CN108450020B - Pusher device - Google Patents
Pusher device Download PDFInfo
- Publication number
- CN108450020B CN108450020B CN201680070077.3A CN201680070077A CN108450020B CN 108450020 B CN108450020 B CN 108450020B CN 201680070077 A CN201680070077 A CN 201680070077A CN 108450020 B CN108450020 B CN 108450020B
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- valve
- passage
- inflow
- pusher
- accommodating space
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Check Valves (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Multiple-Way Valves (AREA)
Abstract
The present invention relates to a pusher device comprising: a housing including a pusher accommodating space disposed to the center and opened downward, a valve accommodating space disposed adjacent to the pusher accommodating space and capable of accommodating a valve structure, an inflow passage having one end connected to an external air inflow portion and the other end connected to the valve accommodating space, a discharge passage having one end connected to the outside and the other end connected to the valve accommodating space, and a connection passage having one end connected to the valve accommodating space and the other end connected to the pusher accommodating space; a valve structure that selectively communicates the connection passage with the inflow passage and the discharge passage; and a pressurizing unit which is in contact with the device to be inspected by the reduction of air pressure when the inflow passage is communicated with the connecting passage and the air flows into the pusher accommodating space from the air inflow part so as to pressurize the device to be inspected to the side of the inspection device; and the valve structure and the pressurizing unit are disposed in the same housing.
Description
Technical Field
The present invention relates to a pusher device, and more particularly, to a pusher device in which a housing and a valve are integrated to reduce the overall size and weight of the device.
Background
Generally, the semiconductor device after the inspection is electrically inspected. In order to perform such an electrical inspection, after a semiconductor device transferred from the outside is mounted in a specific inspection apparatus, a specific pressure is applied to the semiconductor device so that a terminal of the semiconductor device is brought into contact with a pad of the inspection apparatus with a fixed pressure.
Such a device for pressing the semiconductor device on the inspection device side is referred to as a pusher device, and such a pusher device generally includes: a housing having a cylinder structure therein and operated by air pressure; and a valve device arranged between the cylinder for supplying air and the housing, and used for switching ON/OFF (ON/OFF) the air supply.
In this case, a specific space filled with air flowing from the outside and a pressurizing means for pressurizing the upper surface of the semiconductor device by ascending or descending in the space are provided in the case.
The valve device is provided with a valve for connecting to the cylinder and the housing to turn on/off air supplied from the cylinder, and is provided outside the housing independently of the housing.
As described above, the pusher device of the related art is configured such that the housing and the valve device are separately manufactured and then attached to each other, and therefore, there is a problem in that the overall size and weight are large.
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a pusher device in which a housing and a valve are integrated to reduce the overall size and weight of the device.
Means for solving the problems
The pusher device of the present invention for achieving the above object is for pressing a terminal of a device under inspection to an inspection device, and comprises: a housing including a pusher accommodating space disposed to the center and opened downward, a valve accommodating space disposed adjacent to the pusher accommodating space and capable of accommodating a valve structure, an inflow passage having one end connected to an external air inflow portion and the other end connected to the valve accommodating space, a discharge passage having one end connected to the outside and the other end connected to the valve accommodating space, and a connection passage having one end connected to the valve accommodating space and the other end connected to the pusher accommodating space; a valve structure that selectively communicates the connection passage with either the inflow passage or the discharge passage; and a pressurizing unit which is contacted with the device to be inspected through the reduction of air pressure when the inflow passage is communicated with the connecting passage and the air flows into the pusher accommodating space from the air inflow part, so as to pressurize the device to be inspected on the side of the inspection device; and the valve structure and the pressurizing unit are arranged in the same shell.
In the pusher device, the valve structure may be inserted into a valve accommodating space of the housing and moved between an inflow position at which the valve structure causes the connection passage and the inflow passage to communicate with each other and blocks communication between the connection passage and the discharge passage, and a discharge position at which the valve structure causes the connection passage and the discharge passage to communicate with each other and blocks communication between the connection passage and the inflow passage.
In the pusher device, when the valve structure moves to the inflow position and air flows into the pusher housing space, the pressurizing means may be brought into contact with the device to be inspected by a decrease in air pressure to pressurize the device to be inspected on the inspection device side.
In the pusher device, the valve structure may include: a cylindrical valve bush inserted into the valve accommodating space and having a rod insertion hole communicating an upper end and a lower end; a valve stem at least partially inserted into the valve bushing and moving between an inflow position and a discharge position; an elastic biasing unit that elastically biases the valve rod from the discharge position to an inflow position; and an operation unit disposed on an upper end side of the cylindrical valve member and capable of contacting the valve rod to pressurize the valve rod to move the valve rod to a discharge position.
