JP2009234688A - Conveyance apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve energy saving by suppressing air consumption in a conveyance apparatus, and to completely and simply verify the retaining state of a work. <P>SOLUTION: A body 14 is provided with a supply switching mechanism 16 for switching a communicating state between a second supply passage 44 to which air is supplied and a discharge hole 24 of a base member 12. When the pressure of air in a communication passage 36 communicating with the second supply passage 44 is increased by the approach of a work, the supply switching mechanism 16 switches the second supply passage 44 and the discharge hole 24 to communicated states. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a transport apparatus capable of transporting a work while being held under a suction action by a pressure fluid.

  Conventionally, for example, a transfer device capable of transferring a semiconductor wafer and a workpiece made of a sheet-like component constituting a display device such as a liquid crystal display or a plasma display in a suctioned state using a Bernoulli effect generated by a gas flow. It has been known.

  In such a conveying apparatus, a holding surface for holding a workpiece is formed on the end surface of the conveying head, and a discharge portion to which a pressure fluid is supplied is formed in a recessed portion at the center of the holding surface. Then, the pressure fluid is supplied to the discharge portion through the inside of the transfer head, and is distributed from the discharge portion to the outer peripheral side, thereby generating a negative pressure on the holding surface of the transfer head and holding the workpiece in a non-contact manner. (For example, refer to Patent Document 1).

  In recent years, there is a demand for reducing the consumption of the pressure fluid from the viewpoints of energy saving, cost reduction, and the like in the transfer device capable of holding and transferring a workpiece under the pressure fluid supply action as described above.

JP 2003-245895 A

  However, in the prior art according to Patent Document 1, since the pressure fluid is always supplied until the transport head is brought close to the work and the work is held, the time until the work is actually held is kept. There is a problem that the amount of pressure fluid consumed increases.

  The present invention has been made in consideration of the above-described problems, and promotes energy saving by reducing the amount of air consumed, and a transport device capable of reliably and simply confirming the holding state of a workpiece. The purpose is to provide.

To achieve the above object, the present invention comprises a body,
A holding surface provided at an end of the body and facing the workpiece;
A first passage formed inside the body and supplying air supplied from an air supply unit to a discharge hole formed on the holding surface;
A second passage provided separately from the first passage and connected to a lead-out port that communicates with the air supply unit and leads the air toward the workpiece;
A switching mechanism provided on the first passage and capable of switching a communication state between the first passage and the discharge hole;
Detection means capable of detecting a holding / non-holding state of the workpiece on the holding surface;
With
The switching mechanism includes a switching valve that is displaced based on a change in pressure of the air in the second passage and communicates the first passage.

  According to the present invention, air is supplied to the first and second passages of the body, and the air supplied to the second passage is led out to the work side via the lead-out port. When the workpiece approaches the holding surface of the body and reaches a distance that can be held by the holding surface, the pressure of the air in the second passage increases, and as the pressure increases, the switching mechanism The switching valve is displaced to switch the first passage to the communication state, and the air flows from the first passage to the discharge hole.

  Therefore, the air supply to the holding surface side through the first passage and the discharge hole is stopped until the workpiece can be held in the transfer device, and the switching mechanism is switched when the workpiece holding distance is reached. Under the action, air can be supplied to the holding surface to hold the workpiece. As a result, it is possible to save energy and reduce costs by reducing the amount of air consumed in the transfer device. In addition, the holding / non-holding state of the workpiece can be reliably and easily detected by providing the detection means.

  Furthermore, the outlet port may be provided so as to open on the holding surface of the body.

  Furthermore, the lead-out port is provided in a member separate from the body, and is formed so as to be opposed to the work, so that the position of the lead-out port with respect to the body of the transfer device depends on the use environment, etc. It can be arranged freely.

  Furthermore, the detection means may be a flow rate sensor capable of detecting the flow rate of supplied air, and the workpiece holding / non-holding state may be detected based on the change in the air flow rate. Thereby, when the air flow rate increases, it is possible to easily confirm that the air is supplied to the holding surface under the switching action of the switching mechanism and the workpiece is in the holding state.

