JP2009216424A - Magnet position measuring method and magnetic field measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnet position measuring method capable of accurately measuring a position of a magnet. <P>SOLUTION: This magnet position measuring method is a method of finding deviation amounts of superconducting magnets 1A, 1B from a prescribed position, in an Si single crystal growing-up device 100 provided with the pair of substantially cylindrical superconducting magnets 1A, 1B arranged in the prescribed position in order to generate a proper magnetic field in an objective area. The magnet position measuring method includes a process for operating the Si single crystal growing-up device 100, for measuring magnetic field intensities of the superconducting magnets 1A, 1B, and for acquiring observed data thereof, and a process for finding an unknown, based on the observed data of the magnetic field intensities and simulation data of the magnetic field intensities obtained by a quadratic function of the magnetic field intensities including the unknown defined as the deviation amounts of the superconducting magnets 1A, 1B from the prescribed position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a magnet position measuring method for measuring the position of a substantially cylindrical (coiled) magnet, and a magnetic field measuring apparatus used in the method.

  Conventionally, a coiled magnet such as a superconducting magnet capable of generating a strong magnetic field is known. And the magnet apparatus provided with such a magnet is utilized for manufacture of Si single crystal, for example (refer to patent documents 1).

  As a method for producing a Si single crystal, a method of growing a single crystal seed crystal while applying a magnetic field to molten Si in a crucible (MCZ method) is generally known. In this method, since thermal convection of molten Si is suppressed by electromagnetic braking, a high-quality Si single crystal can be manufactured.

In recent years, the demand for large Si single crystals having a diameter of about 300 mm for industrial use has increased. In order to manufacture such a large Si single crystal, a crucible having a diameter of about 1 m is required. In this case, a magnetic field strength of 0.3 (T) or more is necessary to suppress the thermal convection of molten Si. As described above, for example, a magnet device including a superconducting magnet is suitable as a device that generates the above-described strong magnetic field in a space having a diameter of 1 m.
Japanese Patent No. 2790549

  By the way, the position of a magnet has dispersion | variation for every magnet apparatus resulting from a manufacturing error. In particular, the quality of the Si single crystal described above is greatly influenced by the magnetic field distribution. Therefore, in order to uniformize the quality of the Si single crystal for each apparatus, it is desirable that the position of the superconducting magnet (magnet) with respect to the Si single crystal growing portion (target region) is as designed as possible. As a result, there has been a desire to accurately measure the amount of deviation from the position of the magnet, that is, the design position.

  In the apparatus as described in Patent Document 1, the superconducting magnet is generally stored in a vacuum vessel. The vacuum vessel is provided with a viewing window for Si single crystal confirmation, but the portion other than the viewing window of the vacuum vessel is made of an opaque material such as non-magnetic stainless steel from the viewpoint of high strength, non-magnetism, low cost, etc. Therefore, it is extremely difficult to accurately grasp the magnet position by visual inspection from the outside of the apparatus.

  The present invention has been made to meet the above demands, and an object of the present invention is to provide a magnet position measuring method and a magnetic field measuring apparatus capable of accurately measuring the position of a magnet.

  In order to achieve the above object, a magnet position measuring method according to one aspect of the present invention includes a magnet in a magnet device including a substantially cylindrical magnet disposed at a predetermined position so as to generate a magnetic field in a target region. A magnet position measuring method for obtaining a deviation amount of the magnet from the predetermined position, the step of operating the magnet device to measure the magnetic field strength of the magnet and obtaining the measured data, and the measured data of the magnetic field strength. And calculating a functional expression representing the magnetic field strength of the magnet based on the magnetic field strength, the functional expression of the magnetic field strength being the coordinate origin as the magnetic field center of the magnet when the magnet is disposed at the predetermined position. In addition, an xyz orthogonal coordinate system is set with the direction along the axis of the magnet at the predetermined position as the x-axis direction, the direction orthogonal to the x-axis direction and the directions orthogonal to each other as the y-axis direction and the z-axis direction, Magnet x Unknowns as positional deviation amounts in the direction, y-axis direction and z-axis direction are dx, dy and dz, respectively, and unknowns as angular deviation amounts around the y-axis and z-axis of the magnet are γ and α, respectively. It is characterized by being expressed by a quadratic function expression of x, y, and z including dx, dy, dz, γ, α.

