JP2009248195A - Workpiece holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently and easily perform a setup operation before and after machining and the attachment/detachment of a workpiece without damaging the workpiece in grinding and polishing the workpiece. <P>SOLUTION: A lens holding device H1 supports the rear surface of a receiving holder 3 for holding a lens to be worked 2 on a pressing holder 5 with an elastic body 6 interposed therebetween. The lens holding device comprises a projecting shaft 3b which projects from the rear surface of the receiving holder 3 and in which an air introduction passage 3 axially extends therethrough; an air introduction passage 5d so formed in the pressing holder 5 that the projecting shaft 3b is inserted thereinto; and a connection member 8 such as an O-ring 8a is so fitted to a diameter-reduced groove section 3m in the outer periphery of the projecting shaft 3b and a diameter-increased groove section 5m in the inner periphery of the air introduction passage 5d as to have the gap G therebetween. Since the receiving holder 3 and the pressing holder 5 are connected to each other through the connection member 8 in a non-restrained state, the receiving holder 3 is prevented from falling down. Since the device is vacuumed through the air introduction passage 3d as necessary, the lens to be worked 2 is sucked and fixed to the receiving holder 3. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a workpiece holding technology, and for example, to a lens holding technology used in an apparatus for grinding or polishing an optical element such as a lens.

For example, in a manufacturing process of an optical element such as a lens, polishing or grinding is performed as a processing method for forming a precise optical surface.
In the conventional lens grinding apparatus or polishing apparatus, there is a technology for processing the lens by fixing the shaft of the lens holding mechanism section and rotating and swinging the polishing dish while constantly pressing the tip end in the spherical direction. In these grinding apparatuses and polishing apparatuses, the lens holding mechanism is generally pressurized by a coil spring or the like.

As an example of a lens holding mechanism in this type of lens polishing apparatus, for example, a technique disclosed in Patent Document 1 is known.
That is, in Patent Document 1, a lower holder that holds the back surface of the lens to be polished via an elastic material, and an upper stage that supports the lower holder through the elastic material from the back side and a holder spindle is coupled to the back surface. A technique for constituting a polishing holder mechanism with a holder is disclosed.

  With this configuration, the pressure pressed by the holder spindle uniformly presses the entire lower holder through the elastic material of the upper holder, and further elastically presses the lens to be polished through the elastic material of the lower holder. By doing so, troubles such as rollover and dropping of the lens to be polished do not occur, and a good processed surface can be obtained.

  However, in the above-described prior art, since the separate upper and lower holders are simply stacked, the lens to be polished is stored in the lower holder before polishing and is polished on the polishing plate before each polishing operation. After placing the upper holder held on the holder spindle on top of it, it is necessary to align the axis of the holder spindle with the axis of the lower holder.

 In addition, the upper holder rises as the holder spindle rises due to the completion of polishing, but the upper holder and the lower holder that holds the lens to be polished are separate, so the lower holder and the lens to be polished are separated from the upper holder. There is a concern that the lens may fall off and damage the lens to be polished or the polishing dish, and the lens to be polished may be left on the polishing dish.

Therefore, it is expected that setup work such as attachment / detachment of the lens to be polished before and after the polishing process becomes very complicated and it is difficult to continue the processing work efficiently.
Japanese Examined Patent Publication No. 6-65460

  It is an object of the present invention to hold a workpiece that can efficiently and easily perform setup work before and after processing and attachment / detachment of a workpiece without causing damage to the workpiece in grinding or polishing of the workpiece. To provide technology.

The present invention includes a first holding member having a work holding portion for holding a workpiece,
A second holding member that supports the first holding member via an elastic body;
Engagement means for engaging the first holding member with the second holding member;
A communication path that is provided in the engagement means and communicates the space between the workpiece holding portion of the first holding member and the back surface of the workpiece to the outside of the second holding member;
A work holding device including the above is provided.

  According to the present invention, in the grinding or polishing of a workpiece, the workpiece holding capable of efficiently and easily performing setup work before and after the machining and detachment of the workpiece without causing damage to the workpiece. Technology can be provided.

  In the first aspect of the present embodiment, the lens to be processed is polished or ground by holding the lens to be processed, pressurizing in a direction parallel to the axis passing through the sphere center of the tool pan, and rotating and swinging the tool pan. In the lens holding device in the lens processing apparatus, the press holder for pressing the processed lens against the processing surface on which the processed lens and the tool plate are in contact, and the receiving holder for holding the processed lens And an elastic body attached to the presser holder.

An air introduction path is provided in each of the presser holder and the receiving holder, and the receiving holder and the lens to be processed can be vacuumed from outside.
There is a connecting member arranged with a slight gap between the presser holder and the receiving holder, and the receiving holder cannot be easily detached from the presser holder.

  The elastic body attached to the presser holder and the slope provided on the receiving holder face each other, and the slope of the receiving holder is elastically pressed through the elastic body attached to the presser holder.

  The inclined surface of the receiving holder is approximately 90 ° with respect to a line connecting the intersection of the tangent line on the outermost periphery of the lens to be processed and the central axis of the lens to be processed and the contact portion of the elastic body attached to the presser holder. Add an angle to become. The lens to be processed is pressed against the processing surface by the pressing holder through the elastic body and the receiving holder.

  In the second aspect of the present embodiment, the lens to be processed is polished by holding the lens to be processed, pressurizing in a direction parallel to the axis passing through the sphere center of the tool pan, and rotating and swinging the tool pan. Alternatively, in a lens holding device in a lens processing apparatus for grinding, a holder for pressing the processing lens against a processing surface on which the processing lens and the tool plate are in contact with each other and a receiver for holding the processing lens A holder and an elastic body attached to the receiving holder.

