JP2009266369A - 磁気センサおよびその形成方法 - Google Patents
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Abstract
【解決手段】TMRセンサ1は、シード層14、AFM層15、ピンド層16、スペーサ層17、フリー層18およびキャップ層19が順に積層されたものである。ピンド層16は、AFM層15の側から、AP2層163と結合層162とAP1層161とが順に積層されたシンセティック反強磁性ピンド構造を有する。スペーサ層17は、例えば金属層と、低バンドギャップ絶縁層もしくは半導体層とが交互に形成された多層構造を有する。金属層は例えば銅層であり、低バンドギャップ絶縁層はMgO層である。
【選択図】図2
Description
本発明の効果を確認するため、図1などに示したTMRセンサ1の構成に対応するTMR積層体を作製し、その特性の評価を行った。その結果を表1に表す。
スペーサ層の構成を変更したことを除き、他は上記実験例1と同様の構成のTMR積層体を作製し、その特性の評価を行った。その結果を表2に表す。
スペーサ層の構成を変更したことを除き、他は上記実験例1と同様の構成のTMR積層体を作製し、その特性の評価を行った。その結果を表3に表す。
スペーサ層の構成を変更したことを除き、他は上記実験例1と同様の構成のTMR積層体を作製し、その特性の評価を行った。その結果を表4に表す。
Claims (20)
- 基体上に、
シード層と、反強磁性(AFM)層と、結合層を介して第1および第2の強磁性層が結合してなるシンセティック反強磁性(SyAF)ピンド層とを順に有する積層体と、
金属層と、低バンドギャップ絶縁層もしくは半導体層とを有し、前記第1の強磁性層と接する複合スペーサ層と、
フリー層と、
キャップ層と
を順に備え、
前記シンセティック反強磁性ピンド層における第1の強磁性層は、CoFe,CoFeB,CoB,FeBおよびCoFeX(但し、XはNi,Cu,Mo,Cr,Zrを表す)の少なくとも1種からなる
磁気センサ。 - 前記金属層は銅(Cu)からなり、
前記低バンドギャップ絶縁層は酸化マグネシウム(MgO)からなる
請求項1記載の磁気センサ。 - 前記金属層は、0.01nm(0.1Å)以上1.0nm(10Å)以下の厚みを有し、
前記低バンドギャップ絶縁層は、0.5nm(5Å)以上2.0nm(20Å)以下の厚みを有する
請求項2記載の磁気センサ。 - 前記低バンドギャップ絶縁層は、亜鉛(Zn),マンガン(Mn),アルミニウム(Al),Cu,ニッケル(Ni),カドミウム(Cd),クロム(Cr),チタン(Ti),ジルコニウム(Zr),ハフニウム(Hf),ルテニウム(Ru),モリブデン(Mo),ニオブ(Nb),コバルト(Co)および鉄(Fe)のうちの少なくとも1種を50原子%以下の割合で含んでいる
請求項2記載の磁気センサ。 - 前記低バンドギャップ絶縁層もしくは半導体層は、
ZnO,ZnX Mg(1-X)O(但し、Xは0以上0.99以下),ZnCuO,ZnCdO,ZnAlO,ZnSe,ZnTe,ZnS,SrTiO3,SrOx ,LaMnOx ,Si,Ge,TiOx ,AlN,GaN,InN,AlP,AlAs,AlSb,GaP,GaAs,GaSb,InP,InAs,CdS,CdTe,HgTe,PbS,PbSe,PbTe,SnTe,Cu2 O,FeSi2 ,CrMnSi,Mg2 Si,RuSi3またはIr3 Si5から構成される
請求項1記載の磁気センサ。 - 前記低バンドギャップ絶縁層もしくは半導体層は、Sb,Bi,CoSi,CoXFe(1-X)Si、CoXMn(1-X)Si,FeSiまたはCoXCr(1-X)Siから構成される
請求項1記載の磁気センサ。 - 前記金属層は、銅(Cu),金(Au),亜鉛(Zn),ルテニウム(Ru)またはアルミニウム(Al)から構成される
請求項1記載の磁気センサ。 - 前記第2の強磁性層は、面心立方構造を有する一対のCoFe層と、前記一対のCoFe層の間に挟まれた鉄合金層との3層構造からなり、
前記結合層は、Ru,RhまたはIrからなり、
前記第1の強磁性層は、[CoFe\Cu]m\CoFe(但し、mは1〜3の整数)で表される積層構造を有する
請求項1記載の磁気センサ。 - 前記フリー層は、CoFe\NiFe,FeCo\CoB,CoFe\CoFeBまたはCoFe\CoFeB\NiFeで表される積層構造を有し、
前記キャップ層は、Ru\Ta\RuまたはRu\Taで表される積層構造を有する
請求項1記載の磁気センサ。 - 基体上に、シード層と、反強磁性(AFM)層と、結合層を介して第1および第2の強磁性層が結合してなるシンセティック反強磁性(SyAF)ピンド層とを順に有する積層体を形成する工程と、
金属層と低バンドギャップ絶縁層もしくは半導体層とを有する複合スペーサ層を、前記第1の強磁性層と接するように形成する工程と、
前記複合スペーサ層の上にフリー層を形成する工程と、
前記フリー層の上にキャップ層を形成する工程と
を含む磁気センサの形成方法。 - 前記金属層を銅(Cu)によって形成し、
前記低バンドギャップ絶縁層を酸化マグネシウム(MgO)によって形成する
請求項10記載の磁気センサの形成方法。 - 前記金属層を、0.01nm(0.1Å)以上1.0nm(10Å)以下の厚みとし、
前記低バンドギャップ絶縁層を、0.5nm(5Å)以上2.0nm(20Å)以下の厚みとする
請求項11記載の磁気センサの形成方法。 - 前記低バンドギャップ絶縁層を、亜鉛(Zn),マンガン(Mn),アルミニウム(Al),Cu,ニッケル(Ni),カドミウム(Cd),クロム(Cr),チタン(Ti),ジルコニウム(Zr),ハフニウム(Hf),ルテニウム(Ru),モリブデン(Mo),ニオブ(Nb),コバルト(Co)および鉄(Fe)のうちの少なくとも1種を50原子%以下の割合で含むように形成する