  In this magnet position measurement method, as described above, based on the actual measurement data obtained by actually measuring the magnetic field strength, the function of the magnetic field strength of the magnet including the unknown defined as the amount of deviation from the predetermined position of the magnet. Since the equation is obtained, for example, the position of the magnet can be accurately measured even in an apparatus configuration in which it is difficult to visually recognize the magnet from the outside.

  Further, when the xyz orthogonal coordinate system is set as described above for a substantially cylindrical magnet, the magnet is symmetric with respect to the xy plane, the yz plane, and the zx plane, and is rotationally symmetric with respect to the x axis. It becomes. From this, the magnetic field strength of the magnet can be expressed by an even function of x, y, and z. In the present invention, since the magnetic field strength is expressed by the lowest-order quadratic function expression excluding the zeroth order, the unknown can be easily obtained.

In the above magnet position measurement method, the quadratic function equation is expressed by the following equation (1) when the central magnetic field strength of the magnet is B ₀ .

B = B ₀ + a [(x + αy−γz) −dx] ² + b [(y−αx) −dy] ²
+ C [(z + γx) −dz] ² Formula (1)
In the above-described magnet position measurement methods, preferably, the magnetic field strength data is magnetic field strength data at a plurality of positions, and the step of obtaining the function formula is performed by using the function from the measured magnetic field strength data by the least square method. A step of obtaining an expression.

  If the least square method as described above is used, an unknown quantity that is a displacement amount of the magnet can be obtained with high accuracy, so that the magnet position can be measured more accurately.

  In these magnet position measuring methods, preferably, the magnet is a split-pair superconducting magnet in which a pair of substantially identical superconducting magnets are arranged coaxially and at a predetermined interval in the axial direction. .

  In this way, the position of the split pair type superconducting magnet can be accurately measured.

  A magnetic field measurement apparatus according to another aspect of the present invention is a magnetic field measurement apparatus for use in any of the above-described magnet position measurement methods, and includes a plurality of probes for measuring magnetic field strength, and the plurality of the plurality of probes. A probe holding unit for holding the probe and a drive unit for moving the probe holding unit, and measuring the magnetic field intensity while moving the probe holding unit by the drive unit.

  In this magnetic field measuring apparatus, the magnetic field strength can be measured simultaneously at a plurality of positions by measuring the magnetic field strength while moving the probe holding unit that holds a plurality of probes by the driving unit. Compared to the case where measurement is performed one by one, acquisition of actual measurement data becomes easier. As a result, based on the actual measurement data obtained by actually measuring the magnetic field strength, it is possible to easily obtain the functional expression of the magnetic field strength of the magnet including the unknown defined as the amount of deviation from the predetermined position of the magnet. For example, even in a device configuration in which it is difficult to visually recognize a magnet from the outside, it becomes easy to accurately measure the position of the magnet.

  In the above-described magnetic field measurement apparatus, preferably, the probe holding unit arranges the plurality of probes in a matrix on a predetermined plane parallel to a plane including any two of the x-axis, the y-axis, and the z-axis. The drive unit is configured to move the probe holding unit in a direction substantially orthogonal to the predetermined plane.

  With this configuration, the measurement positions of the magnetic field strength are uniformly distributed in the space, so that the actual measurement data obtained can be spatially less biased. Thereby, the reliability of the deviation | shift amount of the magnet calculated | required based on measured data can be improved.

  In the above magnetic field measurement apparatus, preferably, the probe holding portion has a holding surface portion that extends along the predetermined plane, and the holding surface portion is provided with a plurality of recesses for holding the probes in a matrix. .

