WO2017095070A1

WO2017095070A1 - Pusher apparatus

Info

Publication number: WO2017095070A1
Application number: PCT/KR2016/013594
Authority: WO
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2015-11-30
Filing date: 2016-11-24
Publication date: 2017-06-08
Also published as: TW201727251A; TWI619952B; CN108450020A; KR101741828B1; CN108450020B

Abstract

The present invention relates to a pusher apparatus. More specifically, the present invention relates to a pusher apparatus for pressing terminals of a device to be tested against a test device, the apparatus comprising: a housing that includes a pusher receiving space disposed in the middle thereof and open at the bottom, a valve receiving space that is disposed adjacent to the pusher receiving space and in which a valve structure can be received, an inflow passage having one end connected with an external air-introducing part and an opposite end connected with the valve receiving space, an outflow passage having one end connected with the outside and an opposite end connected with the valve receiving space, and a connecting passage having one end connected with the valve receiving space and an opposite end connected with the pusher receiving space; the valve structure making the connecting passage selectively communicate with one of the inflow passage and the outflow passage; and a pressing means that moves downward by air pressure to make contact with the device - to - be - tested to press the device-to-be-tested against the test device, when the inflow passage communicates with the connecting passage so that air flows into the pusher receiving space from the air-introducing part, wherein the valve structure and the pressing means are disposed in a single housing.

Description

Pusher device

The present invention relates to a pusher device, and more particularly to a pusher device integrating the housing and the valve to reduce the size and weight of the overall device.

In general, the semiconductor device that has been inspected may perform an electrical inspection. In order to perform such electrical inspection, the semiconductor device, which has been transported from the outside, must be seated in a predetermined inspection apparatus, and then a predetermined pressing force is applied to the semiconductor device so that terminals of the semiconductor device can contact the pads of the inspection apparatus at a constant pressure.

An apparatus for pressurizing such a semiconductor device to the inspection apparatus side is called a pusher device, which is generally disposed between the housing having a cylinder structure and operated by pneumatic, the air cylinder for supplying air and the housing. It consists of a valve unit that turns on / off the air supply.

At this time, inside the housing, there is provided a predetermined space filled with air introduced from the outside, and pressing means for pressing the upper surface of the semiconductor device while raising or lowering in the space.

In addition, the valve device is connected to the air cylinder and the housing is provided with a valve for turning on / off the air supplied from the air cylinder therein, such a valve device is installed outside the housing separately from the housing.

As described above, the pusher device of the prior art has a problem in that the overall size and the weight go out because the pusher device is made of a housing and a valve device separately and then attached to each other.

The present invention has been made to solve the above problems, and more particularly, to provide a pusher device in which the housing and the valve are integrated to reduce the size and weight of the overall device.

The pusher device of the present invention for achieving the above object, in the pusher device for pressing the terminals of the device under test to the device for inspection,

A pusher receiving space disposed centrally and opened downward; a valve receiving space disposed adjacent to the pusher receiving space and accommodating a valve structure; one end of which is connected to an external air inlet and the other end of the valve receiving; An inflow passage connected to the space, one end of which is connected to the outside and the other end of which is connected to the valve receiving space, and one end of which is connected to the valve accommodation space and the other end of the connection passage connected to the pusher accommodation space. housing;

A valve structure for selectively communicating the connection passage with any one of the inflow passage and the discharge passage; And

When the inflow passage and the connection passage is in communication with the air from the air inlet flows into the pusher receiving space by the pneumatic pressure by pressing the device to be inspected by lowering by pneumatic contact with the device under test Including,

The valve structure and the pressing means are arranged in a single housing.

In the pusher device,

The valve structure is inserted into the valve receiving space of the housing,

An inlet position that blocks communication between the connection passage and the discharge passage while communicating the connection passage and the inflow passage with each other, and communicates the connection passage and the discharge passage with each other and blocks communication between the connection passage and the inflow passage; You can move between discharge positions.

In the pusher device,

When the valve structure moves to the inflow position and air flows into the pusher receiving space, the pressing means may press down the device under test by contacting the device under test by lowering by pneumatic pressure.

In the pusher device,

The valve structure,

A tubular valve bush inserted into the valve receiving space and provided with a stem insertion hole communicating with upper and lower ends thereof;

A valve stem inserted into the valve bush to move between the inlet and outlet positions;

Elastic bias means for elastically biasing the valve stem from the discharge position to the inlet position; And

It may be disposed on the upper end side of the cylindrical valve member and may include an operation means for pressing the valve stem to move to the discharge position while in contact with the valve stem.