請求項11記載の磁気センサの形成方法。 - 前記低バンドギャップ絶縁層もしくは半導体層を、
ZnO,ZnX Mg(1-X)O(但し、Xは0以上0.99以下),ZnCuO,ZnCdO,ZnAlO,ZnSe,ZnTe,ZnS,SrTiO3,SrOx ,LaMnOx ,Si,Ge,TiOx ,AlN,GaN,InN,AlP,AlAs,AlSb,GaP,GaAs,GaSb,InP,InAs,CdS,CdTe,HgTe,PbS,PbSe,PbTe,SnTe,Cu2 O,FeSi2 ,CrMnSi,Mg2 Si,RuSi3またはIr3 Si5 によって形成する
請求項10記載の磁気センサの形成方法。 - 前記低バンドギャップ絶縁層もしくは半導体層を、Sb,Bi,CoSi,CoXFe(1-X)Si、CoXMn(1-X)Si,FeSiまたはCoXCr(1-X)Siによって形成する
請求項10記載の磁気センサの形成方法。 - 前記金属層を、銅(Cu),金(Au),亜鉛(Zn),ルテニウム(Ru)またはアルミニウム(Al)によって形成する
請求項10記載の磁気センサの形成方法。 - 前記第2の強磁性層として、面心立方構造を有する一対のCoFe層と前記一対のCoFe層の間に挟まれた鉄合金層との3層構造を形成し、
前記結合層を、Ru,RhまたはIrによって形成し、
前記第1の強磁性層を、[CoFe\Cu]m\CoFe(但し、mは1〜3の整数)で表される積層構造とする
請求項10記載の磁気センサの形成方法。 - 前記フリー層を、CoFe\NiFe,FeCo\CoB,CoFe\CoFeBまたはCoFe\CoFeB\NiFeで表される積層構造とし、
前記キャップ層を、Ru\Ta\RuまたはRu\Taで表される積層構造とする
請求項10記載の磁気センサの形成方法。 - 前記低バンドギャップ絶縁層を、前記金属層もしくは前記第1の強磁性層の上にマグネシウム層を形成したのち、自然酸化法もしくはラジカル酸化法を用いて前記マグネシウム層を酸化することにより形成する
請求項11記載の磁気センサの形成方法。 - 前記積層体、複合スペーサ層、フリー層およびキャップ層を含む積層構造をアニール処理したのち、所定形状となるようにパターニングする
請求項11記載の磁気センサの形成方法。
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Cited By (7)
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009194224A (ja) * | 2008-02-15 | 2009-08-27 | Fujitsu Ltd | 磁気抵抗効果素子、ヘッドスライダ、磁気情報再生装置および磁気抵抗効果メモリ |
US20090274837A1 (en) * | 2008-04-30 | 2009-11-05 | Tdk Corporation | Method of producing the magnetoresistive device of the cpp type |
US8779538B2 (en) * | 2009-08-10 | 2014-07-15 | Samsung Electronics Co., Ltd. | Magnetic tunneling junction seed, capping, and spacer layer materials |
US20110031569A1 (en) * | 2009-08-10 | 2011-02-10 | Grandis, Inc. | Method and system for providing magnetic tunneling junction elements having improved performance through capping layer induced perpendicular anisotropy and memories using such magnetic elements |
US8064246B2 (en) * | 2009-12-10 | 2011-11-22 | John Casimir Slonczewski | Creating spin-transfer torque in oscillators and memories |
US9070464B2 (en) * | 2010-12-10 | 2015-06-30 | Avalanche Technology, Inc. | Magnetic random access memory (MRAM) with enhanced magnetic stiffness and method of making same |
US8568602B2 (en) | 2011-01-19 | 2013-10-29 | HGST Netherlands B.V. | Method of manufacturing a magnetic read sensor having a low resistance cap structure |
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US9034491B2 (en) | 2012-11-30 | 2015-05-19 | Seagate Technology Llc | Low resistance area magnetic stack |
US20150213815A1 (en) * | 2014-01-29 | 2015-07-30 | Seagate Technology Llc | Synthetic antiferromagnetic reader |
US9214169B1 (en) * | 2014-06-20 | 2015-12-15 | Western Digital (Fremont), Llc | Magnetic recording read transducer having a laminated free layer |
