JP2010188438A - Workpiece holder and polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece holder capable of realizing highly accurate polishing with no maintenance for a long time without being influenced by a size of a workpiece. <P>SOLUTION: In this workpiece holder H1, wherein a stick 1 is connected to a back face of a holder 5 holding a lens 3 via a stick ball 22 and is tiltably held, an air passage 10 and an air passage 5e for applying a positive pressure air 13 and a negative pressure air 14 are provided to the stick 1 and the holder 5, and a groove-shaped air storage 8 is provided around the stick ball 22. A check valve 16 is arranged to the air passage 5e of the holder 5. In transporting the lens 3, the negative air 14 is applied to a workpiece holding recessed part 5a through the air passage 10 and the air passage 5e, so as to adsorb and hold the lense 3. In processing, the positive air 13 is introduced to the groove-shaped air storage 8, so as to reduce friction resistance by making the stick ball 2 floated from the holder 5. Therefore, the holder 5 holding the lens 3 rotates following a polishing plate 4 reliably. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a work holder and a polishing apparatus.

  In general, as a method for surface finishing of optical elements such as lenses, prisms, mirrors, etc., an object to be polished (hereinafter collectively referred to as a lens) and an elastic tool for polishing (pitch, polyurethane pad, polisher, A polishing process is used in which the surface irregularities of the lens are removed with polishing abrasive grains interposed at the interface.

This polishing method is used not only for lenses but also for processing glass panels of display devices such as semiconductors, glass hard disks, and liquid crystal televisions.
In such a polishing method in which a workpiece is worn by pressurization and rubbing to perform processing, there are still many manufacturing forms that depend on human skill for setting-up work for ensuring the shape accuracy of the polished surface. In particular, it is difficult to polish evenly, that is, to promote wear of the object to be polished evenly.

  Patent Document 1 shown in FIG. 4 discloses a polishing machine for performing a grinding process for finishing a spherical surface with a polishing plate 131 in order to increase the accuracy of the created spherical shape in the process of manufacturing a glass lens.

  Specifically, the guide cylinder 123 and the pulley 125 are provided on the swing arm 129 that supports the upper shaft 121, and the balance weight 122 that moves up and down the guide cylinder 123 is connected to the upper shaft via the balance wire 124 and the pulley 125. 121 is connected to the upper end of 121.

  The upper shaft 121 is integrated with the piston of the upper shaft cylinder portion 126 and penetrates the upper shaft cylinder portion 126, and the lens 130 is held at the lower end portion (lens axis B) via the Kanzashi 133 and the lens holder 132. ing.

  Then, by supplying and discharging fluid pressure to and from the air port 127 and the upper shaft raising air port 128 in the upper shaft cylinder portion 126, it is possible to freely control the pressing force W against the polishing plate 131 of the lens 130 supported by the kanzashi 133. Is.

  Then, while rotating the polishing plate 131 supported by the polishing plate shaft C, the lens 130 is brought into contact with the polishing plate 131 and pressurized from above via the Kanzashi 133, and the polishing plate 131 is swung by the swing arm 129. Polishing is performed with the center O as a fulcrum.

  However, in the polishing machine disclosed in Patent Document 1, polishing is performed while the lens 130 is driven and rotated with respect to the polishing dish 131 by frictional resistance generated between the lens 130 and the polishing dish 131. Since the frictional resistance to be generated is small, the frictional force generated between the Kanzashi 133 and the lens holder 132 is lost and the driven rotation is stopped. Therefore, there is a technical problem that only a large-diameter lens having a high frictional resistance can be polished.

  In addition, in the configuration of Patent Document 1, since the Kanzashi 133, the lens holder 132, and the lens 130 are separate structures, the lens 130 cannot be grasped and conveyed up and down without the assistance of an operator, and automation is not possible.

  Further, when processing is performed while applying an abrasive with the configuration of the polishing machine of Patent Document 1, the lens holder 132 is worn by the abrasive and a play occurs between the lens holder 132 and the lens processing accuracy.

JP-A-8-39425

  An object of the present invention is to provide a technology capable of realizing high-precision polishing without being affected by the size of a workpiece and without maintenance for a long time.

