JP2009214278A5 - - Google Patents

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Publication number
JP2009214278A5
JP2009214278A5 JP2008063432A JP2008063432A JP2009214278A5 JP 2009214278 A5 JP2009214278 A5 JP 2009214278A5 JP 2008063432 A JP2008063432 A JP 2008063432A JP 2008063432 A JP2008063432 A JP 2008063432A JP 2009214278 A5 JP2009214278 A5 JP 2009214278A5
Authority
JP
Japan
Prior art keywords
grinding wheel
wheel according
grinding
abrasive grains
cushion layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008063432A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009214278A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008063432A priority Critical patent/JP2009214278A/ja
Priority claimed from JP2008063432A external-priority patent/JP2009214278A/ja
Publication of JP2009214278A publication Critical patent/JP2009214278A/ja
Publication of JP2009214278A5 publication Critical patent/JP2009214278A5/ja
Pending legal-status Critical Current

Links

JP2008063432A 2008-03-13 2008-03-13 研削用砥石 Pending JP2009214278A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008063432A JP2009214278A (ja) 2008-03-13 2008-03-13 研削用砥石

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008063432A JP2009214278A (ja) 2008-03-13 2008-03-13 研削用砥石

Publications (2)

Publication Number Publication Date
JP2009214278A JP2009214278A (ja) 2009-09-24
JP2009214278A5 true JP2009214278A5 (enExample) 2011-10-13

Family

ID=41186702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008063432A Pending JP2009214278A (ja) 2008-03-13 2008-03-13 研削用砥石

Country Status (1)

Country Link
JP (1) JP2009214278A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE388520T1 (de) 2004-05-06 2008-03-15 Nxp Bv Elektronische einrichtung
JP5460537B2 (ja) 2010-06-17 2014-04-02 東京エレクトロン株式会社 基板裏面研磨装置、基板裏面研磨システム及び基板裏面研磨方法並びに基板裏面研磨プログラムを記録した記録媒体

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105365U (ja) * 1982-12-29 1984-07-16 三和研磨工業株式会社 石材研磨板
JPS62184970U (enExample) * 1986-05-14 1987-11-25
JPS6438256U (enExample) * 1987-08-31 1989-03-07
JPH0740069U (ja) * 1993-12-27 1995-07-18 柳瀬株式会社 研磨用ディスク
JPH0885067A (ja) * 1994-09-14 1996-04-02 Nippon Electric Glass Co Ltd 板ガラス等の研磨装置用研磨工具
JP2000084856A (ja) * 1998-09-09 2000-03-28 Osaka Diamond Ind Co Ltd 弾性体を介して超砥粒層を設けた鏡面加工用超砥粒砥石
JP2001205548A (ja) * 2000-01-28 2001-07-31 Nippei Toyama Corp 片面研削装置および片面研削方法
JP4153857B2 (ja) * 2003-04-30 2008-09-24 株式会社日平トヤマ 鏡面仕上げ装置
JP2005040899A (ja) * 2003-07-22 2005-02-17 Fanuc Ltd ダイヤモンド砥石
JP4103808B2 (ja) * 2004-01-22 2008-06-18 信越半導体株式会社 ウエーハの研削方法及びウエーハ
JP2006055964A (ja) * 2004-08-23 2006-03-02 Olympus Corp スムージング工具
JP2006159323A (ja) * 2004-12-03 2006-06-22 Asahi Diamond Industrial Co Ltd 回転砥石
JP2006218577A (ja) * 2005-02-10 2006-08-24 Read Co Ltd 研磨布用ドレッサー

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