In the pusher device, the valve accommodating space may include an inflow portion connected to the inflow passage, a discharge portion connected to the discharge passage, and a connection portion connected to the connection passage, the connection portion being disposed between the inflow portion and the discharge portion.
In the pusher device, the valve bush may be provided with a communication hole at an upper end thereof, the communication hole communicating the inflow passage with the rod insertion hole therein, and a bush seal provided below the communication hole to seal a space between an outer surface of the valve bush and the valve accommodation space.
In the pusher device, the valve stem may include: a column part, at least a part of which is inserted into the rod insertion hole of the valve bushing, and which has an outer diameter smaller than the rod insertion hole; and a sealing part integrally connected to the column part and provided with a sealing seal; the inflow position is a position at which the packing of the packing section is in contact with an inner surface of the rod insertion hole of the valve bushing in an airtight manner, and the discharge position is a position at which the packing of the packing section is in contact with an inner wall of the accommodation space between the inflow portion and the connection portion in an airtight manner.
In the connection portion of the pusher device, the valve stem is spaced apart from an inner wall of the valve accommodating space by a predetermined interval, and when the sealing packing of the sealing portion is positioned at the inflow portion, the connection passage of the connection portion can communicate with the discharge passage through a lower end of the valve stem.
In the pusher device, when the sealing packing of the sealing portion is fitted into the valve stem, the inflow passages of the connecting portion can communicate with each other through a space between the outer peripheral surface of the valve stem and the sealing portion.
Effects of the invention
The valve structure and the pressurizing unit are disposed in the same housing, so that there is an advantage that a space for inspecting the semiconductor device can be minimized.
Drawings
Fig. 1 is a perspective view of a pusher device of an embodiment of the present invention.
Fig. 2 is an exploded perspective view of fig. 1.
Fig. 3 and 4 are side views showing a state before the pusher device presses the semiconductor device.
Fig. 5 is a plan view showing a state before the pusher device pressurizes the semiconductor device.
Figure 6 is a cross-sectional view vi-vi of figure 5.
FIG. 7 is a cross-sectional view of the VII-VII of FIG. 5.
FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 5.
Fig. 9 is a plan view showing a state where the pusher device presses the semiconductor device.
FIG. 10 is a cross-sectional view of X-X of FIG. 9.
FIG. 11 is a cross-sectional view of XI-XI of FIG. 9.
FIG. 12 is a cross-sectional view of XII-XII of FIG. 9.
Detailed Description
Hereinafter, a pusher device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
Refer to fig. 1 to 4. The invention relates to a pusher device 10 for pressing a terminal of a device 50 to be inspected to an apparatus for inspection, the pusher device 10 comprising: a housing 20, a valve structure 30, and a pressurizing unit 40; the valve structure 30 and the pressurizing unit 40 are disposed in the same housing 20.
The casing 20 has a rectangular parallelepiped shape as a whole, and includes a pusher accommodating space 21, a valve accommodating space 22, an inflow passage 23, a discharge passage 24, and a connection passage 25 inside thereof.
The pusher housing space 21 is arranged substantially at the center and is open downward, and is formed in a substantially cylindrical shape. The other end of the connecting passage 25 is connected to the pusher housing space 21.
The valve housing space 22 is disposed adjacent to the pusher housing space 21, and is capable of housing the valve assembly 30, and houses the valve assembly 30 therein. Specifically, the valve housing space 22 is in the form of a groove that opens upward. The valve housing space 22 connects the other end of the inflow passage 23, the other end of the discharge passage 24, and one end of the connecting passage 25.
Such a valve housing space 22 includes an inflow portion 221 connected to the inflow passage 23, a discharge portion 222 connected to the discharge passage 24, and a connection portion 223 connected to the connection passage 25, and the connection portion 223 is disposed between the inflow portion 221 and the discharge portion 222. In the connecting portion 223, the stem 32 is spaced apart from the inner wall of the valve accommodating space 22 by a predetermined distance, and when the sealing seal 322a of the sealing portion 322 is positioned at the inflow portion 221, the connecting passage 25 of the connecting portion 223 communicates with the discharge passage 24 through the lower end of the stem 32.
When the sealing packing 322a of the sealing part 322 is fitted into the valve stem 32, the inflow path 23 of the connecting part 223 can communicate with each other through a space between the outer peripheral surface of the valve stem 32 and the sealing part 322.
One end of the inflow passage 23 is connected to an external air inflow portion 231, and the other end is connected to the valve housing space 22. Specifically, the inflow passage 23 is a passage: one end of the air pump is connected to an external air pump so that air supplied from the air pump (not shown) can flow in.