  The elastic body attached to the receiving holder and the inclined surface provided on the holding holder face each other, and the receiving holder is elastically pressed by the inclined surface of the holding holder through the elastic body attached to the receiving holder.

  The inclined surface of the press holder is approximately 90 ° with respect to a line connecting the intersection of the tangent line on the outermost periphery of the lens to be processed and the center axis of the lens to be processed and the contact portion of the elastic body attached to the press holder. Add an angle to become. The lens to be processed is pressed against the processing surface by the pressing holder through the elastic body and the receiving holder.

  According to the lens holding device of each aspect of the present embodiment, since the presser holder and the receiving holder are connected via the connecting member, the receiving holder is prevented from dropping from the presser holder, It is possible to reliably prevent damage to the lens to be processed and the tool pan held by the receiving holder due to the removal of the holder.

  In addition, before and after processing, the receiving holder and the lens to be processed are vacuum-sucked from the outside through the air introduction path, so that the press holder can be stably held integrally and the workpiece holding device can be processed. The lens can be attached and detached efficiently and easily.

  In addition, since the receiving holder and the lens to be processed are movable around the intersection of the tangent at the outermost periphery of the lens to be processed and the central axis of the lens to be processed, the working surface (particularly the outer periphery of the lens to be processed) Since it is applied in a direction that balances the rotational moment due to the frictional force generated in step 1, the forcible force that rotates the lens to be processed in different directions is not generated, and displacement and dropout are prevented and the lens to be processed is smooth. Can be rotated and the processing result can be stabilized.

  In other words, the work lens can sufficiently follow the various shapes of the tool, and by not generating a moment to rotate the work lens in a direction other than the direction following the work work surface, The pressure distribution is kept uniform, and the surface to be processed of the lens to be processed can be processed in a highly accurate state without uneven shape such as ass and habits.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[Embodiment 1]
FIG. 1 is a cross-sectional view showing an example of the configuration of a workpiece holding device according to an embodiment of the present invention, and FIG. 2 shows an example of the configuration of a polishing device to which the workpiece holding device of the present embodiment is attached. It is a perspective view shown.

In this embodiment, as an example of a work holding device, a case where the present invention is applied to a lens holding device used for polishing a lens to be processed will be described as an example.
As illustrated in FIG. 1, the lens holding device H1 of the present embodiment includes a receiving holder 3 (first holding member), an elastic body 4, a presser holder 5 (second holding member), an elastic body 6, and a connecting member. 8 (engagement means).

The lens holding device H1 holds the workpiece lens 2 (workpiece) and performs an operation of pressing the processing surface 2a of the processing lens 2 against the tool plate 1 on the side of the polishing device M described later.
The tool tray 1 is a polishing tool having a concave spherical surface obtained by attaching a resilient polishing sheet (not shown) to a base plate made of a cast iron or the like in a spherical shape and having a working surface 1a.

The processing target lens 2 includes a processing surface 2a as an optical functional surface made of a convex spherical surface, and a cylindrical outer peripheral surface 2b surrounding the processing surface 2a.
The processed lens 2 on which the processed surface 2a made of a convex spherical surface is polished is in contact with the processed surface 2a made of the convex spherical surface and the concave spherical surface (processing action surface 1a) of the tool plate 1, so that the tool plate 1 is in contact with it. Polishing is performed by relatively rotating and swinging.

Further, the processing surface 1a of the tool plate 1 may be additionally processed if the accuracy of its curvature radius is poor after a polishing sheet (not shown) is attached.
As described above, in the description of the present embodiment, the processing of the lens 2 to be processed will be described as an example, and the shape of the processing lens 2 to be processed with the tool plate 1 having a concave spherical shape. A case where is a convex spherical surface will be described.

In the lens holding device H1, the receiving holder 3 restrains the position of the lens 2 to be processed by fitting and holding the back surface of the lens 2 to be processed to the concave work holding portion 3h.
In the receiving holder 3, a frustoconical inclined surface 3k is formed on the entire outer periphery of the back surface on the opposite side of the work holding portion 3h.

  In this case, a projection shaft 3b (engagement means) is provided at the center of the receiving holder 3, and an air introduction path 3d (engagement means) (communication path) penetrating in the axial direction is formed on the projection shaft 3b. Has been. Further, a reduced diameter groove portion 3m is formed on the outer periphery of the protruding shaft 3b.

  An elastic body 4 such as a polishing sheet for holding the lens is attached to the inside of the work holding portion 3 h that receives the lens 2 to be processed on the lower surface of the receiving holder 3. The elastic body 4 elastically presses the lens 2 to be processed and prevents the receiving surface of the lens 2 to be processed (the surface opposite to the processing surface 2a) from being in direct contact with the receiving holder 3 and being damaged. By reducing the vibration generated from the tool plate 1 side during processing, the processing surface 2a of the processing lens 2 is prevented from cracking, chipping and surface roughness.

A presser holder 5 is provided on the back side of the receiving holder 3. The presser holder 5 includes a recess 5 a that restricts the movement of the receiving holder 3.
An elastic body holding portion 5b to which an elastic body 6 such as an O-ring is attached is formed on the inner peripheral portion of the lower surface of the concave portion 5a of the presser holder 5, and the outer peripheral portion of the receiving holder 3 is interposed via the elastic body 6. The inclined surface 3k provided in is elastically pressed.

  In addition, an air introduction path 5d (engagement) that opens through the presser holder 5 at a position where the above-described protrusion shaft 3b protruding from the back side of the support holder 3 is inserted at the center of the presser holder 5. Means) (communication path) and an enlarged-diameter groove 5m carved on the inner periphery of the air introduction path 5d.