  If comprised in this way, it can prevent that the position of a probe shifts | deviates during a measurement, Therefore Actual measurement data can be acquired correctly.

  According to the magnet position measuring method of the present invention, the position of the magnet can be accurately measured even in an apparatus configuration in which it is difficult to visually recognize the magnet from the outside.

  In addition, according to the magnetic field measurement apparatus of the present invention, it is easier to obtain actual measurement data than when measuring the magnetic field strength one by one. As a result, the amount of magnet displacement can be easily determined by the magnet position measuring method of the present invention, so that the position of the magnet can be accurately measured even in an apparatus configuration in which it is difficult to visually recognize the magnet from the outside.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a front sectional view showing the overall configuration of a Si single crystal growing apparatus according to an embodiment of the present invention. FIG. 2 is a front cross-sectional view showing a state at the time of measuring the magnetic field strength of the Si single crystal growing apparatus shown in FIG. 3 is a perspective view showing the configuration of the holding plate and the moving mechanism of the magnetic field measurement jig, and FIG. 4 is a diagram for explaining the relationship between the probe hole and the probe of the holding plate shown in FIG. It is a partial expansion perspective view. FIG. 5 is a perspective view for explaining the measurement position of the magnetic field strength.

  First, with reference to FIG. 1, the whole structure of the Si single crystal growth apparatus 100 of this embodiment is demonstrated. The Si single crystal growing apparatus 100 is an example of the “magnet apparatus” in the present invention.

  The Si single crystal growing apparatus 100 includes a pair of substantially cylindrical superconducting magnets 1A and 1B, and a crucible 2 provided therebetween. Superconducting magnets 1A and 1B are formed by winding a superconducting wire in a coil shape. The crucible 2 contains molten Si3A. The superconducting magnets 1A and 1B are examples of the “magnet” of the present invention.

  The pair of superconducting magnets 1A and 1B are split pair type superconducting magnets that have substantially the same size (same shape) and are provided coaxially and at a predetermined interval in the axial direction.

  The Si single crystal growing apparatus 100 is a transverse magnetic field system in which superconducting magnets 1A and 1B are arranged side by side in the lateral direction so that the axial direction is substantially horizontal. The present invention can also be applied to other longitudinal magnetic field systems and cusp magnetic field systems.

  Superconducting magnets 1 </ b> A and 1 </ b> B are housed in a substantially U-shaped vacuum container 4 in plan view, and crucible 2 is housed in a vacuum container 5 separate from the vacuum container 4. The vacuum vessel 5 is provided with a viewing window (not shown) for confirming the Si single crystal, but the portions other than the viewing window of the vacuum vessel 4 and the vacuum vessel 5 are of high strength, non-magnetic, inexpensive, etc. From the viewpoint, it is made of an opaque material such as nonmagnetic stainless steel. Therefore, it is extremely difficult to visually recognize the superconducting magnets 1A and 1B from the outside of the container, and it is almost impossible to accurately grasp the position of the superconducting magnet from the appearance.

  The crucible 2 is supported by the moving mechanism 6. Further, a heater 10 such as a resistance heating method, an infrared intensive heating method, or a high frequency induction heating method is installed on the side of the crucible 2.

  The moving mechanism 6 includes a mounting table 61 for mounting the crucible 2 and a drive unit 62 for rotating and lifting the mounting table 61.

  In the present embodiment, the center of the liquid surface of the molten Si3A in the crucible 2 is the Si single crystal growth part 7, and a seed crystal for Si single crystal growth is arranged in the Si single crystal growth part 7. In the initial state of Si single crystal growth, the superconducting magnets 1A and 1B and the crucible 2 are relatively positioned and arranged so that the Si single crystal growing part 7 and the magnetic field centers of the pair of superconducting magnets 1A and 1B substantially coincide. Has been. The arrangement position of the superconducting magnets 1A and 1B satisfying the above-mentioned relative position is the “predetermined position” of the present invention.