In the pusher device,

The valve receiving space,

The inflow passage is connected to the inlet portion, the discharge passage is connected to the discharge portion, and the connection passage is composed of a connection portion, the connection portion may be disposed between the inlet portion and the discharge portion.

In the pusher device,

The valve bush, a communication hole for communicating the inlet passage with the stem insert hole therein is provided at the upper end, the lower side of the communication hole may be provided with a bushing sealing the outer surface of the valve bush and the valve receiving space.

In the pusher device,

The valve stem is at least partially inserted into the stem inserting hole of the valve bush and has a smaller diameter than the stem inserting hole, and consists of a sealing part integrally connected with the pillar and provided with a sealing seal,

The inflow position is a position in which the hermetic sealing of the closure portion is in contact with the inner surface of the stem insertion hole of the valve bush so as to be airtight.

The discharge position may be a position in contact with the inner wall of the receiving space between the inlet portion and the connecting portion so as to be airtight.

In the connecting portion of the pusher device, when the valve stem is spaced a predetermined distance from the inner wall of the valve receiving space and the sealing seal of the sealing portion is located in the inlet portion, the connecting passage of the connecting portion is the lower end of the valve stem It can communicate with the discharge passage through.

In the pusher device, when the hermetic sealing of the closure part is fitted inside the valve stem, the inflow passage of the connection portion may communicate with each other through the space between the outer peripheral surface of the valve stem and the sealing part.

The valve structure and the pressing means are arranged in a single housing has the advantage that the space for inspecting the semiconductor device can be minimized.

1 is a perspective view of a pusher device according to an embodiment of the present invention.

Figure 2 is an exploded perspective view of Figure 1;

3 and 4 are side views showing a state before the pusher device presses the semiconductor device.

Fig. 5 is a plan view showing a state before the pusher device presses the semiconductor device.

FIG. 6 is a VI-VI cross-sectional view of FIG. 5. FIG.

FIG. 7 is a VIII-VIII cross-sectional view of FIG. 5. FIG.

8 is a cross-sectional view taken along line VIII-VIII of FIG. 5.

9 is a plan view showing a state in which the pusher device presses the semiconductor device.

FIG. 10 is a VIII-VIII cross-sectional view of FIG. 9; FIG.

FIG. 11 is a sectional view taken along the line II-XI of FIG. 9; FIG.

Fig. 12 is a cross-sectional view of XII-XII of Fig. 9.

Hereinafter, a pusher device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a pusher device (10) for pressurizing the terminals of a device under test (50) to a device for inspection, comprising a housing (20), a valve structure (30), and a pressurizing means (40). The structure 30 and the pressing means 40 is characterized in that it is arranged in a single housing (20).

The housing 20 has a rectangular parallelepiped shape as a whole, and includes a pusher accommodation space 21, a valve accommodation space 22, an inflow passage 23, a discharge passage 24, and a connection passage 25 therein. do.

The pusher receiving space 21 is disposed substantially in the center and is opened downward and has a substantially cylindrical shape. The other end of the connection passage 25 is connected to the pusher accommodation space 21.

The valve receiving space 22 is disposed adjacent to the pusher receiving space 21 and the valve structure 30 may be accommodated, and the valve structure 30 is accommodated therein. Specifically, the valve receiving space 22 has a groove shape which is open upward. The valve receiving space 22 is connected to the other end of the inflow passage 23, the other end of the discharge passage 24 is connected, one end of the connection passage 25 is connected.

The valve receiving space 22 has an inlet portion 221 to which the inlet passage 23 is connected, an outlet portion 222 to which the outlet passage 24 is connected, and a connecting portion 223 to which the connection passage 25 is connected. It is configured as, the connection portion 223 is disposed between the inlet portion 221 and the discharge portion 222. In the connecting portion 223, the valve stem 32 is spaced apart from the inner wall of the valve receiving space 22 by a predetermined interval, and the sealing seal 322a of the sealing portion 322 is connected to the inlet portion 221. When positioned, the connection passage 25 of the connection portion 223 communicates with the discharge passage 24 through the lower end of the valve stem 32.

In addition, when the sealing seal 322a of the sealing part 322 is fitted inside the valve stem 32, the inflow passage 23 of the connecting part 223 has an outer circumferential surface of the valve stem 32 and the sealing part 322. Can communicate with each other through the space between them.

The inflow passage 23 is one end is connected to the external air inlet 231 and the other end is connected to the valve receiving space (22). Specifically, one end of the inflow passage 23 is connected to an external air pump to allow the air applied from the air pump (not shown) to flow therein.