  A holder spindle 7 is coaxially attached to the opening position of the air introduction path 5d at the center of the back surface of the presser holder 5, and the holder spindle 7 is held in a radial direction and a thrust direction by a bearing (not shown).

  The holder spindle 7 is provided with an air introduction path 7d in the axial direction so as to communicate with the air introduction path 5d of the presser holder 5. The air introduction path 7d is connected to a vacuum suction device (not shown). .

  The space formed by the reduced diameter groove portion 3m formed on the projection shaft 3b of the receiving holder 3 and the enlarged diameter groove portion 5m formed on the presser holder 5 is connected to an elastic body such as an O-ring 8a. A member 8 is arranged.

  The connecting member 8 is inserted into the enlarged diameter groove portion 5m provided on the inner periphery of the air introduction path 5d of the presser holder 5 while being deformed using elasticity. Next, the protruding shaft 3 b of the receiving holder 3 is inserted using the deformation of the connecting member 8.

  By assembling the presser holder 5 and the receiving holder 3 in this way, the receiving holder 3 is connected to the presser holder 5 via the connecting member 8, and does not come out with a force that is about the weight of the receiving holder 3, for example. This is the main function of the connecting member 8 in the present embodiment.

  During processing, the gap G is such that the connecting member 8 does not simultaneously contact the reduced diameter groove portion 3m of the projection shaft 3b on the receiving holder 3 side and the enlarged diameter groove portion 5m of the air introduction path 5d on the presser holder 5 side. The dimension of each part, such as the connection member 8, the reduced diameter groove part 3m, and the enlarged diameter groove part 5m, is set.

  The gap G between the connecting member 8 and the reduced-diameter groove portion 3m and the enlarged-diameter groove portion 5m secures the connection state of the receiving holder 3 and the presser holder 5 via the connecting member 8 while processing as described later. A relative free displacement of the receiving holder 3 with respect to the presser holder 5 is ensured.

The lens holding device H1 (hereinafter also simply referred to as a holder) configured as described above performs an operation of holding the workpiece lens 2 and pressing and pressing the lens 2 against the tool plate 1.
In this case, the inclined surface 3k of the receiving holder 3 is an intersection O2 between the tangent L1 at the outermost periphery a which is a point on the intersection line of the processed surface 2a and the outer peripheral surface 2b of the processed lens 2 and the central axis Lc of the processed lens 2. And an angle of about 90 ° with respect to a reference line L2 connecting the contact portion c to the inclined surface 3k of the elastic body 6 attached to the presser holder.

That is, the inclined surface 3k of the receiving holder 3 is formed at an angle at which a normal line (in this case, the reference line L2) passing through the contact portion c with the elastic body 6 passes through the intersection point O2.
Further, members such as the lens 2 to be processed, the receiving holder 3, the presser holder 5, and the elastic body 6 are held substantially symmetrically on the central axis (that is, the central axis Lc) of the holder spindle 7.

  An air introduction path 7d is formed in the holder spindle 7 and vacuum pressure generated by a vacuum suction device (not shown) is introduced, and the workpiece is processed through the air introduction path 5d of the presser holder 5 and the air introduction path 3d of the receiving holder 3. The lens 2 can be vacuum-sucked so as to be in close contact with the elastic body 4 of the holder 3, and the receiver holder 3 is also stably held with respect to the presser holder 5 by vacuum suction.

The lens holding device H1 configured in this way is attached to the polishing device to polish the lens.
FIG. 2 shows a typical example of the polishing apparatus M to which the lens holding device of the present embodiment can be attached.

  In the polishing apparatus M of FIG. 2, the lens holding device H <b> 1 of the present embodiment corresponds to the holder 121. The holder spindle 7 of the presser holder 5 is fixed to an upper shaft 122 described later, and the tool shaft 1 b of the tool plate 1 is fixed to the grindstone spindle 115.

  As illustrated in FIG. 2, the polishing apparatus M according to the first embodiment includes an apparatus main body 150, a swing plate 151 provided on the upper portion of the apparatus main body 150, and a lower plate provided below the swing plate 151, for example. The upper part is opened, the lower side part 161b is formed in an arc shape, and the grindstone rocking body 161 provided with the semicircular side plates 162, and the lower side part 161b of the grindstone rocking body 161 are integrally supported. 171.

  A grindstone motor 116 and a grindstone spindle 115 that is rotationally driven by the grindstone motor 116 are attached to the housing 171, and a tool plate 1 for spherical polishing is attached to the upper end of the grindstone spindle 115. The grindstone spindle 115 is set to rotate around an axis passing through the ball center 104.

The housing 171 further includes a swing motor 112 disposed along the Y-axis direction at a position adjacent to the grinding wheel motor 116.
On the other hand, a pair of support arms 164 arranged in parallel to support the grindstone rocker 161 by a pair of bearings 163 protrude from the apparatus main body 150, and further, below the pair of support arms 164. A fixed protrusion 180 having an arcuate rocking gear portion 181 for rocking the housing 171 is provided.

  Then, the gear 114 attached to the drive shaft of the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other, and the gear 114 rotated by the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other. The housing 171 and the grindstone rocking body 161 are swung in the arrow direction (around the Y axis) shown in FIG. 2 with the ball center 104 as the rocking center.

  The protruding end of the swing plate 151 provided on the upper part of the apparatus main body 150 includes a cylinder 120 along the Z-axis direction, an upper shaft 122 connected to a rod 120a that expands and contracts the cylinder 120, and a lower end portion of the upper shaft 122. A holder 121 attached to the lens is disposed, and the lens 2 to be processed is held by the holder 121. That is, the lens 2 to be processed can be displaced (vertically moved) in the Z-axis direction while being supported by the holder 121 by the operation of the cylinder 120 as a displacement mechanism for displacing the optical element in the vertical direction, and is pressed against the tool plate 1 It is possible.