  As shown in FIG. 2, in the present embodiment, the magnetic field centers of the superconducting magnets 1A and 1B arranged at the predetermined positions (that is, the Si single crystal growing part 7) are used as coordinate origins, and the superconductivity at the predetermined positions is used. The direction along the axis of the magnets 1A and 1B is the x-axis direction (left and right direction in FIG. 2, the right direction is the + x direction), and the direction perpendicular to the x-axis direction and perpendicular to each other is the y-axis direction (in FIG. 2). An xyz orthogonal coordinate system is set as a direction perpendicular to the paper surface, the back direction being the + y direction, and the z-axis direction (the vertical direction in FIG. 2 and the upward direction is the + z direction).

  The moving mechanism 6 is configured so that the crucible 2 is lowered while being slowly rotated, whereby a substantially cylindrical Si single crystal 3B having the same orientation array as the seed crystal is grown. ing.

  In addition, since the Si single crystal growth apparatus 100 of this embodiment is configured to grow the Si single crystal 3B while applying a magnetic field by the superconducting magnets 1A and 1B to the molten Si 3A, the thermal convection of the molten Si 3A is suppressed by electromagnetic braking. Is done. Thereby, high-quality Si single crystal 3B can be manufactured.

  By the way, in the Si single crystal growth apparatus 100 of the present embodiment, as described above, since the vacuum vessel 4 is made of an opaque material, it is almost impossible to grasp the positions of the superconducting magnets 1A and 1B from an external view. It has become. However, the relative positions of the superconducting magnets 1A and 1B with respect to the Si single crystal growing part 7 are as set, that is, the magnetic field centers of the superconducting magnets 1A and 1B substantially coincide with the Si single crystal growing part 7. Since it is important for quality improvement, it is desired to accurately grasp the positions of the superconducting magnets 1A and 1B and adjust their arrangement positions as necessary.

  Here, as shown in FIG. 2, the Si single crystal growth apparatus 100 of the present embodiment has a configuration including a magnetic field measurement jig 8, which will be described in detail later. The magnetic field of the superconducting magnets 1A and 1B is measured by the measuring jig 8, and thereby the amount of deviation of the superconducting magnets 1A and 1B from the predetermined position is obtained.

  As shown in FIGS. 3 and 4, the magnetic field measurement jig 8 has a plurality of probes 81 (see FIG. 4) for measuring the magnetic field strength and a holding plate 82 that holds these probes 81. . The upper surface of the holding plate 82 is parallel to the xy plane, and is provided with a plurality of probe holes 82a into which the probes 81 are inserted and positioned. The probe hole 82a is set to have a cross-sectional shape slightly larger than the cross-sectional shape of the probe 81, so that the probe 81 is held immovably. The probe hole 82a is an example of the “concave portion” in the present invention. The upper surface of the holding plate 82 corresponds to the “holding surface portion” of the present invention. Thus, the plurality of probes 81 held in the probe holes 82a of the holding plate 82 are arranged in a matrix form along the xy plane.

  As shown in FIG. 3, the holding plate 82 is supported by the moving mechanism 6, and is moved in the z-axis direction (vertical direction) by the moving mechanism 6 without rotating. The holding plate 82 is set to be stopped at a plurality of positions in the vertical direction, and each time the probe is stopped, the magnetic field strength is measured. As a result, the measurement positions P (see FIG. 5) of the magnetic field strength by the probe 81 are uniformly distributed in the space, so that actual measurement data of the magnetic field strength with little spatial deviation is acquired. The holding plate 82 is set on the mounting table 61 before the crucible 2 is mounted on the mounting table 61 in order to grow the Si single crystal. In the present embodiment, the magnetic field measurement jig 8 and the moving mechanism 6 constitute the “magnetic field measurement device” of the present invention.

  Next, the configuration of the control system of the Si single crystal growth apparatus 100 will be described with reference to FIG.