US9177575B1 (en) * | 2014-12-05 | 2015-11-03 | HGST Netherlands B.V. | Tunneling magnetoresistive (TMR) read head with reduced gap thickness |
US9508365B1 (en) | 2015-06-24 | 2016-11-29 | Western Digital (Fremont), LLC. | Magnetic reader having a crystal decoupling structure |
US9401162B1 (en) | 2015-08-14 | 2016-07-26 | Seagate Technology Llc | Read sensor with free layers of different widths sandwiching a SAF structure for extremely high resolution |
US9830935B1 (en) | 2016-08-10 | 2017-11-28 | Seagate Technology Llc | Read sensor capable of providing multiple effective read widths |
CN112736190B (zh) * | 2019-10-14 | 2023-04-18 | 上海磁宇信息科技有限公司 | 磁性隧道结结构及磁性随机存储器 |
US11125840B2 (en) | 2020-02-18 | 2021-09-21 | Western Digital Technologies, Inc. | Ultra-low RA and high TMR magnetic sensor with radiation reflective lead |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003298143A (ja) * | 2002-03-28 | 2003-10-17 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP2004031545A (ja) * | 2002-06-25 | 2004-01-29 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
JP2007088483A (ja) * | 2005-09-23 | 2007-04-05 | Headway Technologies Inc | スピンバルブ構造およびその形成方法ならびにcpp−gmr再生ヘッド |
JP2007115960A (ja) * | 2005-10-21 | 2007-05-10 | Toshiba Corp | 磁気抵抗効果素子の製造方法 |
JP2008004944A (ja) * | 2006-06-21 | 2008-01-10 | Headway Technologies Inc | 強磁性構造、スピンバルブ構造およびその製造方法、磁気抵抗効果素子およびその製造方法 |
JP2008091842A (ja) * | 2006-09-08 | 2008-04-17 | Tdk Corp | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3293437B2 (ja) | 1995-12-19 | 2002-06-17 | 松下電器産業株式会社 | 磁気抵抗効果素子、磁気抵抗効果型ヘッド及びメモリー素子 |
US5668688A (en) | 1996-05-24 | 1997-09-16 | Quantum Peripherals Colorado, Inc. | Current perpendicular-to-the-plane spin valve type magnetoresistive transducer |
JP4382333B2 (ja) | 2002-03-28 | 2009-12-09 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
US7872837B2 (en) | 2004-04-30 | 2011-01-18 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a magnetic read sensor having a thin pinning layer and improved magnetoreistive coefficient |
JP4822680B2 (ja) | 2004-08-10 | 2011-11-24 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
WO2007013887A2 (en) | 2004-10-15 | 2007-02-01 | The Trustees Of Columbia University In The City Of New York | Methods of manipulating the relaxation rate in magnetic materials and devices for using the same |
US7333306B2 (en) | 2005-08-23 | 2008-02-19 | Headway Technologies, Inc. | Magnetoresistive spin valve sensor with tri-layer free layer |
