A5 JP 2009505411A5 JP 2008526437 A JP2008526437 A JP 2008526437A JP 2008526437 A JP2008526437 A JP 2008526437A JP 2009505411 A5 JP2009505411 A5 JP 2009505411A5
- Authority
- JP
- Japan
- Prior art keywords
- outer ring
- terminal optical
- optical element
- thermal expansion
- holding structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70881005P | 2005-08-16 | 2005-08-16 | |
| US60/708,810 | 2005-08-16 | ||
| PCT/EP2006/008073 WO2007020067A1 (en) | 2005-08-16 | 2006-08-16 | Immersion lithography objective |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009505411A JP2009505411A (ja) | 2009-02-05 |
| JP2009505411A5 true JP2009505411A5 (enExample) | 2013-03-07 |
| JP5243957B2 JP5243957B2 (ja) | 2013-07-24 |
Family
ID=37503663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008526437A Active JP5243957B2 (ja) | 2005-08-16 | 2006-08-16 | 液浸リソグラフィー用オブジェクティブ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7649702B2 (enExample) |
| JP (1) | JP5243957B2 (enExample) |
| WO (1) | WO2007020067A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008026979B3 (de) * | 2008-05-29 | 2009-12-24 | Carl Zeiss Ag | Vorrichtung zum Korrigieren von Abbildungsfehlern in einem optischen System |
| JP5455516B2 (ja) * | 2009-09-11 | 2014-03-26 | キヤノン株式会社 | 支持装置、光学装置、転写装置及びデバイス製造方法 |
| DE102009045163B4 (de) * | 2009-09-30 | 2017-04-06 | Carl Zeiss Smt Gmbh | Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102010008756A1 (de) * | 2010-02-17 | 2011-06-30 | Carl Zeiss Laser Optics GmbH, 73447 | Optische Anordnung |
| CN102981234A (zh) * | 2012-12-12 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | 光学元件轴向调整装置 |
| DE102013201264A1 (de) * | 2013-01-28 | 2014-02-27 | Carl Zeiss Smt Gmbh | Verbindungselement zur Kompensation unterschiedlicher thermischer Ausdehnung der verbundenen Körper |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4269125A (en) | 1979-07-27 | 1981-05-26 | Combustion Engineering, Inc. | Pulverizer rejects disposal |
| US4733945A (en) | 1986-01-15 | 1988-03-29 | The Perkin-Elmer Corporation | Precision lens mounting |
| JPH11337795A (ja) * | 1998-05-22 | 1999-12-10 | Canon Inc | レンズ鏡筒 |
| US6198576B1 (en) * | 1998-07-16 | 2001-03-06 | Nikon Corporation | Projection optical system and exposure apparatus |
| DE19901295A1 (de) * | 1999-01-15 | 2000-07-20 | Zeiss Carl Fa | Optische Abbildungsvorrichtung, insbesondere Objektiv, mit wenigstens einem optischen Element |
| US6239924B1 (en) * | 1999-08-31 | 2001-05-29 | Nikon Corporation | Kinematic lens mounting with distributed support and radial flexure |
| JP4809987B2 (ja) * | 2000-03-30 | 2011-11-09 | キヤノン株式会社 | 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法 |
| KR20030051421A (ko) | 2000-03-31 | 2003-06-25 | 가부시키가이샤 니콘 | 광학 부재의 유지 방법 및 장치, 광학 장치, 노광 장치 및디바이스 제조 방법 |
| JP2002048962A (ja) | 2000-06-17 | 2002-02-15 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | 光学素子装着装置 |
| DE10121346A1 (de) | 2001-05-02 | 2002-11-07 | Zeiss Carl | Objektiv, insbesondere Projektionsobjektiv für die Halbleiter-Lithographie |
| JP2003029116A (ja) * | 2001-07-13 | 2003-01-29 | Canon Inc | レンズ保持装置、およびレンズ保持装置を組み込んだ投影露光装置 |
| US20030234918A1 (en) * | 2002-06-20 | 2003-12-25 | Nikon Corporation | Adjustable soft mounts in kinematic lens mounting system |
| JP4565261B2 (ja) * | 2002-06-24 | 2010-10-20 | 株式会社ニコン | 光学素子保持機構、光学系鏡筒及び露光装置 |
| WO2004086148A1 (de) * | 2003-03-26 | 2004-10-07 | Carl Zeiss Smt Ag | Vorrichtung zur deformationsarmen austauschbaren lagerung eines optischen elements |
| KR20180089562A (ko) * | 2003-04-10 | 2018-08-08 | 가부시키가이샤 니콘 | 액침 리소그래피 장치용 진공 배출을 포함하는 환경 시스템 |
| JP3805323B2 (ja) * | 2003-05-21 | 2006-08-02 | キヤノン株式会社 | 露光装置、収差低減方法及び光学部材調整機構 |
| DE10324477A1 (de) * | 2003-05-30 | 2004-12-30 | Carl Zeiss Smt Ag | Mikrolithographische Projektionsbelichtungsanlage |
| EP1503244A1 (en) * | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
| WO2005054953A2 (en) * | 2003-11-24 | 2005-06-16 | Carl-Zeiss Smt Ag | Holding device for an optical element in an objective |
| US7369332B2 (en) | 2004-04-13 | 2008-05-06 | Carl Zeiss Smt Gmbh | Closing module for an optical arrangement |
-
2006
- 2006-08-16 JP JP2008526437A patent/JP5243957B2/ja active Active
- 2006-08-16 WO PCT/EP2006/008073 patent/WO2007020067A1/en not_active Ceased
-
2008
- 2008-01-25 US US12/019,830 patent/US7649702B2/en not_active Expired - Fee Related
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