  As shown in FIG. 6, the control device 9 provided in the Si single crystal growth apparatus 100 includes a CPU (Central Processing Unit) 91 as an arithmetic processing unit, a ROM (Read Only Memory), and a RAM (Random Access Memory). , An HDD (Hard Disk Drive) or the like as a memory, a moving mechanism control unit 93 for controlling the driving of the moving mechanism 6, and a probe control unit 94 for controlling the probe 81. Yes.

  The CPU 91 functionally includes a data acquisition unit 91a and a deviation amount calculation unit 91b. The data acquisition unit 91a has a function of acquiring measured data of magnetic field strength from each probe 81. The deviation amount calculation unit 91b has a function for executing a calculation for obtaining deviation amounts from the predetermined positions of the superconducting magnets 1A and 1B from the measured data of the magnetic field strength and the simulation data described later.

  Next, the magnet position measuring method according to the present embodiment will be described with reference to the flowchart of FIG.

  First, in step S1, the magnetic field strength of the superconducting magnets 1A and 1B is measured by the magnetic field measuring jig 8 placed on the placing table 61. In this magnetic field measurement operation, the movement mechanism control unit 93 (see FIG. 6) of the control device 9 performs control to move the magnetic field measurement jig 8 in the z-axis direction and stop it at a predetermined position in the vertical direction by the movement mechanism 6. Further, this is done by causing the probe control section 94 to perform control for measuring the magnetic field intensity by each probe 81. As a result, as shown in FIG. 5, the magnetic field strength is measured three-dimensionally at a plurality of measurement positions P in the magnetic field space of the superconducting magnets 1A and 1B.

  In step S2, the magnetic field strength at each measurement position P is acquired as measured data of the magnetic field distribution (magnetic field strength) by the data acquisition unit 91a (see FIG. 6) of the CPU 91.

  In step S3, the deviation amount calculation unit 91b performs a model function fitting process to obtain deviation amounts of the superconducting magnets 1A and 1B from the predetermined position. Specifically, the simulation of the magnetic field strength obtained from the measured data of the magnetic field strength obtained by the magnetic field measuring jig 8 and the model function of the magnetic field strength including the unknowns defined as the deviation amounts from the predetermined positions of the superconducting magnets 1A and 1B. The data is used to perform the fitting process of the model function, thereby determining the unknown contained in the model function, that is, the amount of deviation from the predetermined position of the superconducting magnets 1A and 1B.

  In the present embodiment, in the xyz orthogonal coordinate system set as described above, the unknowns as the displacement amounts of the superconducting magnets 1A and 1B in the x-axis direction, the y-axis direction, and the z-axis direction are respectively expressed as dx, dy, and dz. In addition, when the unknowns as the angular deviation amounts around the y-axis and z-axis of the superconducting magnets 1A and 1B are γ and α, respectively, a quadratic function expressed as follows as the above model function: Equation (11) is used.

B = B ₀ + a [(x + αy−γz) −dx] ² + b [(y−αx) −dy] ² + c [(z + γx) −dz] ² Formula (11)
Here, the process of deriving Equation (11) will be briefly described.

  The superconducting magnets 1A and 1B provided at predetermined positions are symmetric with respect to the xy plane, the yz plane, and the zx plane and are rotationally symmetric with respect to the x axis in the xyz orthogonal coordinate system of the present embodiment.

Due to this symmetry, the magnetic field strength can be expressed by an even function of x, y, and z. Then, except for the polynomial of only the 0th order component in which the magnetic field strength is constant, the polynomial having the minimum order includes up to the second order component, and is expressed by the following formula (21). B ₀ is the central magnetic field strength, and a, b, and c are coefficients determined by the shape of the superconducting magnet.

B = B ₀ + ax ² + by ² + cz ² Formula (21)
Here, the superconducting magnets 1A and 1B are displaced from the predetermined position by dx, dy, and dz in the x-axis direction, the y-axis direction, and the z-axis direction, respectively, and β, Assuming that the rotation is shifted by γ and α radians, the magnetic field strength at the coordinate point (x, y, z) can be expressed as the following equation (22).