One end of the discharge passage 24 is connected to an external discharge passage 241, and the other end is connected to the valve housing space 22, and the following functions of the discharge passage 24 are performed: when the pressurizing unit 40 rises after completing the pressurization of the device 50 under inspection, air can be discharged.
The connection passage 25 has one end connected to the valve housing space 22 and the other end connected to the pusher housing space 21. Such a connection passage 25 is used as a passage for allowing air to flow into the interior of the impeller housing space 21 or as a passage for discharging air inside the impeller housing space 21 to the outside.
The valve structure 30 allows the connection passage 25 to selectively communicate with either the inflow passage 23 or the discharge passage 24. Specifically, the valve structure 30 is inserted into the valve accommodating space 22 of the housing 20 and moved between an inflow position and a discharge position, the valve structure 30 causes the connection passage 25 and the inflow passage 23 to communicate with each other and blocks the communication between the connection passage 25 and the discharge passage 24 at the inflow position, and the valve structure 30 causes the connection passage 25 and the discharge passage 24 to communicate with each other and blocks the communication between the connection passage 25 and the inflow passage 23 at the discharge position.
The valve structure 30 includes a valve bush 31, a valve stem 32, an elastic biasing unit 33, and an operating unit 34.
The valve bush 31 has a cylindrical shape, is inserted into the valve accommodating space 22, and has a rod insertion hole 311 communicating the upper and lower ends. The valve bush 31 has a communication hole 312 at an upper end thereof for communicating the inflow passage 23 with the rod insertion hole 311 therein, and a bush seal 313 for sealing a space between an outer surface of the valve bush 31 and the valve accommodating space 22 is provided below the communication hole 312.
At least a part of the valve stem 32 is inserted into the valve bushing 31 and moves between the inflow position and the discharge position. The above-mentioned valve stem 32 includes: a column portion 321 at least partially inserted into the rod insertion hole 311 of the valve bush 31 and having an outer diameter smaller than that of the rod insertion hole 311; and a sealing portion 322 integrally connected to the column portion 321, and provided with a sealing seal 322 a. At this time, the inflow position is a position where the packing 322a of the packing 322 is in contact with the inner surface of the rod insertion hole 311 of the valve bushing 31 in an airtight manner, and the discharge position is a position where the packing of the packing is in contact with the inner wall of the valve accommodating space 22 between the inflow portion 221 and the connection portion 223 in an airtight manner.
The elastic biasing means 33 elastically biases the valve rod 32 from the discharge position to the inflow position. Specifically, the elastic biasing means 33 is disposed between the lower end of the valve rod 32 and the lower end of the valve housing space 22 to elastically support the valve rod 32.
The operation unit 34 is disposed on the upper end side of the cylindrical valve member, and is capable of contacting the valve stem 32 to pressurize the valve stem 32 and move the valve stem to a discharge position.
When the inflow path 23 communicates with the connection path 25 and air flows into the pusher housing space 21 from the air inflow portion 231, the pressurizing unit 40 is brought into contact with the device 50 to be inspected by a decrease in air pressure, thereby pressurizing the device 50 to be inspected on the inspection apparatus side. When the valve structure 30 moves to the inflow position and air flows into the pusher housing space 21, the pressurizing means 40 is brought into contact with the device 50 to be inspected by a decrease in air pressure, thereby pressurizing the device 50 to be inspected on the inspection apparatus side. Such a pressurizing unit 40 includes: a pressurizing plate 41 which is in contact with the upper surface of the device 50 to be inspected and pressurizes the device 50 to be inspected; a piston 42 connected to the pressure plate 41 and ascending or descending by air pressure; and a piston spring 43 for elastically biasing the piston 42 upward. The pressurizing unit has the following structure: when air flows into the pusher housing space 21, the piston 42 is lowered by the air pressure, and the pressurizing plate 41 is also lowered together with the piston, and when the air pressure is removed, the piston 42 is raised by the piston spring 43. Since such a pressurizing unit 40 is a general structure of the pusher device 10, a detailed description thereof is omitted.
The pusher device 10 of the present invention functions and effects as follows.
First, fig. 5 to 8 show a case where the valve structure 30 is located at the discharge position and the pressurizing unit 40 is raised. At this time, since the connection passage 25 and the discharge passage 24 communicate with each other, the air inside the pusher housing space 21 is discharged to the outside.