  Further, the lens 2 to be processed is put into the receiving holder 3, and the lens 2 to be processed 2 is adsorbed to the holder 3 by using a vacuum suction device (not shown) using the air introduction paths of the holder spindle 7, the presser holder 5 and the receiving holder 3. be able to.

  Further, the base of the swing plate 151 is fixed to the apparatus main body 150 by a bearing box body 191, and the X axis (the axis in the X axis direction passing through the swing center of the base of the swing plate 151 is the center of the ball 104. And is driven by an X-axis oscillating motor 190 connected to the bearing box body 191. That is, the lens 2 to be processed can swing around the X axis while being supported via the swing plate 151, the upper shaft 122, and the holder 121.

  The polishing apparatus M of the first embodiment further includes a control device 106 that performs overall control, a grindstone rocking control unit 107 that is connected to the rocking motor 112, and an inverter for controlling the rotational speed of the grindstone motor 116. 108. The control device 106 also performs drive control of the X-axis swing motor 190 and the cylinder 120.

Next, a spherical polishing method for the lens 2 to be processed by the above-described polishing apparatus M will be described.
The lens 2 to be processed is received and attracted to the holder 3 by using a vacuum suction device (not shown) using the air introduction path 5d and the air introduction path 3d of the holder spindle 7, the holding holder 5, and the receiving holder 3, respectively.

  At this time, in the case of the present embodiment, the receiving holder 3 is engaged with the presser holder 5 supported by the holder spindle 7 via the connecting member 8, and therefore the receiving holder 3 and the lens 2 to be processed 2. Will not fall off.

  Next, the cylinder 120 is displaced (downwardly moved) in the Z-axis direction while being supported by the holder 121 and is pressed against the tool plate 1. At this time, the vacuum suction is stopped, and it is desirable that each introduction path be at atmospheric pressure.

  The tool plate 1 is rotationally driven via a grinding wheel spindle 115 driven by a grinding wheel motor 116. Further, the gear 114 rotates while meshing with the arcuate rocking gear portion 181 by the rotation of the rocking motor 112, whereby the tool plate 1 together with the housing 171 and the grindstone rocking body 161 is rotated around the ball center 104. Swing around the axis.

  On the other hand, the holder 121 holding the workpiece lens 2 is displaced downward along the Z axis by the extending operation of the rod 120a of the cylinder 120, and presses the workpiece lens 2 against the tool plate 1 with a constant pressing force. .

  Further, the processing lens 2 held by the holder 121 is in contact with the tool plate 1 while being in contact with the tool plate 1 in conjunction with the swing of the swing plate 151 driven by the X-axis swing motor 190. The center of curvature of the optical function surface (that is, the sphere center of the surface 2a to be processed) is made to coincide with the sphere center 104 of the tool plate 1 to swing around the X axis.

  In this way, the tool plate 1 swings around the Y axis around the spherical center 104, and the lens 2 to be processed swings around the X axis. A desired spherical polishing of the work surface 2a is performed by a relative sliding movement between the work surface 2a and the work surface 1a.

Next, the action of the lens holding device H1 (holding tool 121) of the first embodiment shown in FIG. 1 in such a polishing process will be described.
In the lens holding device H1 at the time of pressurization, the inclined surface 3k on the outer periphery of the upper surface of the receiving holder 3 has an intersection O2 between the tangent L1 at the outermost periphery a of the lens 2 to be processed and the center axis Lc of the lens 2 to be processed, and the presser. Since it is formed at an angle of about 90 ° with respect to the reference line L2 that connects the contact portion c between the elastic body 6 attached to the holder 5 and the inclined surface 3k, the outer peripheral portion of the upper surface of the receiving holder 3 during pressurization Since the inclined surface 3k has a movable structure around the intersection point O2, the machining fulcrum can be concentrated at one point of the intersection point O2.

  Accordingly, the rotational moment due to the frictional force generated on the processing surface 2a of the processing lens 2 (particularly the outer peripheral portion of the processing lens 2) is also applied only in a certain direction following the processing surface 1a of the tool pan 1. An unreasonable force that causes the processing lens 2 to rotate in different directions does not occur, and the processing target lens 2 stably held by the receiving holder 3 rotates smoothly, and the polishing result is also stabilized.

  Further, as described above, the gap G is provided around the connecting member 8 that engages the presser holder 5 and the receiving holder 3 so as not to contact the reduced diameter groove portion 3m and the enlarged diameter groove portion 5m at the same time. Since the displacement of the receiving holder 3 is not restrained with respect to the presser holder 5 during the processing of the lens 2 to be processed, the stable processing of the lens 2 to be processed is not hindered.

  After being processed in this manner, the air introduction path 5d and the air introduction path 3d are again sucked by vacuum through the air introduction path 7d, and the lens 2 to be processed is received and adsorbed to the holder 3. Next, the cylinder 120 is displaced (raised) in the Z-axis direction while being supported by the holder 121, and the lens 2 to be processed is detached from the tool plate 1.

  When the holder 121 is raised to a desired height, the workpiece lens 2 can be taken out of the receiving holder 3 by releasing the vacuum suction. Also at this time, the receiving holder 3 is elastically connected to the presser holder 5 by the connecting member 8 as described above, so that it does not fall off from the presser holder 5.