  In addition, by providing a contact member on the holding surface that can contact the workpiece when the workpiece is held, the workpiece can be held in contact with the contact member. In this state, the workpiece is prevented from moving with respect to the conveying device, and the workpiece can be conveyed without being displaced with respect to the conveying device.

  According to the present invention, the following effects can be obtained.

  That is, the air is led out to the work side through the lead-out port, and the pressure of the air in the second passage increases as the work approaches, whereby the switching valve of the switching mechanism is displaced and the first passage communicates. Since the air is supplied to the holding surface and the workpiece is held by switching to the state, it is possible to reduce the amount of air consumed in the transfer device, thereby saving energy and reducing costs. Moreover, the holding / non-holding state of the workpiece can be reliably and easily detected by providing the detection means.

  Preferred embodiments of the transport apparatus according to the present invention will be described below and described in detail with reference to the accompanying drawings.

  In FIG. 1, reference numeral 10 indicates a transport apparatus according to the first embodiment of the present invention.

  As shown in FIGS. 1 to 6, the transport device 10 includes a base member (body) 12 formed in a disc shape, a main body (body) 14 provided on the base member 12, and the main body. And a supply switching mechanism (switching mechanism) 16 that is provided in the portion 14 and switches the supply state of air to the base member 12.

  The base member 12 is formed of a disk-shaped block body having a predetermined thickness, and the main body portion 14 is connected to the center portion of the upper end surface via a bolt (not shown), and a work holding surface ( The holding surface 18 is disposed so as to face the workpiece W.

  The base member 12 includes a first supply passage (first passage) 20 formed in the central portion and extending along the axial direction, and a plurality of (for example, radially extending around the first supply passage 20) (for example, 4) radiation passages (first passages) 22 and a plurality of (for example, four) discharge holes 24 connected to the outer end of the radiation passage 22 and extending radially inward. The discharge hole 24 penetrates to the annular recess 26 formed in the lower end surface of the base member 12. That is, the first supply passage 20 communicates with the annular recess 26 through the plurality of radiation passages 22 and the discharge holes 24.

  One end of the first supply passage 20 extends to the upper end surface of the base member 12, and the other end is connected to the plurality of radiation passages 22.

  The radiation passages 22 are spaced from each other at an equal angle with the first supply passage 20 as a center, extend radially outward, and penetrate to the outer peripheral surface of the base member 12. That is, the radiation passage 22 extends in the horizontal direction orthogonal to the axis of the base member 12. Since the outer end portion of the radiation passage 22 is closed by inserting the sealing plug 28, the radiation passage 22 is not in communication with the outside.

  The discharge hole 24 is connected via a connection passage 30 in the vicinity of the outer end portion of the radiation passage 22. Since the sealing plug 28 is also inserted into the upper end portion of the connection passage 30, the connection passage 30 is not in communication with the outside of the base member 12. The discharge hole 24 is connected to the annular recess 26 so as to be tangential.

  The annular recess 26 is formed in a substantially trapezoidal cross-section that gradually becomes narrower from the lower end surface to the upper end surface side of the base member 12, and the discharge holes 24 are connected to and opened on the outer peripheral side thereof.

  On the other hand, a detection passage 32 extending radially outward is formed between two adjacent radiation passages 22 in the plurality of radiation passages 22, and in the vicinity of the outer end portion of the detection passage 32, A detection port (lead-out port) 34 extending toward the lower end surface of the base member 12 is connected. The detection passage 32 extends in a direction orthogonal to the axis of the base member 12 in the same manner as the radiation passage 22, and its outer end is sealed with a sealing plug 28. Further, the inner end portion of the detection passage 32 is connected to a communication passage (second passage) 36 formed in the main body portion 14.

  The detection port 34 is formed substantially parallel to the axis of the base member 12, opens at the lower end surface of the base member 12, and is provided at a predetermined distance from the annular recess 26 in the radially outward direction.

  The main body portion 14 includes a main body 40 having a supply port 38 to which air is supplied, and a sub body 42 connected to a side portion of the main body 40.

  A supply port 38 is formed on the upper surface of the main body 40, and a second supply passage (first passage) 44 extending in a straight line downward is connected to the lower portion of the supply port 38. The second supply passage 44 is formed and connected to be aligned with the first supply passage 20 of the base member 12.

