JP5165460B2 - Work holder and work processing method - Google Patents

Description

  The present invention relates to a workpiece holder and a workpiece processing method, and more particularly to a technique effective when applied to polishing or grinding of a workpiece such as an optical element.

  For example, in the process of manufacturing an optical element such as a lens, polishing and grinding are performed for the purpose of forming a precise optical functional surface on the lens. Hereinafter, for simplicity, polishing and grinding are collectively referred to as polishing.

  By the way, as a holding tool for holding an optical element such as a lens in such polishing or grinding, a fitting type holding tool for fitting a lens into a cylindrical base member as described in Non-Patent Document 1 is provided. Are known. The structure of the holder of this reference technique will be described with reference to FIGS.

  The polishing optical element holder 11 shown in FIG. 5 includes a cylindrical base 12, a base 13 fixed in the base 12, and a lens receiver 14 attached to the base 13. . Specifically, the base 12 has a cylindrical shape having an inner diameter slightly larger than the outer diameter of the lens 15 to be polished, and a base 13 made of a hard body is fixed to the base 12.

  One holding surface of the pedestal 13 has a shape similar to the curvature of the lens receiving surface 15a of the lens 15 to be processed that comes into contact with the lens 15 to be processed, and the other back surface. Is provided with a countersink 16 for a countersink for supporting by a swing shaft (not shown). In addition, a processing machine (not shown) for transmitting a load to the entire optical element holder 11 is connected to the hairpin arranged on the counterbore 16.

  On the other hand, on the holding surface of the pedestal 13 having the same curvature as that of the lens receiving surface 15a, an elastic sheet 14a made of an elastic material is attached with an adhesive or the like as a lens receiving material 14 to protect the lens receiving surface 15a. It is attached.

  As another configuration of the holder, as shown in FIG. 6, the above-described cylindrical base 12 and the pedestal 13 fixed in the base 12 are integrated into the base 12, and the O-ring 14 b is used as the lens receiving material 14. In some cases, it is interposed between the base 12 and the lens receiving surface 15a.

Hereinafter, a case where the lens is polished using the holder having the above-described configuration will be described.
First, the lens 15 to be polished is fitted into the base 12 and brought into contact with a grindstone (not shown) while being in contact with the lens receiving material 14 in the base 12.

  Next, the processing machine is operated, and the load is transmitted to the optical element holder 11 through the handle. As a result, the lens 15 to be processed that is in contact with the lens receiving member 14 in the base 12 of the optical element holder 11 is pressed against the grindstone.

  Then, when the processing lens 15 and the grindstone are moved relative to each other while the grindstone is rotated by a driving device (not shown), the processing lens 15 is rotated together with the base 12 following the rotation of the grindstone, and the grindstone and the processing lens 15 The surface 15b to be processed is polished by the difference in the relative speeds.

  At this time, when the elastic sheet 14a is used as a lens receiving material as shown in FIG. 5, a force for pressing the lens 15 to be processed against the grindstone is applied to the entire lens receiving surface 15a. Further, when the O-ring 14b is used as a lens receiving material as shown in FIG. 6, a force for pressing the lens 15 to be processed against the grindstone is applied to the lens receiving surface 15a in a ring shape.

  When polishing is performed by bringing the processing surface of the optical component such as the processing lens 15 and the processing surface of the processing tool into contact with each other and applying relative pressure to the processing surface of the optical component while applying pressure to the processing surface of the optical component. However, there is a technical problem that uneven pressure is applied to the surface to be processed of the optical component, and this influence causes deterioration of surface accuracy near the center of the optical component, that is, so-called Newton's tendency.

The reason why the surface accuracy is deteriorated will be described with reference to FIGS. 7, 8, and 9.
FIG. 7 and FIG. 8 are schematic views of lower-axis oscillating type ball center polishing used in mass production processing of camera lenses and the like in recent years. When polishing the lens 15 to be processed held by the optical element holder 11, a load W is applied to the processing surface 15 b of the lens 15 to be processed from the upper shaft of a polishing machine (not shown) via the optical element holder 11. While rotating 20, the rocker is swung so as to change the angle of the grindstone shaft between θ1 and θ2.