According to a first aspect of the present invention, there is provided a holder including a work holding unit for holding a work,
Kanzashi connected to the holder via a Kanzashi sphere;
A first fluid passage drilled through the Kanzashi and the Kanzashi sphere in an axial direction;
A second fluid passage that is drilled in the holder and communicates the work holding portion and the first fluid passage;
A check valve that is disposed in the second fluid passage and selectively allows fluid to pass in a direction in which the workpiece is sucked into the workpiece holding portion;
A fluid reservoir provided between the Kanzashi sphere and the holder and communicating with the first fluid passage;
A work holder provided with

A second aspect of the present invention is a polishing apparatus including a polishing tool and a work holder that holds the work and presses the polishing tool.
The work holder is
A holder having a work holding part for holding the work;
Kanzashi connected to the holder via a Kanzashi sphere;
A first fluid passage drilled through the Kanzashi and the Kanzashi sphere in an axial direction;
A second fluid passage that is drilled in the holder and communicates the work holding portion and the first fluid passage;
A check valve that is disposed in the second fluid passage and selectively allows fluid to pass in a direction in which the workpiece is sucked into the workpiece holding portion;
A fluid reservoir provided between the Kanzashi sphere and the holder and communicating with the first fluid passage;
A polishing apparatus comprising:

  ADVANTAGE OF THE INVENTION According to this invention, the technique which can implement | achieve highly accurate grinding | polishing without a long-time maintenance without being influenced by the size of a workpiece | work can be provided.

It is a schematic sectional drawing which shows an example of a structure of the grinding | polishing apparatus provided with the work holder which is one embodiment of this invention. It is a schematic sectional drawing which shows an example of a structure of the grinding | polishing apparatus provided with the modification of the work holder which is one embodiment of this invention. It is a schematic sectional drawing which shows an example of a structure of the grinding | polishing apparatus provided with the modification of the work holder which is other embodiment of this invention. It is a conceptual diagram which shows the grinding machine of a prior art.

  In the first aspect of the present embodiment, in a work holder provided in a polishing machine that polishes an optical element such as a lens, an air introduction port provided inside a Kanzashi that holds the work, and a space between the Kanzashi sphere at the tip of the Kanzashi and the holder. A labyrinth seal that increases the internal pressure to prevent the entry of abrasives by providing it in the gap between the Kansai system and the upper part of the holder, and a check valve for the introduced air provided inside the holder are provided. The configuration is illustrated.

  According to the first aspect, when a lens as a workpiece is conveyed up and down, if negative pressure air is introduced into the air introduction port, the negative pressure air passes through the inside of the kanzashi and passes through the check valve. Since the lens acts so as to be attracted to the holder via the cushioning material, the lens can be automatically conveyed while being held in the holder without requiring the assistance of an operator.

In this state, the holder is lowered and the lens is pressed against the polishing dish.
Next, if positive pressure air is introduced into the air inlet, the positive pressure air passes through the inside of the Kanzashi and reaches the Kanzashi sphere, but the air to the lens is blocked by the check valve in the holder.

  For this reason, positive pressure air introduced from the outside flows into the gap between the Kanzashi sphere and the holder, and air can accumulate in the groove-shaped air pocket, so that the Kanzha sphere rises from the holder and there is no rotational resistance. On the other hand, even a slight torque can be rotated. As a result, even when the diameter of the lens is relatively small and the frictional resistance between the polishing dish and the lens is small, it is possible to reliably rotate the lens with respect to the polishing dish during processing.

  Even if processing is performed while applying an abrasive to the holder, the inside of the labyrinth seal provided at the connection portion between the holder and the Kanzashi is positive pressure by positive pressure air introduced from the outside. It is possible to prevent the abrasive from entering the portion.

In addition, as a second aspect, in the first aspect described above, a groove-shaped air reservoir composed of a groove carved on the side of the Kanzashi sphere or the holder can be provided as the air reservoir.
As a third aspect, in the first aspect described above, a hole-type air reservoir provided on the side of the Kanzashi sphere can be provided as the air reservoir.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a schematic cross-sectional view showing an example of the configuration of a polishing apparatus provided with a work holder according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view showing an example of the configuration of a polishing apparatus provided with a modification of the work holder according to one embodiment of the present invention.
In FIG. 1, description will be made assuming that the vertical direction is the Z direction, the horizontal direction is the X direction, and the direction perpendicular to the paper surface is the Y direction.