  The supply port 38 is connected to an air supply source 48 (see FIG. 2) via the tube 46, and air is supplied from the air supply source 48 to the supply port 38. A flow rate sensor 50 capable of detecting the flow rate of air supplied from the air supply source 48 to the supply port 38 is provided between the supply port 38 and the air supply source 48.

  Further, a bypass passage (second passage) 52 extending in the lateral direction is connected to the supply port 38 and communicates with the communication passage 36 of the sub body 42 through the bypass passage 52.

  Further, the main body 40 is formed with a mounting hole 54 that is orthogonal to the second supply passage 44 and in which the supply switching mechanism 16 is provided. The mounting hole 54 is provided in a side portion of the main body 40 and the second It penetrates so as to intersect the supply passage 44. The mounting hole 54 includes a large-diameter portion and a small-diameter portion adjacent to the large-diameter portion, and is formed so that the small-diameter portion is on the subbody 42 side (arrow A direction). The mounting hole 54 communicates with the bypass passage 52 of the sub body 42 through the small diameter portion and communicates with the second supply passage 44 through the sub passage 56 formed between the second supply passage 44 and the large diameter portion. ing.

  Further, the main body 40 is provided with a seal member 60a on the joint surface with the sub body via a groove portion, and airtightness between the main body 40 and the sub body 42 and the outside is maintained, and the main body 40 is connected to the base member 12. On the joint surface, a seal member 60b is provided in an annular groove provided so as to surround the second supply passage 44, and between the first supply passage 20 and the second supply passage 44 of the base member 12 and the outside. Holds airtightness.

  The sub body 42 is formed at substantially the same height as the main body 40, and a communication path 36 through which the air supplied to the supply port 38 flows is formed on the joint surface facing the main body 40. The communication path 36 is formed in parallel with the joint surface, extends toward the base member 12 side, and is bent at a right angle in a direction (arrow A direction) away from the main body 40 at a portion facing the mounting hole 54. After extending in a direction away from the mounting hole 54, it is bent again and extends toward the base member 12 side. The communication path 36 is connected to and communicates with the detection path (second path) 32 of the base member 12. The sub-body is provided with a seal member 60c on the joint surface with the base member 12 so as to surround the communication path 36, and maintains airtightness between the detection path 32 and the communication path 36 and the outside.

  That is, a part of the air supplied to the supply port 38 is supplied to the detection passage 32 through the bypass passage 52 and the communication passage 36 and then led out from the detection port 34 of the base member 12 to the outside.

  Further, the sub-body 42 is formed with a needle hole 62 coaxially with the bypass passage 52 of the main body 40, and an adjustment needle 64 (described later) constituting the supply switching mechanism 16 is provided. That is, the needle hole 62 extends in a direction orthogonal to the second supply passage 44 of the main body 40 (in the directions of arrows A and B), similarly to the bypass passage 52.

  The supply switching mechanism 16 is provided in the mounting hole 54 and is displaceable along a small diameter portion of the mounting hole 54, a holder 68 screwed into the large diameter portion, and the spool valve 66. And a spring 70 interposed between the holder 68 and the holder 68.

  In addition, a flow rate adjustment mechanism including an adjustment needle 64 capable of adjusting the flow rate of air flowing from the bypass passage 52 to the communication passage 36 is provided. The adjustment needle 64 is provided so that the back pressure applied to the spool valve 66 can be adjusted optimally.

  The spool valve 66 is inserted through the small diameter portion of the mounting hole 54, and the shaft portion 72 that switches the communication state of the second supply passage 44 and the diameter of the shaft portion 72 is increased. And a flange portion 74 to be inserted. The shaft portion 72 is formed with a land portion 76 that can close the second supply passage 44 and a communication portion 78 that is recessed in the radially inward direction with respect to the land portion 76 and communicates with the second supply passage 44. The land portion 76 is provided on the flange portion 74 side (arrow B direction) with respect to the communication portion 78. The width dimensions of the land portion 76 and the communication portion 78 are set to be larger than the diameter of the second supply passage 44.

  That is, the spool valve 66 is displaced along the mounting hole 54 in a direction orthogonal to the second supply passage 44 (in the directions of arrows A and B), and the land portion 76 or the communication portion 78 is subjected to the displacement action. Is arranged so as to face the second supply passage 44, thereby switching the communication state of the second supply passage 44.