B = B ₀
+ A [(xcosαcosγ + ysinα-zsinγcosα) -dx] ²
+ B [(ycosβcosα + zsinβ-xsinαcosβ) -dy] ²
+ C [(zcosγcosβ + xsinγ-ysinβcosγ) -dz] ²
... Formula (22)
Since the distribution of the magnetic field strength is rotationally symmetric with respect to the x-axis, when β is 0 in Expression (22), it can be expressed as Expression (22 ′).

B = B ₀
+ A [(xcosαcosγ + ysinα-zsinγcosα) -dx] ²
+ B [(ycosα-xsinα) -dy] ²
+ C [(zcosγ + xsinγ) −dz] ²
... Formula (22 ')
Furthermore, since γ and α are considered to be sufficiently smaller than 1, when the following two approximate expressions (23) are used to transform the expression (22 ′), the above expression (11) is obtained as a function expression of the magnetic field strength. Is derived.

sin θ˜θ, cos θ˜1 (where absolute value θ << 1) (23)
Note that the simulation data may be extracted from a data table stored in the storage unit 92 in advance, or may be obtained by arithmetic processing in real time.

Then, the magnetic field strength difference between the corresponding positions in the magnetic field strength actual measurement data obtained by the magnetic field measurement jig 8 and the magnetic field strength simulation data obtained from the model function (Equation (11)) is obtained at each position, and this is obtained. Then, a, b, c, B ₀ , α, γ, dx, dy, dz are determined by a so-called least square method so that the sum of each difference is squared and the sum is minimized.

  In this way, the positions of superconducting magnets 1A and 1B (the amount of deviation from a predetermined position) can be accurately measured.

  Based on the above results, for example, by adjusting the positions of the superconducting magnets 1A and 1B together with the vacuum container 4, the positions of the superconducting magnets 1A and 1B and the Si single crystal growing part 7 can be made as designed. In the present embodiment, the position adjustment of the superconducting magnets 1A and 1B may be performed manually, or a mechanism for moving the vacuum vessel 4 is incorporated and automatically adjusted according to the amount of deviation. There may be.

  In the present embodiment, as described above, based on the actual measurement data obtained by actually measuring the magnetic field strength, the superconducting magnet including an unknown quantity defined as the amount of deviation from the predetermined position of the pair of superconducting magnets 1A and 1B. Since the function formulas of the magnetic field strengths of 1A and 1B are obtained, the position of the superconducting magnets 1A and 1B can be accurately measured even if, for example, it is difficult to visually recognize the superconducting magnets 1A and 1B from the outside. .

  When the xyz orthogonal coordinate system is set as described above for the pair of substantially cylindrical superconducting magnets 1A and 1B, the superconducting magnets 1A and 1B are symmetrical with respect to the xy plane, the yz plane, and the zx plane. And rotationally symmetric with respect to the x-axis. From this, the magnetic field intensity of the superconducting magnets 1A and 1B can be expressed by an even function of x, y, and z. In the present embodiment, as described above, the magnetic field strength is expressed by the lowest-order quadratic function expression excluding the 0th order, so that the unknown can be easily obtained.

  In the present embodiment, as described above, the difference between the magnetic field strengths at the positions corresponding to the actual measurement data and the simulation data is obtained at each position, and the unknowns are obtained so that the sum of the squares of the differences is minimized. By using the least square method for determining the above, it is possible to accurately obtain an unknown quantity that is a deviation amount of the superconducting magnets 1A and 1B, so that the positions of the superconducting magnets 1A and 1B can be measured more accurately.

  Further, in the present embodiment, as described above, the magnetic field strength is measured while moving the holding plate 82 that holds the plurality of probes 81 by the driving unit 62, so that the magnetic field strength is measured at a plurality of positions simultaneously. Can do. This makes it easier to obtain measured data, for example, compared to when measuring the magnetic field strength one place at a time. Therefore, based on the actual measurement data obtained by actually measuring the magnetic field strength, a functional expression of the magnetic field strength of the superconducting magnets 1A and 1B including an unknown number defined as the amount of deviation from the predetermined position of the superconducting magnets 1A and 1B is obtained. Since it can obtain | require easily, even if it is an apparatus structure which is hard to visually recognize superconducting magnet 1A, 1B from the outside, it becomes easy to measure the position of the said superconducting magnet 1A, 1B correctly.