In the present embodiment, as an example, the Z direction is the vertical direction, and the X direction and the Y direction are the horizontal direction.
(Constitution)
As illustrated in FIG. 1, the polishing apparatus M <b> 1 of the present embodiment has a polishing dish 4 (polishing tool) arranged in the vertical direction and a lens 3 (work) with respect to the polishing dish 4. A work holder H1 for holding and pressing is provided.

  The work holder H1 is supported by a three-dimensional moving mechanism and a swinging mechanism (not shown), can hold the lens 3 and can arbitrarily move in each of the X, Y, and Z directions. The lens 3 can be swung relative to the polishing dish 4 inside.

The polishing dish 4 is coaxially fixed to a tool shaft 4a provided in the vertical direction, and is configured to rotate by being supported by the device housing 4b of the polishing device M1 via the tool shaft 4a.
On the other hand, the work holder H <b> 1 according to the present embodiment includes a Kansas system 9, a Kanzashi 1, a holder 5, and a Kanzashi receiving nut portion 6.

  The Kanza system 9 is arranged in the vertical direction, and an air passage 12 (first fluid passage) is bored in the axial direction from the lower end side to the upper end side of the Kanza system 9. Is opened as an air inlet 12a (first fluid passage) on the side surface of the Kansai system 9.

At the lower end side of the air passage 12 of the Kanza system 9, the upper end portion of the Kanzaki 1 is coaxially press-fitted and fixed.
A Kanzashi sphere 2 is coaxially and integrally provided on the lower end side of the Kanzashi 1.

  In this case, an air passage 10 (first fluid passage) penetrating in the axial direction (Z direction) is formed in the Kanzashi 1 and the Kanzashi sphere 2, and this air passage 10 is connected to the air passage 12 of the Kanza system 9. It communicates with the same axis.

The Kanzashi 1 supports the holder 5 via the Kanzashi sphere 2 so as to be tiltable with respect to the Z direction with respect to the Kanzashi 1.
The holder 5 is provided with a workpiece holding recess 5a (work holding portion) on the lower surface facing the polishing dish 4, and is opposite to the processing surface 3a of the lens 3 via a cushioning material 7 arranged inside the workpiece holding recess 5a. The side rear surface 3b is held.

In the holder 5, a Kanzashi receiving seat 5 b is projected from the center of the back surface opposite to the work holding recess 5 a.
A spherical sliding surface 5c is provided at the position of the Kanzashi seat 5b.

  An air passage 5e (second fluid passage) is formed in the central portion of the spherical sliding surface 5c so as to be coaxial with the air passage 10 of the kanzashi 1 in the Z direction, and a lower end portion of the air passage 5e. Is opened on the back surface of the cushioning material 7 in the workpiece holding recess 5a.

A screw portion 5f is engraved on the outer periphery of the Kanzashi receiving seat 5b, and a Kanzashi receiving nut portion 6 is screwed to the screw portion 5f via the screw portion 6d.
The Kanzashi receiving nut portion 6 is formed with a Kanzashi insertion hole 6a through which the Kanzashi 1 is inserted, and a spherical sliding surface 6b made of a non-spherical surface formed so as to be coaxial with the Kanzashi insertion hole 6a.

  Then, in a state where the kanzashi 1 is inserted into the kanzashi insertion hole 6a, the kanzashi receiving nut portion 6 is screwed into the holder 5, and the spherical sliding surface 5c of the kanzashi receiving seat 5b and the spherical sliding surface 6b of the kanzashi receiving nut portion 6 are used. Is slidably contacted with the Kanzashi sphere 2, so that the holder 5 is supported so as to be tiltable with respect to the Kanzashi 1 (Kansa system 9) in the Z direction and to freely rotate with respect to the Kanzashi 1 around the Z direction. The

  A groove 5d and a groove 6c are respectively formed on the spherical sliding surface 5c of the Kanzashi receiving seat 5b in contact with the Kanzashi ball 2 and the spherical sliding surface 6b of the Kanzashi receiving nut portion 6 so as to form a grooved air pocket 8 ( Fluid reservoir).

  The groove-shaped air reservoir 8 communicates with the air passage 10 of the kanzashi 1 and the kanzashi insertion hole 6a through which the kanzashi 1 is inserted through a gap between the kanzashi sphere 2, the spherical sliding surface 5c, and the spherical sliding surface 6b. Yes.