  The holder 68 has a screw engraved on the outer peripheral surface thereof, and is screwed into the large-diameter portion of the mounting hole 54, and protrudes toward the spool valve 66 side (arrow A direction) at a substantially central portion thereof. A guide pin is formed at the central portion, and one end of the spring 70 is inserted outside the guide pin, whereby the spring 70 is guided.

  The spring 70 is made of, for example, a coil spring, and is interposed between the flange portion 74 of the spool valve 66 and the end portion of the holder 68, and in a direction in which the spool valve 66 is separated from the holder 68 (arrow A direction). It is energized.

  The adjustment needle 64 is screwed into the needle hole 62 via a screw formed on the outer peripheral surface on one end portion side, and a tapered portion 80 that gradually decreases in diameter toward the tip is formed on the other end portion. Is done. The tapered portion 80 is inserted into the bypass passage 52 through the communication passage 36. Then, when the adjustment needle 64 is screwed, the adjustment needle 64 moves forward and backward along the needle hole 62. An O-ring 82 is attached to the outer peripheral surface of the adjustment needle 64 via an annular groove, and is in sliding contact with the inner peripheral surface of the needle hole 62. Thereby, the air flowing through the communication passage 36 and the bypass passage 52 does not leak to the outside, and the air tightness between the communication passage 36 and the bypass passage 52 and the outside is maintained.

  That is, the air flowing into the communication passage 36 through the bypass passage 52 flows through between the inner wall surface of the bypass passage 52 and the tapered portion 80, so that the adjustment needle 64 is moved in the axial direction (arrows A and B). Direction) and adjusting the gap between the bypass passage 52 and the tapered portion 80, the flow rate of air flowing through the communication passage 36 to the detection port 34 can be freely adjusted. .

  The transport apparatus 10 according to the embodiment of the present invention is basically configured as described above, and the operation and effects thereof will be described next. Note that a state where the transfer device 10 is not approaching the workpiece W will be described as an initial state.

  In this initial state, air is supplied from the air supply source 48 to the supply port 38, and the air is supplied to the second supply passage 44 and flows to the communication passage 36 through the bypass passage 52. At this time, the spool valve 66 is displaced in a direction (arrow A direction) away from the holder 68 under the elastic action of the spring 70, the flange portion 74 is engaged with the step between the large diameter portion and the small diameter portion, and The land portion 76 is in the valve-closed state facing the second supply passage 44. Therefore, the communication of the second supply passage 44 is blocked by the land portion 76, and the air supplied to the second supply passage 44 does not flow to the first supply passage 20 and the radiation passage 22 of the base member 12.

  On the other hand, the air flowing through the bypass passage 52 flows through a gap between the tapered portion 80 of the adjustment needle 64 and the bypass passage 52, and after being adjusted to a predetermined flow rate, the detection passage 32 of the base member 12 through the communication passage 36. Supplied to. Then, it flows from the detection passage 32 to the detection port 34 and is led out below the base member 12. At this time, since the workpiece W has not yet been arranged below the base member 12, the change in the air pressure inside the detection port 34, the detection passage 32, and the communication passage 36 is slight. In other words, the pressure of the air has not yet reached a magnitude that allows the spool valve 66 to be displaced toward the holder 68 (in the direction of arrow B) against the spring force of the spring 70.

  Next, the transfer device 10 is moved to a position facing the workpiece W via a robot arm or the like (not shown) so that the workpiece holding surface 18 of the base member 12 is above the workpiece W as shown in FIG. Move to. Then, the work holding surface 18 of the transport device 10 and the work W face each other, and the transport device 10 is gradually approached to the work W in a parallel state with a predetermined interval.

  As a result, the workpiece W is positioned below the detection port 34, and accordingly, the workpiece W becomes a flow resistance of the air led out from the detection port 34. That is, the air flow led downward from the detection port 34 is hindered by the work W disposed below the detection port 34.

  As a result, the pressure of the air in the detection passage 32 and the communication passage 36 supplying air to the detection port 34 increases, and the end of the spool valve 66 is moved by the increase in the air pressure in the communication passage 36. The back pressure is pressed toward the holder 68 (arrow B direction).