  In the present embodiment, as described above, the plurality of probes 81 are held in a matrix on the xy plane by the holding plate 82, and the holding plate 82 is moved in the z-axis direction by the drive unit 62. Since it comprised in this way, the measurement position of a magnetic field intensity comes to distribute uniformly in space. As a result, the obtained actual measurement data can be made less spatially biased, so that the reliability of the deviation amount of the superconducting magnet obtained based on the actual measurement data can be improved.

In the present embodiment, as described above, since the plurality of probe holes 82a for holding the probes 81 are provided in a matrix on the upper surface of the holding plate 82, the position of the probe 81 is shifted during measurement. Can be prevented. Thereby, actual measurement data can be acquired correctly.
(Example)
Hereinafter, an experiment carried out to confirm the effect of the magnet position measurement method of the above embodiment will be described.

  In this experiment, the magnetic field measurement jig 8 to be used was made of nonmagnetic aluminum.

  Referring to FIG. 5, the number of probe holes 82a for fixing the probe 81 (Lakeshole triaxial Hall element, model number MMZ-2502-UH) provided on the holding plate 82 is the x-axis. Nine at 100 mm intervals in the direction and 9 at 100 mm intervals in the y-axis direction. That is, the total number of probe holes 82a in the holding plate 82 is 81.

The mounting table 61 on which the holding plate 82 was mounted was stopped as appropriate while being mechanically moved up and down (z-axis direction) by the drive unit 62, and the magnetic field strength was measured. There are five stop positions in the z-axis direction of −185 mm, −100 mm, 0 mm, 100 mm, and 185 mm, and measurement is performed at 81 points at each position, so that the total measurement positions P are 405. And the deviation | shift amount from the predetermined position of superconducting magnet 1A, 1B is calculated from this measurement data and the simulation data obtained from the model function. As a result, a, b, c, B ₀ , α, γ, dx, dy, dz were values shown in Table 1 below.

  From this table, in this example, the superconducting magnets 1A and 1B are displaced from the predetermined position by +1.2 mm in the x-axis direction, -4.56 mm in the y-axis direction, and +1.96 mm in the z-axis direction. It was found that the rotation was shifted by −0.17 degrees (−0.030 radians) around the y axis and by +0.16 degrees (+0.028 radians) around the z axis. The rotation direction around the axis was the positive (+) direction with the clockwise direction facing the plus side of the axis.

  And the position of superconducting magnet 1A, 1B was adjusted with the vacuum vessel 4 in order to correct | amend the said deviation | shift amount. At this time, since the crucible 2 has a rotationally symmetric shape with respect to the z-axis, the rotational deviation around the z-axis of the superconducting magnets 1A and 1B was not adjusted. It was confirmed that the quality of the Si single crystal 3B was improved in the apparatus after correcting the deviation amount.

  Further, if the correction method as described above is used, it is possible to sufficiently suppress variations in the quality of the Si single crystal for each Si single crystal growing apparatus.

  In the above embodiment, the example in which the drive unit 62 that rotates and lifts the crucible 2 is also used for a mechanism that lifts and lowers the holding plate 82 is shown. However, even if a mechanism that lifts and lowers the holding plate 82 is separately provided. Good. In this case, the crucible 2 may be fixed and the Si single crystal growth seed crystal may be pulled up with respect to the crucible 2.

  In addition, the present invention is applied to the Si single crystal growing apparatus 100 including the split pair type superconducting magnets 1A and 1B. However, the present invention is not limited thereto, and the superconducting magnet in the magnet apparatus including a single coiled superconducting magnet is not limited thereto. The present invention can also be applied when measuring the position, or when measuring the magnet position in a magnet device including a substantially cylindrical magnet other than the superconducting magnet.