When the operation means 34 is operated in the above-described state and the valve structure 30 is raised by the elastic biasing means 33, the operation proceeds as shown in fig. 9 to 12. That is, when the valve assembly 30 is raised, the sealing seal 322a of the sealing portion 322 air-tightly contacts the inner surface of the stem 32 to block the communication between the discharge passage 24 and the connection passage 25. In contrast, the inflow passage 23 and the connection passage 25 are made to communicate with each other. Thereby, the external air is supplied to the pusher housing space 21 through the inflow passage 23 and the connection passage 25, and the pressurizing unit 40 is lowered to pressurize the device under test 50 on the inspection apparatus side.
On the contrary, when the valve is operated reversely again, the valve structure 30 descends and the sealing packing 322a of the sealing part 322 blocks the inflow part 221 from the connection part 223 in an airtight manner as shown in fig. 5 to 8, thereby preventing the inflow of air from the outside. In contrast, the discharge passage 24 and the connection passage 25 are made to communicate with each other. That is, the air inside the pusher housing space 21 is discharged to the outside through the discharge passage 24 by the connection passage 25, the space between the inner wall of the valve housing space 22 and the valve stem 32, the lower end of the valve stem 32, and the stem insertion hole 311 of the valve stem 32.
The pusher device of the present invention has an advantage that not only the overall size of the pusher device but also the weight can be reduced by integrally disposing the valve structure including the pressurizing unit inside the housing.
Claims (8)
1. A pusher device for pressing a terminal of a device under inspection to an apparatus for inspection, the pusher device comprising:
a housing including a pusher accommodating space disposed to the center and opened downward, a valve accommodating space disposed adjacent to the pusher accommodating space and capable of accommodating a valve structure, an inflow passage having one end connected to an external air inflow portion and the other end connected to the valve accommodating space, a discharge passage having one end connected to the outside and the other end connected to the valve accommodating space, and a connection passage having one end connected to the valve accommodating space and the other end connected to the pusher accommodating space;
the valve structure, make the said connecting passage communicate with either one in the said inflow passage and said discharge passage selectively; and
a pressurizing unit that pressurizes the device under inspection by bringing the device under inspection into contact with the device under inspection by a decrease in air pressure when the inflow passage communicates with the connection passage and air flows into the pusher housing space from the air inflow portion; and is
The valve structure and the pressurizing unit are disposed in the same housing,
wherein the valve structure body is inserted into the valve housing space of the housing and is movable between an inflow position at which the connection passage and the inflow passage communicate with each other and communication between the connection passage and the discharge passage is blocked, and a discharge position at which the connection passage and the discharge passage communicate with each other and communication between the connection passage and the inflow passage is blocked.
2. The pusher device according to claim 1, wherein if the valve structure is moved to the inflow position and air flows into the interior of the pusher housing space, the pressurizing unit is brought into contact with the device under inspection by a decrease in air pressure to pressurize the device under inspection side.
3. The pusher device of claim 1, wherein the valve formation comprises:
a cylindrical valve bush inserted into the valve accommodating space and having a rod insertion hole communicating an upper end and a lower end;
a valve stem at least partially inserted into the valve bushing to move between the inlet position and the outlet position;
an elastic biasing unit that elastically biases the valve rod from the discharge position to the inflow position; and
and an operation unit disposed on an upper end side of the cylindrical valve member and capable of contacting the valve stem to pressurize the valve stem and move the valve stem to the discharge position.
4. The pusher device according to claim 3, wherein the valve accommodating space includes an inflow portion connecting the inflow passage, a discharge portion connecting the discharge passage, and a connection portion connecting the connection passage, the connection portion being disposed between the inflow portion and the discharge portion.
5. The pusher apparatus according to claim 4, wherein the valve bush is provided at an upper end thereof with a communication hole that communicates the inflow passage with the rod insertion hole inside, and a bush seal that seals between an outer surface of the valve bush and the valve receiving space is provided at a lower side of the communication hole.
6. The pusher device of claim 5, wherein the valve stem comprises: a post portion, at least a portion of which is inserted into the rod insertion hole of the valve bushing, having an outer diameter smaller than the rod insertion hole; and a sealing part integrally connected to the column part and provided with a sealing seal;
the inflow position is a position at which the hermetic seal of the hermetic section is in contact with an inner surface of the rod insertion hole of the valve bushing in an airtight manner,
the discharge position is a position at which the airtight seal of the airtight section is in contact with an inner wall of the accommodation space between the inflow section and the connection section in an airtight manner.
7. The pusher apparatus according to claim 6, wherein the valve stem is spaced apart from an inner wall of the valve accommodating space by a certain interval at the connection portion, and the connection passage of the connection portion communicates with the discharge passage through a lower end of the valve stem when the sealing packing of the sealing portion is located at the inflow portion.