  Then, the spool valve 66 is displaced toward the holder 68 (in the direction of arrow B) against the elastic force of the spring 70 as the air pressure rises in the communication passage 36, and the communication portion 78 of the spool valve 66 is moved. Is opened to a position where it faces the second supply passage 44 (see FIG. 6).

  As a result, the air that has been supplied from the supply port 38 to the second supply passage 44 flows to the first supply passage 20 of the base member 12 through the communication portion 78 of the spool valve 66. At this time, the flow rate of the air supplied to the transfer device 10 increases, and the flow rate change is detected by the flow rate sensor 50. Thereby, it is confirmed that the holding | maintenance of the workpiece | work W by the conveying apparatus 10 was started. That is, the flow sensor 50 functions as a detection unit that can detect the holding / non-holding state of the workpiece W.

  In this case, the air flowing through the second supply passage 44 flows through the sub passage 56 toward the mounting hole 54 and presses the flange portion 74 of the spool valve 66 toward the holder 68 (in the direction of arrow B). Even when the back pressure of the air in the communication passage 36 is reduced, the spool valve 66 is pressed by the air in the second supply passage 44, so that the spool valve 66 is displaced to the holder 68 side. Retained.

  This air is supplied from the first supply passage 20 to the radiation passage 22 and led out from the discharge hole 24 to the annular recess 26. Since the discharge hole 24 is arranged so as to be tangential to the annular recess 26, the air led out from the discharge hole 24 circulates along the annular recess 26. As a result, a swirling flow due to air is generated in the annular recess 26, and the air flows along the annular recess 26 recessed in a substantially trapezoidal cross section while increasing the flow velocity thereof.

  Then, the air that has swirled between the workpiece W arranged at a position facing the workpiece holding surface 18 of the base member 12 and the workpiece holding surface 18 moves along the workpiece holding surface 18 at a high speed toward the outer peripheral side. And the negative pressure is generated between the work holding surface 18 and the work W.

  As a result, the workpiece W (for example, a wafer or the like) disposed at a position facing the workpiece holding surface 18 of the base member 12 is sucked by the negative pressure generated in the annular recess 26, while the workpiece holding surface 18 of the base member 12. The workpiece W is held in a non-contact state due to the balance between the negative pressure and the positive pressure. As a result, as shown in FIG. 6, the workpiece W is conveyed to a predetermined position while being held on the workpiece holding surface 18 of the conveying apparatus 10.

  As described above, in the first embodiment, the separation distance between the workpiece holding surface 18 and the workpiece W in the transport device 10 is detected, and when the workpiece W reaches a distance that can be attracted, the supply switching mechanism 16 is detected. And the supply of air to the work holding surface 18 can be started to hold the work W. As a result, until the work W is held, the supply of air to the work holding surface 18 is stopped, and the supply of the air is started when the work W can be held. Thus, it is possible to reduce the amount of air consumed at 10.

  Here, the air consumption amount of the transfer device 10 according to the first embodiment and the air consumption amount of the transfer device according to the related art will be compared with reference to FIG. Note that the solid line in FIG. 7 is a characteristic indicating the air consumption C of the transfer apparatus 10 according to the first embodiment, and the broken line is a characteristic indicating the air consumption D of the transfer apparatus according to the related art. .

  As shown in FIG. 7, the transport apparatus 10 according to the present embodiment has a small air consumption C in a state where the workpiece W is in a non-holding state (before E in FIG. 7). It is understood that the air consumption C begins to increase while being sucked and held (at time E in FIG. 7), and is held constant in the holding state of the workpiece W (after E in FIG. 7). . On the other hand, it can be understood that in the transfer device according to the prior art, the air consumption D is constant from the non-holding state to the holding state of the workpiece W.

  As described above, in the transfer apparatus 10 according to the first embodiment, the air is always supplied before the workpiece W is held, unlike the conventional transfer apparatus that does not include the supply switching mechanism 16 that can switch the supply state of the air. It is not necessary to keep supplying the air, and the air consumption can be suitably reduced to save energy and reduce costs.