It is the front sectional view showing the whole Si single crystal growth device composition by one embodiment of the present invention. It is front sectional drawing which showed the state at the time of the magnetic field strength measurement of the Si single crystal growth apparatus shown in FIG. It is the perspective view which showed the structure of the holding plate and movement mechanism of a magnetic field measurement jig. FIG. 4 is a partially enlarged perspective view for explaining a relationship between a probe hole of the holding plate shown in FIG. 3 and a probe. It is a perspective view for demonstrating the measurement position of magnetic field intensity. It is the block diagram which showed the structure of the control system of Si single crystal growth apparatus. It is a flowchart for demonstrating a magnet position confirmation operation | movement.

Explanation of symbols

1A, 1B Superconducting magnet (magnet)
6 Movement mechanism (magnetic field measuring device)
8 Magnetic field measurement jig (magnetic field measurement device)
62 Drive unit 81 Probe 82 Holding plate (probe holding unit)
82a Probe hole (recess)
100 Si single crystal growth device (magnet device)

Claims (7)

A magnet position measuring method for obtaining a deviation amount of the magnet from the predetermined position in a magnet device including a substantially cylindrical magnet disposed at a predetermined position so as to generate a magnetic field in a target region,
Activating the magnet device, measuring the magnetic field strength of the magnet, and obtaining the actual measurement data;
Obtaining a functional equation representing the magnetic field strength of the magnet based on the measured data of the magnetic field strength,
The functional formula of the magnetic field strength is that the center of the magnetic field of the magnet when the magnet is arranged at the predetermined position is a coordinate origin, and the direction along the axis of the magnet at the predetermined position is the x-axis direction, An xyz orthogonal coordinate system is set with the directions orthogonal to the x-axis direction and orthogonal to each other as the y-axis direction and the z-axis direction, and an unknown quantity as a positional deviation amount of the magnet in the x-axis direction, the y-axis direction, and the z-axis direction X, including dx, dy, dz, γ, and α, where dx, dy, and dz are the unknowns, and γ and α are the unknowns as angular deviation amounts about the y-axis and z-axis of the magnet, respectively. , Y and z are expressed by quadratic function equations. 2. The magnet position measuring method according to claim 1, wherein the quadratic function formula is represented by the following formula (1) when a central magnetic field strength of the magnet is B ₀ .
B = B ₀ + a [(x + αy−γz) −dx] ² + b [(y−αx) −dy] ²
+ C [(z + γx) −dz] ² Formula (1) The magnetic field strength data is magnetic field strength data at a plurality of positions,
3. The magnet position measuring method according to claim 1, wherein the step of obtaining the function formula includes the step of obtaining the function formula from the measured data of the magnetic field intensity by a least square method.   The magnet according to any one of claims 1 to 3, wherein the magnet is a split-pair superconducting magnet in which a pair of superconducting magnets having substantially the same shape are arranged coaxially and at a predetermined interval in the axial direction. The magnet position measuring method according to claim 1. A magnetic field measuring apparatus for use in the magnet position measuring method according to any one of claims 1 to 4,
A plurality of probes for measuring magnetic field strength, a probe holding unit that holds the plurality of probes, and a drive unit that moves the probe holding unit,
A magnetic field measuring apparatus for measuring a magnetic field intensity while moving the probe holding unit by the driving unit. The probe holding unit holds the plurality of probes in a matrix on a predetermined plane parallel to a plane including any two of the x-axis, y-axis, and z-axis,
The magnetic field measuring apparatus according to claim 5, wherein the driving unit moves the probe holding unit in a direction substantially orthogonal to the predetermined plane. The probe holding part has a holding surface part along the predetermined plane,
The magnetic field measuring apparatus according to claim 6, wherein the holding surface portion is provided with a plurality of recesses for holding the probes in a matrix.

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