JP2599918B2 - Polishing holding device - Google Patents
Polishing holding deviceInfo
- Publication number
- JP2599918B2 JP2599918B2 JP62164840A JP16484087A JP2599918B2 JP 2599918 B2 JP2599918 B2 JP 2599918B2 JP 62164840 A JP62164840 A JP 62164840A JP 16484087 A JP16484087 A JP 16484087A JP 2599918 B2 JP2599918 B2 JP 2599918B2
- Authority
- JP
- Japan
- Prior art keywords
- spherical surface
- work
- holder
- polishing
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、研磨保持装置に係り、特に、加工圧，揺動
力を与えるアームに装着され凹球面を有する支持具に、
ワークを取り付け凸球面を有する保持具を上記凹球面と
凸球面により摺動可能に装着した研磨保持装置に関す
る。Description: BACKGROUND OF THE INVENTION The present invention relates to a polishing holding apparatus, and more particularly, to a support having a concave spherical surface attached to an arm for applying a processing pressure and a swinging power.
The present invention relates to a polishing and holding apparatus in which a holder having a convex spherical surface to which a work is attached is slidably mounted by the concave spherical surface and the convex spherical surface.
［従来の技術］ 従来、上記の如く球面を介してワークを保持する装置
としては、特開昭60−52259号公報のラップ加工機にお
いて開示されている。かかる装置は、第９図に示す如
く、駆動アーム１に上下方向スライド自在に支持された
荷重棒２の下端に取り付けた凹球面体軸受３と、この軸
受３の凹球面座と適合する凸球面部を形成したワークホ
ルダ４とをこのワークホルダ４にワーク５を取り付けて
上記凹球面座と凸球面部とを嵌め合せるとともに、荷重
棒２に荷重Ｐを与えつつ駆動アーム１を揺動してラップ
定盤６上にワーク５を摺動させて研磨するものである、
そして、ワークの摺動方向を矢印Ａとした場合、ワーク
ホルダ４の凸球面の中心Ｏ′と研磨面（ワーク５とラッ
プ定盤の接触面）の垂直距離をh1、ワークホルダ４を押
す力の合力Ｆの作用点の研磨面からの高さをh2とする
と、ワーク半径ａがいくら小さくなっても−ａ≦h2−h1
≦ａ＋ｂの範囲ではワーク形状によらず力学的安定性が
得られワークの表面にひっかき傷あるいは衝突により欠
陥等のスクラッチの発生を最小限に抑えてワーク５の研
磨を行なうことができる。なお。図中ａはワーク５、ｂ
はワークホルダ４の円形状の平面投影の半径である。[Prior Art] Conventionally, as an apparatus for holding a work through a spherical surface as described above, a lapping machine disclosed in JP-A-60-52259 has been disclosed. As shown in FIG. 9, such a device comprises a concave spherical body bearing 3 attached to the lower end of a load rod 2 slidably supported by a drive arm 1 in the vertical direction, and a convex spherical surface which is compatible with a concave spherical seat of the bearing 3. The workpiece 5 is attached to the workpiece holder 4 and the workpiece 5 is attached to the workpiece holder 4 to fit the concave spherical seat and the convex spherical section together, and the drive arm 1 is swung while applying a load P to the load bar 2. The work 5 is polished by sliding the work 5 on the lap surface plate 6.
When the sliding direction of the work is indicated by an arrow A, the vertical distance between the center O ′ of the convex spherical surface of the work holder 4 and the polishing surface (the contact surface between the work 5 and the lap surface plate) is h 1 , and the work holder 4 is pressed. and the height from the polishing surface of the acting point of the resultant force F of the force and h 2, even when the workpiece radius a is much smaller -a ≦ h 2 -h 1
In the range of ≦ a + b, mechanical stability can be obtained irrespective of the shape of the work, and the work 5 can be polished while minimizing the generation of scratches such as defects due to scratches or collisions on the work surface. In addition. In the figure, a is a work 5, b
Is the radius of the circular planar projection of the work holder 4.