The discharge passage 24 is one end is connected to the external discharge passage 241 and the other end is connected to the valve receiving space 22, the pressing means 40 after the pressing on the device under test 50 is completed When this rises to perform the function of the air discharge passage 24 to allow the air to escape.

One end of the connection passage 25 is connected to the valve accommodation space 22 and the other end is a passage connected to the pusher accommodation space 21. The connection passage 25 is used as a passage through which air is introduced into the pusher accommodation space 21 or used as a passage for discharging air inside the pusher accommodation space 21 to the outside.

The valve structure 30 selectively communicates the connection passage 25 to any one of the inflow passage 23 and the discharge passage 24. Specifically, the valve structure 30 is inserted into the valve receiving space 22 of the housing 20, the connecting passage 25 and the inlet passage 23 while communicating with the connecting passage 25 An inlet position to block communication between the discharge passage 24 and the connection passage 25 and the discharge passage 24 to communicate with each other and to block communication between the connection passage 25 and the inflow passage 23. To move between discharge positions.

The valve structure 30 includes a valve bush 31, a valve stem 32, an elastic bias means 33, and an operation means 34.

The valve bush 31 is inserted into the valve receiving space 22 and is provided with a stem insertion hole 311 which communicates with the upper and lower ends. The valve bush 31 is provided with a communication hole 312 for communicating the inflow passage 23 with an internal stem insertion hole 311 at an upper end thereof, and a valve bush 31 below the communication hole 312. A bush seal 313 sealing the outer surface of the c) and the valve accommodation space 22 is provided.

The valve stem 32 is to insert at least a portion of the valve bush 31 to move between the inlet and outlet positions. The valve stem 32 is at least partially inserted into the stem insertion hole 311 of the valve bush 31 and the pillar portion 321 having an outer diameter smaller than the stem insertion hole 311 and the pillar portion 321 It is integrally connected with) and consists of a sealing part 322 provided with a sealing seal (322a). At this time, the inflow position is a position where the sealing seal 322a of the closure portion 322 is in contact with the inner surface of the stem insertion hole 311 of the valve bush 31 so as to be airtight, the discharge position is the inflow portion The inner wall of the valve receiving space 22 between the 221 and the connecting portion 223 is in contact with the airtight seal.

The elastic biasing means 33 elastically biases the valve stem 32 from the discharge position to the inflow position. Specifically, the elastic bias means 33 is disposed between the lower end of the valve stem 32 and the lower end of the valve receiving space 22 to elastically support the valve stem 32.

The operation means 34 is disposed on the upper end side of the cylindrical valve member and can press the valve stem 32 to move to the discharge position while contacting the valve stem 32.

The pressurizing means 40 is lowered by pneumatic pressure when the inflow passage 23 and the connection passage 25 are in communication so that air is introduced into the pusher accommodation space 21 from the air inlet 231. The contact device 50 can press the device under test 50 toward the device for inspection. The pressurizing means 40 is lowered by pneumatic pressure when the valve structure 30 moves to the inflow position and the air flows into the pusher receiving space 21 so as to contact the device under test 50. It is possible to press 50 to the inspection apparatus side. The pressing means 40 is in contact with the device under test 50 and the upper surface of the pressure plate 41 for pressing the device under test 50, the piston connected to the pressure plate 41 and raised or lowered by pneumatic pressure (42) and a piston spring (43) for elastically biasing the piston (42) upwards. When air is introduced into the pusher accommodation space 21, the piston 42 is lowered by pneumatic pressure, and the pressure plate 41 is lowered at the same time. When the pneumatic pressure is removed, the piston 42 is moved by the piston spring 43. It is made of a structure that rises. Since the pressing means 40 is a general configuration of the pusher device 10, a detailed description thereof will be omitted.

Referring to the operation and effect of the pusher device 10 according to the present invention.

First, the valve structure 30 is placed in the discharge position and the pressurizing means 40 is shown in FIGS. 6 to 8. In this case, the connection passage 25 and the discharge passage 24 communicate with each other, so that the air in the pusher accommodation space 21 is discharged to the outside.

In this state, when the operation means 34 is operated to raise the valve structure 30 by the elastic bias means 33, the operation is performed as shown in FIGS. That is, when the valve structure 30 is raised, the sealing seal 322a of the sealing part 322 is in airtight contact with the inner surface of the valve stem 32 to block the communication between the discharge passage 24 and the connection passage 25. do. On the contrary, the inflow passage 23 and the connection passage 25 communicate with each other. Accordingly, the external air is supplied to the pusher accommodation space 21 through the inflow passage 23 and the connection passage 25 to press the device under test 50 toward the inspection apparatus while lowering the pressure means 40. .