US20070091514A1 (en) | 2005-10-21 | 2007-04-26 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetoresistive (MR) elements having improved hard bias seed layers |
US7423847B2 (en) * | 2005-11-03 | 2008-09-09 | Hitachi Global Storage Technologies Netherlands B.V. | Current-perpendicular-to-the-plane spin-valve (CPP-SV) sensor with current-confining apertures concentrated near the sensing edge |
US7473478B2 (en) | 2005-12-30 | 2009-01-06 | Tdk Corporation | Oscillator |
JP4991155B2 (ja) | 2006-01-19 | 2012-08-01 | 株式会社東芝 | 半導体記憶装置 |
JP4975335B2 (ja) | 2006-02-16 | 2012-07-11 | 株式会社東芝 | 磁気抵抗効果素子,磁気ヘッド,および磁気記録再生装置 |
US7672085B2 (en) * | 2007-01-24 | 2010-03-02 | Tdk Corporation | CPP type magneto-resistive effect device having a semiconductor oxide spacer layer and magnetic disk system |
-
2008
- 2008-04-25 US US12/150,191 patent/US8289663B2/en active Active
-
2009
- 2009-04-27 JP JP2009107823A patent/JP2009266369A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003298143A (ja) * | 2002-03-28 | 2003-10-17 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP2004031545A (ja) * | 2002-06-25 | 2004-01-29 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
JP2007088483A (ja) * | 2005-09-23 | 2007-04-05 | Headway Technologies Inc | スピンバルブ構造およびその形成方法ならびにcpp−gmr再生ヘッド |
JP2007115960A (ja) * | 2005-10-21 | 2007-05-10 | Toshiba Corp | 磁気抵抗効果素子の製造方法 |
JP2008004944A (ja) * | 2006-06-21 | 2008-01-10 | Headway Technologies Inc | 強磁性構造、スピンバルブ構造およびその製造方法、磁気抵抗効果素子およびその製造方法 |
JP2008091842A (ja) * | 2006-09-08 | 2008-04-17 | Tdk Corp | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011238932A (ja) * | 2010-05-11 | 2011-11-24 | Headway Technologies Inc | スピントランスファー発振器構造およびその製造方法 |
JP2013254957A (ja) * | 2012-06-07 | 2013-12-19 | Samsung Electronics Co Ltd | 磁気トンネリング接合シード膜、キャッピング膜、及びスペーサー膜物質 |
JP2014179428A (ja) * | 2013-03-14 | 2014-09-25 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
KR20200038331A (ko) * | 2013-03-15 | 2020-04-10 | 인텔 코포레이션 | 내장된 자기 터널 접합을 포함하는 로직 칩 |
KR102257931B1 (ko) * | 2013-03-15 | 2021-05-28 | 인텔 코포레이션 | 내장된 자기 터널 접합을 포함하는 로직 칩 |
KR101519767B1 (ko) * | 2013-12-31 | 2015-05-12 | 숙명여자대학교산학협력단 | 수직 자기 이방성을 가지는 비정질 강자성체 다층박막 |
KR20180038949A (ko) * | 2016-10-07 | 2018-04-17 | 삼성전자주식회사 | 스핀 전달 토크 응용에 이용 가능한 희석된 자유막 자기 접합을 제공하는 시스템 및 그 방법 |
KR102361086B1 (ko) * | 2016-10-07 | 2022-02-09 | 삼성전자주식회사 | 스핀 전달 토크 응용에 이용 가능한 희석된 자유막 자기 접합을 제공하는 시스템 및 그 방법 |
KR20190024544A (ko) * | 2017-08-28 | 2019-03-08 | 삼성전자주식회사 | 자기 접합부, 자기 메모리 및 자기 접합부를 제공하는 방법 |
KR102412195B1 (ko) | 2017-08-28 | 2022-06-22 | 삼성전자주식회사 | 자기 접합부, 자기 메모리 및 자기 접합부를 제공하는 방법 |
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