  In FIG. 7, the grindstone axis angle is θ1, and the grindstone 20 is in contact with the entire surface 15b of the lens 15 to be processed, and pressure is applied. At this time, the pressure in the annular zone A having the apex angle α on the processing surface 15b is a component force P1 cos α in the direction of the sphere when the pressure P1 at the lens center is set.

  FIG. 8 shows the case where the grindstone axis angle is θ2 (> θ1). However, since a part of the work surface 15b of the lens protrudes from the grindstone 20, the area of the contact surface 15c becomes small, and the pressure at the center is P2. (> P1). At this time, the pressure in the annular zone A becomes P2cosα in the contact surface 15c, but becomes zero in the region other than the contact surface 15c, and therefore the pressure in the annular zone A becomes the sum of these.

  Further, pressure generated by the moment generated by the relative movement of the grindstone 20 and the lens 15 to be processed, local pressure due to concentration of stress generated in the vicinity of the outer peripheral edge portion 15d of the grindstone 20, etc. The force acting on the work surface 15b is the sum ΣP of these.

FIG. 9 is a graph of the various pressures described above. In this way, the pressure acting on the processing surface 15b of the processing lens 15 is not uniform and takes a large value in the vicinity of the lens center point.
In the holder shown in FIG. 7, since the lens 15 to be processed is held by the elastic sheet 14a, the lens 15 to be processed is easily deformed in the vicinity of the center, and the deformation is particularly large in a thin lens having a small center thickness. Become.

Further, in the holder shown in FIG. 8, since the lens 15 to be processed is held by the O-ring 14b, the deformation in the vicinity of the center point is further increased (prone to occur).
Of course, the pressure distribution differs depending on the processing conditions such as the curvature of the processing surface 15b of the lens 15 to be processed, the rocking speed and rocking angle of the grindstone 20, but it is the same that the pressure distribution becomes large near the center point. .

  On the other hand, as is well known as Preston's equation, the amount of processing of the lens is a function of pressure, relative speed, and residence time, so even if the pressure distribution is not uniform, setting of processing conditions, pressure, High-precision machining can be performed by controlling the amount of machining by controlling the values of relative speed and residence time.

  However, if there is a pressure distribution, the lens is deformed, and the lens 15 to be processed is processed while being deformed. When the processing is completed, the deformation returns to the original state, and the surface accuracy is deteriorated by this deformation amount. .

  As a countermeasure against the deterioration of the surface accuracy, for example, it is conceivable to improve the surface accuracy of the polished surface by processing while suppressing the deformation of the lens to be processed by reducing the pressing force of the grindstone against the lens to be processed. The required processing time becomes longer, resulting in a decrease in productivity, that is, an increase in manufacturing cost.

The deterioration of the surface accuracy referred to here is a so-called Newton-Kuse, and the level of the non-defective product is, for example, about 0.5 or less (about 150 nm or less) Newtons.
The number of Newtons mentioned above refers to the state of Newton rings observed when the lens to be evaluated is superimposed on a prototype (lens) that has irregularities opposite to the lens to be evaluated and has a surface shape as designed. (Number).
Japan Opto-Mechatronics Association, published in 1987, “JOEM Optical Element Processing Technology '87, 1-5 Grinding / Polishing”, pages 146-148.

  The purpose of the present invention is to provide a technology that can easily obtain a highly accurate machining surface at low cost even when the pressure distribution by the machining tool on the workpiece is not uniform or in high-load machining of a workpiece such as a thin lens with large deformation. Is to provide.

According to a first aspect of the present invention, there is provided a work holder including a pedestal portion having a work holding surface that abuts a held surface opposite to a work surface of the work, and a frame portion that holds an outer peripheral portion of the work. Because
Central portion of the workpiece holding surface in the base portion is selectively caused a abutting shape with respect to the held surface of the workpiece,
By making the second radius of curvature of the workpiece holding surface of the pedestal portion larger than the first radius of curvature of the held surface of the workpiece, the central portion of the workpiece holding surface in the pedestal portion is Provided is a workpiece holder configured to selectively contact the held surface .