Therefore, the lens 2 to be processed can be attached and detached at a position where the holder 121 is raised to a desired height and the workability is good.
Further, in the processing, the shape accuracy and roughness of the processing surface 2a as the optical functional surface of the processing lens 2 are not deteriorated, and an obstacle such as the rollover or dropping of the processing lens 2 from the tool plate 1 hardly occurs.

  Further, since the connecting member 8 is an elastic body, even if the receiving holder 3 is inclined by a machining resistance so as not to contact the reduced diameter groove portion 3m and the enlarged diameter groove portion 5m at the same time, the shape accuracy of the surface 2a to be processed. The roughness does not deteriorate.

  Further, since the connecting member 8 is an elastic body, it is possible to easily disassemble and assemble the presser holder 5 and the receiving holder 3 by using the elastic deformation of the connecting member 8 without using a tool. It is possible to easily and quickly perform setup change and replacement work of the holding device H1.

That is, in grinding and polishing of a workpiece, the setup work before and after the machining and the attachment / detachment of the workpiece can be efficiently and easily performed without causing damage to the workpiece.
Furthermore, it is possible to perform automatic processing including setup work by linking the polishing apparatus M using the lens holding device H1 of the present embodiment and the supply / discharge device for the lens 2 to be processed (not shown).
[Embodiment 2]
FIG. 3 is a sectional view showing an example of a lens holding device as a workpiece holding device according to another embodiment of the present invention.

  In the lens holding device H2 of the second embodiment, the inclined surface 5k is provided on the presser holder 5 side, the elastic body 6 is held on the receiving holder 3 side, and the presser holder 5 has a reduced diameter groove portion 5p. A shaft 5e (engagement means) is provided, and an air introduction path 3d having a diameter-enlarged groove 3p is formed in the receiving holder 3, and a connecting member such as an O-ring 8a is provided between the diameter-reduced groove 5p and the diameter-enlarged groove 3p. 8 is different from the lens holding device H1 described above.

  Therefore, in the lens holding device H2 according to the second embodiment, the same components as those of the lens holding device H1 according to the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

  In the lens holding device H2 of Embodiment 2, in the receiving holder 3 for restraining the position of the lens 2 to be processed, an elastic body holding in which an elastic body 6 made of an O-ring or the like is attached to the outer peripheral portion of the upper surface thereof. An elastic body 4 such as a lens holding polishing sheet is attached to the inner surface of the work holding portion 3h that is formed with the portion 3a and receives the lens 2 to be processed on the lower surface.

  The presser holder 5 is provided with a recess 5a for restricting the movement of the receiving holder 3. A slope 5k is formed on the outer periphery of the recess 5a on the lower surface of the presser holder 5, and abuts against the elastic body 6 held on the receiving holder 3 side. And press. A holder spindle 7 is attached to the upper surface of the presser holder 5.

And by the lens holding device H2 comprised as mentioned above, the to-be-processed lens 2 is hold | maintained, and it presses and presses against the tool plate | board 1.
In this case, the inclined surface 5k of the presser holder 5 is in contact with the intersection O2 between the tangent L1 at the outermost periphery a of the lens 2 to be processed and the central axis Lc of the lens 2 to be processed, and the elastic body 6 attached to the receiving holder 3. It is formed at an angle of about 90 ° with respect to the reference line L2 connecting the portions c.

That is, the angle of the slope 5k is set so that the normal line (reference line L2) passing through the contact portion c with the elastic body 6 on the slope 5k passes through the intersection O2.
Further, in the lens holding device H2, a projection shaft 5e having a reduced diameter groove portion 5p is formed in the presser holder 5, a diameter expanded groove portion 3p is formed in the receiving holder 3, and a connecting member 8 of an O-ring 8a is disposed in a space therebetween. It has a configuration. There is a slight gap G between the connecting member 8 and the enlarged diameter groove portion 3p or the reduced diameter groove portion 5p, and the receiving holder 3 is not restrained by the presser holder 5 due to the elastic deformation of the gap G or the connecting member 8. .

Next, the operation of the lens holding device H2 of the second embodiment illustrated in FIG. 3 will be described.
As described above, the inclined surface 5k formed on the outer peripheral portion of the concave portion 5a on the lower surface of the press holder 5 of the lens holding device H2 is pressed with the tangent L1 at the outermost periphery a of the processed lens 2 when the lens 2 to be processed is pressed. An angle of about 90 ° is formed with respect to a reference line L2 that connects an intersection point O2 with the center axis Lc of the lens 2 to be processed and a contact portion c between the elastic body 6 attached to the receiving holder 3. .

For this reason, since the receiving holder 3 has a movable structure around the intersection O2 when the lens 2 to be processed is pressed, the processing fulcrum can be concentrated at one point of the intersection O2.
Therefore, the rotational moment due to the frictional force generated on the working surface 1a of the tool plate 1 (particularly the outer periphery of the lens 2 to be processed) is also applied only in a certain direction following the processing surface 1a. There is no excessive force to rotate in different directions, the lens 2 to be processed held by the receiving holder 3 rotates relatively smoothly with respect to the tool pan 1, and the polishing result of the processing surface 2a is also stable. To do.

  As described above, the air introduction path 7d is formed in the holder spindle 7, and a vacuum pressure generated by a vacuum suction device (not shown) is introduced, and the air introduction path 5d and the receiving holder 3 of the presser holder 5 of the lens holding device H2. The workpiece lens 2 can be vacuum-sucked through the air introduction path 3d.

  In the lens holding device H2 of the second embodiment, in addition to the operations and effects of the first embodiment, for example, the receiving holder 3 manufactured for each type of lens 2 to be processed has an air introduction path 3d. It is only necessary to pierce the hole, and the hole can be easily machined. The height of the receiving holder 3 can be reduced, and the manufacturing cost of the receiving holder 3 and the lens holding device H2 can be reduced.

