JP2009249265A - 窒素ドープシリコン単結晶の製造方法 - Google Patents
窒素ドープシリコン単結晶の製造方法 Download PDFInfo
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- JP2009249265A JP2009249265A JP2008102208A JP2008102208A JP2009249265A JP 2009249265 A JP2009249265 A JP 2009249265A JP 2008102208 A JP2008102208 A JP 2008102208A JP 2008102208 A JP2008102208 A JP 2008102208A JP 2009249265 A JP2009249265 A JP 2009249265A
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- single crystal
- nitrogen
- silicon single
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- melt
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- 239000013078 crystal Substances 0.000 title claims abstract description 149
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 112
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 112
- 239000010703 silicon Substances 0.000 title claims abstract description 112
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 166
- 239000002994 raw material Substances 0.000 claims abstract description 96
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 83
- 238000000034 method Methods 0.000 claims abstract description 27
- 238000007711 solidification Methods 0.000 claims abstract description 23
- 230000008023 solidification Effects 0.000 claims abstract description 23
- 239000000155 melt Substances 0.000 claims abstract description 9
- 239000002019 doping agent Substances 0.000 abstract description 31
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 description 27
- 229910052581 Si3N4 Inorganic materials 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 14
- 239000007791 liquid phase Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 238000005204 segregation Methods 0.000 description 5
- 239000007790 solid phase Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- YULMNMJFAZWLLN-UHFFFAOYSA-N C=C1CCCCC1 Chemical compound C=C1CCCCC1 YULMNMJFAZWLLN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000008710 crystal-8 Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
【解決手段】窒素ドープシリコン単結晶4を引き上げた後、ルツボ1内に残存する残存融液3aにシリコン原料8を供給して溶融し、この融液3から窒素ドープシリコン単結晶4を引き上げる。シリコン単結晶の育成の際、直前のシリコン単結晶の引き上げ終了時の固化率に基づいて、前記残存融液に供給するシリコン原料の量を設定し、シリコン単結晶中の窒素濃度を調整する。
【選択図】図4
Description
〔C〕S=k0〔C〕0(1−g)k0-1 ・・・(1)
〔C〕L=〔C〕0(1−g)k0-1 ・・・(2)
1a 石英ルツボ
1b 黒鉛ルツボ
2 ヒータ
3 原料融液
3a 残存融液
4 窒素ドープシリコン単結晶
5 引き上げ軸
6 支持軸
7 種結晶
8 シリコン原料
9 慣用の窒素ドーパント用原料
Claims (3)
- チョクラルスキー法により、窒素をドープされたシリコン単結晶を製造する方法であって、
シリコン単結晶を引き上げた後、ルツボ内に残存する残存融液にシリコン原料を供給して溶融し、この融液からシリコン単結晶を引き上げることを特徴とする窒素ドープシリコン単結晶の製造方法。 - 前記残存融液へのシリコン原料の供給、および前記シリコン単結晶の引き上げを複数回繰り返すことを特徴とする請求項1に記載の窒素ドープシリコン単結晶の製造方法。
- シリコン単結晶の育成の際、直前のシリコン単結晶の引き上げ終了時の固化率に基づいて、前記残存融液に供給するシリコン原料の量を設定し、シリコン単結晶中の窒素濃度を調整することを特徴とする請求項1または2に記載の窒素ドープシリコン単結晶の製造方法。
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JP2008102208A JP5262257B2 (ja) | 2008-04-10 | 2008-04-10 | 窒素ドープシリコン単結晶の製造方法 |
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JP2008102208A JP5262257B2 (ja) | 2008-04-10 | 2008-04-10 | 窒素ドープシリコン単結晶の製造方法 |
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JP2009249265A true JP2009249265A (ja) | 2009-10-29 |
JP5262257B2 JP5262257B2 (ja) | 2013-08-14 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6142054B1 (ja) * | 2016-03-03 | 2017-06-07 | 上海新昇半導體科技有限公司 | 単結晶シリコンを成長させる方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6741179B1 (ja) | 2020-02-18 | 2020-08-19 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08143392A (ja) * | 1994-11-21 | 1996-06-04 | Shin Etsu Handotai Co Ltd | 粒状原料の供給装置およびその供給方法 |
JPH09208368A (ja) * | 1996-02-08 | 1997-08-12 | Shin Etsu Handotai Co Ltd | 粒状シリコン原料の供給方法および供給管 |
JPH11263693A (ja) * | 1998-03-13 | 1999-09-28 | Shin Etsu Handotai Co Ltd | 単結晶引上げ装置の原料追加供給装置 |
JP2001332594A (ja) * | 2000-05-25 | 2001-11-30 | Shin Etsu Handotai Co Ltd | パーティクルモニター用単結晶シリコンウェーハの製造方法 |
JP2006069852A (ja) * | 2004-09-02 | 2006-03-16 | Shin Etsu Handotai Co Ltd | 炭素ドープシリコン単結晶の製造方法及び炭素ドープシリコン単結晶 |
JP2006169044A (ja) * | 2004-12-16 | 2006-06-29 | Shin Etsu Handotai Co Ltd | 単結晶の製造方法およびアニールウェーハの製造方法 |
JP2006315869A (ja) * | 2005-05-10 | 2006-11-24 | Sumco Corp | 窒素ドープシリコン単結晶の製造方法 |
JP2007191357A (ja) * | 2006-01-20 | 2007-08-02 | Sumco Corp | 単結晶製造管理システム及び方法 |
-
2008
- 2008-04-10 JP JP2008102208A patent/JP5262257B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08143392A (ja) * | 1994-11-21 | 1996-06-04 | Shin Etsu Handotai Co Ltd | 粒状原料の供給装置およびその供給方法 |
JPH09208368A (ja) * | 1996-02-08 | 1997-08-12 | Shin Etsu Handotai Co Ltd | 粒状シリコン原料の供給方法および供給管 |
JPH11263693A (ja) * | 1998-03-13 | 1999-09-28 | Shin Etsu Handotai Co Ltd | 単結晶引上げ装置の原料追加供給装置 |
JP2001332594A (ja) * | 2000-05-25 | 2001-11-30 | Shin Etsu Handotai Co Ltd | パーティクルモニター用単結晶シリコンウェーハの製造方法 |
JP2006069852A (ja) * | 2004-09-02 | 2006-03-16 | Shin Etsu Handotai Co Ltd | 炭素ドープシリコン単結晶の製造方法及び炭素ドープシリコン単結晶 |
JP2006169044A (ja) * | 2004-12-16 | 2006-06-29 | Shin Etsu Handotai Co Ltd | 単結晶の製造方法およびアニールウェーハの製造方法 |
JP2006315869A (ja) * | 2005-05-10 | 2006-11-24 | Sumco Corp | 窒素ドープシリコン単結晶の製造方法 |
JP2007191357A (ja) * | 2006-01-20 | 2007-08-02 | Sumco Corp | 単結晶製造管理システム及び方法 |
Non-Patent Citations (1)
Title |
---|
JPN6012006562; 深水克郎編: シリコン結晶・ウェーハ技術の課題 -大口径化,平坦化- , 19940131, p.32-34, リアライズ社 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6142054B1 (ja) * | 2016-03-03 | 2017-06-07 | 上海新昇半導體科技有限公司 | 単結晶シリコンを成長させる方法 |
JP2017154962A (ja) * | 2016-03-03 | 2017-09-07 | 上海新昇半導體科技有限公司 | 単結晶シリコンを成長させる方法 |
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