  Further, by detecting a change in the air flow rate with a flow rate sensor 50 provided between the air supply source 48 and the supply port 38, the workpiece W can be reliably held or not held based on the increase or decrease in the air flow rate. It can be easily confirmed.

  Next, a transport apparatus 100 according to a second embodiment is shown in FIGS. Note that the same components as those of the transport apparatus 10 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the transport apparatus 100 according to the second embodiment, the detection port 102 for detecting the approach state of the work W with respect to the work holding surface 18 of the transport apparatus 100 is provided with the base member 12 capable of holding the work W. Is provided in a separate detection block 104, and is different from the transport apparatus 10 according to the first embodiment in that the detection block 104 and the communication path 36 of the sub-body 42 are connected via a pipe 106. .

  The detection block 104 is provided, for example, at a position separated from the transport device 100 by a predetermined distance, and includes a detection port 102 and a connection port 108 communicating with the detection port 102. On the other hand, in the transport device 100, a sub port 110 communicating with the communication path 36 is formed on the side surface of the sub body 42, and the sub port 110 and the connection port 108 are connected by a pipe. Then, the air supplied to the supply port 38 is guided to the sub port 110 via the bypass passage 52 and the communication passage 36 and supplied to the detection port 102 via the pipe 106.

  In the second embodiment, the detection port 102 capable of detecting the approaching state of the workpiece W with respect to the workpiece holding surface 18 of the transfer apparatus 100 can be arranged separately from the transfer apparatus 100. Therefore, the arrangement of the detection ports 102 can be freely set regardless of the installation location of the transfer device 100.

  Next, a transport device 150 according to a third embodiment is shown in FIGS. Note that the same components as those of the transport apparatus 10 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the transfer device 150 according to the third embodiment, the first supply passage 20, without separately providing a detection port and a detection passage for detecting the approaching state of the workpiece W with respect to the workpiece holding surface 18, It is different from the transport apparatuses 10 and 100 according to the first and second embodiments in that the second supply path 44 and the radiation path 160 are shared.

  In the conveying device 150, the communication passage 154 of the sub body 152 is connected to the downstream side of the spool valve 66 in the second supply passage 44 via a return passage 158 formed in the main body 40, and One supply passage 20 is connected to a plurality of radiation passages 160, and the radiation passages 160 are connected to discharge holes 162 extending to the work holding surface 18 while being inclined outward in the radial direction.

  The air supplied to the supply port 38 is supplied from the return passage 158 to the second supply passage 44 through the bypass passage 52 and the communication passage 154 in an initial state where the conveying device 150 is not approaching the workpiece W. The first supply passage 20 and the radiation passage 160 lead out downward from the plurality of discharge holes 162, respectively. At this time, since the workpiece W is not yet arranged below the base member 12, the change in the air pressure inside the discharge hole 162, the radiation passage 160, and the communication passage 154 is slight. In other words, the pressure of the air has not yet reached a magnitude that allows the spool valve 66 to be displaced toward the holder 68 (in the direction of arrow B) against the spring force of the spring 70.

  Next, the conveying device 150 is made to approach the workpiece W and gradually approach, so that the air pressure in the communication passage 154 rises, and the spool valve 66 resists the elastic action of the spring 70 to hold the holder. Displace to 68 side (arrow B direction). The air supplied to the supply port 38 is led out from the discharge hole 162 through the second supply passage 44 and the first supply passage 20, and the workpiece W is held on the workpiece holding surface 18. That is, the discharge hole 162 functions as a detection port for detecting the approaching state of the workpiece W, and the first supply passage 20 and the radiation passage 160 function as detection passages.

  As described above, in the third embodiment, the discharge port 162 to which air is supplied when the workpiece W is held without separately providing a detection port and a detection passage for detecting the approaching state of the workpiece W. Since the first supply passage 20 and the radiation passage 160 are shared, the structure can be simplified and the manufacturing cost can be reduced, and the maintainability can be improved.

  Next, a transport device 200 according to a fourth embodiment is shown in FIGS. 12A and 12B. Note that the same components as those of the transport apparatus 10 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the transfer apparatus 200 according to the fourth embodiment, the first to third points are provided in that an annular pad (contact member) 202 is provided on the work holding surface 18 of the base member 12 capable of holding the work W. This is different from the transfer apparatuses 10, 100, and 150 according to the embodiment.