According to a second aspect of the present invention, a workpiece holding surface opposite to a workpiece surface is held by a workpiece holding surface of a workpiece holder, and a machining tool is slid relative to the workpiece surface for machining. A workpiece machining method for performing
A first step of holding the workpiece on the workpiece holder in a state in which a center portion of the workpiece holding surface of the workpiece holder is selectively in contact with the held surface of the workpiece;
A second step of performing machining by pressing and sliding the machining tool relative to the workpiece held by the workpiece holder;
Only including,
In the first step, a center portion of the work holding surface of the work holder is determined by a difference between a first radius of curvature of the held surface of the work and a second radius of curvature of the work holding surface of the work holder. However, the present invention provides a workpiece machining method for holding the workpiece on the workpiece holder in a state of selectively contacting the held surface of the workpiece.

  According to the present invention, it is possible to easily obtain a highly accurate machining surface at a low cost even in the case where the pressure distribution by the machining tool on the workpiece is not uniform or in high-load machining of a workpiece such as a thin lens having a large deformation. Can be provided.

  In the first aspect of the present embodiment, the lens receiving surface of the elastic sheet that is replaceably attached to the optical element holder and the contact surface of the lens to be processed are centered so that the lens to be processed has an outer peripheral side. Since it curves upward, it cancels out deformation due to the distribution of the processing pressure and obtains a polished surface with no habit.

  In the second aspect of the present embodiment, the pedestal of the optical element holder is made of a hard member such as a metal, and a step is provided on the pedestal so that the lens receiving surface of the elastic sheet and the contact surface of the lens to be processed are provided. Achieving a center hit, suppressing deformation of the center of the lens due to processing pressure, and there is room for the outer periphery of the lens to be curved upward due to the elastic sheet. obtain.

  In the third aspect of the present embodiment, the steps provided on the pedestal of the optical element holder are made detachable so that steps of various shapes can be easily made. Since the pressure distribution applied to the lens to be processed varies from machine to machine due to machine differences, the amount of deformation is not the same even with the same lens shape. For this reason, it is to cope with the necessity of obtaining a step having an optimal shape for each machine.

  In addition, since the amount of deformation varies depending on the lens shape, an optimum step is necessary for the shape of the lens to be processed. According to the third aspect described above, a step having the optimum shape can be easily realized by replacing the step portion. It is possible.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of a configuration of a workpiece holder that implements a workpiece machining method according to an embodiment of the present invention.

  The workpiece holder H1 includes a cylindrical base 4 (frame portion), a pedestal 5 fixed in the base 4, and a lens receiving material 2 attached to a lens receiving surface 5a (work holding surface) of the pedestal 5. It is configured as. Specifically, the base 4 has a cylindrical shape with an inner diameter slightly larger than the outer diameter of the lens 1 (work) to be polished, and a base 5 made of a rigid body having a large rigidity is fixed to the base 4. Yes.

  The lens receiving surface 5a of the pedestal 5 has a curvature larger than the curvature R1 (first curvature radius) of the lens contact surface 1a (held surface) of the lens 1 to be processed that comes into contact with the lens 1 to be processed. Furthermore, in order to protect the lens contact surface 1a, a sheet made of an elastic body is attached as a lens receiving material 2 with an adhesive or the like.

  At this time, the curvature R2 (second curvature radius) of the lens receiving surface 2a of the lens receiving member 2 made of an elastic sheet reflects the curvature of the lens receiving surface 5a of the pedestal 5 and is more than the curvature R1 of the lens contact surface 1a. It is composed largely.

  That is, in the case of the workpiece holder H1 of the first embodiment, the curvature of the lens receiving surface 5a of the pedestal 5 is set so that the curvature R2> the curvature R1 in consideration of the thickness of the lens receiving material 2. .

  The workpiece holder H1 is supported with the back surface fixed to an upper shaft 122 of the polishing apparatus K, which will be described later, while the workpiece lens 1 is held, and the workpiece surface 1b of the workpiece lens 1 is a grindstone spindle. The posture is opposed to the machining surface 10 a of the tool tray 10 supported by the 115.