  A taper valve seat portion 17 having a through hole 17a is press-fitted into the air passage 5e of the holder 5 communicating with the air passage 10 of the kanzashi 1 from the lower end side, and a breathable porous body is formed on the upper end side of the air passage 5e. A porous bush 15 made of a body is press-fitted and arranged.

  Furthermore, a floating spherical valve body 16a is disposed in the air passage 5e between the taper valve seat portion 17 and the porous bush 15. The air passage 5e is moved from the lower work holding recess 5a to the upper Kanzashi ball. The check valve 16 that allows the fluid to pass only in the direction toward 2 is configured.

  That is, when the positive pressure air 13 (fluid) is about to flow downward from the side of the Kanzashi sphere 2 in the air passage 5e, the check valve 16 has the spherical valve body 16a in close contact with the tapered valve seat portion 17. Then, the air passage 5e is closed by closing the through hole 17a.

  On the other hand, the check valve 16 is a spherical valve when negative pressure air 14 (fluid) acts on the air passage 5e to cause air to flow from the workpiece holding recess 5a side to the upper Kanzashi bulb 2 side. The body 16a floats from the taper valve seat 17 and opens the through hole 17a, and the lens 3 and the buffer material 7 held in the work holding recess 5a are sucked through the air passage 5e.

  On the other hand, a seal space 9a is formed in the lower end portion of the Kanza system 9 opposite to the Kangusi receiving nut portion 6 so as to be coaxial with the Kanzaki 1 and the lower end portion of the Kanza system 9 constitutes a thin seal fin 9b. is doing.

  Further, in the Kanzashi receiving nut portion 6, a cylindrical seal fin 6e is provided around the Kanzashi insertion hole 6a through which the Kanzashi 1 is inserted, and is coaxially provided with the Kanzashi insertion hole 6a. It is inserted into the seal space 9a on the side of the stay 9, and is fitted in a non-contact manner over the entire circumference with a predetermined gap with the seal fin 9b.

  And the labyrinth seal 11 which protects the insertion part of the Kanzashi 1 with respect to the Kanzashi insertion hole 6a in the Kanzashi receiving nut part 6 from the seal fin 6e of the Kanzashi receiving nut part 6 and the seal fin 9b of the Kanzashi system 9 is comprised. ing.

(Function)
Hereinafter, an example of the action of the polishing apparatus M1 provided with the work holder H1 of the present embodiment will be described.

First, when holding the lens 3 in the holder 5 of the work holder H1 and transporting it in the three-dimensional space of XYZ, the negative pressure air 14 is introduced into the air inlet 12a.
As a result, the negative pressure air 14 acting on the air introduction port 12a passes through the air passage 12 and the air passage 10 in the Kanzashi 1 and the air passage 5e of the holder 5, and the spherical valve body 16a of the check valve 16 is negatively pressurized. The air passage 5e is opened by being lifted from the taper valve seat portion 17 and pressed against the porous bush 15, and the workpiece holding recess 5a is in communication with the air passage 12. As a result, the workpiece holding recess 5a is negatively affected by the negative pressure air 14. The pressure (negative pressure) state is established, and the lens 3 is sucked and held in the work holding recess 5 a of the holder 5 through the buffer material 7.

In this state, the work holder H1 is lowered in the Z direction, and the lens 3 is pressed against the polishing dish 4 that is rotationally driven by the tool shaft 4a.
Next, by introducing the positive pressure air 13 into the air introduction port 12a, the positive pressure air 13 passes through the air passage 12 of the Kanza system 9, the air passage 10 inside the Kanzashi 1, and the air passage 5e of the holder 5. The spherical valve body 16a of the check valve 16 is pressed against the taper valve seat portion 17 to block the air passage 5e.

  Thereby, the positive pressure air 13 to the lens 3 of the holder 5 through the air passage 5e is cut off, and the positive pressure air 13 flows into the gap between the Kanzashi sphere 2 and the holder 5 and the Kanzashi receiving nut portion 6 to form the groove-shaped air. Since the air can be retained in the reservoir 8, the Kanzashi sphere 2 floats in a non-contact manner with respect to the spherical sliding surface 5c and the spherical sliding surface 6b of the holder 5 and the Kanzashi receiving nut portion 6, and the friction resistance is eliminated. 1 (Kanshi sphere 2) can be rotated and tilted lightly with low resistance, and the lens 3 can be driven and rotated with respect to the polishing dish 4 during processing.