  As shown in FIGS. 12A and 12B, the pad 202 is formed in an annular shape from, for example, an elastic material such as rubber, and is provided at a predetermined distance from the annular recess 26 in the radially outward direction. It is provided so as to protrude at a predetermined height with respect to the holding surface 18. The pad 202 is provided so as to face the detection port 34, and the pad 202 has a hole portion 204 communicating with the detection port 34. That is, the air supplied to the detection port 34 is led downward through the hole 204.

  As described above, in the fourth embodiment, by providing the workpiece holding surface 18 of the base member 12 that can hold the workpiece W with the annular pad 202, the workpiece W held by the workpiece holding surface 18 is transferred to the pad. 202, the workpiece W is prevented from moving with respect to the conveying device 200, and the workpiece W can be conveyed without being displaced while being held by the conveying device 200. (See FIG. 12B).

  In addition, the conveying apparatus according to the present invention is not limited to the above-described embodiment, and it is needless to say that various configurations can be adopted without departing from the gist of the present invention.

1 is an overall cross-sectional view illustrating a transport apparatus according to a first embodiment of the present invention. It is a schematic circuit diagram which shows the distribution route of the air in the conveying apparatus of FIG. It is sectional drawing along the III-III line of FIG. It is sectional drawing along the IV-IV line of FIG. It is the top view which looked at the conveying apparatus of FIG. 1 from the base member side. FIG. 2 is an overall cross-sectional view showing a state in which a spool valve is displaced in the transport device of FIG. It is a characteristic line figure which shows the relationship between the air flow volume and time in the conveying apparatus of FIG. It is whole sectional drawing which shows the conveying apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic circuit diagram which shows the distribution route of the air in the conveying apparatus of FIG. It is whole sectional drawing which shows the conveying apparatus which concerns on the 3rd Embodiment of this invention. It is a schematic circuit diagram which shows the distribution route of the air in the conveying apparatus of FIG. 12A and 12B are overall cross-sectional views showing a transfer apparatus according to a fourth embodiment of the present invention. FIG. 12A shows a state before holding a work, and FIG. It is sectional drawing which shows a state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10, 100, 150, 200 ... Conveying apparatus 12 ... Base member 14 ... Main-body part 16 ... Supply switching mechanism 18 ... Work holding surface 20 ... 1st supply path 22, 160 ... Radiation path 24, 162 ... Discharge hole 26 ... Annular recessed part 34, 102 ... Detection port 36, 154 ... Communication passage 38 ... Supply port 44 ... Second supply passage 48 ... Air supply source 50 ... Flow rate sensor 52 ... Bypass passage 54 ... Mounting hole 64 ... Adjustment needle 66 ... Spool valve 68 ... Holder 70 ... Spring 76 ... Land part 78 ... Communication part 80 ... Tip 104 ... Detection block 158 ... Return passage 202 ... Pad

Claims (5)

Body,
A holding surface provided at an end of the body and facing the workpiece;
A first passage formed inside the body and supplying air supplied from an air supply unit to a discharge hole formed on the holding surface;
A second passage provided separately from the first passage and connected to a lead-out port that communicates with the air supply unit and leads the air toward the workpiece;
A switching mechanism provided on the first passage and capable of switching a communication state between the first passage and the discharge hole;
Detection means capable of detecting a holding / non-holding state of the workpiece on the holding surface;
With
The transfer mechanism includes a switching valve that is displaced based on a change in pressure of the air in the second passage and communicates the first passage. In the conveying apparatus of Claim 1,
The transport device according to claim 1, wherein the lead-out port is provided to be opened in the holding surface of the body. In the conveying apparatus of Claim 1,
The conveying device, wherein the lead-out port is provided in a member separate from the body and is formed to open so as to face the workpiece. In the conveyance apparatus of any one of Claims 1-3,
The detection unit includes a flow sensor capable of detecting a flow rate of the supplied air, and detects a holding / non-holding state of the workpiece based on a change in the air flow rate. In the conveyance apparatus of any one of Claims 1-4,
The conveying device according to claim 1, wherein the holding surface is provided with a contact member capable of contacting the work when the work is held.

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