上記装置において、凹球面体軸受３の凹球面座の曲率
中心Ｏ′は幾何学的な中心であって、ラップ研磨作業に
おける加工力を受ける力学的な中心とはならず、研磨作
業中にワーク５には常にモーメント力が作用している。In the above apparatus, the center of curvature O 'of the concave spherical seat of the concave spherical body bearing 3 is a geometric center, not a mechanical center for receiving a processing force in the lap polishing operation. The moment force always acts on 5.
［発明が解決しようとする問題点］ しかしながら、上記従来の装置にあっては、研磨作業
によって発生するワーク５の摺動力Ｆは凹球面座がワー
クホルダ４を介してワーク５に与える駆動力と等しく、
このときの駆動力の作用点をＤとし、研磨面からの高さ
をh2とすれば、ワーク５にはＦ・h2のモーメントが作用
することになる。このモーメント力はワーク４の研磨圧
がワーク４の外周部程高くなるように作用するのでワー
ク４の被加工面の研磨圧が不均一となりワーク４とラッ
プ定盤６との相対すべりによる均一な加工が困難であっ
た。したがって、ワーク４の被加工面の面精度を不安定
にするとともに、外周部にダレを生じさせる等高い面精
度を有するワーク４を得ることができない問題点があっ
た。また、ロッドレンズの如き長尺物のワークの研磨に
際して装置が大型化する不具合があった。[Problems to be Solved by the Invention] However, in the above-described conventional apparatus, the sliding force F of the work 5 generated by the polishing operation is equal to the driving force given to the work 5 by the concave spherical seat through the work holder 4. equally,
The acting point of the driving force at this time is D, if the height from the polishing surface and h 2, will act moment of F · h 2 is the workpiece 5. This moment force acts so that the polishing pressure of the work 4 becomes higher toward the outer peripheral portion of the work 4, so that the polishing pressure on the surface to be processed of the work 4 becomes non-uniform, and the work 4 and the lap surface plate 6 become uniform due to relative slip. Processing was difficult. Therefore, there is a problem that the surface accuracy of the surface to be processed of the work 4 becomes unstable, and the work 4 having a high surface accuracy such as causing sagging on the outer peripheral portion cannot be obtained. In addition, there is a problem that the apparatus becomes large when polishing a long workpiece such as a rod lens.
本発明は、上記問題点に着目してなされたものであっ
て、互いに作用，反作用の関係にある駆動力と摺動力の
ベクトルが同一平面内に存在するようにして、ワークホ
ルダを介してワークに作用するモーメント力を生じさせ
ず、ワークの被加工面の研磨圧を均等に保って高精度の
加工面を安定的に得ることができるようにワークを保持
し得るワーク保持装置の提供を目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a work force and a slide force, which have an action and a reaction relationship with each other, are present on the same plane, and a work is performed via a work holder. The present invention aims to provide a work holding device capable of holding a work so that a high-precision machined surface can be stably obtained while maintaining a uniform polishing pressure on a work surface of the work without generating a moment force acting on the work. And
［課題を解決するための手段］ 本願発明は凹球面を内周面に有するとともにこの凹球
面で形成される空間内に凹球面の中心を有する環状又は
球帯状又は球冠状の支持具と、ワーク又は研磨具を保持
するワークホルダーを中空部に備え且つ前記凹球面と対
応した曲率半径の凸球面を外周面に有する環状又は球帯
状又は球冠状の保持具とを具備し、前記支持具と保持具
とを前記凹球面と凸球面を介して摺動可能にするととも
に、加工によって生じる加工抵抗力の総和ベクトルが凹
球面および凸球面の中心を通るように、該中心をワーク
又は研磨具の加工面と一致するように前記ワークホルダ
ーは前記保持具の中空部に位置決めされているようにし
たものである。Means for Solving the Problems The present invention relates to an annular or spherical band-shaped or spherical crown-shaped support having a concave spherical surface on the inner peripheral surface and having a center of the concave spherical surface in a space formed by the concave spherical surface, and a work. Or a work holder for holding a polishing tool in a hollow portion, and an annular or spherical band-shaped or spherical crown-shaped holder having a convex spherical surface having a radius of curvature corresponding to the concave spherical surface on an outer peripheral surface thereof. Tool is slidable through the concave spherical surface and the convex spherical surface, and the center of the workpiece or the polishing tool is processed so that the total vector of the processing resistance generated by the processing passes through the centers of the concave spherical surface and the convex spherical surface. The work holder is positioned in a hollow portion of the holder so as to coincide with a surface.