In this state, the polishing dish 4 is rotated, whereby the lens 3 held by the holder 5 is polished or ground.
That is, when the diameter of the lens 3 is relatively small, the driven rotational torque received by the lens 3 from the polishing dish 4 is relatively small. However, in the case of the polishing apparatus M1 of the present embodiment, as described above. Since the holder 5 in the work holder H1 is supported by the Kanzashi sphere 2 with a very low frictional resistance against the Kanzashi 1, the lens 3 held by the holder 5 even when the diameter of the lens 3 is small. Rotates following the polishing dish 4 during processing, and a good processing result is obtained.

That is, in the case of the polishing apparatus M1 of the present embodiment, good polishing results can be obtained with the lens 3 having various dimensions in a wide range from the large diameter to the small diameter.
Even if processing is performed while supplying a polishing agent (not shown) to the polishing plate 4 and the lens 3, the seal space 9 a inside the labyrinth seal 11 remains in the air passage 12, the air passage 10, the kanzashi sphere 2 and the holder 5. Further, the positive pressure air 13 supplied through the gap between the Kanzashi receiving nut portion 6 is maintained at a positive pressure, and it is effective for the abrasive to enter the connecting portion between the Kanzashi ball 2 and the holder 5 and the Kanzashi receiving nut portion 6. It can be prevented.

  As a result, wear of the sliding portion of the Kanzashi sphere 2 and the holder 5 and the Kanzashi receiving nut portion 6 due to the abrasive is prevented, and the holding accuracy of the holder 5 by the Kanzashi 1 is prevented from being lowered, and the holder 5 (lens 3) is removed. The Kanzashi 1 can be held with high accuracy, and the processing accuracy of the lens 3 by the polishing dish 4 is improved.

Furthermore, the frequency of complicated maintenance and management work such as disassembling and cleaning the Kanzashi 1 and the holder 5, the Kanzashi receiving nut portion 6 and the like of the work holder H1 is greatly reduced.
In other words, high-precision polishing can be realized without being affected by the size of the workpiece such as the lens 3 and without maintenance for a long time.
(effect)
According to the polishing apparatus M1 provided with the work holder H1 of the present embodiment, the lens 3 can be held without the assistance of an operator, for example, by suction by supplying negative pressure air 14 to the holder 5 of the work holder H1. The lens 3 held by the holder 5 can be automatically transported.

  Further, even when processing a small-diameter lens 3 having a small frictional resistance, since the frictional resistance between the Kanzashi sphere 2 and the holder 5 and the Kanzashi receiving nut portion 6 is eliminated, the holder 5 is lightly driven with respect to the Kanzashi 1. Rotation and tilting are possible, and high-precision processing of the small-diameter lens 3 is possible.

  Further, by introducing the positive pressure air 13 into the seal space 9a through the labyrinth seal 11 and the air passage 12, the air passage 10, etc., the abrasive is treated with the Kanzashi ball 2, the holder 5, and the Kanzashi receiving nut portion 6 during processing. Therefore, it is possible to provide a work holder H1 that can be polished without maintenance for a long time.

That is, it is possible to provide the work holder H1 and the polishing apparatus M1 that can polish the small-diameter lens 3 with high accuracy and without maintenance for a long time.
FIG. 2 is a schematic cross-sectional view showing a configuration example of a polishing apparatus M2 provided with a work holder H2 which is a modification of the work holder H1 of the present embodiment.

  In the case of the work holder H2 and the polishing apparatus M2 of the modified example illustrated in FIG. 2, the groove 2a is engraved on the surface of the kanzashi sphere 2 so as to function as the above-described grooved air reservoir 8. Unlike the holder H1 and the polishing apparatus M1, the other configurations are the same.

  In the case of the work holder H2 and the polishing apparatus M2 of this modified example, the same effects as those of the work holder H1 and the polishing apparatus M1 described above can be obtained, and further, instead of the holder 5 and the Kanzashi receiving nut portion 6, Since the groove-shaped air pocket 8 can be realized by concentrating and engraving the groove 2a, there is an advantage that the machining and configuration of the work holder H1 can be simplified.