[Embodiment 3]
Next, referring to FIG. 4, a lens holding device as a work holding device according to the third embodiment of the present invention will be described.

  In the lens holding device H3 according to the third embodiment, when the lens 2 to be processed is pressed against the tool plate 1 and pressed, the constituent elements of the engaging portion between the presser holder 5 and the receiving holder 3 are formed as spherical surfaces. The point that the washer-shaped member 8b is used as the connecting member 8 instead of the O-ring 8a is different from the above-described first and second embodiments, and other configurations and members are the same as those of the first embodiment. The same members are denoted by the same reference numerals, and descriptions of their configurations and operations are omitted.

The receiving holder 3 of the lens holding device H3 is provided to constrain the position of the lens 2 to be processed, and a convex spherical surface portion 3c is formed on the upper surface thereof.
On the other hand, the presser holder 5 includes a concave spherical surface portion 5 c that restricts the movement of the receiving holder 3 on the lower surface facing the receiving holder 3. An elastic body 6a made of a non-spherical sheet is attached to the concave spherical surface portion 5c of the presser holder 5, and the convex spherical surface portion 3c of the receiving holder 3 can be elastically held and pressed.

  When the lens 2 to be processed is pressed against the tool plate 1 by the lens holding device H3 configured as described above, the radius of curvature R3 of the concave spherical surface portion 5c of the presser holder 5 is the convexity of the receiving holder 3. The thickness dimension t of the elastic body 6a is adjusted so as to be equal to the sum of the curvature radius R2 of the spherical surface portion 3c and the thickness dimension t of the elastic body 6a.

  In FIG. 4, R1 is the radius of curvature of the working surface 1a of the tool plate 1, point O1 is the center of curvature of the radius of curvature R1 of the working surface 1a, and point O3 is the convex spherical portion 3c of the receiving holder 3. The curvature radius R2 and the curvature radius R3 of the concave spherical surface portion 5c of the presser holder 5 are set as the respective curvature centers.

  In the lens holding device H3 of the third embodiment, the point O3 that is the center of curvature of each of the curvature radius R2 of the convex spherical surface portion 3c of the receiving holder 3 and the curvature radius R3 of the concave spherical surface portion 5c of the presser holder 5 is processed. The position is set so as to substantially coincide with the intersection O2 between the tangent L1 at the outermost periphery a of the lens 2 and the center axis Lc of the lens 2 to be processed.

An air introduction path 3d is formed in the projecting shaft 3b projecting from the rear surface of the receiving holder 3 so as to penetrate in the axial direction, and a reduced-diameter groove 3m is provided on the outer periphery.
In addition, an air introduction path 5d into which the projection shaft 3b is inserted penetrates the presser holder 5, and a diameter expansion groove 5m is formed on the inner periphery of the air introduction path 5d.

  The connecting member 8 made of a washer-shaped member 8b is arranged in the space between the reduced diameter groove 3m of the projection shaft 3b of the receiving holder 3 and the increased diameter groove 5m of the presser holder 5. A slight gap G exists between the connecting member 8 and the reduced diameter groove portion 3m and the enlarged diameter groove portion 5m. The presser holder 5 and the receiving holder 3 are connected via the connecting member 8, and the receiving holder 3 is pressed. The displacement is not restrained with respect to the holder 5.

Next, the operation of the lens holding device H3 of the third embodiment will be described.
As described above, the radius of curvature R3 of the concave spherical portion 5c of the presser holder 5 is configured to be equal to the sum of the radius of curvature R2 of the convex spherical portion 3c of the receiving holder 3 and the thickness dimension t of the elastic body 6a. Therefore, when the work lens 2 is pressed against the tool plate 1, the spherical center (O3) of the convex spherical surface portion 3c of the receiving holder 3 coincides with the spherical center (O3) of the concave spherical surface portion 5c of the presser holder 5. The processing fulcrum of the tool plate 1 can be concentrated at one point O3.

  In addition, by making the spherical center O3 of the concave spherical surface portion 5c and the convex spherical surface portion 3c substantially coincide with the intersection O2 of the tangent L1 at the outermost periphery a of the lens 2 to be processed and the central axis Lc of the lens 2 to be processed, the processing action is performed. Since the rotational moment due to the frictional force generated on the surface 1a (particularly the outer peripheral portion of the lens 2 to be processed) is also applied only in a certain direction following the processing surface 1a, it is impossible to rotate the lens 2 to be processed in different directions. No special force is generated, and the lens 2 to be processed held by the receiving holder 3 rotates smoothly with respect to the tool plate 1, and the polishing result of the processing surface 2a is also stabilized.

  In the lens holding device H3 according to the third embodiment, the contact portions of the presser holder 5, the receiving holder 3, and the elastic body 6a are spherical surfaces (concave spherical surface portion 5c, convex spherical surface portion 3c). The processing fulcrum of the lens 2 can be concentrated on one point, and the effect of stably holding the lens 2 to be processed by the lens holding device H3 during polishing is great.

  An air introduction path 7d is formed in the holder spindle 7, and vacuum pressure generated by a vacuum suction device (not shown) is introduced, and the workpiece is processed via the air introduction path 5d of the presser holder 5 and the air introduction path 3d of the receiving holder 3. The lens 2 can be vacuumed.

  According to the lens holding device H3 of the third embodiment, in addition to the operations and effects of the first embodiment described above, for example, the presser holder 5 that needs to process the concave spherical surface portion 5c has the air introduction path 5d. The manufacturing cost of the presser holder 5 does not require complicated processing such as providing a protrusion structure such as a protrusion shaft on the spherical surface that obstructs the spherical surface processing of the concave spherical surface portion 5c. As a result, the entire manufacturing cost of the lens holding device H3 can be reduced.