8. The pusher apparatus according to claim 6, wherein the inflow passages of the connecting portion communicate with each other through a space between an outer peripheral surface of the valve stem and the closing portion when the closing seal of the closing portion is fitted in the interior of the valve stem.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0169270 | 2015-11-30 | ||
| KR1020150169270A KR101741828B1 (en) | 2015-11-30 | 2015-11-30 | Pusher apparatus |
| PCT/KR2016/013594 WO2017095070A1 (en) | 2015-11-30 | 2016-11-24 | Pusher apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108450020A CN108450020A (en) | 2018-08-24 |
| CN108450020B true CN108450020B (en) | 2020-10-09 |
Family
ID=58797146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680070077.3A Active CN108450020B (en) | 2015-11-30 | 2016-11-24 | Pusher device |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR101741828B1 (en) |
| CN (1) | CN108450020B (en) |
| TW (1) | TWI619952B (en) |
| WO (1) | WO2017095070A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102039625B1 (en) * | 2017-09-25 | 2019-11-01 | 주식회사 아이에스시 | Test socket |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146905A (en) * | 1999-11-22 | 2001-05-29 | Fujikura Rubber Ltd | Simultaneous actuating cylinder device and device for simultaneously examining large numbers of integrated circuits |
| JP2009234688A (en) * | 2008-03-26 | 2009-10-15 | Smc Corp | Conveyance apparatus |
| CN102365557A (en) * | 2009-03-10 | 2012-02-29 | 弗劳恩霍弗实用研究促进协会 | Measuring device for electrically measuring a flat measurement structure that can be contacted on one side |
| CN103575937A (en) * | 2012-07-31 | 2014-02-12 | 鸿劲科技股份有限公司 | Air pressure type test device and test equipment using same |
| CN104377151A (en) * | 2009-09-28 | 2015-02-25 | 株式会社尼康 | Pressing apparatus and control method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002257899A (en) * | 2001-02-27 | 2002-09-11 | Ando Electric Co Ltd | Automatic handler |
| JP2003066095A (en) * | 2001-08-23 | 2003-03-05 | Ando Electric Co Ltd | Device carrier and automatic handler |
| JP2005055330A (en) | 2003-08-06 | 2005-03-03 | Elpida Memory Inc | Pressure device for semiconductor device |
| CN100357743C (en) * | 2004-08-27 | 2007-12-26 | 京元电子股份有限公司 | Method and apparatus for taking and putting electronic elements waiting for measurement |
| KR101015553B1 (en) * | 2008-10-22 | 2011-02-17 | 세크론 주식회사 | Apparatus for contacting semiconductor device to test socket |
| KR101371982B1 (en) | 2013-01-13 | 2014-03-11 | 주식회사 오킨스전자 | Test system using vacuum and fluid, and method thereof |
| TWI523143B (en) * | 2013-09-13 | 2016-02-21 | 京元電子股份有限公司 | Floating buffer mechanism for electronic component testing socket |
| CN204515050U (en) * | 2015-04-21 | 2015-07-29 | 东莞华贝电子科技有限公司 | For detecting the device of web member |
-
2015
- 2015-11-30 KR KR1020150169270A patent/KR101741828B1/en active IP Right Grant
-
2016
- 2016-11-24 CN CN201680070077.3A patent/CN108450020B/en active Active
- 2016-11-24 WO PCT/KR2016/013594 patent/WO2017095070A1/en active Application Filing
- 2016-11-29 TW TW105139292A patent/TWI619952B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146905A (en) * | 1999-11-22 | 2001-05-29 | Fujikura Rubber Ltd | Simultaneous actuating cylinder device and device for simultaneously examining large numbers of integrated circuits |
| JP2009234688A (en) * | 2008-03-26 | 2009-10-15 | Smc Corp | Conveyance apparatus |
| CN102365557A (en) * | 2009-03-10 | 2012-02-29 | 弗劳恩霍弗实用研究促进协会 | Measuring device for electrically measuring a flat measurement structure that can be contacted on one side |
| CN104377151A (en) * | 2009-09-28 | 2015-02-25 | 株式会社尼康 | Pressing apparatus and control method |
| CN103575937A (en) * | 2012-07-31 | 2014-02-12 | 鸿劲科技股份有限公司 | Air pressure type test device and test equipment using same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101741828B1 (en) | 2017-05-31 |
| WO2017095070A1 (en) | 2017-06-08 |
| TWI619952B (en) | 2018-04-01 |
| TW201727251A (en) | 2017-08-01 |
| CN108450020A (en) | 2018-08-24 |
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