［作用］ 上記構成によれば、凹球面と凸球面間の摺動抵抗を小
さくすることにより、研磨加工時に、ワークに作用する
駆動力（揺動力）の作用点を上記凹球面と凸球面の中心
とみなすことができる。したがって、加工時に生ずる加
工抵抗力の総和ベクトルを上記凹凸球面の中心を通るよ
うにし、ワークに作用するモーメント力を発生させるこ
となく、均等な加工圧分布を有してワークの被加工面を
加工することができる。[Operation] According to the above configuration, by reducing the sliding resistance between the concave spherical surface and the convex spherical surface, the point of application of the driving force (oscillating power) acting on the work during the polishing process is determined by the difference between the concave spherical surface and the convex spherical surface. Can be considered the center. Therefore, the total vector of the processing resistance force generated at the time of processing is made to pass through the center of the concave and convex spherical surface, and the processing surface of the work is processed with a uniform processing pressure distribution without generating a moment force acting on the work. can do.
［実施例］ 以下、本発明の実施例を図面を用いて詳細に説明す
る。[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
（第１実施例） 第１図は、本発明に係る研磨保持装置の第１実施例を
示し、第１図ａは断面図、第１図ｂは平面図で、この保
持装置10は、研磨作業時に加工圧及び／または揺動を与
える図示を省略したアームに装着され環状の凹球面11を
内周面に形成した支持具12と、この凹球面11と対応した
凸球面13を外周面に形成し、ワークホルダ14を介してワ
ーク15を保持する保持具16とより構成され、こと保持具
16は、上記凸球面13と凹球面11を介して上記支持具12に
摺動可能に嵌装されている。なお、上記凹球面11と凸球
面13間に潤滑剤，低摩擦材料等の摩擦低減用の材料を介
装することにより上記凹球面11と凸球面13間の摺動抵抗
を減少させることができる。(First Embodiment) FIG. 1 shows a first embodiment of a polishing and holding apparatus according to the present invention, wherein FIG. 1a is a sectional view and FIG. 1b is a plan view. A support tool 12 mounted on an arm (not shown) for applying a processing pressure and / or swing during operation and having an annular concave spherical surface 11 formed on an inner peripheral surface, and a convex spherical surface 13 corresponding to the concave spherical surface 11 on an outer peripheral surface. And a holder 16 for forming and holding a work 15 via a work holder 14
16 is slidably fitted to the support 12 via the convex spherical surface 13 and the concave spherical surface 11. The sliding resistance between the concave sphere 11 and the convex sphere 13 can be reduced by interposing a friction reducing material such as a lubricant or a low friction material between the concave sphere 11 and the convex sphere 13. .
支持具12は、環状の部材12a,12bからなり、この部材1
2a,12bをネジ等の固着手段17により嵌合して一体化して
構成するとともに、凹球面11の中心Ｏに関して対称に分
割し、この中心Ｏが環状の部材12a,12bの内周面で形成
される空間内に存するようにし、そして環状の凸球面13
を形成した保持具16を摺動可能に嵌装できるように構成
してある（第２図参照）。なお、上記支持具12は、第３
図に示す如く凹球面11の中心Ｏに関して対称に分割し得
る半環状の部材12a,12bをネジ17等により団結した構成
にても実施できる。The support tool 12 includes annular members 12a and 12b.