On the contrary, if the operation valve is operated again, the valve structure 30 descends and the sealing seal 322a of the seal 322 connects the inlet 221 to the inlet 221 as shown in FIGS. 6 to 8. Airtight shut off prevents air from entering. Unlike this, the discharge passage 24 and the connection passage 25 communicate with each other. That is, the air in the pusher accommodation space 21 is connected to the passage 25, the space between the inner wall of the valve receiving space 22 and the valve stem 32, the lower end of the valve stem 32 and the valve stem 32 It is discharged to the outside through the discharge passage 24 through the stem insertion hole 311 of the.

The pusher device according to the present invention has the advantage that not only can reduce the size of the overall pusher device, but also reduce the weight by integrating the valve structure including the pressing means in the housing.

Claims

In the pusher device for pressing the terminals of the device under test to the device for inspection,

A pusher receiving space disposed centrally and opened downward; a valve receiving space disposed adjacent to the pusher receiving space and accommodating a valve structure; one end of which is connected to an external air inlet and the other end of the valve receiving; An inflow passage connected to the space, one end of which is connected to the outside and the other end of which is connected to the valve receiving space, and one end of which is connected to the valve accommodation space and the other end of the connection passage connected to the pusher accommodation space. housing;

A valve structure for selectively communicating the connection passage with any one of the inflow passage and the discharge passage; And

When the inflow passage and the connection passage is in communication with the air from the air inlet flows into the pusher receiving space by the pneumatic pressure by pressing the device to be inspected by lowering by pneumatic contact with the device under test Including,

And the valve structure and the pressing means are arranged in a single housing.
The method of claim 1,

The valve structure,

Is inserted into the valve receiving space of the housing,

An inlet position that blocks communication between the connection passage and the discharge passage while communicating the connection passage and the inflow passage with each other, and communicates the connection passage and the discharge passage with each other and blocks communication between the connection passage and the inflow passage; Pusher device, characterized in that moving between the discharge position.
The method of claim 2,

The pressurizing means, when the valve structure is moved to the inlet position, when the air flows into the pusher receiving space is pushed down by the pneumatic pressure device to the inspection apparatus by lowering by the pneumatic contact with the device under test. Device.
The method of claim 2,

The valve structure,

A tubular valve bush inserted into the valve receiving space and provided with a stem insertion hole communicating with upper and lower ends thereof;

A valve stem inserted into the valve bush to move between the inlet and outlet positions;

Elastic bias means for elastically biasing the valve stem from the discharge position to the inlet position; And

A pusher device disposed on an upper end side of the tubular valve member and including an operation means capable of pressing the valve stem to move to the discharge position while contacting the valve stem.
The method of claim 4, wherein

The valve receiving space,

A pusher device comprising an inlet part connected to the inlet passage, an outlet part connected to the discharge path, and a connection part connected to the connection path, wherein the connection part is disposed between the inlet part and the outlet part.
The method of claim 5,

The valve bush is provided with a communication hole for communicating the inflow passage with an internal stem insertion hole at an upper end thereof, and a bushing seal for sealing between an outer surface of the valve bush and the valve receiving space at a lower side of the communication hole. Pusher device.
The method of claim 6,

The valve stem is at least partially inserted into the stem inserting hole of the valve bush and has a smaller diameter than the stem inserting hole, and consists of a sealing part integrally connected with the pillar and provided with a sealing seal,

The inflow position is a position in which the hermetic sealing of the closure portion is in contact with the inner surface of the stem insertion hole of the valve bush so as to be airtight.

The discharge position is a pusher device, characterized in that for contact with the inner wall of the receiving space between the inlet and the connecting portion so as to be airtight.
The method of claim 7, wherein

In the connecting portion, when the valve stem is spaced a predetermined distance from the inner wall of the valve receiving space and the sealing seal of the sealing portion is located in the inlet portion, the connecting passage of the connecting portion and the discharge passage through the bottom of the valve stem Pusher device, characterized in that the communication.
The method of claim 7, wherein

And the inlet passage of the connection portion communicates with each other through a space between the outer circumferential surface of the valve stem and the seal when the seal of the seal is fitted into the valve stem.
The method of claim 1,

And the valve structure and the pressurizing means are arranged in a single housing in a single housing.