(Embodiment 2)
FIG. 3 is a schematic cross-sectional view showing an example of a configuration of a polishing apparatus provided with a work holder according to another embodiment of the present invention.
(Constitution)
In the polishing apparatus M3 provided with the work holder H3 illustrated in FIG. 3, a plurality of through holes 2b are formed in a radial manner so as to communicate with the Kanzashi sphere 2 of the Kanzashi 1 so as to cross the air passage 10. Unlike the work holder H1 and the polishing apparatus M1 described above, the other configurations are the same in that they function as the shaped air reservoir 18 (fluid reservoir).

  In the case of this work holder H3, since the hole-shaped air reservoir 18 including the through hole 2b is directly connected to the air passage 10, the positive pressure air 13 introduced into the air passage 10 through the air passage 12 from the air introduction port 12a. However, it becomes easy to flow into the gap between the surface of the Kanzashi sphere 2 and the spherical sliding surface 5 c of the holder 5 and the spherical sliding surface 6 b of the Kanzashi receiving nut portion 6 via the hole-shaped air reservoir 18.

As a result, there is an advantage that the Kanzashi sphere 2 can be more reliably brought into a low-friction floating state with respect to the holder 5 and the Kanzashi receiving nut portion 6.
In addition, there is no need to process a groove or the like on the spherical sliding surface 5c of the holder 5 or the spherical sliding surface 6b side of the Kanzashi receiving nut portion 6, and the advantage that the manufacture and structure of the work holder H3 can be simplified. There is also.

(Function)
In the case of this work holder H3, when the lens 3 is conveyed, the negative pressure air 14 is introduced into the air introduction port 12a as in the case of the above-described work holder H1. 10, the check valve 16 is opened, and the lens 3 is sucked and held on the holder 5 through the cushioning material 7 so that the work holding recess 5 a of the holder 5 becomes negative pressure.

In this state, the work holder H3 is lowered and the lens 3 held by the holder 5 is pressed against the polishing dish 4.
Next, if the positive pressure air 13 is introduced into the air introduction port 12 a, the positive pressure air 13 passes through the air passage 10 in the Kanzashi 1 and presses the spherical valve body 16 a of the check valve 16 against the taper valve seat portion 17. Then, the air passage 5e of the holder 5 is closed, and the outflow of the positive pressure air 13 to the workpiece holding recess 5a where the lens 3 is located is blocked.

  At the same time, the positive pressure air 13 introduced into the air passage 10 flows into the gap between the Kanzashi sphere 2 and the holder 5 through the hole-shaped air reservoir 18 formed of the through hole 2b provided directly connected to the air passage 10, Thereby, the Kanzashi sphere 2 floats with respect to the holder 5 and the Kanzashi receiving nut part 6, and there is no frictional resistance, and the holder 5 can be rotated and tilted lightly with respect to the Kanzashi 1.

As a result, even in the case of the small-diameter lens 3, the driven rotation of the lens 3 with respect to the polishing dish 4 can be performed during processing, and high-precision polishing can be performed.
Further, even if the polishing plate 4 and the lens 3 are processed while applying a polishing agent (not shown), the positive pressure air 13 introduced through the air passage 10 causes the hole-shaped air reservoir 18, the kanzashi sphere 2 and the holder 5 to move. By flowing into the seal space 9a through the gap, the seal space 9a inside the labyrinth seal 11 is at a positive pressure, and the abrasive enters the sliding portion of the kanzashi sphere 2 with respect to the holder 5 and the kanzashi receiving nut portion 6. Can be prevented.
(effect)
Since the lens 3 can be sucked and held in the work holding recess 5a of the holder 5 by the action of the negative pressure air 14 through the air passage 10 or the like provided in the Kanzashi 1 of the work holder H3, the lens 3 is not required to be assisted by an operator. Can be automated.

  Further, even when processing a small-diameter lens 3 having a small frictional resistance, since the frictional resistance between the Kanzashi sphere 2 and the holder 5 is eliminated, the lens 3 held by the holder 5 is lightly rotated with respect to the polishing dish 4. This enables high-precision polishing and grinding of the small-diameter lens 3.

  In addition, the seal space 9a inside the labyrinth seal 11 that protects the sliding parts of the candilla sphere 2, the holder 5, and the candid receiving nut part 6 is maintained at a positive pressure by introducing positive pressure air 13 through the air passage 10 and the like. Therefore, it is possible to reliably prevent the abrasive from entering the sliding portion of the Kanzashi sphere 2 during processing, and to provide the work holder H3 that can be polished without maintenance for a long time.