2a and 12b are fitted and integrated by fixing means 17 such as screws, and are symmetrically divided with respect to the center O of the concave spherical surface 11, and this center O is formed by the inner peripheral surfaces of the annular members 12a and 12b. And the annular convex spherical surface 13
The holding member 16 formed with is formed so as to be slidably fitted therein (see FIG. 2). In addition, the above support 12 is
As shown in the figure, the present invention can also be applied to a configuration in which semi-annular members 12a and 12b that can be divided symmetrically with respect to the center O of the concave spherical surface 11 are united by screws 17 or the like.
保持具16は、外周面を凸球面13に形成した中空部18を
有する環状部材からなり、この中空部18内には、螺着等
の手段によりワーク15を保持するワークホルダ14が固着
されるとともに、ワーク15の研磨加工の際に発生する加
工抵抗力の総和ベクトルＦが球面の中心Ｏを通るように
ワーク15の位置を設定してワークホルダ14を固着できる
ように構成してある。したがって、球面の中心Ｏは、中
空部18内に位置することになる。なお、図中、19は研磨
具、20は研磨具19の回転軸である。The holder 16 is formed of an annular member having a hollow portion 18 having an outer peripheral surface formed into a convex spherical surface 13, and a work holder 14 for holding a work 15 is fixed in the hollow portion 18 by means such as screwing. In addition, the position of the work 15 is set so that the total vector F of the processing resistance generated during the polishing of the work 15 passes through the center O of the spherical surface, and the work holder 14 can be fixed. Therefore, the center O of the spherical surface is located inside the hollow portion 18. In the drawing, 19 is a polishing tool, and 20 is a rotation axis of the polishing tool 19.
上記構成からなる保持装置10において、保持具球面の
中心Ｏをワーク15の被加工面15aと一致するようにワー
クホルダ14を位置決めして保持具16上に固着し、加工に
よって生じる加工抵抗力の総和ベクトルＦ′が中心Ｏを
通るように設定する。そして、研磨具19を回転するとと
もに図示を省略した上記アームにより支持具12に加工圧
及び／または揺動運動をワーク15に与える。この場合、
ワーク15は、保持具16、ワークホルダ14と共に研磨具19
の回転に従属回転し、かつ、研磨具19の上下方向の振れ
に対しても従属移動する。In the holding device 10 having the above-described configuration, the work holder 14 is positioned and fixed on the holder 16 so that the center O of the spherical surface of the holding tool coincides with the processing surface 15a of the work 15, and the working resistance force generated by the working is reduced. The sum vector F 'is set to pass through the center O. Then, the polishing tool 19 is rotated, and a working pressure and / or a swinging motion is applied to the support tool 12 by the arm (not shown). in this case,
The work 15 is a polishing tool 19 together with the holder 16 and the work holder 14.
The rotation of the polishing tool 19 is dependent on the rotation of.
本実施例によれば、加工抵抗力によるモーメント力が
生ぜず、ワークの被加工面を均等な加工圧にて研磨でき
るので、被加工面を高精度に安定的に加工できるととも
に、ワークの外周部に面ダレを発生させることなく加工
できる。According to the present embodiment, the work surface of the work can be polished with a uniform working pressure without generating a moment force due to the work resistance force, so that the work surface can be stably machined with high accuracy and the outer periphery of the work can be polished. Processing can be performed without causing surface sag on the part.
第４図は、本実施例の研磨保持装置を用いてφ12の光
学ガラスの平面研磨を実施した光学レンズの干渉縞を示
し、図の如く非常に高精度でクセ，面ダレの少ない加工
面が安定的に得ることができた。FIG. 4 shows interference fringes of an optical lens obtained by polishing the optical glass having a diameter of 12 using the polishing and holding apparatus of this embodiment. As shown in FIG. It could be obtained stably.