[Embodiment 4]
Next, with reference to FIG. 5, a lens holding device as a work holding device according to the fourth embodiment of the present invention will be described.

  In the lens holding device H4 of the fourth embodiment, the connecting member 8 is not the O-ring 8a but a screw-like member 8c fixed to the presser holder 5, and the presser holder 5 is screwed to the holder spindle 7. It differs from the lens holding device H1 of the first embodiment described above in that it includes a spindle screwing portion 5f to be mated, and other configurations and members are the same as those of the first embodiment. The same reference numerals are given, and descriptions of their configurations and operations are omitted.

  That is, in the lens holding device H4 of the fourth embodiment, the spindle threaded portion 5f in which the air introduction path 5d is drilled in the axial direction is projected on the back side of the presser holder 5, and the spindle threaded portion 5f. By screwing a screw-like member 8c as a connecting member 8 from the side of the tube and fitting it into a reduced-diameter groove 3m provided on the projection shaft 3b of the receiving holder 3 inserted into the air introduction path 5d, The holder 3 is connected to the presser holder 5.

  There is a slight gap G between the tip of the screw-like member 8c as the connecting member 8 and the reduced diameter groove 3m of the receiving holder 3, and even if the receiving holder 3 is inclined due to processing resistance during processing, the receiving holder 3 and the presser holder 5 Does not touch. However, the receiving holder 3 is structured not to be removed from the presser holder 5 by fitting the screw-like member 8c into the reduced diameter groove 3m. That is, since it is fixed by the screw-like member 8c, it is possible to reliably prevent the receiving holder 3 from dropping from the presser holder 5.

  As described above, according to the lens holding device H4 of the fourth embodiment, the same effects as those of the lens holding device H1 of the first embodiment can be obtained, and the spindle screwing portion 5f is further provided in the presser holder 5. By providing, the lens holding device H4 can be easily attached to and detached from the holder spindle 7.

  As described above, according to the lens holding device of each embodiment of the present invention, the inclined surface or spherical surface provided in the presser holder 5 or the receiving holder 3 is provided in the receiving holder 3 or the presser holder 5 via the elastic body. The inclined surface or spherical surface is elastically pressed so that the workpiece lens 2 is held and pressed by the work holding portion 3h on the lower surface of the receiving holder 3, and the inclined lens or spherical surface is pressed by the workpiece lens 2 The processing fulcrum of the tool plate 1 with respect to the processing lens 2 can be concentrated at one point by substantially matching the intersection O2 of the tangent line L1 at the outermost periphery a of the lens and the center axis Lc of the processing lens 2. Since the rotational moment due to the frictional force generated in 1a is applied to the lens 2 only in a certain direction following the processing surface 1a, the lens 2 is moved in different directions. Excessive force for rotating does not occur, the uncut lens 2 can smoothly rotate relative to the tool disc 1, is also stable polishing result of the processed surface 2a.

  In other words, in grinding or polishing of a workpiece such as the lens 2 to be processed, it is possible to stably hold the workpiece without causing a positional shift or dropping of the workpiece and realize high-precision machining.

  An air introduction path is formed in the presser holder 5 and the receiving holder 3, and a connecting member 8 is provided so that a slight gap G is formed between the presser holder 5 and the receiving holder 3. The receiving holder 3 cannot be removed with some force. Furthermore, even if the receiving holder 3 is inclined with respect to the presser holder 5 due to the rotational moment generated in the processing, the connecting portion by the connecting members 8 does not come into contact with each other, so that the above-described high-precision processing is not hindered.

Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the connecting member 8 is not limited to the O-ring 8a, the washer-shaped member 8b, and the screw-shaped member 8c, and other types of coupling members may be used. Alternatively, the connecting member 8 may be omitted, and the protrusion shaft and the air introduction path may be directly fitted so as to form a desired gap G.

Further, the workpiece is not limited to an optical element such as a lens to be processed, but can be widely applied to general articles that require precision processing.
(Appendix 1)
A first holding member in which a slope is formed on the back side of the work holding unit for holding a workpiece and an air introduction path is provided;
A second holding member that supports the first holding member and provides an air introduction path via an elastic body that contacts the inclined surface of the first holding member;
A connecting member disposed with a slight gap between the first holding member and the second holding member;
Including
The inclined surface of the first holding member has an angle at which the normal of the contact position of the elastic body on the inclined surface passes through the intersection of the tangent line on the outermost periphery of the workpiece and the central axis of the workpiece. A workpiece holding device that is set.
(Appendix 2)
A first holding member that holds an elastic body on the back side of a work holding unit that holds a workpiece, and that is provided with an air introduction path;
A second holding member provided with an inclined surface contacting the elastic body held by the first holding member, supporting the first holding member via the inclined surface, and provided with an air introduction path;
A connecting member disposed with a slight gap between the first holding member and the second holding member;
Including
The inclined surface of the second holding member has an angle at which the normal of the contact position of the elastic member on the inclined surface passes through the intersection of the tangent line on the outermost periphery of the workpiece and the central axis of the workpiece. A workpiece holding device that is set.
(Appendix 3)
A first holding member in which a convex spherical surface is formed on the back side of the holding unit for holding the workpiece, and an air introduction path is provided;
A second holding member provided with a concave spherical surface that is in contact with the convex spherical surface of the first holding member via an elastic body, supporting the first holding member, and provided with an air introduction path;
A connecting member disposed with a slight gap between the first holding member and the second holding member;
Including
The workpiece holding device, wherein the centers of curvature of the convex spherical surface and the concave spherical surface are close to or coincident with an intersection of a tangent line on the outermost periphery of the workpiece and a central axis of the workpiece.
(Appendix 4)
In the workpiece holding device according to any one of appendix 1 to appendix 3,
The workpiece is a lens to be processed, holds the lens to be processed, pressurizes in an axial direction with an axis passing through the sphere center of the tool pan, and rotates the tool pan relative to the workpiece lens. And a workpiece holding device provided in a lens processing device for polishing or grinding the lens to be processed by swinging.

