JP2009505124A5 - - Google Patents
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- Publication number
- JP2009505124A5 JP2009505124A5 JP2008525556A JP2008525556A JP2009505124A5 JP 2009505124 A5 JP2009505124 A5 JP 2009505124A5 JP 2008525556 A JP2008525556 A JP 2008525556A JP 2008525556 A JP2008525556 A JP 2008525556A JP 2009505124 A5 JP2009505124 A5 JP 2009505124A5
- Authority
- JP
- Japan
- Prior art keywords
- projection system
- image projection
- image
- sio
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 16
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 9
- 239000013078 crystal Substances 0.000 claims 7
- 230000003287 optical effect Effects 0.000 claims 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims 6
- 229910004283 SiO 4 Inorganic materials 0.000 claims 2
- 239000011575 calcium Substances 0.000 claims 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims 2
- 239000000292 calcium oxide Substances 0.000 claims 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000000395 magnesium oxide Substances 0.000 claims 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
- 229910020068 MgAl Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims 1
- 239000002178 crystalline material Substances 0.000 claims 1
- 239000002223 garnet Substances 0.000 claims 1
- 239000011777 magnesium Substances 0.000 claims 1
- 229910052749 magnesium Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 claims 1
- 229910001950 potassium oxide Inorganic materials 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- -1 scandium aluminum Chemical compound 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims 1
- 229910001948 sodium oxide Inorganic materials 0.000 claims 1
- 229910052596 spinel Inorganic materials 0.000 claims 1
- 239000011029 spinel Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70690305P | 2005-08-10 | 2005-08-10 | |
| PCT/EP2006/065070 WO2007017473A1 (de) | 2005-08-10 | 2006-08-04 | Abbildungssystem, insbesondere projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009505124A JP2009505124A (ja) | 2009-02-05 |
| JP2009505124A5 true JP2009505124A5 (enExample) | 2009-07-16 |
Family
ID=37188852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008525556A Pending JP2009505124A (ja) | 2005-08-10 | 2006-08-04 | 像投影システム、特に、マイクロリソグラフィ投影露光装置の投影対物レンズ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080182210A1 (enExample) |
| EP (1) | EP1913445B1 (enExample) |
| JP (1) | JP2009505124A (enExample) |
| KR (1) | KR20080028429A (enExample) |
| CN (1) | CN101243359B (enExample) |
| AT (1) | ATE511124T1 (enExample) |
| WO (1) | WO2007017473A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008001800A1 (de) * | 2007-05-25 | 2008-11-27 | Carl Zeiss Smt Ag | Projektionsobjektiv für die Mikrolithographie, Mikrolithographie-Projektionsbelichtungsanlage mit einem derartigen Projektionsobjektiv, mikrolithographisches Herstellungsverfahren für Bauelemente sowie mit diesem Verfahren hergestelltes Bauelement |
| CN114326075B (zh) * | 2021-12-10 | 2023-12-19 | 肯维捷斯（武汉）科技有限公司 | 一种生物样品的数字显微成像系统及镜检方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000034967A (ko) * | 1998-11-30 | 2000-06-26 | 헨켈 카르스텐 | 수정-렌즈를 갖는 오브젝티브 및 투사 조명 장치 |
| US6995930B2 (en) * | 1999-12-29 | 2006-02-07 | Carl Zeiss Smt Ag | Catadioptric projection objective with geometric beam splitting |
| WO2002093209A2 (de) * | 2001-05-15 | 2002-11-21 | Carl Zeiss | Objektiv mit fluorid-kristall-linsen |
| JP2003021619A (ja) * | 2001-07-05 | 2003-01-24 | Canon Inc | 蛍石及びその分析法、製造法、光学特性評価法 |
| EP1411375A4 (en) * | 2001-07-18 | 2007-03-21 | Nikon Corp | OPTICAL ELEMENT COMPRISING A LANTHANE FLUORIDE FILM |
| US7092069B2 (en) * | 2002-03-08 | 2006-08-15 | Carl Zeiss Smt Ag | Projection exposure method and projection exposure system |
| AU2002364974A1 (en) * | 2002-09-03 | 2004-03-29 | Carl Zeiss Smt Ag | Objective with birefringent lenses |
| JP4835155B2 (ja) * | 2003-07-09 | 2011-12-14 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
| KR101200654B1 (ko) * | 2003-12-15 | 2012-11-12 | 칼 짜이스 에스엠티 게엠베하 | 고 개구율 및 평평한 단부면을 가진 투사 대물렌즈 |
| US7466489B2 (en) * | 2003-12-15 | 2008-12-16 | Susanne Beder | Projection objective having a high aperture and a planar end surface |
| JP5102492B2 (ja) * | 2003-12-19 | 2012-12-19 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 結晶素子を有するマイクロリソグラフィー投影用対物レンズ |
| JP2006113533A (ja) * | 2004-08-03 | 2006-04-27 | Nikon Corp | 投影光学系、露光装置、および露光方法 |
-
2006
- 2006-08-04 CN CN2006800296095A patent/CN101243359B/zh not_active Expired - Fee Related
- 2006-08-04 WO PCT/EP2006/065070 patent/WO2007017473A1/de not_active Ceased
- 2006-08-04 JP JP2008525556A patent/JP2009505124A/ja active Pending
- 2006-08-04 KR KR1020087001045A patent/KR20080028429A/ko not_active Ceased
- 2006-08-04 AT AT06778169T patent/ATE511124T1/de active
- 2006-08-04 EP EP06778169A patent/EP1913445B1/de not_active Not-in-force
-
2008
- 2008-02-07 US US12/027,731 patent/US20080182210A1/en not_active Abandoned
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