（第２実施例） 第５図は、本発明に係る研磨保持装置の第２実施例を
示し、第５図ａは断面図、第５図ｂは平面図である。Second Embodiment FIG. 5 shows a second embodiment of the polishing and holding apparatus according to the present invention, wherein FIG. 5A is a sectional view and FIG. 5B is a plan view.
本実施例の保持装置25は、上記第１実施例と同一構成
からなる保持具16に取付具26を介してワークホルダ14、
ワーク15を保持する構成としたもので、他の構成は上記
第１実施例と同様であるので、同一部材には同一番号を
付してその説明を省略する。The holding device 25 of the present embodiment includes a holder 16 having the same configuration as that of the first embodiment, a work holder 14,
Since the configuration is such that the workpiece 15 is held, and the other configuration is the same as that of the first embodiment, the same members are denoted by the same reference numerals and description thereof will be omitted.
取付具26は、ワークホルダ14の保持部27が形成される
とともに、保持具16の中空部18に螺着等の手段により固
着されている。この保持部27にはベアリング等の軸受28
が設けられており、この軸受28によりワークホルダ14が
回転可能に取付具26で支承し得るように構成されてい
る。The attachment 26 has a holding portion 27 of the work holder 14 formed therein, and is fixed to the hollow portion 18 of the holder 16 by means such as screwing. The holding part 27 has a bearing 28 such as a bearing.
The work holder 14 is configured to be rotatably supported by the mounting fixture 26 by the bearing 28.
上記構成からなる保持装置25において、上記第１実施
例と同様にワーク15を位置決めして、加圧，揺動して研
磨加工を行う場合、ワーク15及びワークホルダ14のみが
研磨具19の回転によって従属回転させられ、ワーク15の
従属回転に保持具16,取付具26の回転慣性力が作用せ
ず、ワーク15の回転は研磨具19に応じた滑らかなものと
なる。更に、研磨具19が研磨具19の回転軸20と研磨面間
に偏心，傾きが生じている場合、支持具12と保持具16の
凹凸両球面11,13で凸球面13の中心Ｏを中心に上記偏
心，傾きに応じて摺動し、ワーク15の被加工面15aと研
磨具19の研磨面との接触を一定に保持することができる
とともに、上記第１実施例と同様な作用，効果を奏する
ことができる。In the holding device 25 having the above-described configuration, when the work 15 is positioned and subjected to polishing by pressing and swinging similarly to the first embodiment, only the work 15 and the work holder 14 rotate the polishing tool 19. As a result, the rotational inertia of the holder 16 and the attachment 26 does not act on the subordinate rotation of the work 15, and the rotation of the work 15 becomes smooth according to the polishing tool 19. Further, when the polishing tool 19 has an eccentricity and an inclination between the rotating shaft 20 of the polishing tool 19 and the polishing surface, the center O of the convex spherical surface 13 is centered between the concave and convex spherical surfaces 11 and 13 of the support tool 12 and the holder 16. The slidable surface according to the eccentricity and inclination can maintain the contact between the work surface 15a of the work 15 and the polishing surface of the polishing tool 19 at a constant level. Can be played.
更に、第６図に示すようにロッドレンズ等の長尺物の
ワークを加工する場合にあっても、本実施例の構成から
成るワーク保持装置を用いて実施できるとともに、上記
と同様な作用，効果を奏することができる。なお、取付
具26には、ワークホルダ14及びワーク15の挿通用の孔29
を設けてある。Further, as shown in FIG. 6, even when a long workpiece such as a rod lens is machined, the work can be carried out using the work holding device having the configuration of the present embodiment, and the same operation and effect as described above can be achieved. The effect can be achieved. The attachment 26 has a hole 29 for inserting the work holder 14 and the work 15 therein.
Is provided.
