JP2009214278A5 - - Google Patents
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- Publication number
- JP2009214278A5 JP2009214278A5 JP2008063432A JP2008063432A JP2009214278A5 JP 2009214278 A5 JP2009214278 A5 JP 2009214278A5 JP 2008063432 A JP2008063432 A JP 2008063432A JP 2008063432 A JP2008063432 A JP 2008063432A JP 2009214278 A5 JP2009214278 A5 JP 2009214278A5
- Authority
- JP
- Japan
- Prior art keywords
- grinding wheel
- wheel according
- grinding
- abrasive grains
- cushion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Claims (8)
弾性体からなるクッション層と、
前記研削を行うための砥粒を有する砥粒層とを備え、
前記砥粒は、金属からなる結合剤により結合されて前記クッション層に重なることを特徴とする研削用砥石。 A grinding wheel for grinding an object to be ground,
A cushion layer made of an elastic body ;
And a abrasive layer having abrasive grains for performing the grinding,
The grindstone for grinding , wherein the abrasive grains are bonded by a binder made of metal and overlap the cushion layer .
前記砥粒は、前記クッション層に接合された前記金属薄板に結合されることを特徴とする請求項１に記載の研削用砥石。The grinding wheel according to claim 1, wherein the abrasive grains are bonded to the metal thin plate bonded to the cushion layer.
前記クッション層が前記基材の前記表面に重なって設けられることを特徴とする請求項１から６のいずれか一項に記載の研削用砥石。The grinding wheel according to any one of claims 1 to 6, wherein the cushion layer is provided so as to overlap the surface of the base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008063432A JP2009214278A (en) | 2008-03-13 | 2008-03-13 | Grinding wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008063432A JP2009214278A (en) | 2008-03-13 | 2008-03-13 | Grinding wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009214278A JP2009214278A (en) | 2009-09-24 |
| JP2009214278A5 true JP2009214278A5 (en) | 2011-10-13 |
Family
ID=41186702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008063432A Pending JP2009214278A (en) | 2008-03-13 | 2008-03-13 | Grinding wheel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009214278A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8901703B2 (en) | 2004-05-06 | 2014-12-02 | Nxp, B.V. | Electronic device |
| JP5460537B2 (en) | 2010-06-17 | 2014-04-02 | 東京エレクトロン株式会社 | Substrate back surface polishing apparatus, substrate back surface polishing system, substrate back surface polishing method, and recording medium recording substrate back surface polishing program |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59105365U (en) * | 1982-12-29 | 1984-07-16 | 三和研磨工業株式会社 | stone polishing board |
| JPS62184970U (en) * | 1986-05-14 | 1987-11-25 | ||
| JPS6438256U (en) * | 1987-08-31 | 1989-03-07 | ||
| JPH0740069U (en) * | 1993-12-27 | 1995-07-18 | 柳瀬株式会社 | Polishing disc |
| JPH0885067A (en) * | 1994-09-14 | 1996-04-02 | Nippon Electric Glass Co Ltd | Polishing tool for polishing device for plate glass, etc. |
| JP2000084856A (en) * | 1998-09-09 | 2000-03-28 | Osaka Diamond Ind Co Ltd | Super abrasive grinding wheel for mirror finishing provided with super abrasive layer through elastic body |
| JP2001205548A (en) * | 2000-01-28 | 2001-07-31 | Nippei Toyama Corp | One side grinding device and method |
| JP4153857B2 (en) * | 2003-04-30 | 2008-09-24 | 株式会社日平トヤマ | Mirror finishing device |
| JP2005040899A (en) * | 2003-07-22 | 2005-02-17 | Fanuc Ltd | Diamond whetstone |
| JP4103808B2 (en) * | 2004-01-22 | 2008-06-18 | 信越半導体株式会社 | Wafer grinding method and wafer |
| JP2006055964A (en) * | 2004-08-23 | 2006-03-02 | Olympus Corp | Smoothing tool |
| JP2006159323A (en) * | 2004-12-03 | 2006-06-22 | Asahi Diamond Industrial Co Ltd | Grinding wheel |
| JP2006218577A (en) * | 2005-02-10 | 2006-08-24 | Read Co Ltd | Dresser for polishing cloth |
-
2008
- 2008-03-13 JP JP2008063432A patent/JP2009214278A/en active Pending
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