As described above, according to each embodiment of the present invention, it is possible to provide a work holder capable of polishing a small-diameter lens with high accuracy and without maintenance for a long time.
Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

For example, the workpiece is not limited to an optical element such as a lens, and can be widely applied to processing of a general workpiece.
[Appendix 1]
In a polishing machine that polishes optical elements, it is provided in the gap between the air introduction port provided inside the Kanzashi that holds the workpiece, the air reservoir provided between the Kanzashi sphere at the tip of the Kanzashi and the holder, and the Kanza system and the top of the holder. A work holder characterized by having a labyrinth seal that increases the internal pressure and prevents an abrasive from entering, and a check valve for introduced air provided in the holder.

[Appendix 2]
The work holder according to claim 1, wherein the air reservoir is in a groove shape and is on the side of the Kanzashi sphere.

[Appendix 3]
The work holder according to claim 1, wherein the air reservoir is in a hole shape and is on the side of the Kanzashi sphere.

DESCRIPTION OF SYMBOLS 1 Kanzashi 2 Kanzashi sphere 2a Groove 2b Through-hole 3 Lens 3a Processed surface 3b Back surface 4 Polishing pan 4a Tool axis 4b Device housing 5 Holder 5a Work holding recess 5b Kanzashi receiving seat 5c Spherical sliding surface 5d Groove 5e Air passage 5f Screw Part 6 Kanzashi receiving nut part 6a Kanzashi insertion hole 6b Spherical sliding surface 6c Groove 6d Screw part 6e Seal fin 7 Cushioning material 8 Grooved air reservoir 9 Kanza system 9a Seal space 9b Seal fin 10 Air path 11 Labyrinth seal 12 Air path 12a Air inlet 13 Positive pressure air 14 Negative pressure air 15 Porous bush 16 Check valve 16a Spherical valve body 17 Taper valve seat 17a Through hole 18 Hole air reservoir H1 Work holder H2 Work holder H3 Work holder M1 Polishing device M2 Polishing Equipment M3 Polishing equipment

Claims (7)

A holder having a work holding unit for holding a work;
Kanzashi connected to the holder via a Kanzashi sphere;
A first fluid passage drilled through the Kanzashi and the Kanzashi sphere in an axial direction;
A second fluid passage that is drilled in the holder and communicates the work holding portion and the first fluid passage;
A check valve that is disposed in the second fluid passage and selectively allows fluid to pass in a direction in which the workpiece is sucked into the workpiece holding portion;
A fluid reservoir provided between the Kanzashi sphere and the holder and communicating with the first fluid passage;
A work holder characterized by comprising:   A labyrinth seal is provided so as to surround a connection portion of the Kanzashi sphere with respect to the holder, and the inside of the labyrinth seal is maintained at a positive pressure by the fluid introduced from the outside through the first fluid passage. The work holder according to claim 1.   2. The work holder according to claim 1, wherein the fluid reservoir is a grooved fluid reservoir carved on a sliding surface of the holder with respect to the Kanzashi sphere.   2. The work holder according to claim 1, wherein the fluid reservoir is a grooved fluid reservoir carved on a sliding surface of the Kanzashi sphere with respect to the holder.   2. The work holder according to claim 1, wherein the fluid reservoir is a hole-shaped fluid reservoir opened on a sliding surface of the Kanzashi sphere with respect to the holder. In a polishing apparatus comprising a polishing tool and a work holder that holds the work and presses the polishing tool,
The work holder is
A holder having a work holding part for holding the work;
Kanzashi connected to the holder via a Kanzashi sphere;
A first fluid passage drilled through the Kanzashi and the Kanzashi sphere in an axial direction;
A second fluid passage that is drilled in the holder and communicates the work holding portion and the first fluid passage;
A check valve that is disposed in the second fluid passage and selectively allows fluid to pass in a direction in which the workpiece is sucked into the workpiece holding portion;
A fluid reservoir provided between the Kanzashi sphere and the holder and communicating with the first fluid passage;
A polishing apparatus comprising:   A labyrinth seal is provided so as to surround a connection part of the Kanzashi sphere with respect to the holder, and the inside of the labyrinth seal is maintained at a positive pressure by the fluid introduced from the outside through the first fluid passage. The polishing apparatus according to claim 6.

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