（第３実施例） 第７図は、本発明の第３実施例を示し、第７図ａは断
面図、第７図ｂは平面図、第７図ｃは側面図である。以
下の説明においては、上記各実施例の同一部材には同一
符号を付して説明する。Third Embodiment FIG. 7 shows a third embodiment of the present invention. FIG. 7a is a sectional view, FIG. 7b is a plan view, and FIG. 7c is a side view. In the following description, the same members in the above embodiments will be denoted by the same reference numerals.
本実施例の研磨保持装置35は、凹球面11を形成した支
持具12に凸球面13を形成した保持具16を摺動可能に嵌装
するとともに、凹球面11及び凸球面13の一部（第７図ｃ
の二点鎖線で表した部分）を軸対称に切除し、第７図ｂ
に示すＥ部,F部の凹球面11と凸球面13とにより支持具12
と保持具16を摺動可能に保持する構成としてある。更
に、この摺動部の凸球面13には、ワーク15の回転軸Ａに
垂直で、かつ凸球面の中心Ｏを通る中心線を有するピン
36が設けられ、一方、このピン36の対応する位置の凹球
面11に第７図ｃにおいて上下方向に溝37が形設され、ピ
ン36が溝37内を凸球面の中心Ｏを中心に移動できるよう
に構成されている。なお、図においては、ピン36,溝37
を一方にのみ設けた場合を示してあるが、上記Ｅ部,F部
の双方に設けた構成とすることができる。The polishing and holding device 35 of the present embodiment is configured such that a holder 16 having a convex spherical surface 13 is slidably fitted on a support 12 having a concave spherical surface 11 and a part of the concave spherical surface 11 and the convex spherical surface 13 (FIG. Fig. 7c
7) is excised axially symmetrically,
The supporting tool 12 is formed by the concave spherical surface 11 and the convex spherical surface 13 of the portions E and F shown in FIG.
And the holder 16 are slidably held. Further, a pin having a center line perpendicular to the rotation axis A of the work 15 and passing through the center O of the convex spherical surface is provided on the convex spherical surface 13 of the sliding portion.
On the other hand, a groove 37 is formed in the vertical direction in FIG. 7c on the concave spherical surface 11 at a position corresponding to the pin 36, and the pin 36 moves inside the groove 37 around the center O of the convex spherical surface. It is configured to be able to. In the figure, the pins 36 and the grooves 37
Is shown only on one side, but it is possible to adopt a configuration provided on both the E section and the F section.
また、支持具12の凹球面11には、エアを吐出するノズ
ル38が配設され、図示を省略したエア供給源によりエア
を凹球面11と凸球面13間に供給してエアフィルムを形成
し、保持具16が円滑に摺動できるように構成されてい
る。その他の構成は、上記第２実施例と同様であるので
同一番号を付してその説明を省略する。A nozzle 38 for discharging air is provided on the concave spherical surface 11 of the support member 12, and air is supplied between the concave spherical surface 11 and the convex spherical surface 13 by an air supply source (not shown) to form an air film. , So that the holder 16 can slide smoothly. Other configurations are the same as those of the second embodiment, and thus the same reference numerals are given and the description is omitted.
本実施例によれば、上記各実施例と同様な作用，効果
を奏するとともに特に、エアフィルムを凹球面，凸球面
間に形成したので、保持具の円滑な摺動を図ることがで
き、高精度な加工面を安定的に加工することができる。
また、支持具と保持具の一部を切除した構成としてある
ので、既述の各実施例においては大径の研磨具あるいは
第８図に示す如きリング状の研磨具39等によるワーク15
の加工時に保持装置（すなわち保持具16の内周面）と干
渉を生ずる場合においても、本実施例では最適な位置条
件を保って加工することができる。According to this embodiment, the same operations and effects as those of the above embodiments are obtained, and in particular, since the air film is formed between the concave spherical surface and the convex spherical surface, the holder can be smoothly slid. An accurate machined surface can be machined stably.