  In the first embodiment, when the lens 1 to be processed is held on the work holder H1, the lens contact surface 1a of the lens 1 to be processed is the center portion 2b of the lens receiving surface 2a of the lens receiving material 2 in the no-load state. In the first (selective) contact, a so-called middle hit state is established (first step).

  When the processing surface 1b of the lens 1 to be processed is pressed against the processing surface 10a of the tool plate 10 and processing is started, the processing is performed by the deformation of the lens receiving material 2 and the deformation of the processing lens 1 due to the processing load. The lens contact surface 1 a of the lens 1 is in close contact with the lens receiving surface 2 a of the lens receiving material 2 over the entire surface. In this close contact state, the processing surface 1b of the processing lens 1 is polished by the processing surface 10a of the tool plate 10 (second step).

  According to the workpiece holder H1 of the first embodiment, the lens contact surface 1a of the lens 1 to be processed is centered against the central portion 2b of the lens receiving surface 2a of the lens receiving material 2 supported by the pedestal 5. Since the force acts so that the deformation M2 is generated in a direction opposite to the deformation M1 of the lens 1 to be processed due to the processing pressure, the deformation due to the processing pressure of the tool plate 10 is canceled, for example, the lens to be processed Even if the lens 1 is a thin lens or is subjected to high load (pressure) processing, a lens having a high shape accuracy without Newton's habit can be obtained after polishing.

  That is, according to the workpiece holder H1 of the first embodiment, a highly accurate machining surface can be obtained even when the pressure distribution by the machining tool such as the tool plate 10 on the workpiece lens 1 as a workpiece is not uniform. In particular, even in high-load processing of the lens 1 to be processed such as a thin lens having a large deformation, a highly accurate processed surface can be easily obtained at low cost.

(Embodiment 2)
FIG. 2 is a cross-sectional view showing an example of the configuration of a workpiece holder that implements a workpiece machining method according to another embodiment of the present invention.

  In the workpiece holder H2 of the second embodiment, the lens receiving surface 5a of the base 5 has a curvature similar to the curvature R1 of the lens contact surface 1a of the lens 1 to be processed, and is convex at the center of the lens receiving surface 5a. The projection receiving step 6 (stepped portion) is provided, and the lens receiving material 2 made of an elastic sheet is attached with an adhesive or the like so as to cover the entire lens receiving surface 5a having the protruding step 6. ing.

  In the case of the workpiece holder H2 according to the second embodiment, the projection step 6 is provided as a hard member integrally with the pedestal 5, and therefore the processed lens 1 held by the workpiece holder H2 in an unloaded state. The lens abutting surface 1a is also in a middle hit state in which it selectively contacts the central portion 2b of the lens receiving surface 5a of the pedestal 5.

  For this reason, since the force acts so that the deformation M2 is generated in the opposite direction to the deformation M1 of the lens 1 to be processed due to the processing pressure, the deformation due to the processing pressure of the tool plate 10 is canceled out, and the deformation of the central portion of the lens 1 to be processed is prevented. It can be prevented directly.

  Further, in the case of this work holder H2, the outer periphery of the lens 1 to be processed is caused by the elasticity of the lens receiving material 2 due to the presence of the protruding step 6 at the center of the lens receiving surface 5a of the pedestal 5, so Since it can be deformed in the direction of deformation M2 beyond the limit due to the curvature of the surface 5a, the amount of deformation M2 is controlled by adjusting the processing pressure acting on the lens 1 to be processed from the tool plate 10, and the lens to be processed There is also an advantage that the polishing shape of one processed surface 1b can be controlled.

  In the case of the workpiece holder H2 of the second embodiment, even if the lens 1 to be processed is a lens that is greatly deformed by the processing pressure of the tool plate 10, the deformation is suppressed and a highly accurate polished surface, that is, the workpiece to be processed. The shape accuracy of the surface 1b can be obtained.

(Embodiment 3)
FIG. 3 is a cross-sectional view showing an example of the configuration of a workpiece holder that implements a workpiece machining method according to still another embodiment of the present invention.

The workpiece holder H3 according to the third embodiment is different from the second embodiment described above in that a detachable protrusion member 7 (stepped portion) is provided at the center of the lens receiving surface 5a of the pedestal 5.
That is, the protrusion member 7 provided in the work holder H3 has a configuration in which a step 7a is provided on the front end side and a screw portion 7b is provided on the rear end side. Then, the protruding member 7 is fixed to the pedestal 5 by screwing the threaded portion 7b of the protruding member 7 into a screw hole provided in the central portion of the lens receiving surface 5a of the pedestal 5. Other configurations are the same as those of the second embodiment.

  For this reason, the middle contact state in which the lens contact surface 1a of the lens 1 to be processed held by the work holder H3 is selectively brought into contact with the central portion 2b of the lens receiving member 2 due to the step of the protruding member 7 of the base 5 is provided. It becomes.

  According to the workpiece holder H3 of the third embodiment, the projection member 7 is attached to the pedestal 5 so as to be replaceable by the screw portion 7b, so that it depends on the type of the lens 1 to be processed, processing conditions, and the like. Since the shape of the step 7a can be easily changed, it is possible to obtain an optimum step shape (in other words, a middle hit state) according to the machine difference of the polishing apparatus K described later and the shape of the lens 1 to be processed. There is.

(Embodiment 4)
FIG. 4 is a perspective view showing a typical example of a polishing apparatus that uses each of the workpiece holders H1 to H3 exemplified in the above-described embodiments.

In the polishing apparatus K, as an example, a case where the processing surface 1b of the processing lens 1 and the processing surface 10a of the tool plate 10 are spherical will be described as an example.
In the polishing apparatus K of FIG. 4, the work holder H <b> 1 (work holder H <b> 2) (work holder H <b> 3) of the present embodiment corresponds to the holder 121. Further, the back surface of the base 5 is fixed to an upper shaft 122 described later, and the back surface of the tool plate 10 is fixed to the grindstone spindle 115.

  As illustrated in FIG. 4, the polishing apparatus K according to the first embodiment includes an apparatus main body 150, a swing plate 151 provided on the upper portion of the apparatus main body 150, and, for example, provided below the swing plate 151. The upper part is opened, the lower side part 161b is formed in an arc shape, and the grindstone rocking body 161 provided with the semicircular side plates 162 and the lower side part 161b of the grindstone rocking body 161 are integrally supported. 171.

  A grindstone motor 116 and a grindstone spindle 115 that is rotationally driven by the grindstone motor 116 are attached to the housing 171, and a tool plate 10 for spherical polishing is attached to the upper end of the grindstone spindle 115. The grindstone spindle 115 is set to rotate around an axis passing through the ball center 104.

The housing 171 further includes a swing motor 112 disposed along the Y-axis direction at a position adjacent to the grinding wheel motor 116.
On the other hand, a pair of support arms 164 arranged in parallel to support the grindstone rocker 161 by a pair of bearings 163 protrude from the apparatus main body 150, and further, below the pair of support arms 164. A fixed protrusion 180 having an arcuate rocking gear portion 181 for rocking the housing 171 is provided.

  Then, the gear 114 attached to the drive shaft of the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other, and the gear 114 rotated by the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other. The housing 171 and the grindstone rocking body 161 are swung in the arrow direction (around the Y axis) shown in FIG. 4 with the ball center 104 as the rocking center.

  The protruding end of the swing plate 151 provided on the upper part of the apparatus main body 150 includes a cylinder 120 along the Z-axis direction, an upper shaft 122 connected to a rod 120a that expands and contracts the cylinder 120, and a lower end portion of the upper shaft 122. A holder 121 attached to the lens is disposed, and the lens 1 to be processed is further held by the holder 121. That is, the lens 1 to be processed can be displaced (vertically moved) in the Z-axis direction while being supported by the holder 121 by the operation of the cylinder 120 as a displacement mechanism for displacing the optical element in the vertical direction. It is possible to press with a pressing force of.

  Further, the base of the swing plate 151 is fixed to the apparatus main body 150 by a bearing box body 191, and the X axis (the axis in the X axis direction passing through the swing center of the base of the swing plate 151 is the center of the ball 104. And is driven by an X-axis oscillating motor 190 connected to the bearing box body 191. That is, the lens 1 to be processed can swing around the X axis while being supported via the swing plate 151, the upper shaft 122, and the holder 121.

  The polishing apparatus K according to the fourth embodiment further includes a control device 106 that performs overall control, a grindstone rocking control unit 107 connected to the rocking motor 112, and an inverter for controlling the rotational speed of the grindstone motor 116. 108. The control device 106 also performs drive control of the X-axis swing motor 190 and the cylinder 120.

Next, a method for polishing the lens 1 to be processed using the above-described workpiece holder H1, workpiece holder H2, and workpiece holder H3 by the polishing apparatus K according to the fourth embodiment will be described.
The tool plate 10 is rotationally driven via a grinding wheel spindle 115 driven by a grinding wheel motor 116. Further, the gear 114 rotates while meshing with the arcuate rocking gear portion 181 due to the rotation of the rocking motor 112, so that the tool plate 10 together with the housing 171 and the grindstone rocking body 161 rotates around the ball center 104. Swing around the axis.

  On the other hand, the holder 121 holding the workpiece lens 1 is displaced downward along the Z axis by the extending operation of the rod 120a of the cylinder 120, and presses the workpiece lens 1 against the tool plate 10 with a constant pressing force. .

  Furthermore, the lens 1 to be processed held by the holder 121 is in contact with the tool plate 10 while being in contact with the tool plate 10 in conjunction with the swing of the swing plate 151 driven by the X-axis swing motor 190. The center of curvature of the optical function surface (that is, the sphere center of the surface 1b to be processed) is made to coincide with the sphere center 104 of the processing surface 10a of the tool plate 10 to swing around the X axis.

  In this way, the tool plate 10 swings around the Y axis around the spherical center 104, and the lens 1 to be processed swings around the X axis. A desired spherical polishing of the work surface 1b is performed by a relative sliding movement between the work surface 1b and the work surface 10a.

  According to this polishing apparatus K, by using any one of the above-mentioned workpiece holder H1, workpiece holder H2, and workpiece holder H3 as the holder 121, it corresponds to each of the workpiece holders H1 to H3. The effects described above can be obtained.

  As described above, according to each of the above-described embodiments of the present invention, when a high-speed and high-load polishing process is performed on the lens 1 to be processed, for example, in a mass production process of a camera lens, Thus, even if it is an easily deformable optical element, it is possible to obtain a highly accurate polished surface without habit.

Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the workpiece is not limited to an optical element, and can be applied to a general product requiring precision polishing.

The polishing apparatus may also be an apparatus having another configuration that performs polishing by relatively sliding the processing surface of the processing lens and the processing surface of the tool plate.
(Supplementary Note 1) In a holding tool for holding and polishing an optical element such as a lens, the optical element is in contact with one surface of the optical element in a state in which the optical element can be inserted and removed, and the optical element in a state of being inserted into the frame part. An optical element holder, wherein the optical element holding surface for holding the element is formed so that the contact surface of the optical element is in a mid-contact state.
(Supplementary Note 2) A holding tool for holding and polishing an optical element such as a lens, a frame part in which the optical element can be inserted and removed, and a pedestal provided with a step in a central part for holding the optical element; An optical element holder comprising a sheet-like elastic body on the optical element holding surface side of the pedestal.
(Supplementary note 3) The optical element holder according to supplementary note 2, wherein a step provided in a central portion of the pedestal for holding the optical element is detachable.

It is sectional drawing which shows an example of a structure of the workpiece holder which implements the workpiece | work processing method which is one embodiment of this invention. It is sectional drawing which shows an example of a structure of the workpiece holder which implements the workpiece | work processing method which is other embodiment of this invention. It is sectional drawing which shows an example of a structure of the workpiece holder which implements the workpiece | work processing method which is further another embodiment of this invention. It is a perspective view which shows a typical example of the grinding | polishing apparatus which uses the workpiece | work holder of each embodiment of this invention. It is sectional drawing which shows the structure of the holder of the reference technique of this invention. It is sectional drawing which shows the structure of the holder of the reference technique of this invention. It is a conceptual diagram explaining the generation | occurrence | production reason of the deterioration of the surface precision of the to-be-processed lens in the holder of reference technology. It is a conceptual diagram explaining the generation | occurrence | production reason of the deterioration of the surface precision of the to-be-processed lens in the holder of reference technology. It is a diagram which shows distribution of the processing pressure in the holder of a reference technique.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processed lens 1a Lens contact surface 1b Processed surface 2 Lens receiving material 2a Lens receiving surface 2b Center part 4 Base 5 Base 5a Lens receiving surface 6 Projection step 7 Projection member 7a Step 7b Screw part 10 Tool plate 10a Processing surface DESCRIPTION OF SYMBOLS 11 Optical element holder 12 Base 13 Base 14 Lens receiving material 14a Elastic sheet 14b O-ring 15 Processed lens 15a Lens receiving surface 15b Processed surface 15c Contact surface 15d Outer peripheral edge part 16 Spot facing 20 Grinding stone 104 Ball center 106 Control device 107 Grinding wheel rocking control unit 108 Inverter 112 Swing motor 114 Gear 115 Grinding wheel spindle 116 Grinding wheel motor 120 Cylinder 120a Rod 121 Holder 122 Upper shaft 150 Device main body 151 Swing plate 161 Wobbling rocking body 161b Lower side portion 162 Both side plates 163 Bearing 164 Support Arm 171 How 180 Fixed projection 181 Arc-shaped swing gear 190 X-axis swing motor 191 Bearing box H1 Work holder H2 Work holder H3 Work holder K Polishing device M1 Deformation M2 Deformation R1 Lens contact of lens 1 to be processed Curvature R2 of surface 1a Curvature of lens receiving surface 2a of lens receiving material 2

Claims (6)

A workpiece holder including a pedestal portion having a workpiece holding surface that abuts a held surface opposite to a workpiece surface of the workpiece, and a frame portion that holds an outer peripheral portion of the workpiece,
Central portion of the workpiece holding surface in the base portion is selectively caused a abutting shape with respect to the held surface of the workpiece,
By making the second radius of curvature of the workpiece holding surface of the pedestal portion larger than the first radius of curvature of the held surface of the workpiece, the central portion of the workpiece holding surface in the pedestal portion is A work holder that selectively contacts the held surface . The workpiece holder according to claim 1,
By forming a stepped portion at the central portion of the pedestal portion, the central portion of the work holding surface of the pedestal portion is selectively brought into contact with the held surface of the work. Work holding tool. The workpiece holder according to claim 2 ,
The workpiece holder, wherein the step portion is detachably attached to the pedestal portion. In the workpiece holder according to any one of claims 1 to 3 ,
A workpiece holder, wherein a sheet-like elastic body is mounted on the workpiece holding surface of the pedestal portion. A workpiece machining method of holding a workpiece holding surface opposite to a workpiece machining surface with a workpiece holding surface of a workpiece holder and performing machining by sliding a machining tool relative to the workpiece surface,
A first step of holding the workpiece on the workpiece holder in a state in which a center portion of the workpiece holding surface of the workpiece holder is selectively in contact with the held surface of the workpiece;
A second step of performing machining by pressing and sliding the machining tool relative to the workpiece held by the workpiece holder;
Only including,
In the first step, a center portion of the work holding surface of the work holder is determined by a difference between a first radius of curvature of the held surface of the work and a second radius of curvature of the work holding surface of the work holder. However, the workpiece | work processing method characterized by hold | maintaining the said workpiece | work in the said workpiece holder in the state which contact | abuts selectively with respect to the said to-be-held surface of the said workpiece | work . In the workpiece processing method according to claim 5 ,
In the first step, by providing a stepped portion at the center of the workpiece holding surface of the workpiece holder, the center of the workpiece holding surface of the workpiece holder is brought into contact with the held surface of the workpiece. A workpiece machining method, wherein the workpiece is held by the workpiece holder in a state of being selectively in contact with the workpiece holder.