It is sectional drawing which shows an example of a structure of the workpiece holding apparatus which is one embodiment of this invention. It is a perspective view which shows an example of a structure of the grinding | polishing apparatus with which the workpiece | work holding | maintenance apparatus which is one embodiment of this invention is mounted | worn. It is sectional drawing which shows an example of the workpiece holding apparatus which is other embodiment of this invention. It is sectional drawing which shows an example of the workpiece holding apparatus which is further another embodiment of this invention. It is sectional drawing which shows an example of the workpiece holding apparatus which is further another embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Tool pan 1a Processing surface 1b Tool axis 2 Processing lens 2a Processing surface 2b Outer peripheral surface 3 Receiving holder 3a Elastic body holding part 3b Projection shaft 3c Convex spherical surface part 3d Air introduction path 3h Work holding part 3k Slope 3m Reduced diameter groove part 3p Expanded groove portion 4 Elastic body 5 Presser holder 5a Recessed portion 5b Elastic body holding portion 5c Concave spherical surface portion 5d Air introduction path 5e Projection shaft 5f Spindle threaded portion 5k Slope 5m Expanded groove portion 5p Reduced diameter groove portion 6 Elastic body 6a Elastic body 7 Holder spindle 7d Air introduction path 8 Connecting member 8a O-ring 8b Washer-shaped member 8c Screw-shaped member 104 Ball center 106 Controller 107 Grinding wheel swing control unit 108 Inverter 112 Swing motor 114 Gear 115 Grinding wheel spindle 116 Grinding wheel motor 120 Cylinder 120a Rod 121 Holder 122 Upper Shaft 150 Device Main Body 151 Oscillating Plate 16 Wheel rocking body 161b Lower side portion 162 Both side plates 163 Bearing 164 Support arm 171 Housing 180 Fixed protrusion 181 Arc-shaped rocking gear portion 190 X-axis rocking motor 191 Bearing box G Gap H1 Lens holding device H2 Lens holding device H3 Lens Holding device H4 Lens holding device M Polishing device

Claims (8)

A first holding member provided with a work holding part for holding a workpiece;
A second holding member that supports the first holding member via an elastic body;
Engagement means for engaging the first holding member with the second holding member;
A communication path that is provided in the engagement means and communicates the space between the workpiece holding portion of the first holding member and the back surface of the workpiece to the outside of the second holding member;
A work holding device comprising: The work holding apparatus according to claim 1,
The work holding apparatus, wherein the second holding member is supported by a drive shaft, and the communication passage is connected to a vacuum suction passage formed in the drive shaft. The work holding apparatus according to claim 1,
The engaging means includes
A projecting shaft that protrudes on the side of the first holding member facing the second holding member, and in which a first air introduction path as the communication path penetrates in the axial direction;
A second air introduction path as the communication path, penetrating through the second holding member at a position where the protruding shaft is inserted;
A fitting member fitted to the reduced diameter portion of the protruding shaft and the enlarged diameter portion of the second air introduction path;
A work holding device comprising: The work holding apparatus according to claim 1,
The engaging means includes
A projecting shaft that protrudes on the side facing the first holding member of the second holding member, and in which a first air introduction path as the communication path penetrates in the axial direction;
The first holding member is formed by penetrating through the position where the protruding shaft is inserted, and a second air introduction path as the communication path;
A fitting member fitted to the reduced diameter portion of the protruding shaft and the enlarged diameter portion of the second air introduction path;
A work holding device comprising: The work holding apparatus according to claim 1,
The first holding member is formed with a slope on the back side of the work holding portion,
The second holding member supports the first holding member via the elastic body that contacts the inclined surface of the first holding member,
The inclined surface of the first holding member has an angle at which the normal of the contact position of the elastic body on the inclined surface passes through the intersection of the tangent line on the outermost periphery of the workpiece and the central axis of the workpiece. A workpiece holding device that is set. The work holding apparatus according to claim 1,
The first holding member includes an elastic body holding portion that holds the elastic body on a back side of the work holding portion,
The second holding member includes a slope contacting the elastic body held by the first holding member, and supports the first holding member via the slope.
The inclined surface of the second holding member has an angle at which the normal of the contact position of the elastic body on the inclined surface passes through the intersection of the tangent line on the outermost periphery of the workpiece and the central axis of the workpiece. A workpiece holding device that is set. The work holding apparatus according to claim 1,
The first holding member is formed with a convex spherical surface on the back side of the work holding portion,
The second holding member that supports the first holding member includes a concave spherical surface that is in contact with the convex spherical surface of the first holding member via the elastic body,
The workpiece holding device, wherein the centers of curvature of the convex spherical surface and the concave spherical surface are close to or coincident with an intersection of a tangent line on the outermost periphery of the workpiece and a central axis of the workpiece. In the workpiece holding device according to any one of claims 1 to 7,
The workpiece is a lens to be processed, holds the lens to be processed, pressurizes in an axial direction of an axis passing through the sphere center of the tool pan, and rotates the tool pan relative to the workpiece lens. And a workpiece holding device provided in a lens processing device for polishing or grinding the lens to be processed by swinging.