Further, since the support and the holder are partially cut away, in each of the above-described embodiments, the workpiece 15 is formed by a large-diameter polishing tool or a ring-shaped polishing tool 39 as shown in FIG.
In this embodiment, even when interference occurs with the holding device (that is, the inner peripheral surface of the holder 16) during the processing, the processing can be performed while maintaining the optimal position condition.
尚、凹，凸球面にはエアのみならず、加工液を初めと
する液体を使用することもできる。In addition, not only air but also a liquid such as a working liquid can be used for the concave and convex spherical surfaces.
なお、上記各実施例においては、支持具及び保持具は
各々凹凸球面の中心に関して対称な環状の形状を用いて
実施した場合について説明してきたが、球帯状あるいは
球冠状であっても環状の場合と同様な構成で実施でき、
同様な作用，効果を奏することができる。In each of the above embodiments, the case has been described in which the support tool and the support tool are each implemented using an annular shape that is symmetrical with respect to the center of the concave and convex spherical surface. Can be implemented with the same configuration as
Similar functions and effects can be obtained.
［発明の効果］ 以上のように、本発明によれば、加工抵抗力の総和ベ
クトルが保持具の凹球面の中心を通るようにワークもし
くは研磨具を保持することによってワークもしくは研磨
具に作用するモーメント力をゼロにしてワークの被加工
面について均一な加工圧力を得ることができるように保
持することができる。その結果、外周部に面ダレ、スク
ラッチ等を発生させずに被加工面を加工することがで
き、高精度な加工面を安定的に加工することができる。[Effects of the Invention] As described above, according to the present invention, the work or the polishing tool is acted on by holding the work or the polishing tool so that the total vector of the processing resistance passes through the center of the concave spherical surface of the holding tool. The moment force can be kept at zero so that a uniform processing pressure can be obtained on the work surface of the work. As a result, the surface to be processed can be processed without causing surface sagging, scratching, and the like on the outer peripheral portion, and a highly accurate processed surface can be stably processed.
また、凹球面を有する支持具と凸球面を有する保持具
は潤滑剤，低摩擦材料、エアフィルム等を介して凹球
面，凸球面の広い面積で摺動可能に嵌装されているの
で、剛性並びに耐久性が高く、安定した加工を行うこと
ができる。更に、ロッドレンズ等の長尺物にも容易に適
用することができる。The support having a concave sphere and the holder having a convex sphere are slidably fitted over a wide area of the concave and convex spheres through a lubricant, a low friction material, an air film, or the like. In addition, stable processing can be performed with high durability. Further, the present invention can be easily applied to a long object such as a rod lens.
第１図は、本発明の第１実施例を示し、第１図ａは研磨
保持装置の断面図、第１図ｂは同平面図、第２図及び第
３図は支持具を示し、第２図a,第３図ａは平面図、第２
図b,第３図ｂは正面図、第４図は加工面の干渉縞を示す
説明図、第５図a,bは本発明の第２実施例を示す研磨保
持装置の断面図，平面図、第６図は研磨保持装置の応用
例を示す説明図、第７図a,b,cは本発明の第３実施例を
示す断面図，平面図，側面図、第８図は研磨具の斜視
図、第９図は従来技術の説明図である。 10,25,35,45……ワーク保持装置 11……凹球面 12……支持具 13……凸球面 14……ワークホルダ 15……ワーク 16……保持具 18……中空部 26……取付具 27……保持部 28……軸受 Ｏ……中心FIG. 1 shows a first embodiment of the present invention, FIG. 1a is a sectional view of a polishing and holding apparatus, FIG. 1b is a plan view of the same, FIG. 2 and FIG. 2a, 3a are plan views, FIG.
Fig. B, Fig. 3b are front views, Fig. 4 is an explanatory view showing interference fringes on the machined surface, Figs. 5a, b are sectional views and plan views of a polishing and holding apparatus showing a second embodiment of the present invention. FIG. 6 is an explanatory view showing an application example of the polishing and holding apparatus. FIGS. 7a, 7b and 7c are sectional views, plan views and side views showing a third embodiment of the present invention, and FIG. FIG. 9 is a perspective view of the prior art. 10, 25, 35, 45… Work holding device 11… Concave sphere 12… Support 13… Convex sphere 14… Work holder 15… Work 16… Holder 18… Hollow part 26… Mounting Fixture 27 Holder 28 Bearing O Center
Claims (3)
面で形成される空間内に凹球面の中心を有する環状又は
球帯状又は球冠状の支持具と、ワーク又は研磨具を保持
するワークホルダを中空部に備え且つ前記凹球面と対応
した曲率半径の凸球面を外周面に有する環状又は球帯状
又は球冠状の保持具とを具備し、 前記支持具と保持具とを前記凹球面と凸球面を介して摺
動可能にするとともに、加工によって生じる加工抵抗力
の総和ベクトルが凹球面および凸球面の中心を通るよう
に、該中心をワーク又は研磨具の加工面と一致するよう
に、前記ワークホルダは前記保持具の中空部に位置決め
されていることを特徴とする研磨保持装置。An annular or spherical band-shaped or spherical crown-shaped support having a concave spherical surface on an inner peripheral surface and having a center of the concave spherical surface in a space formed by the concave spherical surface, and a work for holding a work or a polishing tool. An annular or spherical band-shaped or spherical crown-shaped holder having a holder in the hollow portion and having a convex spherical surface having a radius of curvature corresponding to the concave spherical surface on the outer peripheral surface, wherein the support and the holder are the concave spherical surface. While allowing sliding through the convex spherical surface, so that the total vector of the processing resistance generated by processing passes through the center of the concave spherical surface and the convex spherical surface, so that the center coincides with the processing surface of the workpiece or the polishing tool, The polishing holder according to claim 1, wherein the work holder is positioned in a hollow portion of the holder.
の摺動は、前記凹球面と凸球面間に潤滑剤又は、低摩擦
材料又はエアフィルム等の摩擦低減用の材料又は機構を
介して行うことを特徴とする特許請求の範囲第１項記載
の研磨保持装置。2. The sliding between the concave spherical surface of the supporting member and the convex spherical surface of the holding member is performed by sliding between the concave spherical surface and the convex spherical surface with a lubricant or a material or mechanism for reducing friction such as a low friction material or an air film. The polishing and holding apparatus according to claim 1, wherein the polishing and holding are performed through a step.
ルダは、前記保持具に対して回転可能に保持してなるこ
とを特徴とする特許請求の範囲第１項記載の研磨保持装
置。3. A polishing holding apparatus according to claim 1, wherein said work holder for holding said workpiece or said polishing tool is rotatably held with respect to said holding tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164840A JP2599918B2 (en) | 1987-07-01 | 1987-07-01 | Polishing holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164840A JP2599918B2 (en) | 1987-07-01 | 1987-07-01 | Polishing holding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6411760A JPS6411760A (en) | 1989-01-17 |
| JP2599918B2 true JP2599918B2 (en) | 1997-04-16 |
Family
ID=15800921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62164840A Expired - Fee Related JP2599918B2 (en) | 1987-07-01 | 1987-07-01 | Polishing holding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2599918B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002355757A (en) * | 2001-03-26 | 2002-12-10 | Seiko Instruments Inc | Simultaneous double surface polishing device |
| TWI616276B (en) * | 2014-08-26 | 2018-03-01 | Ball type polishing machine with built-in load meter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58196056U (en) * | 1982-06-23 | 1983-12-27 | 富士通株式会社 | Angle polishing jig |
| JPH0825140B2 (en) * | 1987-06-12 | 1996-03-13 | シャープ株式会社 | Polishing equipment |
-
1987
- 1987-07-01 JP JP62164840A patent/JP2599918B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6411760A (en) | 1989-01-17 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |